CN203895738U - Device used for generating high-mean-power quasi-continuous ultraviolet pulse laser - Google Patents
Device used for generating high-mean-power quasi-continuous ultraviolet pulse laser Download PDFInfo
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- CN203895738U CN203895738U CN201420147870.7U CN201420147870U CN203895738U CN 203895738 U CN203895738 U CN 203895738U CN 201420147870 U CN201420147870 U CN 201420147870U CN 203895738 U CN203895738 U CN 203895738U
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Abstract
Provided is a device used for generating high-mean-power quasi-continuous ultraviolet pulse laser. The device comprises a concave surface resonant cavity mirror, a laser crystal, a plane turning mirror, a laser Q switch, a flat mirror, a frequency multiplication crystal, a coupling output flat mirror, a tri-frequency-multiplication crystal, a planar cavity mirror, a pump laser and coupling lens groups. The concave surface resonant cavity mirror is a concave-convex lens with the same curvature and the concave surface faces to the laser crystal and forms a cavity mirror of a laser resonant cavity. The concave surface resonant cavity mirror, the plane turning mirror arranged in an included angle of 45 degrees with an optical axis and the planar cavity mirror form a L-shaped laser resonant cavity. Pump lights emitted from two pump fiber heads are coupled into the laser crystal through two coupling lens groups respectively, and form counter-rotating particle number. The energy accumulated by the counter-rotating particle number is converted into pulse laser oscillation with high repetition rate through the Q switch. The frequency multiplication crystal converts part of the 1064nm laser formed in the cavity into the 532nm laser, then the tri-frequency-multiplication crystal carries out sum frequency of the residual 1064nm laser and the converted 532nm laser and generates the 355nm pulse laser. Then the 355nm pulse laser is coupled out from the laser resonant cavity by the coupling output mirror arranged inclinedly in a certain angle and a required 355nm ultraviolet pulse laser output is obtained. The device can obtain high-mean-power quasi-continuous ultraviolet pulse laser, and has advantages of high efficiency, high output power and high output spectrographic purity.
Description
Technical field
The utility model relates to a kind of device that can produce the quasi-continuous ultraviolet pulse laser of high-average power, can be widely used in the fields such as industrial processes, laser display and scientific research.
Background technology
Ultraviolet and deep ultraviolet solid state laser because its Output of laser wavelength is short, can good condensing performance, single photon energy is high, be suitable for the features such as contactless cold working and micro-processing, have a wide range of applications in fields such as photoetching technique, capillary processing, wafer delineation, microelectronics processing, Atmospheric Survey, photochemistry, Photobiology and medical science.Particularly, in the cold working field of microelectronics processing and transparent material, the advantage that Ultra-Violet Laser has the laser of other wavelength to hardly match, has obtained increasing application in field of laser processing in recent years.Ultraviolet process equipment requires also more and more higher to the average power of laser, the most average power of ultraviolet laser of industrial application has reached 3W.The ultraviolet all-solid-state laser of current industrial use, adopts Nd:YVO mostly
4crystal is as gain media, and adopts acoustooptic Q-switching or electro-optical Q-switch to obtain high repetitive frequency pulsed output.In order to obtain higher conversion efficiency, mostly adopt the mode of intracavity frequency doubling, in resonant cavity, place the laser that non-linear frequency-doubling crystal is 532nm by the laser freuqency doubling of 1064nm, again by another piece nonlinear crystal in resonant cavity, with mode frequently, the laser of 532nm and remaining 1064nm laser are carried out to nonlinear frequency transformation, thereby obtain the Ultra-Violet Laser of 355nm.
The ultraviolet laser of commercial Application adopts maximum resonant cavity shapes to have two kinds, line chamber and " V " shape chamber at present.The all elements of line chamber are all arranged point-blank as accompanying drawing 1., and pumping source carries out pumping from one end to laser crystal, and the Ultra-Violet Laser of acquisition is exported from the other end.The advantage of this laser is simple in structure, be convenient to adjust, but shortcoming is to be difficult to obtain 3W or Ultra-Violet Laser more than 3W output.Adopt the ultraviolet laser in " V " shape chamber in order to obtain Ultra-Violet Laser output more than 3W, mostly adopt two blocks of laser crystals, two blocks of laser crystals are placed respectively at support arm two ends with " V " shape chamber resonant cavity, adopt semiconductor laser to carry out end pumping, on another arm, place frequency-doubling crystal and obtain Ultra-Violet Laser output with frequency crystal.These two kinds of resonant cavity shapes are all directly exported the Ultra-Violet Laser of 355nm from a chamber mirror of resonant cavity, easily there is the outgoing that mixes of remaining 1064nm and 532nm laser and 355nm ultraviolet light, cause 355nm laser spectroscopy composition impure, easily in laser processing procedure, produce unnecessary thermal effect and affect crudy.
Summary of the invention
The purpose of this utility model is to overcome above-mentioned prior art shortcoming, and a kind of device that produces the quasi-continuous ultraviolet pulse laser of high-average power is provided, and it is high that this laser has efficiency, and power output is high, the advantage that output spectrum purity is high.
Technical solution of the present utility model is as follows:
A kind of device for generation of the quasi-continuous ultraviolet pulse laser of high-average power, comprise concave surface resonator mirror, laser crystal, plane turning mirror, laser Q switch, level crossing, frequency-doubling crystal, coupling output plane mirror, frequency tripling crystal, planar cavity mirror, pump laser and coupled lens group, it is characterized in that described concave surface resonator mirror and plane turning mirror and the planar cavity mirror of 45 ° of placements have formed " L " shape laserresonator jointly, the total length of resonant cavity is less than 50cm, two pump lasers carry out pumping by coupled lens group to laser crystal respectively from the both sides of laser crystal, Q switching can be acoustooptic Q-switching, also can be electro-optical Q-switch, Laser output by with optical axis coupling output plane mirror in a certain angle coupling output.
Described concave surface resonator mirror is the concave and convex lenses that concave surface is identical with convex curvature, concave surface is towards laser crystal, concave surface is coated with 0 ° of high inverse medium film of 1064nm and the anti-reflection deielectric-coating of 808nm, and convex surface is coated with the anti-reflection deielectric-coating of 808nm, and the radius of curvature of concave surface resonator mirror minute surface is that 0.8m is between 1.6m.
Described laser crystal can be Nd:YVO
4crystal can be also Nd:GdVO
4crystal.
Described plane turning mirror is coated with 45 ° of anti-reflection deielectric-coating of 808nm and 1064nm all-dielectric film towards the one side of laser crystal, and another side is coated with 45 ° of anti-reflection deielectric-coating of 808nm, and the normal of plane turning mirror minute surface and the optical axis included angle of crystal are 45 °.
Described level crossing is coated with 0 ° of anti-reflection deielectric-coating of 1064nm and the 532nm film that is all-trans towards the one side of frequency-doubling crystal, and another side is coated with 0 ° of anti-reflection deielectric-coating of 1064nm.
Described frequency-doubling crystal can be the lbo crystal of I class phase matched, can be also the lbo crystal of I class noncritical phase matching, can also be the clbo crystal of I class phase matched or the non-linear frequency-doubling crystal of other I class phase matched.
The described normal of coupling output plane mirror and the optical axis of resonant cavity have certain angle, the scope of angle is between 5-35 °, minute surface is coated with 355nm laser all-dielectric film and 532nm anti-reflection film and the 1064nm anti-reflection film of respective angles towards the one side of frequency tripling crystal, another side is coated with the anti-reflection deielectric-coating of 532nm and the anti-reflection deielectric-coating of 1064nm of respective angles.
Described frequency tripling crystal can be the lbo crystal of II class phase matched, can be bbo crystal or other nonlinear crystal of II class phase matched.
Described planar cavity mirror is coated with the all-dielectric film of 0 ° of 1064nm, 532nm and tri-kinds of wavelength of 355nm towards the one side of frequency tripling crystal, another side is plated film not.
Technique effect of the present utility model:
The utility model adopts " L " shape resonant cavity, and the total length of resonant cavity is less than 50cm, after tune Q, can obtain the laser pulse of 15ns with insied width.Adopt two laser pumping sources respectively a laser crystal to be carried out to pumping from both sides, can obtain higher laser-conversion efficiency and the Ultra-Violet Laser output that is greater than 3W.The stable resonator that to adopt curvature be concave mirror between 0.8-1.6m forms with planar cavity mirror, frequency-doubling crystal and frequency tripling crystal are successively placed on to the one end near planar cavity mirror, can make the laser beam diameter minimum in nonlinear crystal, improve the power density of nonlinear crystal inner laser, thereby obtain higher non-linear conversion efficiency.Laser crystal adopts Nd:YVO
4or Nd:GdVO
4crystal, the pump absorption peak of these two kinds of crystal is all that near 808nm, the optical maser wavelength of transmitting is 1064nm, the gain of these two kinds of laser crystals is all very high, and laser threshold is lower again, is again birefringece crystal simultaneously, be easy to obtain linearly polarized laser, be conducive to realize frequency multiplication and frequency tripling.The frequency-doubling crystal adopting is the nonlinear crystal of I class phase matched or the nonlinear crystal of I class noncritical phase matching, obtain the laser of 532nm, adopt with frequency crystal be the nonlinear crystal of II class phase matched, for the laser of the laser of 532nm and 1064nm and frequency are produced to the Laser output of 355nm.The low-angle plane output coupling mirror adopting is coated with 355nm total reflection medium film and 1064nm and 532nm anti-reflection film, 355nm ultraviolet light can be coupled out to resonant cavity, and the 355nm laser spectroscopy purity of output is high, and the 1064nm being wherein mixed with and 532nm laser power are less than 1%.
Brief description of the drawings
Fig. 1 is at present comparatively common a kind of ultraviolet laser composition schematic diagram, wherein 1 is pump laser, 2 is pumping coupled lens, and 3 is Effect of Back-Cavity Mirror, and 4 is laser crystal, 5 is Q-switch, 6 is 532nm plane mirror, and 7 is frequency-doubling crystal, and 8 is 355nm plane mirror, 9 is frequency tripling crystal, and 10 is plane output cavity mirror.
Fig. 2 is composition schematic diagram of the present utility model, wherein 1 is concave surface resonator mirror, and 2 is laser crystal, and 3 is plane turning mirror, 4 is laser Q switch, 5 is level crossing, and 6 is frequency-doubling crystal, and 7 is coupling output plane mirror, 8 is frequency tripling crystal, 9 is planar cavity mirror, and 10 is pump laser, and 11 is coupled lens group.
Embodiment
Below in conjunction with embodiment and accompanying drawing, the invention will be further described, but should not limit the scope of the invention with this.
First refer to Fig. 2, Fig. 2 is a kind of installation composition schematic diagram for generation of the quasi-continuous ultraviolet pulse laser of high-average power of the present invention.Comprise the concave surface resonator mirror (1), laser crystal (2), plane turning mirror (3) and the laser Q switch (4) that form resonant cavity, level crossing (5), frequency-doubling crystal (6), coupling output plane mirror (7), frequency tripling crystal (8), planar cavity mirror (9), pump laser (10) and coupled lens group (11).It is characterized in that described concave surface resonator mirror (1) and plane turning mirror (3) and the planar cavity mirror (9) of 45 ° of placements have formed " L " shape laserresonator jointly, the total length of resonant cavity is less than 50cm.Two pump lasers (10) carry out pumping by coupled lens group (11) to laser crystal respectively from the both sides of laser crystal (2), high power pumping luminous power can be coupled into laser crystal, thereby be convenient to obtain high-average power Laser output.Laser Q switch is adjusted Q to resonant cavity, obtains the narrow-pulse laser output that width is less than 15ns.The angle of coupling output plane mirror normal and resonant cavity optical axis is between 5-35 °, and frequency-doubling crystal and frequency tripling crystal are all placed near planar cavity mirror (9) as far as possible successively.
The course of work of this device:
Two pump lasers or pumping optical fiber head (10) send the pump light of 808nm wavelength, pass through respectively coupled lens group (11) and be coupled into laser crystal (2), laser crystal (2), laser crystal is realized after population inversion, in the time that opening, Q switching forms the laser pulse of 1064nm in the resonant cavity being formed by concave surface resonator mirror (1) and plane turning mirror (3) and planar cavity mirror (9), this pulse is having the laser of part 1064nm to be converted into the laser of 532nm after frequency-doubling crystal (6), when the laser of 532nm and the laser of 1064nm pass through frequency tripling crystal (8) jointly, can be due to the laser non-linear and 355nm of effect generation frequently, the laser of 355nm is reflected by planar cavity mirror (9) in resonant cavity, again pass through frequency tripling crystal, reflect resonant cavity by coupling output plane mirror (7), obtain the pulse output light of 355nm.
Specific embodiment:
Refer to Fig. 2.Pump laser (10) adopts the 808nm tail optical fiber output semiconductor laser of two 30W continuous powers, the coupled lens group (11) of the pump light that its optical fiber head sends through being made up of the lens of two the same focal length, enters laser crystal (2).Laser crystal (2) adopts doping content 0.4%, is of a size of 4 × 4 × 10 Nd:YVO
4crystal, parcel is put into copper heat sink crystal is dispelled the heat after indium foil.Concave surface resonator mirror (1) adopts the concave and convex lenses of radius of curvature 0.8m, 0 ° of 808nm wavelength anti-reflection film of concave surface plating and the 1064nm film that is all-trans, and concave surface is towards laser crystal.The normal of plane turning mirror and laser crystal optical axis are 45 ° of angles.Q switching adopts acoustooptic Q-switching, and the q-frequency of acoustooptic Q-switching is made as 50kHz.Frequency-doubling crystal adopts and is of a size of 3 × 3 × 8mm, the lbo crystal of I class noncritical phase matching, and crystal two ends are coated with respectively 0 ° of anti-reflection film of 1064nm and 532nm.The lbo crystal of frequency tripling crystal by adopting II class phase matched, size is similarly 3 × 3 × 8mm.The angle of coupling output plane mirror and optical axis is 20 °, and the length of whole resonant cavity is 50cm.Adopt the laser aid of this embodiment, can obtain average power 4W, pulse repetition frequency 50k Hz, the 355nm Laser output of pulse duration 13ns.
According to the checking of above specific embodiment, the present invention can overcome the shortcoming of prior art, produces the 355nm wavelength pulse laser that average power is greater than 3W.And it is high that the present invention has conversion efficiency, power output is high, spectral purity advantages of higher.
Claims (9)
1. the device for generation of the quasi-continuous ultraviolet pulse laser of high-average power, comprise concave surface resonator mirror (1), laser crystal (2), plane turning mirror (3) and laser Q switch (4), level crossing (5), frequency-doubling crystal (6), coupling output plane mirror (7), frequency tripling crystal (8), planar cavity mirror (9), pump laser (10) and coupled lens group (11), it is characterized in that described concave surface resonator mirror (1) and plane turning mirror (3) and the planar cavity mirror (9) of 45 ° of placements have formed " L " shape laserresonator jointly, the total length of resonant cavity is less than 50cm, two pump lasers (10) carry out pumping by coupled lens group (11) to laser crystal respectively from the both sides of laser crystal (2), Q switching can be acoustooptic Q-switching, also can be electro-optical Q-switch, Laser output by with optical axis coupling output plane mirror (7) in a certain angle coupling output.
2. device according to claim 1, it is characterized in that described concave surface resonator mirror (1) is the concave and convex lenses that concave surface is identical with convex curvature, concave surface is towards laser crystal (2), concave surface is coated with 0 ° of high inverse medium film of 1064nm and the anti-reflection deielectric-coating of 808nm, convex surface is coated with the anti-reflection deielectric-coating of 808nm, and the radius of curvature of concave surface resonator mirror minute surface is that 0.8m is between 1.6m.
3. device according to claim 1, is characterized in that described laser crystal (2) can be Nd:YVO
4crystal can be also Nd:GdVO
4crystal.
4. device according to claim 1, it is characterized in that described plane turning mirror (3) is coated with 45 ° of anti-reflection deielectric-coating of 808nm and 1064nm all-dielectric film towards the one side of laser crystal (2), another side is coated with 45 ° of anti-reflection deielectric-coating of 808nm, and the normal of plane turning mirror minute surface and the optical axis included angle of crystal are 45 °.
5. device according to claim 1, is characterized in that described level crossing (5) is coated with 0 ° of anti-reflection deielectric-coating of 1064nm and the 532nm film that is all-trans towards the one side of frequency-doubling crystal (6), and another side is coated with 0 ° of anti-reflection deielectric-coating of 1064nm.
6. device according to claim 1, it is characterized in that described frequency-doubling crystal (6) can be the lbo crystal of I class phase matched, also can be the lbo crystal of I class noncritical phase matching, can also be the clbo crystal of I class phase matched or the non-linear frequency-doubling crystal of other I class phase matched.
7. device according to claim 1, it is characterized in that the described normal of coupling output plane mirror (7) and the optical axis of resonant cavity have certain angle, the scope of angle is between 5-35 °, minute surface is coated with 355nm laser all-dielectric film and 532nm anti-reflection film and the 1064nm anti-reflection film of respective angles towards the one side of frequency tripling crystal (8), another side is coated with the anti-reflection deielectric-coating of 532nm and the anti-reflection deielectric-coating of 1064nm of respective angles.
8. device according to claim 1, is characterized in that described frequency tripling crystal (8) can be the lbo crystal of II class phase matched, can be bbo crystal or other nonlinear crystal of II class phase matched.
9. device according to claim 1, is characterized in that described planar cavity mirror (9) is coated with the all-dielectric film of 0 ° of 1064nm, 532nm and tri-kinds of wavelength of 355nm towards the one side of frequency tripling crystal, and another side is plated film not.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420147870.7U CN203895738U (en) | 2014-03-28 | 2014-03-28 | Device used for generating high-mean-power quasi-continuous ultraviolet pulse laser |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420147870.7U CN203895738U (en) | 2014-03-28 | 2014-03-28 | Device used for generating high-mean-power quasi-continuous ultraviolet pulse laser |
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|---|---|
| CN203895738U true CN203895738U (en) | 2014-10-22 |
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| CN201420147870.7U Expired - Fee Related CN203895738U (en) | 2014-03-28 | 2014-03-28 | Device used for generating high-mean-power quasi-continuous ultraviolet pulse laser |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108933378A (en) * | 2018-09-21 | 2018-12-04 | 深圳市杰普特光电股份有限公司 | Bicrystal ultraviolet laser |
| CN113346343A (en) * | 2021-05-11 | 2021-09-03 | 中国科学院上海光学精密机械研究所 | Intracavity cascade harmonic conversion tunable laser |
-
2014
- 2014-03-28 CN CN201420147870.7U patent/CN203895738U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108933378A (en) * | 2018-09-21 | 2018-12-04 | 深圳市杰普特光电股份有限公司 | Bicrystal ultraviolet laser |
| CN113346343A (en) * | 2021-05-11 | 2021-09-03 | 中国科学院上海光学精密机械研究所 | Intracavity cascade harmonic conversion tunable laser |
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| C14 | Grant of patent or utility model | ||
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141022 Termination date: 20200328 |