CN202224399U - Ultrasonic cleaning container - Google Patents
Ultrasonic cleaning container Download PDFInfo
- Publication number
- CN202224399U CN202224399U CN 201120334857 CN201120334857U CN202224399U CN 202224399 U CN202224399 U CN 202224399U CN 201120334857 CN201120334857 CN 201120334857 CN 201120334857 U CN201120334857 U CN 201120334857U CN 202224399 U CN202224399 U CN 202224399U
- Authority
- CN
- China
- Prior art keywords
- liquid level
- ultrasonic waves
- level sensor
- outer container
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
The utility model discloses an ultrasonic cleaning container, which comprises an outer container, an inner container, a plurality of liquid level sensors and a sensor adjusting and positioning mechanism. The inner container is positioned inside the outer container, and the liquid level sensors are mounted on the outer wall of the outer container through the sensor adjusting and positioning mechanism, so that the positions of the liquid level sensors can be individually adjusted according to capacity requirements, the actual use capacity of the outer container is changed, liquor inside the outer container is prevented from being volatilized and even evacuated due to too small quantity, and or the liquor inside the outer container is prevented from remaining due to too large quantity. Besides, the application range of the ultrasonic cleaning container can be effectively widened. In addition, the actual capacity of the liquor inside the outer container can be visually read by the aid of a transparent communicating vessel with scale marks.
Description
Technical field
The utility model relates to a kind of container, relates in particular to a kind of ultrasonic waves for cleaning container.
Background technology
CMP refers to cmp (Chemical Mechanical Polishing), or is called chemically mechanical polishing (Chemical Mechanical Planarization).Now, to use the most widely be in integrated circuit (IC) and super large-scale integration (ULSI), wafer to be polished to the CMP technology." buffing is hard " principle in the wearing and tearing of CMP techniques make use; Promptly polish to realize high-quality surface finish with softer material; In the presence of certain pressure and lapping liquid (slurry); Polished workpiece is done relative motion with respect to grinding pad (pad), by means of the combination between the corrosiveness of the abrasive action of nano particle and oxidant, forms smooth finish surface at polished surface of the work.
And ultrasonic waves for cleaning is the first step of carrying out the cmp glossing.Therefore, the parameter setting of ultrasonic wave container is for the cleaning process particular importance, and Parameter Optimization builds in the design of hardware, so, great especially for the optimization meaning of ultrasonic waves for cleaning hardware.
As shown in Figure 1; The structure of the ultrasonic waves for cleaning container of chemical-mechanical grinding device comprises: outer container 110, inner pressurd vessel 120 and some liquid level sensors 130; Said inner pressurd vessel 120 is positioned at the inside of said outer container 110, and said some liquid level sensors 130 are fixed on the outer wall of said outer container 110.
This shows that the capacity of the outer container 110 of existing ultrasonic waves for cleaning container and the position of liquid level sensor 130 have following shortcoming by the production design decision:
1. liquid level sensor 130 is fixed on the outer wall of outer container 110, can not adjust the position of liquid level sensor 130 according to the capacity requirement of outer container.
2. the volume designed size and the actual capacity of outer container 110 have incomprehensiveness, can not intuitively show;
When optimizing the ultrasonic wave parameter,, perhaps cause outer container 110 interior solution too much residual easily because the restriction of above-mentioned two kinds of designs can cause very few being easy to of outer container 110 interior solution to volatilize even find time.
Therefore, how a kind of ultrasonic waves for cleaning container that can adjust the liquid level sensor position according to capacity requirement separately being provided is the technical problem that those skilled in the art need to be resolved hurrily.
The utility model content
The purpose of the utility model is to provide a kind of ultrasonic waves for cleaning container that can adjust the liquid level sensor position according to capacity requirement separately.
In order to reach above-mentioned purpose, the utility model adopts following technical scheme:
A kind of ultrasonic waves for cleaning container; Comprise outer container, inner pressurd vessel and some liquid level sensors; Said inner pressurd vessel is positioned at the inside of said outer container, also comprises sensor adjustment detent mechanism, and said some liquid level sensors are installed on the outer wall of said outer container through sensor adjustment detent mechanism.
Preferably; In above-mentioned ultrasonic waves for cleaning container, said sensor adjustment detent mechanism comprises the positioning component of chute and some and said liquid level sensor respective numbers, and said chute is fixedly set in the outer wall of said outer container; Said positioning component comprises spacer and stator; Said spacer is located in the said chute, and said stator is arranged at the outside of said chute, and the outer peripheral face of said liquid level sensor is provided with external screw thread; Said spacer and stator are respectively equipped with the screwed hole that supplies corresponding said liquid level sensor to screw in, and said liquid level sensor is arranged in corresponding said stator and corresponding said spacer respectively successively.
Preferably, in above-mentioned ultrasonic waves for cleaning container, said chute comprises the pair of openings groove opposite, and the distance between the said groove is greater than the external diameter of said liquid level sensor.
Preferably, in above-mentioned ultrasonic waves for cleaning container, said some liquid level sensors are set in turn in the outer wall of said outer container from the bottom to top.
Preferably, in above-mentioned ultrasonic waves for cleaning container, said ultrasonic waves for cleaning container comprises four liquid level sensors, is low liquid level sensor, low liquid level sensor, high liquid level sensor and Gao Gao liquid level sensor from the bottom to top successively.
Preferably, in above-mentioned ultrasonic waves for cleaning container, also comprise a linker, said linker links to each other with the bottom of said outer container.
In above-mentioned ultrasonic waves for cleaning container, said linker adopts transparent material.
In above-mentioned ultrasonic waves for cleaning container, the outer surface of said linker is provided with scale.
The ultrasonic waves for cleaning container of the utility model; Liquid level sensor is installed on the outer wall of said outer container through sensor adjustment detent mechanism; Therefore, can adjust the position (highly) of liquid level sensor separately, thereby change the actual use capacity of outer container according to capacity requirement; Prevent that outer container from volatilization even vaccuum phenomenon taking place because of internal solution is very few; And can prevent that outer container from because of internal solution the solution residual phenomena taking place too much, simultaneously, also can effectively improve the application scenario of this ultrasonic waves for cleaning container.In addition,, can intuitively read the liquid actual capacity in the outer container, use with the handled easily personnel through being provided with the transparent linker of scale.
Description of drawings
The ultrasonic waves for cleaning container of the utility model is provided by following embodiment and accompanying drawing.
Fig. 1 is the structural representation of existing ultrasonic waves for cleaning container;
Fig. 2 is the structural representation of the ultrasonic waves for cleaning container of the utility model one embodiment;
Fig. 3 is the single liquid level sensor of the utility model one embodiment and the assembling sketch map of sensor adjustment detent mechanism.
The specific embodiment
Below will do further to describe in detail to the ultrasonic waves for cleaning container of the utility model.
Below with reference to accompanying drawings the utility model is described in more detail, has wherein represented the preferred embodiment of the utility model, should be appreciated that those skilled in the art can revise the utility model described here and still realize the advantageous effects of the utility model.Therefore, following description is appreciated that extensively knowing to those skilled in the art, and not as the restriction to the utility model.
For clear, whole characteristics of practical embodiments are not described.In following description, be not described in detail known function and structure, because they can make the utility model because unnecessary details and confusion.Will be understood that in the exploitation of any practical embodiments, must make a large amount of implementation details, for example, change into another embodiment by an embodiment according to relevant system or relevant commercial restriction to realize developer's specific objective.In addition, will be understood that this development possibly be complicated and time-consuming, but only be routine work to those skilled in the art.
For the purpose, the characteristic that make the utility model is more obviously understandable, be further described below in conjunction with the specific embodiment of accompanying drawing to the utility model.What need explanation is, accompanying drawing all adopts the form of simplifying very much and all uses non-ratio accurately, only in order to convenient, the purpose of aid illustration the utility model embodiment lucidly.
See also Fig. 2 and Fig. 3, wherein, Fig. 2 is the structural representation of the ultrasonic waves for cleaning container of the utility model one embodiment, and Fig. 3 is the single liquid level sensor of the utility model one embodiment and the assembling sketch map of sensor adjustment detent mechanism.
This ultrasonic waves for cleaning container comprises outer container 210, inner pressurd vessel 220 and some liquid level sensors 230, and said inner pressurd vessel 220 is positioned at the inside of said outer container 210.Said inner pressurd vessel 220 is used for cleaning wafer, and the main effect of said outer container 210 is to be used for mixing cleaning fluid and to supply cleaning fluids to inner pressurd vessel 220.Said ultrasonic waves for cleaning container also comprises sensor adjustment detent mechanism, and said some liquid level sensors 230 are installed on the outer wall of said outer container 210 through sensor adjustment detent mechanism.
Owing to liquid level sensor 230 is installed on the outer wall of said outer container 210 through sensor adjustment detent mechanism; Therefore; Can adjust the position (highly) of liquid level sensor 230 according to capacity requirement separately; Thereby change the actual use capacity of outer container 210, prevent that outer container 210 from volatilization even vaccuum phenomenon taking place because of internal solution is very few, prevent that perhaps outer container 210 from because of internal solution the solution residual phenomena taking place too much; Simultaneously, also can effectively improve the application scenario of this ultrasonic waves for cleaning container.
Preferable; Please continue to consult Fig. 2 and Fig. 3; In the present embodiment, said sensor adjustment detent mechanism comprises the positioning component of chute 240 and some and said liquid level sensor 230 respective numbers, and said chute 240 is fixedly set in the outer wall of said outer container 210; Said positioning component comprises spacer 250 and stator 260; Said spacer 260 is located in the said chute 240, and said stator 260 is arranged at the outside of said chute 240, and the outer peripheral face of said liquid level sensor 230 is provided with external screw thread; Said spacer 250 is respectively equipped with the screwed hole that supplies corresponding said liquid level sensor 230 to screw in stator 260, and said liquid level sensor is arranged in corresponding said stator 260 and corresponding said spacer 250 respectively successively.
Wherein, Said chute 240 comprises pair of openings groove opposite 241; Distance between the said groove 241 is greater than the external diameter of said liquid level sensor 230; Contact with outer container 210 thereby make said liquid level sensor can pass stator 260, spacer 250 and chute 240 backs, and then the liquid level of solution in the detecting outer container 210.Certainly, the structure of said sensor adjustment detent mechanism is not limited thereto, if realize liquid level sensor 230 move up and down function and lock function.
Present embodiment please continue to consult Fig. 2, and said ultrasonic waves for cleaning container comprises four liquid level sensors 230, and said four liquid level sensors 230 are set in turn in the outer wall of said outer container 210 from the bottom to top.These four liquid level sensors 230 are low liquid level sensor (LL), low liquid level sensor (L), high liquid level sensor (H) and high liquid level sensor (HH) from the bottom to top successively.Wherein, the effect of said low low liquid level sensor (LL) is to prevent that container from use using sky; The effect of said low liquid level sensor (L) is when liquid level triggers it, will be to outer container with make-up solution; The effect of said high liquid level sensor (H) is when liquid level triggers it, will stop to said outer container make-up solution; The effect of the high liquid level sensor of said height (HH) is to prevent that liquid from overflowing outer container.And in normal use, the liquid level of outer container remains between low liquid level sensor (L), the high liquid level sensor (H).
Preferably, please continue to consult Fig. 2, in the present embodiment, said ultrasonic waves for cleaning container also comprises a linker 270, and said linker 270 links to each other with the bottom of said outer container 210.Said linker 270 adopts transparent material.The outer surface of said linker 270 is provided with scale.Through being provided with the transparent linker 270 of scale, can intuitively read the liquid actual capacity in the outer container 210, use with the handled easily personnel.
In sum; The ultrasonic waves for cleaning container of the utility model is installed on the outer wall of said outer container through sensor adjustment detent mechanism with liquid level sensor, therefore; Can adjust the position (highly) of liquid level sensor according to capacity requirement separately; Thereby change the actual use capacity of outer container, prevent that outer container from volatilization even vaccuum phenomenon taking place because of internal solution is very few, and can prevent that outer container from because of internal solution the solution residual phenomena taking place too much; Simultaneously, also can effectively improve the application scenario of this ultrasonic waves for cleaning container.In addition,, can intuitively read the liquid actual capacity in the outer container, use with the handled easily personnel through being provided with the transparent linker of scale.
Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from the spirit and the scope of the utility model.Like this, belong within the scope of the utility model claim and equivalent technologies thereof if these of the utility model are revised with modification, then the utility model also is intended to comprise these changes and modification interior.
Claims (8)
1. ultrasonic waves for cleaning container; Comprise outer container, inner pressurd vessel and some liquid level sensors; Said inner pressurd vessel is positioned at the inside of said outer container; It is characterized in that, also comprise sensor adjustment detent mechanism, said some liquid level sensors are installed on the outer wall of said outer container through sensor adjustment detent mechanism.
2. ultrasonic waves for cleaning container according to claim 1; It is characterized in that said sensor adjustment detent mechanism comprises the positioning component of chute and some and said liquid level sensor respective numbers, said chute is fixedly set in the outer wall of said outer container; Said positioning component comprises spacer and stator; Said spacer is located in the said chute, and said stator is arranged at the outside of said chute, and the outer peripheral face of said liquid level sensor is provided with external screw thread; Said spacer and stator are respectively equipped with the screwed hole that supplies corresponding liquid level sensor to screw in, and said liquid level sensor is arranged in corresponding said stator and corresponding said spacer respectively successively.
3. ultrasonic waves for cleaning container according to claim 2 is characterized in that said chute comprises the pair of openings groove opposite, and the distance between the said groove is greater than the external diameter of said liquid level sensor.
4. ultrasonic waves for cleaning container according to claim 1 is characterized in that said some liquid level sensors are set in turn in the outer wall of said outer container from the bottom to top.
5. ultrasonic waves for cleaning container according to claim 4 is characterized in that, said ultrasonic waves for cleaning container comprises four liquid level sensors, is low liquid level sensor, low liquid level sensor, high liquid level sensor and Gao Gao liquid level sensor from the bottom to top successively.
6. according to any described ultrasonic waves for cleaning container in the claim 1 to 5, it is characterized in that also comprise a linker, said linker links to each other with the bottom of said outer container.
7. ultrasonic waves for cleaning container according to claim 6 is characterized in that, said linker adopts transparent material to process.
8. ultrasonic waves for cleaning container according to claim 6 is characterized in that the outer surface of said linker is provided with scale.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120334857 CN202224399U (en) | 2011-09-07 | 2011-09-07 | Ultrasonic cleaning container |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120334857 CN202224399U (en) | 2011-09-07 | 2011-09-07 | Ultrasonic cleaning container |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202224399U true CN202224399U (en) | 2012-05-23 |
Family
ID=46075007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201120334857 Expired - Fee Related CN202224399U (en) | 2011-09-07 | 2011-09-07 | Ultrasonic cleaning container |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202224399U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105240171A (en) * | 2015-11-10 | 2016-01-13 | 蚌埠国威滤清器有限公司 | Oil bath-type air cleaner with visible oil level |
-
2011
- 2011-09-07 CN CN 201120334857 patent/CN202224399U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105240171A (en) * | 2015-11-10 | 2016-01-13 | 蚌埠国威滤清器有限公司 | Oil bath-type air cleaner with visible oil level |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102765012B (en) | Electrorheological fluid-based flexible controllable air sac polishing tool | |
| CN201579701U (en) | Lower pressure control system of CMP polishing pad finisher | |
| CN202592202U (en) | Grinding head with grinding fluid supply function and grinding device | |
| JP2014138974A (en) | Polishing pad for polishing workpiece, chemical machine polishing device, and method for polishing workpiece using chemical machine polishing device | |
| CN202224399U (en) | Ultrasonic cleaning container | |
| CN103506940B (en) | Chemically mechanical polishing wafer carrier | |
| CN102419603A (en) | Temperature control system of polishing pad in chemical mechanical polishing process | |
| KR102230096B1 (en) | Method for polishing gan single crystal material | |
| CN202204581U (en) | Liquid measuring tool | |
| CN105583720A (en) | Method Of Polishing SiC Substrate | |
| CN203831228U (en) | Elastic combined element pressurizing device used for polishing machine tool | |
| CN102152237A (en) | Method and system for controlling manufacturing procedures of chemical mechanical polishing bench | |
| CN106863101B (en) | Wet process face contact flexible high-efficiency polishing machine | |
| CN204102870U (en) | A kind of cleaning device of wafer placement platform | |
| CN201959757U (en) | Liquid surface-floated stirrer | |
| CN207788624U (en) | Polishing pad and its burnishing device | |
| CN205734400U (en) | A kind of baseplane, valve body and valve seat hole grinding tool | |
| CN202428308U (en) | Polishing disc and polishing machine table | |
| CN205497195U (en) | Quick burnishing device of wafer | |
| CN203125323U (en) | Grinding pad finishing machine and grinding device | |
| CN106808366A (en) | A kind of cast iron pipe polishing pair abrasive wheel gear devices | |
| CN205438162U (en) | A accurate counter weight mechanism for grinding and polishing equipment is last | |
| CN206066081U (en) | Mechanical scale-type tool setting gauge | |
| CN208880467U (en) | A kind of grinding wafer carrier | |
| JP6371721B2 (en) | Wafer polisher |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120523 Termination date: 20160907 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |