CN201959757U - Liquid surface-floated stirrer - Google Patents
Liquid surface-floated stirrer Download PDFInfo
- Publication number
- CN201959757U CN201959757U CN2010206443496U CN201020644349U CN201959757U CN 201959757 U CN201959757 U CN 201959757U CN 2010206443496 U CN2010206443496 U CN 2010206443496U CN 201020644349 U CN201020644349 U CN 201020644349U CN 201959757 U CN201959757 U CN 201959757U
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- Prior art keywords
- paddle
- liquid level
- rotating spindle
- unsteady
- agitator
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Abstract
The utility model discloses a liquid surface-floated stirrer. The liquid surface-floated stirrer comprises a rotary spindle, a fixed stirring paddle, a floater and a floating stirring paddle, the fixed stirring paddle is fixed on the tail end of the rotary spindle, the floating stirring paddle is fixed on the lower end of the floater, and the floater and the floating stirring paddle are sleeved on the rotary spindle, and can slide along the rotary spindle. The stirring paddle of the liquid surface-floated stirrer can be adjusted up and down along with the change of the liquid level, consequently, no matter how high or low the liquid level is, the liquid surface-floated stirrer can sufficiently stir the liquid surface close to the air, and thereby the liquid surface-floated stirrer can effectively solve the crystallization problem of the liquid surface close to the air.
Description
Technical field
The utility model relates to a kind of semiconductor fabrication process equipment, relates in particular to a kind of liquid level buoyancy agitator
Background technology
In semiconductor technology, chemically mechanical polishing (Chemical Mechanical Polishing, CMP) technology is the technology of mechanical skiving and chemical attack combination, chemical Mechanical Polishing Technique forms bright and clean smooth plane by the chemical attack effect of ultramicronized abrasive action and slurry on polished dielectric surface.Chemical Mechanical Polishing Technique is the product of integrated circuit (IC) to granular, multiple stratification, slimming, flatening process development, become the mainstream technology of semiconductor manufacturing, also be wafer to 200mm, 300mm and even bigger diameter excessively, enhance productivity, reduce the technology of manufacturing cost and substrate globalize planarization indispensability.Chemical Mechanical Polishing Technique has become the maincenter technology of semiconductor fabrication process.
CMP is to use the lapping liquid (Slurry) of abrasive grains such as containing silicon nitride, silica to make the method for semiconductor wafer surface planarization, and the object of grinding comprises silicon oxide layer, distribution, connector (Plug) etc.The purpose of grinding wafer is to remove the cut channel of crystal column surface or uneven, make the Surface Machining damage smooth evenly, in the chemical attack process, its surface corrosion speed gets final product uniformity, between grinding pad and wafer, add lapping liquid (Slurry), to improve grinding efficiency.Static being placed on of lapping liquid placed very easily crystallization in the air, the lapping liquid of crystallization can cause cut (Scratch) to wafer in process of lapping, influence output.When prior art, lapping liquid are positioned in the liquid-collecting barrel, need utilize paddle and self circulatory system to help lapping liquid to increase certain stirring, reduce the formation of crystallization.
Fig. 1 is the structural representation of liquid level agitator in the prior art.As shown in Figure 1, described liquid level agitator 30 comprises rotating spindle 32 and is fixed in the paddle 34 of described rotating spindle 32 tail ends, described agitator 30 is arranged in the liquid-collecting barrel 10 that holds lapping liquid 20, paddle 34 is immersed in the lapping liquid 20, rotating spindle 32 drives paddle 34 and rotates constantly stirring lapping liquid 20, thereby makes the situation that reduces the lapping liquid crystallization.But when more lapping liquid 20 is stored in the liquid-collecting barrel 10, it is just not obvious that the top contact of paddle 34 butt joint near-space gas is in the disturbance near the lapping liquid 20 of air of liquid-collecting barrel 10 the superiors, near the liquid level of air will with long-time static contact of air, very easily form crystallization.
The utility model content
The technical problems to be solved in the utility model is that providing a kind of can increase the agitator that nearly liquid level stirs.
For addressing the above problem, the utility model provides a kind of liquid level buoyancy agitator, comprise rotating spindle, and the fixedly paddle that is fixed in described rotating spindle tail end, also comprise float and the unsteady paddle that is fixed in described float below, described float and unsteady paddle are sheathed on the described rotating spindle, and can slide along described rotating spindle.
Further, described rotating spindle is provided with longitudinal rail, and described float and unsteady paddle and described longitudinal rail are suitable.
Further, described float and described unsteady paddle are fixedly linked by bindiny mechanism, and described bindiny mechanism is sheathed on the described rotating spindle, and can slide along described rotating spindle.
