CN202241654U - Workpiece positioning and bonding device - Google Patents
Workpiece positioning and bonding device Download PDFInfo
- Publication number
- CN202241654U CN202241654U CN2011203743012U CN201120374301U CN202241654U CN 202241654 U CN202241654 U CN 202241654U CN 2011203743012 U CN2011203743012 U CN 2011203743012U CN 201120374301 U CN201120374301 U CN 201120374301U CN 202241654 U CN202241654 U CN 202241654U
- Authority
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- China
- Prior art keywords
- workpiece
- cushion block
- location
- bonder
- railing
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
- 238000005520 cutting process Methods 0.000 claims abstract description 68
- 125000006850 spacer group Chemical group 0.000 claims description 14
- 239000004677 Nylon Substances 0.000 claims description 8
- 229920001778 nylon Polymers 0.000 claims description 8
- 238000013461 design Methods 0.000 abstract description 4
- 230000002441 reversible effect Effects 0.000 abstract description 2
- 239000000853 adhesive Substances 0.000 description 18
- 230000001070 adhesive effect Effects 0.000 description 18
- 238000000034 method Methods 0.000 description 12
- 229910000831 Steel Inorganic materials 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000012790 adhesive layer Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003670 easy-to-clean Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Images
Abstract
The utility model discloses a workpiece positioning and bonding device, which comprises a workpiece connecting piece and cutting cushion block bonding device and a workpiece cushion block and workpiece bonding device, wherein the workpiece connecting piece and cutting cushion block bonding device comprises a first accommodating base, a first positioning side-step ladder and a cutting cushion block positioning sheet; the first positioning side-step ladder vertically intersects integrally with a plane where the first accommodating base is positioned; a plane where the cutting cushion block positioning sheet is positioned is parallel to the first accommodating base; and the workpiece cushion block and workpiece bonding device comprises a second accommodating base, a second positioning side-step ladder, a reversible workpiece fixing surrounding rod, a tension rod, an immovable workpiece fixing surrounding rod and a workpiece positioning side plate. Bonding of a workpiece connecting piece and a cutting cushion block as well as bonding of a workpiece cushion block and a workpiece are finished independently by adopting two devices, and dual-station structural designs are adopted for the two bonding devices, so that the two ingot workpieces can be bonded simultaneously, the centering consistence of the same multi-line cutting equipment on two cut ingot workpieces is ensured, the operation is more convenient, and the operation efficiency is high.
Description
Technical field
The utility model relates to a kind of silicon chip processing line cut workpiece to be prepared to use servicing unit, relates in particular to a kind of workpiece location bonder.
Background technology
In solar energy, the semiconductor grade silicon chip process, particularly solar silicon wafers processing, majority is to adopt multi-thread cutting equipment to cut into slices.In order to reach higher cutting efficiency and benefit, make every effort to make multi-line cutting machine with reasonable structural design, higher motion and positional precision, effectively control and monitoring function, bigger adaptability realize.
The preparation of cut workpiece is as one of key operation link before the crystal bar section, bonding, the workpiece cushion block that mainly comprises workpiece connector and cutting cushion block and workpiece bonding, seize operation process such as fixing of guide rail and workpiece connector on both sides by the arms.There are directly influence in the thickness of the accuracy of workpiece centering, bonding fastness, glue-line and uniformity etc. to cut quality, and in addition, the effect of the convenience of operation in the scale process do not allowed unheeded yet.Therefore, the preparation of cut workpiece especially the location adhesion process of workpiece need adopt specific servicing unit to accomplish.
At present, the structure of the supporting workpiece location bonder of multi-thread cutting equipment is as shown in Figure 1: this workpiece location bonder comprises fixedly compression module 5 of workpiece connector placement base 1, workpiece connector positioning screw 2, cutting cushion block positioning screw 3, location backup plate 4 and workpiece.During use; As shown in Figure 2: as the workpiece connector to be placed on the workpiece connector to place on the base 1; Place the cutting cushion block on the workpiece connector; Place work piece on the cutting cushion block, at last with cutting cushion block positioning screw 3, workpiece connector positioning screw 2 and workpiece fixedly compression module 5 accomplish the location between workpiece connector and cutting cushion block, cutting cushion block and the workpiece, and the workpiece connector with cut cushion block, cut that the employing resin carries out bonding as adhesive between cushion block and the workpiece.