Further, described longitudinal rail is provided with latch for printed circuit in two ends up and down.
Further, the material of described liquid level buoyancy agitator is a resistant material.
In sum, the paddle of liquid level buoyancy agitator described in the utility model can change with the height of liquid level and adjust up and down, thereby no matter the height of liquid level can both fully stir the liquid level near air, thereby effectively reduces the problem near the liquid level crystallization of air.
Description of drawings
Fig. 1 is the structural representation of liquid level agitator in the prior art.
Fig. 2 is the structural representation of unsteady paddle among the utility model one embodiment.
Fig. 3 is the vertical view of the described unsteady paddle of Fig. 2.
Fig. 4 is another state diagram of the described unsteady paddle of Fig. 2.
The specific embodiment
For making content of the present utility model clear more understandable,, content of the present utility model is described further below in conjunction with Figure of description.Certainly the utility model is not limited to this specific embodiment, and the known general replacement of those skilled in the art also is encompassed in the protection domain of the present utility model.
Secondly, the utility model utilizes schematic diagram to carry out detailed statement, and when the utility model example was described in detail in detail, for convenience of explanation, schematic diagram did not amplify according to general ratio is local, should be with this as to qualification of the present utility model.
Core concept of the present utility model is: installing float on the rotating spindle of prior art agitator additional and be fixed in unsteady paddle below the float, described float fluctuates with the liquid surface lifting variation, described unsteady paddle is arranged on the described rotating spindle, rotating spindle can drive described unsteady paddle when rotating and horizontally rotate, thereby stir liquid level, thereby reach the problem that prevents near the liquid level crystallization of air near air.
Fig. 2 is the structural representation of unsteady paddle among the utility model one embodiment, and Fig. 3 is the vertical view of the described unsteady paddle of Fig. 2.As shown in Figures 2 and 3, the utility model provides a kind of liquid level buoyancy agitator 300, comprise rotating spindle 320, and the fixedly paddle 340 that is fixed in described rotating spindle 320 tail ends, also comprise float 360 and the unsteady paddle 380 that is fixed in described float 360 belows, described float 360 is sheathed on the described rotating spindle 320 with unsteady paddle 380, and can slide along described rotating spindle 320.Described liquid level buoyancy agitator 300 is arranged in the liquid-collecting barrel 100 that holds lapping liquid 200, described fixedly paddle 340 is immersed in the lapping liquid 200 with unsteady paddle 380, lay respectively at the bottom of lapping liquid and the liquid level place of close air, rotating spindle 320 drives paddle 340 and unsteady paddle 380 rotates constantly stirring lapping liquid 200, thereby makes the situation that reduces lapping liquid 200 crystallizations.
Further, described rotating spindle 320 is provided with longitudinal rail 310; Fig. 3 is the vertical view of the described unsteady paddle of Fig. 2.Please in conjunction with Fig. 3, described float 360 is suitable with the internal diameter shape and the described longitudinal rail of unsteady paddle 380, further, in the present embodiment, described longitudinal rail 310 is for being arranged on the longitudinally-moving key of rotating spindle 320, and described float 360 is suitable with the longitudinally-moving key with unsteady paddle 380.Thereby make float 360 and unsteady paddle 380 hold fixing in the horizontal direction with respect to rotating spindle 320, thereby making rotating spindle can drive unsteady paddle 380 when rotating rotates, thereby the liquid level part that makes the paddle 380 that floats can stir close air, and float 360 can relatively rotate main shaft 320 slips with unsteady paddle 380 in the vertical directions.Other structures that can satisfy above-mentioned unsteady paddle and rotating spindle movement relation are all in thought range of the present utility model in addition.
Further, described float 360 is fixedly linked by bindiny mechanism 370 with described unsteady paddle 380, described bindiny mechanism is sheathed on the described rotating spindle 320, and can slide along described rotating spindle 320, equally, the interior ring and the longitudinal rail on the rotating spindle 320 of described bindiny mechanism are suitable, drive and horizontally rotate and bindiny mechanism 370 can relatively rotate main shaft 320 longitudinally-movings thereby make syndeton 370 can be rotated main shaft 320.Described bindiny mechanism 370 can be better fixedly float 360 and unsteady paddle 380, the method for other fixedly connected floats 360 and unsteady paddle 380 all can be used as within the thought of the present utility model in addition.
Further, described longitudinal rail is provided with latch for printed circuit 330 in two ends about in the of 310.Described latch for printed circuit 330 can prevent that liquid level from crossing the paddle 380 that floats when low and touching fixedly paddle 340, and described float 360 touched liquid-collecting barrel 100 tops when liquid level was too high, protected liquid level buoyancy agitator 300, increased the service life.