Though existing workpiece location bonder can be fixed workpiece connector and cutting cushion block, cutting cushion block and workpiece, but still some is not enough below existing:
1, the workpiece connector that is positioned at the bottom adopts the two point form positioning screw to position, and the accuracy of workpiece connector location directly has influence on the integral body location of workpiece, because screw rod has the rotation mobility, this localization method is prone to cause the inaccuracy of whole location;
2, the operating platform of whole device and the angle between the horizontal plane are bigger; The resin binder that adopts in each adhesion step can flow to a lower side; Cause final bondline thickness uniformity inconsistent, the bondline thickness between cutting cushion block and the workpiece is inconsistent will to influence cut quality;
3, the workpiece that is adopted fixedly compression module needs to exert pressure through the nut at fastening top; With guarantee bonding firmly; Because the tightness that artificial rotation fastening nut is difficult to be consistent, therefore, can cause final bondline thickness uncontrollable and thickness evenness is inconsistent;
4, accomplish the bonding of workpiece and fixedly after the pressurization; Need cutting cushion block and the adhesive that the overflow of the bonding tape edge edge of workpiece goes out are cleaned, because this device adopts backup plate that workpiece is located, after workpiece is fixed and pressurizeed; Have only square hole to clean through the rear portion, easy to clean;
The location of 5, adopting this device together to accomplish between workpiece connector and cutting cushion block, cutting cushion block and the workpiece is bonding, and single can only be accomplished the bonding process of an ingot workpiece, and the convenience of operation is not enough, and operating efficiency is not high.
The utility model content
The purpose of the utility model is: a kind of design more reasonable, operation workpiece location bonder more easily is provided; Guaranteeing that the more accurate centering of cut workpiece is bonding, to increase work efficiency, thereby can effectively solve the problem that exists in the above-mentioned prior art.
The utility model purpose realizes through following technical proposals: a kind of workpiece location bonder; Comprise workpiece connector and cutting cushion block bonder and workpiece cushion block and workpiece bonder; Said workpiece connector comprises that with cutting cushion block bonder first places base, first location by ladder and cutting cushion block spacer; Said first location leans on terraced intersecting vertically with plane, the first placement base place to be one, and the said cutting cushion block spacer plane, place and the first placement base are parallel; Said workpiece cushion block and workpiece bonder comprise second place base, second location lean on ladder, turning workpiece fixedly railing, stayed mast, fixedly railing and workpiece are located backup plate to the part of can not starting building; Said second location leans on terraced intersecting vertically with plane, the second placement base place to be one; Two sides and the back side that ladder is leaned in second location is fixing one perpendicular perpendicular piece respectively; The said turning workpiece fixedly upper end of the perpendicular piece in two ends and both sides of railing spins; The upper end of the perpendicular piece in one end of stayed mast and the back side spins; The other end and turning workpiece fixedly railing interlock, said can not start building part fixedly railing be fixed on the upper end of the perpendicular piece in both sides and the back side and with second to place base parallel, workpiece location backup plate with can not start building part fixedly railing be threaded.
As optimal way, comprise vertical screw rod, said cutting cushion block spacer, first location are leaned on ladder and first to place base and are connected by screw rod.
As further optimal way, comprise that also first decides the weight piece in workpiece connector and the cutting cushion block bonder.
As optimal way, turning workpiece fixedly railing is provided with the workpiece standing screw that runs through.
As further optimal way, said workpiece standing screw passes turning workpiece and fixedly is provided with the nylon cap in the end of railing.
As further optimal way, the upper end of perpendicular piece has the fixedly surface platform of railing flip angle of the turning workpiece of control.
As further optimal way, comprise that also second decides the weight piece in workpiece connector and the cutting cushion block bonder.
Compared with prior art, the beneficial effect of the utility model:
1, bonding, the workpiece cushion block of workpiece connector and cutting cushion block and workpiece bonding being divided into two devices accomplishes separately; Adopt integral structure that the workpiece connector is positioned; Guaranteed the more uniformity of changing device location of twice bonding process; Because of its mode that adopts the face formula location of non-adjustable location ladder, positioning accuracy is higher simultaneously;
2, adopt turning workpiece fixedly railing and workpiece standing screw workpiece is fixed, make keeping parallelism between whole operation platform and the horizontal plane of this device, it is consistent with the bondline thickness between the workpiece to guarantee to cut cushion block;
3, adopt and decide the weight piece adhesive is exerted pressure, guarantee that further final bondline thickness is controlled and thickness evenness is consistent, minimizing is to the influence of cut quality;
4, adopt monoblock type workpiece location backup plate that workpiece is positioned, after the fixing pressurization of workpiece, do not have around cutting cushion block and the bonding seam of workpiece and block, the convenient adhesive that overflow is gone out cleans;
5, the place that contacts with workpiece of workpiece location backup plate and workpiece standing screw is nylon material, can prevent that locking apparatus is located, fixture causes damage to workpiece;
6, adopt two devices to accomplish bonding, workpiece cushion block and workpiece bonding of workpiece connector and cutting cushion block separately; Two bonders all adopt the double structural design; It is bonding to make that two ingot workpiece can carry out simultaneously; Guarantee same multi-thread cutting equipment cut two ingot workpiece to neutral uniformity, it is more convenient to operate, operating efficiency is high.
Description of drawings
Fig. 1 is the structural representation of workpiece location bonder in the prior art;
Fig. 2 is the structural representation when workpiece location bonder uses in the prior art;
Fig. 3 is a workpiece connector and the structural representation that cuts the cushion block bonder in the utility model;
Fig. 4 is a workpiece connector and the use sketch map that cuts the cushion block bonder in the utility model;
Fig. 5 is that the workpiece connector combines the use sketch map of deciding the weight piece with cutting cushion block bonder in the utility model;
Fig. 6 is the structural representation of workpiece cushion block and workpiece bonder in the utility model;
Fig. 7 is the sketch map that workpiece cushion block and workpiece bonder launch in the utility model;
Fig. 8 is the use sketch map of workpiece cushion block and workpiece bonder in the utility model;
Fig. 9 is the sketch map that combines to decide the weight piece when workpiece cushion block uses with the workpiece bonder in the utility model;
Figure 10 is the side cross-sectional view of Fig. 6 in the utility model;
Figure 11 is the face of the bowing structural representation of Fig. 6 in the utility model.
Wherein: the workpiece connector is placed fixedly compression module-5 of base-1, workpiece connector positioning screw-2, cutting cushion block positioning screw-3, location backup plate-4, workpiece; The first placement base-11, first location lean on ladder-12, cutting cushion block spacer-13, first to decide weight piece-14, screw rod-15; Second place base-21, second location lean on ladder-22, turning workpiece fixedly railing-23, stayed mast-24, fixedly railing-25, workpiece are located backup plate-26 to the part of can not starting building, workpiece standing screw-27, second is decided weight piece-28, erected piece-29, nylon cap-30.
The specific embodiment
For the purpose, technical scheme and the advantage that make the utility model is clearer,, the utility model is further elaborated below in conjunction with accompanying drawing and embodiment.Should be appreciated that specific embodiment described herein only in order to explanation the utility model, and be not used in qualification the utility model.
Disclosed all characteristics in this specification, or the step in disclosed all methods or the process are except the speciality of mutual repulsion and/or the step; All can make up by any way; Only if special narration all can be replaced by other equivalences or the alternative features with similar purpose, promptly; Only if special narration, each characteristic is an embodiment in a series of equivalences or the similar characteristics.
Fig. 3-Figure 11 shows the workpiece location bonder that the utility model embodiment provides, and for the ease of explanation, only shows the part relevant with the utility model embodiment.
Embodiment
The utility model workpiece location bonder comprises workpiece connector and cutting cushion block bonder and workpiece cushion block and workpiece bonder; Wherein: said workpiece connector and cutting cushion block bonder comprise that first places base 11, first location and lean on ladder 12, cutting cushion block spacer 13, first decide weight piece 14 and vertical screw rod 15; Said first location intersects vertically by the ladder 12 and first placement plane, base 11 place and is one; It is parallel that base 11 is placed on plane, said cutting cushion block spacer 13 place and first, and said cutting cushion block spacer 13, first is located and leaned on the ladder 12 and first placement base 11 to be connected by screw rod 15.Said workpiece cushion block and workpiece bonder comprise second place base 21, second location lean on ladder 22, turning workpiece fixedly railing 23, stayed mast 24, the part of can not starting building fixedly locate backup plate 26 and second and decide weight piece 28 by railing 25, workpiece.Said second location intersects vertically by the ladder 22 and second placement plane, base 21 place and is one; Two sides and the back side that ladder 22 is leaned in second location is fixing one perpendicular perpendicular piece 29 respectively; The said turning workpiece fixedly upper end of the perpendicular piece 29 in two ends and both sides of railing 23 spins; The upper end of the perpendicular piece 29 in one end of stayed mast 24 and the back side spins, and the other end and turning workpiece fixedly railing 23 interlock.The upper end of the perpendicular piece 29 in both sides has the fixedly surface platform of railing 23 flip angles of the turning workpiece of control.Turning workpiece fixedly railing 23 is provided with the workpiece standing screw 27 that runs through, and said workpiece standing screw 27 passes turning workpiece and fixedly is provided with nylon cap 30 in the end of railing 23.Said can not start building part fixedly railing 25 be fixed on the upper end of the perpendicular piece 29 in both sides and the back side and with second to place base 21 parallel, workpiece location backup plate 26 with can not start building part fixedly railing 25 be threaded.
In workpiece connector and cutting cushion block bonder, concrete structure and use as Fig. 3-shown in Figure 5, first places base 11 leans on ladder 12 to adopt integral type steel systems to become with first location, and two working faces become 90 to spend and intersect vertically, and the first placement base 11 is positioned at level.First location lean on ladder 12 on side by side fixing two the steel screw rods 15 of plane equidistance, eight screw rods of vertically placing 15 are set altogether, the direction of its setting is and first places the perpendicular direction of base 11 working faces.The plane at cutting cushion block spacer 13 places and the working face of the first placement base 11 are parallel, and four rectifiable cutting cushion block spacers 13 are set, and fixing through two screw rods 15 respectively.First decides weight piece 14 is separate component, plays the effect that adds press fit.
In workpiece cushion block and workpiece bonder; Concrete structure and using like Fig. 6-shown in Figure 11; Second places base 21 leans on ladder 22 to adopt integral type steel system to become with second location; Two working faces become 90 degree to intersect vertically, and second locatees by the perpendicular piece 29 of the fixing respectively steel in terraced 22 two sides and the back side, and perpendicular piece 29 vertical cubes are to vertical with the second placement base, 21 working faces.The turning workpiece fixedly screw of railing 23 through two band caps is fixed on the opposed two perpendicular pieces 29 in both sides, and spins with the upper end of perpendicular piece 29, is, and said turning workpiece fixedly railing 23 can carry out the plane along the screw of bearing and rotates.The levelling bench that perpendicular piece 29 upper ends are provided with is controlled the fixedly flip angle of railing 23 of turning workpiece.Turning workpiece fixedly is provided with a plurality of screws on the railing 23 at interval; Workpiece standing screw 27 is screwed into fixedly railing 23 of turning workpiece through this screw; And workpiece standing screw 27 passes turning workpiece and fixedly can contact with workpiece the end of railing 23; Therefore, be provided with herein and fill up separated nylon cap 30.The upper end of the perpendicular piece 29 in one end of stayed mast 24 and the back side spins, and the other end and turning workpiece fixedly railing 23 interlock, and forms the reversible stayed mast.Steel can not start building part fixedly railing 25 be fixed on the upper end of the perpendicular piece 29 in both sides and the back side and with second to place base 21 parallel, workpiece location backup plate 26 with can not start building part fixedly railing 25 be threaded.Workpiece location backup plate 26 adopts the replaceable nylon material of monoblock type to process.The part of can not starting building fixedly is provided with the many places screw on the railing 25, workpiece location backup plate 26 utilize the screw fit screw with can not start building part fixedly railing 25 be threaded.Second decides weight piece 28 is separate component, plays the effect that adds press fit.
The method for using of this workpiece location bonder is following:
When first use workpiece connector and cutting cushion block bonder, need proofread and correct, adjust:
The workpiece connector is a standard component, and its scale error can be ignored, and leans on ladder 12 to be positioned over first near first location it and places on the station of base 11, adopt measurer to find out the center line of workpiece connector and perform mark; The cutting cushion block is a standard component; Its scale error is minimum to the influence of cut quality; Can ignore; Adopt measurer to find out the center line of cutting cushion block and perform mark, it is positioned on the workpiece connector and makes both central lines, two cuttings in adjustment side cushion block spacer 13 is locked after making its end fully contact the side of cutting cushion block.Adopt same procedure that two cutting cushion block spacers 13 of another one station are proofreaied and correct and locked.
The workpiece connector is bonding with the cutting cushion block: the adhesive surface that cleans workpiece connector and cutting cushion block respectively; Lean on ladder 12 to be positioned over first near first location workpiece connector and place on the base 11, mixed adhesive also evenly is coated on the adhesive surface of workpiece connector; The cutting cushion block adhesive surface and the adhesive surface of the workpiece connector that has applied adhesive are fitted; The position of adjustment cutting cushion block makes its side fully contact the end, location of cutting cushion block spacer 13; And adopt first to decide weight piece 14 and add press fit, wait for curable adhesive layer.
When first use workpiece cushion block and workpiece bonder, need proofread and correct, adjust:
Lean on ladder 22 to be positioned on the station on the second placement base 21 near second location workpiece connector, adopt measurer to find out the center line of workpiece connector and perform mark; Needing the workpiece of cutting is standard component; Its scale error can be ignored; Adopt measurer to find out work centre line and perform mark, it is positioned on the workpiece connector and makes both central lines, select the workpiece location backup plate 26 of suitable thickness to place workpiece and can not start building part fixedly between the railing 25; Make all fully contacts of its both sides, this workpiece location backup plate 26 is fixed on through screw can not starts building part fixedly on the railing 25.
Workpiece cushion block and workpiece bonding:, guarantee sufficient operating space with fixedly railing 23 upsets of stayed mast 24, turning workpiece; Cleaning is respectively cut the adhesive surface of cushion block and workpiece respectively; Lean on ladder 22 to be arranged side by side in second near second location two workpiece connectors that clean adhesive surface and the bonding completion part of cutting cushion block and place surely on the base 21, utilize second location to lean on the workpiece connector positioning instant of 22 pairs of bottoms of ladder can accomplish the integral body location of workpiece connector and the bonding completion part of cutting cushion block; Mixed adhesive also evenly is coated on the adhesive surface of two cutting cushion blocks; Workpiece adhesive surface and the cutting cushion block adhesive surface that has applied adhesive are fitted, and the position of adjustment workpiece makes the locating surface of abundant contact workpiece location, its side backup plate 26; With turning workpiece fixedly the screw junction upset of railing 23 edges and perpendicular piece 29 cause level, make its with can not start building part fixedly railing 25 form around the workpiece around body, around the working face of formed plane parallel in the second placement base 21; The rotation stayed mast 24 make its end and turning workpiece fixedly railing 23 interlock; Rotational workpieces standing screw 27 makes the side of its abundant contact workpiece in end that workpiece is fixed, and the end that workpiece standing screw 27 contacts with workpiece is provided with nylon cap 30, plays the separated effect of pad.Adopt second to decide 28 pressurizations of weight piece; Situation about using based on reality can be provided with a plurality of second and decide weight piece 28 here, for example decides weight piece 28 for three complete up and down overlapping second.The adhesive that the overflow of the bonding tape edge edge of clean cut cushion block and workpiece goes out is waited for curable adhesive layer.
The above is merely the preferred embodiment of the utility model; Not in order to restriction the utility model; Any modification of being done within all spirit and principles at the utility model, be equal to replacement and improvement etc., all should be included within the protection domain of the utility model.
Claims (7)
1. a workpiece is located bonder; It is characterized in that: comprise workpiece connector and cutting cushion block bonder and workpiece cushion block and workpiece bonder; Said workpiece connector comprises that with cutting cushion block bonder first places base, first location by ladder and cutting cushion block spacer; Said first location leans on terraced intersecting vertically with plane, the first placement base place to be one, and the said cutting cushion block spacer plane, place and the first placement base are parallel; Said workpiece cushion block and workpiece bonder comprise second place base, second location lean on ladder, turning workpiece fixedly railing, stayed mast, fixedly railing and workpiece are located backup plate to the part of can not starting building; Said second location leans on terraced intersecting vertically with plane, the second placement base place to be one; Two sides and the back side that ladder is leaned in second location is fixing one perpendicular perpendicular piece respectively; The said turning workpiece fixedly upper end of the perpendicular piece in two ends and both sides of railing spins; The upper end of the perpendicular piece in one end of stayed mast and the back side spins; The other end and turning workpiece fixedly railing interlock, said can not start building part fixedly railing be fixed on the upper end of the perpendicular piece in both sides and the back side and with second to place base parallel, workpiece location backup plate with can not start building part fixedly railing be threaded.
2. workpiece as claimed in claim 1 location bonder is characterized in that: comprise vertical screw rod, said cutting cushion block spacer, first location are leaned on ladder and first to place base and are connected by screw rod.
3. like the described workpiece of arbitrary claim in claim 1 or 2 location bonder, it is characterized in that: comprise that also first decides the weight piece in workpiece connector and the cutting cushion block bonder.
4. workpiece as claimed in claim 1 location bonder, it is characterized in that: turning workpiece fixedly railing is provided with the workpiece standing screw that runs through.
5. workpiece as claimed in claim 4 location bonder, it is characterized in that: said workpiece standing screw passes turning workpiece and fixedly is provided with the nylon cap in the end of railing.
6. like the described workpiece of arbitrary claim in claim 1 or 5 location bonder, it is characterized in that: the upper end of perpendicular piece has the fixedly surface platform of railing flip angle of the turning workpiece of control.
7. workpiece as claimed in claim 6 location bonder is characterized in that: comprise that also second decides the weight piece in workpiece connector and the cutting cushion block bonder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203743012U CN202241654U (en) | 2011-09-30 | 2011-09-30 | Workpiece positioning and bonding device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203743012U CN202241654U (en) | 2011-09-30 | 2011-09-30 | Workpiece positioning and bonding device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202241654U true CN202241654U (en) | 2012-05-30 |
Family
ID=46102947
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011203743012U Withdrawn - After Issue CN202241654U (en) | 2011-09-30 | 2011-09-30 | Workpiece positioning and bonding device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202241654U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102320083A (en) * | 2011-09-30 | 2012-01-18 | 东方电气集团峨嵋半导体材料有限公司 | Work-piece locating and bonding device |
| CN108081484A (en) * | 2016-11-23 | 2018-05-29 | Lg矽得荣株式会社 | Ingot compression apparatus and the ingot chopper and slicer including ingot compression apparatus |
-
2011
- 2011-09-30 CN CN2011203743012U patent/CN202241654U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102320083A (en) * | 2011-09-30 | 2012-01-18 | 东方电气集团峨嵋半导体材料有限公司 | Work-piece locating and bonding device |
| CN102320083B (en) * | 2011-09-30 | 2014-03-26 | 峨嵋半导体材料研究所 | Work-piece locating and bonding device |
| CN108081484A (en) * | 2016-11-23 | 2018-05-29 | Lg矽得荣株式会社 | Ingot compression apparatus and the ingot chopper and slicer including ingot compression apparatus |
| CN108081484B (en) * | 2016-11-23 | 2019-11-12 | 爱思开矽得荣株式会社 | Ingot compression apparatus and ingot chopper and slicer including ingot compression apparatus |
| US10486333B2 (en) | 2016-11-23 | 2019-11-26 | Sk Siltron Co., Ltd. | Ingot pressing apparatus and ingot slicing apparatus including the same |
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