Further, the material of described liquid level buoyancy agitator is a resistant material, and the material of described liquid level buoyancy agitator 300 can be polytetrafluoroethylene (PTFE) or other materials, can be not with liquid-collecting barrel in.
Fig. 4 is another state diagram of the described unsteady paddle of Fig. 2.Please in conjunction with Fig. 2 and Fig. 4, described float 360 and unsteady paddle 380 can be along with liquid level variation fluctuate along rotating spindle, and stir liquid level near air with the rotation of rotating spindle, thereby prevent near the long-time static generation crystallization of the liquid level of air.
In sum, the utility model liquid level buoyancy agitator is installing float additional and is being fixed in unsteady paddle below the float on the rotating spindle, described float fluctuates with the liquid surface lifting variation, described unsteady paddle is arranged on the described rotating spindle, rotating spindle can drive described unsteady paddle when rotating and horizontally rotate, thereby stir liquid level, thereby effectively prevent problem near the liquid level crystallization of air near air.
Though the utility model discloses as above with preferred embodiment; right its is not in order to limit the utility model; have in the technical field under any and know the knowledgeable usually; in not breaking away from spirit and scope of the present utility model; when doing a little change and retouching, therefore protection domain of the present utility model is as the criterion when looking claims person of defining.
Claims (5)
1. liquid level buoyancy agitator, comprise rotating spindle, and the fixedly paddle that is fixed in described rotating spindle tail end, it is characterized in that, also comprise float and the unsteady paddle that is fixed in described float below, described float and unsteady paddle are sheathed on the described rotating spindle, and can slide along described rotating spindle.
2. liquid level buoyancy agitator as claimed in claim 1 is characterized in that described rotating spindle is provided with longitudinal rail, and described float and unsteady paddle and described longitudinal rail are suitable.
3. liquid level buoyancy agitator as claimed in claim 1 or 2 is characterized in that, described float and described unsteady paddle are fixedly linked by bindiny mechanism, and described bindiny mechanism is sheathed on the described rotating spindle, and can slide along described rotating spindle.
4. liquid level buoyancy agitator as claimed in claim 2 is characterized in that, described longitudinal rail is provided with latch for printed circuit in two ends up and down.
5. liquid level buoyancy agitator as claimed in claim 1 is characterized in that the material of described liquid level buoyancy agitator is a resistant material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206443496U CN201959757U (en) | 2010-12-06 | 2010-12-06 | Liquid surface-floated stirrer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206443496U CN201959757U (en) | 2010-12-06 | 2010-12-06 | Liquid surface-floated stirrer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201959757U true CN201959757U (en) | 2011-09-07 |
Family
ID=44522279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010206443496U Expired - Fee Related CN201959757U (en) | 2010-12-06 | 2010-12-06 | Liquid surface-floated stirrer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201959757U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2503690A (en) * | 2012-07-04 | 2014-01-08 | Stephen Bannocks | A rainwater agitation apparatus |
| CN103785324A (en) * | 2014-01-18 | 2014-05-14 | 浙江长城减速机有限公司 | Liquid level self-adaptive defoaming paddle |
| CN106984232A (en) * | 2017-05-25 | 2017-07-28 | 国家海洋局第海洋研究所 | Seawater stirs lifting device |
| CN107175907A (en) * | 2017-05-12 | 2017-09-19 | 贵州鸿图彩印包装有限责任公司 | A kind of wine box printing equipment |
| CN115646302A (en) * | 2022-12-12 | 2023-01-31 | 江苏科伦多食品配料有限公司 | Food additive mixing control device and using method thereof |
-
2010
- 2010-12-06 CN CN2010206443496U patent/CN201959757U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2503690A (en) * | 2012-07-04 | 2014-01-08 | Stephen Bannocks | A rainwater agitation apparatus |
| GB2503690B (en) * | 2012-07-04 | 2016-08-10 | Bannocks Stephen | Water agitation apparatus |
| CN103785324A (en) * | 2014-01-18 | 2014-05-14 | 浙江长城减速机有限公司 | Liquid level self-adaptive defoaming paddle |
| CN107175907A (en) * | 2017-05-12 | 2017-09-19 | 贵州鸿图彩印包装有限责任公司 | A kind of wine box printing equipment |
| CN106984232A (en) * | 2017-05-25 | 2017-07-28 | 国家海洋局第海洋研究所 | Seawater stirs lifting device |
| CN115646302A (en) * | 2022-12-12 | 2023-01-31 | 江苏科伦多食品配料有限公司 | Food additive mixing control device and using method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130320 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20130320 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110907 Termination date: 20181206 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |