CN202208776U

CN202208776U - Device for detecting crystal material zone melting on boron

Info

Publication number: CN202208776U
Application number: CN 201120315582
Authority: CN
Inventors: 刘朝轩
Original assignee: Luoyang Jinnuo Mechanical Engineering Co Ltd
Current assignee: Luoyang Jinnuo Mechanical Engineering Co Ltd
Priority date: 2011-08-17
Filing date: 2011-08-17
Publication date: 2012-05-02
Anticipated expiration: 2021-08-17

Abstract

The utility model discloses a device for detecting crystal material zone melting on boron, which relates to a device for detecting impurity content in the crystal material, wherein a vacuum cavity is arranged at the middle part of a frame; an upper lifting mechanism corresponds to the vacuum cavity and is linked with raw crystal bars inside the vacuum cavity through an upper shaft (7), and a lower lifting mechanism is linked with seed crystals inside the vacuum cavity through a lower shaft (14); the upper lifting mechanism, the vacuum cavity and the lower lifting mechanism are concentrically arranged; the upper lifting mechanism and the lower lifting mechanism move axially through a lead screw and a guide rail, the vacuum cavity is connected to a diffusion pump (38) through a connecting pipe (30) at an air inlet. As the upper lifting mechanism and the lower lifting mechanism arranged at the upper end and the lower end of the vacuum cavity respectively are linked, the raw crystal bars can be pulled from poly-crystals into the required mono-crystals in a high-vacuum airtight cavity. The device for detecting the crystal material zone melting on boron has a simple structure, is easy to operate, has high sealing effect and high vacuum degree, and can be opened and closed quickly, and realizes the purposes of high efficiency and low cost.

Description

Basic boron proofing unit is melted in a kind of crystalline material district

[technical field]

The utility model relates to crystalline material foreign matter content proofing unit, especially relates to the molten basic boron proofing unit in a kind of crystalline material district.

[background technology]

Known, polysilicon is the direct material of manufacture order crystal silicon, also is the base mateiral of semiconducter device such as contemporary artificial intelligence, control automatically, information processing, opto-electronic conversion.Polysilicon is a kind of high purity material, is commonly called as HIGH-PURITY SILICON.It is just amazing at last that common metal silicon purity reaches five " 9 ", concerning polysilicon, also is nowhere near, and the used polysilicon of electronic industry must be that eight " 9 " are to the ten nines; That is to say in 1,000,000,000 to 10,000,000,000 Siliciumatoms, an impurity atoms is only arranged.Hence one can see that, is quite high to the purity requirement of polysilicon.

Polysilicon product quality situation is to become monocrystalline (to be generally called " boron inspection " said boron inspection exactly through polysilicon is become monocrystalline through district's melting and pulling through district's melting and pulling; And boron content is evenly distributed in the monocrystalline) after; Method with the GB regulation records resistivity, life-span and conductivity model.In this process, any impurity all can influence the accuracy of detection, misleads the quality product of polysilicon.Polysilicon is being carried out in the boron inspection process; Require polysilicon under high vacuum environment, to distinguish melting and pulling, thus very high to the stopping property of proofing unit, at present that polysilicon is comparatively heavy at the equipment that high vacuum environment inferior segment melting and pulling becomes monocrystalline to detect; And it is comparatively loaded down with trivial details to operate; Because the influence of airtight, preheating or the like factor, often seriously polluted to crystal bar finally do not reach the purpose that expection detects in pulling process.

[summary of the invention]

In order to overcome the deficiency in the background technology; The utility model discloses the molten basic boron proofing unit in a kind of crystalline material district; The interlock of the jacking system of the upper and lower part of the molten basic boron proofing unit in the described crystalline material of the utility model district through being arranged on airtight vacuum cavity upper and lower ends is drawn into satisfactory monocrystalline with polycrystalline with the raw material crystal bar in having the airtight cavity of high vacuum state, the utlity model has simple in structure, easy handling; Good seal performance; High and the ability quickly opening and closing of vacuum tightness has realized that efficient is high, the purpose that cost is low.

In order to realize described goal of the invention, the utility model adopts following technical scheme:

Basic boron proofing unit is melted in a kind of crystalline material district; Comprise top hoisting appliance, vacuum cavity, bottom hoisting appliance, guide rail and frame; Said vacuum cavity is arranged on central rack; The corresponding vacuum cavity of top hoisting appliance and through the intravital fuel rod of last axle interlock vacuum chamber, hoisting appliance top, bottom is through the intravital seed crystal of lower shaft interlock vacuum chamber, said top hoisting appliance, vacuum cavity and bottom hoisting appliance be setting with one heart; Top hoisting appliance and bottom hoisting appliance axially move through leading screw, guide rail, and said vacuum cavity connects DP through the bleeding point pipe connecting and forms the molten basic boron proofing unit in said crystalline material district.

Basic boron proofing unit is melted in described crystalline material district, and said vacuum cavity is a vacuum container, is provided with fire door in the vacuum container front portion; The middle part of said fire door is provided with viewing window, is provided with the hinge that connects furnace chamber in fire door one side, and the opposite side of fire door is connected with furnace chamber through snap close; The hinge both sides of wherein said fire door are respectively equipped with snap close, form the closure mechanism of fire door and furnace chamber, and the rear portion of said furnace chamber is provided with preheating mechanism; Wherein " C " shape preheater of preheating mechanism front end setting is arranged on the inwall of furnace chamber; Wherein the furnace wall of furnace chamber is double-deck, forms the hollow cooling medium pass between the ectonexine, also is provided with the crystal bar well heater at the rear portion of furnace chamber; Said crystal bar well heater is that in the furnace chamber or two places, furnace chamber rear portion move setting; Front end at the crystal bar well heater is provided with heater coil, is provided with the stove neck in the upper end of furnace chamber, and last seal box is arranged in the stove neck; Be provided with stove neck down in the bottom of furnace chamber, the lower seal box is arranged on down in the stove neck.

Basic boron proofing unit is melted in described crystalline material district, and said bleeding point pipe connecting is provided with communication port, is provided with inlet mouth at the opposite side of furnace chamber, and said inlet mouth is through air intake valve control.

Basic boron proofing unit is melted in described crystalline material district; Said top hoisting appliance comprises step-down gear A, goes up slide rail, goes up back-up block, step-down gear B, go up axle, go up an axle elevating screw, Connection Block B, motor A, Connection Block C and motor B; Be fixed with step-down gear B on the lower stage terrace of said upward back-up block front end, the power intake of said step-down gear B is connected with motor B through Connection Block C, and the main shaft of said motor B is connected with the power input shaft of step-down gear B through shaft coupling; Clutch end at step-down gear B is provided with PTO; Said PTO passes back-up block and is connected with power transmission wheel A, leading screw is set in last back-up block penetrates the hole internal fixing screw is arranged, and said screw cooperates with the wire connection of last axle elevating screw; The said axle elevating screw two ends of going up are fixed on the upper side of frame through axle bed; Top at last axle elevating screw one end mount pad is provided with step-down gear A, and the clutch end of step-down gear A is connected with last axle elevating screw upper end, and the power intake of said step-down gear A is connected with motor A through joint chair B; The main shaft of said motor A is connected with the power input shaft of step-down gear A through shaft coupling; Last axle penetrates the hole and is connected through the axle of going up in bearing and the last back-up block, is fixed with power transmission wheel B last upper end, and said power transmission wheel B is connected with power transmission wheel A; The lower end of last axle is arranged in the vacuum cavity; Said bottom of going up axle closely is connected with the interior last seal box of last stove neck and is slidingly matched, and on the top shoe mounting face of last back-up block, is fixed with slide block, and said slide block is slidingly matched with the last slide rail that is arranged on the frame mounting face; Said power transmission wheel B and power transmission wheel A are through band transmission or chain drive or meshing transmission.

Basic boron proofing unit is melted in described crystalline material district, and a said side that goes up back-up block is equipped with the limit switch push pedal, and said limit switch push pedal forms the protection mechanism that axle goes up and down with the two limit switch A that are installed in frame or go up on the axle bed of axle elevating screw two ends.

Basic boron proofing unit is melted in described crystalline material district; Said bottom hoisting appliance comprises lower shaft, Connection Block A, step-down gear C, following back-up block, motor C, lower shaft elevating screw, glidepath, step-down gear D, Connection Block D and motor D; Be fixed with step-down gear C on the upper stage terrace of said back-up block front end down, the power intake of said step-down gear C is connected with motor C through Connection Block A, and the main shaft of said motor C is connected with the power input shaft of step-down gear C through shaft coupling; Clutch end at step-down gear C is provided with PTO; Said PTO passes down back-up block and is connected with power transmission wheel C, and the following leading screw that in following back-up block, is provided with penetrates the hole internal fixing has screw, and said screw cooperates with the wire connection of lower shaft elevating screw; Said lower shaft elevating screw two ends are fixed on the bottom surfaces of frame mounting face through axle bed; Top at lower shaft elevating screw one end mount pad is provided with step-down gear D, and the clutch end of step-down gear D is connected with lower shaft elevating screw lower end, and the power intake of said step-down gear D is connected with motor D through Connection Block D; The main shaft of said motor D is connected with the power input shaft of step-down gear D through shaft coupling; Lower shaft penetrates the hole through bearing and lower shaft in the following back-up block and is connected, and is fixed with power transmission wheel D in the lower end of lower shaft, and said power transmission wheel D is connected with power transmission wheel C; The upper end of lower shaft is arranged in the vacuum furnace body; The top of said lower shaft closely is connected with the interior lower seal box of following stove neck and is slidingly matched, and on the sliding block mounting face of following back-up block, is fixed with slide block, and said slide block is slidingly matched with the glidepath that is arranged on the frame mounting face; Said power transmission wheel D and power transmission wheel C are through band transmission or chain drive.

Basic boron proofing unit is melted in described crystalline material district, and a said side of back-up block down is equipped with the limit switch push pedal, and said limit switch push pedal forms the protection mechanism that lower shaft goes up and down with the two limit switch B that are installed on frame or the lower shaft elevating screw two ends axle bed.

Basic boron proofing unit is melted in described crystalline material district, and said DP is connected with vacuum pump through flexible pipe, and DP is provided with vacuum detection instrument, is provided with height adjusting block A in the bottom of DP.

Basic boron proofing unit is melted in described crystalline material district, is provided with base in the bottom of frame, and the bottom of said base is provided with adjustment piece B, is provided with at least two hoisting rings in the upper end of frame.

Adopt technique scheme, the beneficial effect of the utility model is:

Basic boron proofing unit is melted in the described crystalline material of the utility model district; Realized the quick extracting vacuum of vacuum container, good seal performance, upper and lower axle jacking system goes up and down stable; Realized the fast rotation of going up and down and going up lower shaft at a slow speed; The boron content of the feasible monocrystalline crystal bar that finally obtains is evenly distributed in arbitrary position on the crystal bar very much, in follow-up testing process, obtains to detect more accurately data; The utlity model has simple in structurely, easy handling can quickly opening and closing, has realized that efficient is high, the goal of the invention that cost is low.

[description of drawings]

Fig. 1 is the perspective view of the utility model;

Fig. 2 is the last back-up block structural representation of the utility model;

Fig. 3 is the following back-up block structural representation of the utility model;

In the drawings: 1, hoisting ring; 2, frame; 3, step-down gear A; 4, go up slide rail; 5, go up back-up block; 6, step-down gear B; 7, go up axle; 8, go up the axle elevating screw; 9, air intake valve; 10, fire door; 11, hinge; 12, following stove neck; 13, lower seal box; 14, lower shaft; 15, Connection Block A; 16, step-down gear C; 17, following back-up block; 18, Connection Block B; 19, motor A; 20, limit switch A; 21, Connection Block C; 22, motor B; 23, go up seal box; 24, go up the stove neck; 25, vacuum container; 26, snap close; 27, crystal bar well heater; 28, preheating mechanism; 29, communication port; 30, bleeding point pipe connecting; 31, limit switch B; 32, motor C; 33, lower shaft elevating screw; 34, glidepath; 35, step-down gear D; 36, Connection Block D; 37, motor D; 38, DP; 39, base; 40, adjustment piece A; 41, adjustment piece B; 42, top shoe mounting face; 43, go up leading screw and penetrate the hole; 44, go up axle and penetrate the hole; 45, sliding block mounting face; 46, leading screw penetrates the hole down; 47, lower shaft penetrates the hole; 48, viewing window.

[embodiment]

Embodiment with reference to following can be explained in more detail the utility model, but the utility model is not limited to these embodiment.

In conjunction with the molten basic boron proofing unit in the crystalline material district described in the accompanying drawing 1; Comprise top hoisting appliance, vacuum cavity, bottom hoisting appliance, guide rail and frame; Said vacuum cavity is arranged on central rack, the corresponding vacuum cavity of top hoisting appliance and through the intravital fuel rod of last axle 7 interlock vacuum chambers, hoisting appliance top, bottom is through the intravital seed crystal of lower shaft 14 interlock vacuum chambers; Said top hoisting appliance, vacuum cavity and bottom hoisting appliance are to be provided with one heart; Top hoisting appliance and bottom hoisting appliance axially move through leading screw, guide rail, and said vacuum cavity connects DP 38 through bleeding point pipe connecting 30, and said bleeding point pipe connecting 30 is provided with communication port 29; Opposite side at furnace chamber 25 is provided with inlet mouth, and said inlet mouth is through air intake valve 9 controls; Said DP 38 is connected with vacuum pump through flexible pipe, and DP 38 is provided with vacuum detection instrument, is provided with height adjusting block A40 in the bottom of DP 38; Be provided with base 39 in the bottom of frame 2, the bottom of said base 39 is provided with adjustment piece B41, is provided with at least two hoisting rings 1 in the upper end of frame 2 and forms the molten basic boron proofing unit in said crystalline material district.

Basic boron proofing unit is melted in described crystalline material district, and said vacuum cavity is a vacuum container 25, is provided with fire door 10 in vacuum container 25 front portions; The middle part of said fire door 10 is provided with viewing window 48, is provided with the hinge 11 that connects furnace chamber 25 in fire door 10 1 sides, and the opposite side of fire door 10 is connected with furnace chamber 25 through snap close 26; Hinge 11 both sides of wherein said fire door 10 are respectively equipped with snap close 26, form the closure mechanism of fire door 10 and furnace chamber 25, and the rear portion of said furnace chamber 25 is provided with preheating mechanism 28; Wherein " C " shape preheater of preheating mechanism 28 front ends setting is arranged on the inwall of furnace chamber 25; Wherein the furnace wall of furnace chamber 25 is double-deck, forms the hollow cooling medium pass between the ectonexine, also is provided with crystal bar well heater 27 at the rear portion of furnace chamber 25; Said crystal bar well heater 27 moves setting in the furnace chamber 25 or two places, furnace chamber 25 rear portions; Front end at crystal bar well heater 27 is provided with heater coil, is provided with stove neck 24 in the upper end of furnace chamber 25, and last seal box 23 is arranged in the stove neck 24; Be provided with stove neck 12 down in the bottom of furnace chamber 25, lower seal box 13 is arranged on down in the stove neck 12.

Comprise step-down gear A3, go up slide rail 4, go up back-up block 5, step-down gear B6, go up axle 7, go up an axle elevating screw 8, Connection Block B18, motor A19, Connection Block C21 and motor B22 in conjunction with accompanying

drawing

1 or 2 said top hoisting appliances; Be fixed with step-down gear B6 on the lower stage terrace of said upward back-up block 5 front ends; The power intake of said step-down gear B6 is connected with motor B22 through Connection Block C21; The main shaft of said motor B22 is connected with the power input shaft of step-down gear B6 through shaft coupling, is provided with PTO at the clutch end of step-down gear B6, and said PTO passes back-up block 5 and is connected with power transmission wheel A; Leading screw penetrates hole 43 internal fixing in last back-up block 5, being provided with has screw; Said screw cooperates with 8 wire connections of last axle elevating screw, and said axle elevating screw 8 two ends of going up are fixed on through axle bed on the upper side of frame 2, are provided with step-down gear A3 on the top of last axle elevating screw 8 one end mount pads; The clutch end of step-down gear A3 is connected with last axle elevating screw 8 upper ends; The power intake of said step-down gear A3 is connected with motor A19 through joint chair B18, and the main shaft of said motor A19 is connected with the power input shaft of step-down gear A3 through shaft coupling, and last axle 7 penetrates hole 44 through bearing with last back-up block 5 interior upward axles and is connected; Upper end at last axle 7 is fixed with power transmission wheel B; Said power transmission wheel B is connected with power transmission wheel A, and the lower end of last axle 7 is arranged in the vacuum cavity, and said bottom of going up axle 7 closely is connected with last stove neck 24 interior last seal boxes 23 and is slidingly matched; On the top shoe mounting face 42 of last back-up block 5, be fixed with slide block, said slide block is slidingly matched with the last slide rail 4 that is arranged on frame 2 mounting faces; Said power transmission wheel B and power transmission wheel A are through band transmission or chain drive or meshing transmission; A said side that goes up back-up block 5 is equipped with the limit switch push pedal, and said limit switch push pedal forms the protection mechanism that axle 7 goes up and down with the two limit switch A20 that are installed in frame 20 or go up on the axle elevating screw 8 two ends axle beds.

Comprise lower shaft 14, Connection Block A15, step-down gear C16, following back-up block 17, motor C32, lower shaft elevating screw 33, glidepath 34, step-down gear D35, Connection Block D36 and motor D 37 in conjunction with accompanying

drawing

1 and 3 said bottom hoisting appliances; Be fixed with step-down gear C16 on the upper stage terrace of said back-up block 17 front ends down; The power intake of said step-down gear C16 is connected with motor C32 through Connection Block A15; The main shaft of said motor C32 is connected with the power input shaft of step-down gear C16 through shaft coupling; Clutch end at step-down gear C16 is provided with PTO; Said PTO passes down back-up block 17 and is connected with power transmission wheel C, and the following leading screw that in following back-up block 17, is provided with penetrates hole 46 internal fixing has screw, and said screw cooperates with 33 wire connections of lower shaft elevating screw; Said lower shaft elevating screw 33 two ends are fixed on the bottom surfaces of frame 2 mounting faces through axle bed; Top at lower shaft elevating screw 33 1 end mount pads is provided with step-down gear D35, and the clutch end of step-down gear D35 is connected with lower shaft elevating screw 33 lower ends, and the power intake of said step-down gear D35 is connected with motor D 37 through Connection Block D36; The main shaft of said motor D 37 is connected with the power input shaft of step-down gear D35 through shaft coupling; Lower shaft 14 penetrates hole 47 through bearing with following back-up block 17 interior lower shafts and is connected, and is fixed with power transmission wheel D in the lower end of lower shaft 14, and said power transmission wheel D is connected with power transmission wheel C; The upper end of lower shaft 14 is arranged in the vacuum furnace body; The top of said lower shaft 14 closely is connected with following stove neck 12 interior lower seal boxes 13 and is slidingly matched, and on the sliding block mounting face 45 of following back-up block 17, is fixed with slide block, and said slide block is slidingly matched with the glidepath 34 that is arranged on frame 2 mounting faces; Said power transmission wheel D and power transmission wheel C are through band transmission or chain drive; A said side of back-up block 17 down is equipped with the limit switch push pedal, and said limit switch push pedal forms the protection mechanism that lower shaft 14 goes up and down with the two limit switch B31 that are installed on frame 20 or the lower shaft elevating screw 33 two ends axle beds.

Implement the molten basic boron proofing unit in the described crystalline material of the utility model district, at first be ready to the raw material crystal bar of diameter of phi 15～20mm * 150mm, and the raw material crystal bar is fixed on is positioned at furnace chamber 25 inner lower ends of going up axle 7; Wherein the more approaching heater coil that is arranged on crystal bar well heater 27 front ends of raw material crystal bar is good more; But can not the Contact Heating coil, be fixed with the seed crystal permanent seat in the upper end that is positioned at furnace chamber 25 inner lower shafts 14 then, on the seed crystal permanent seat, be fixed with seed crystal; Adjustment is arranged on fixed " C " shape preheater on the furnace chamber 25 rear portion preheating mechanisms; Make " C " shape preheater and raw material crystal bar near but do not contact, close fire door 10, close air intake valve 9 simultaneously; Make furnace chamber 25 and fire door 10 form an airtight cavity; Vacuumize through vacuum pump, 38 pairs of vacuum cavities of DP, and through being arranged on the vacuum detection instrument monitoring vacuum on the vacuum pump 38, when vacuum tightness≤6.67 * 10 ^-2During Pa, stop vacuum cavity being vacuumized, start high-frequency device " said high-frequency device is meant through three phase rectifier three-phase alternating current is become high voltage direct current; convert high voltage direct current to the high frequency A.C. current through the valve inverter then, and the high-frequency alternating current after the conversion produces high-frequency alternating magnetic field through load coil, and high-frequency alternating magnetic field and raw material crystal bar produce high-frequency vortex; the high-frequency vortex through producing heats fuel rod, and this is the working process and the role of high-frequency device ", the raw material crystal bar is heated through the heater coil of crystal bar well heater 27 front end settings; For the raw material crystal bar is melted fast, realize the raw material crystal bar is assisted preheating simultaneously, after the raw material crystal bar melts the formation melting zone through " C " shape preheater; Drive lower shaft 14 by the bottom hoisting appliance and rise at a slow speed, until seed crystal being passed the heater coil endoporus and contacting raw material crystal bar melting zone, treat that seed crystal and raw material crystal bar melting zone fuse into one after; Drive lower shaft 14 by the bottom hoisting appliance and at the uniform velocity descend, top jacking system drive is simultaneously gone up axle 7 and is at the uniform velocity descended thereupon, is the finished product crystal bar through drawing the new cylindricality crystal bar that forms; After drawing completion, close high-frequency device, stop heating; After making the interior temperature of stove be cooled to normal temperature, open air intake valve 9, make bubbling airs in the furnace chamber 25; Open fire door, take out crystal bar, just accomplished processing and testing process crystal bar; The crystal bar that finally obtains is to have become single crystal by polycrystal; Make the boron content in the crystal bar be evenly distributed on arbitrary position on the crystal bar simultaneously, in follow-up testing process, obtain to detect more accurately data.

Carefully not stating in the above content is prior art partly, does not state so run business into particular one.

The embodiment that selects for use in this article for the purpose of open the utility model currently thinks to suit, but will be appreciated that, the utility model is intended to comprise that all belong to all conversion and the improvement of the interior embodiment of this design and the utility model scope.

Claims

1. basic boron proofing unit is melted in a crystalline material district; Comprise top hoisting appliance, vacuum cavity, bottom hoisting appliance, guide rail and frame; It is characterized in that: said vacuum cavity is arranged on central rack; The corresponding vacuum cavity of top hoisting appliance and through the intravital fuel rod of last axle (7) interlock vacuum chamber; Hoisting appliance top, bottom is through the intravital seed crystal of lower shaft (14) interlock vacuum chamber; Said top hoisting appliance, vacuum cavity and bottom hoisting appliance are to be provided with one heart, and top hoisting appliance and bottom hoisting appliance axially move through leading screw, guide rail, and said vacuum cavity connects DP (38) through bleeding point pipe connecting (30) and forms the molten basic boron proofing unit in said crystalline material district.

2. basic boron proofing unit is melted in crystalline material according to claim 1 district, it is characterized in that: said vacuum cavity is vacuum container (25), is provided with fire door (10) in vacuum container (25) front portion; The middle part of said fire door (10) is provided with viewing window (48); Be provided with the hinge (11) that connects furnace chamber (25) in fire door (10) one sides, the opposite side of fire door (10) is connected with furnace chamber (25) through snap close (26), and hinge (11) both sides of wherein said fire door (10) are respectively equipped with snap close (26); Form the closure mechanism of fire door (10) and furnace chamber (25); The rear portion of said furnace chamber (25) is provided with preheating mechanism (28), and wherein " C " shape preheater of preheating mechanism (28) front end setting is arranged on the inwall of furnace chamber (25), and wherein the furnace wall of furnace chamber (25) is double-deck; Form the hollow cooling medium pass between the ectonexine; Also be provided with crystal bar well heater (27) at the rear portion of furnace chamber (25), said crystal bar well heater (27) moves setting in the furnace chamber (25) or two places, furnace chamber (25) rear portion, is provided with heater coil at the front end of crystal bar well heater (27); Be provided with stove neck (24) in the upper end of furnace chamber (25), last seal box (23) is arranged in the stove neck (24); Be provided with stove neck (12) down in the bottom of furnace chamber (25), lower seal box (13) is arranged on down in the stove neck (12).

3. basic boron proofing unit is melted in crystalline material according to claim 1 district, and it is characterized in that: said bleeding point pipe connecting (30) is provided with communication port (29), is provided with inlet mouth at the opposite side of furnace chamber (25), and said inlet mouth is through air intake valve (9) control.

4. basic boron proofing unit is melted in crystalline material according to claim 1 district; It is characterized in that: said top hoisting appliance comprises step-down gear A (3), goes up slide rail (4), goes up back-up block (5), step-down gear B (6), go up axle (7), go up an axle elevating screw (8), Connection Block B (18), motor A (19), Connection Block C (21) and motor B (22); Be fixed with step-down gear B (6) on the lower stage terrace of said upward back-up block (5) front end; The power intake of said step-down gear B (6) is connected with motor B (22) through Connection Block C (21); The main shaft of said motor B (22) is connected with the power input shaft of step-down gear B (6) through shaft coupling; Clutch end at step-down gear B (6) is provided with PTO; Said PTO passes back-up block (5) and is connected with power transmission wheel A, and the last leading screw that in last back-up block (5), is provided with penetrates hole (43) internal fixing has screw, and said screw cooperates with the wire connection of last axle elevating screw (8); Said axle elevating screw (8) two ends of going up are fixed on the upper side of frame (2) through axle bed; Top at last axle elevating screw (8) one end mount pads is provided with step-down gear A (3), and the clutch end of step-down gear A (3) is connected with last axle elevating screw (8) upper end, and the power intake of said step-down gear A (3) is connected with motor A (19) through joint chair B (18); The main shaft of said motor A (19) is connected with the power input shaft of step-down gear A (3) through shaft coupling; Last axle (7) penetrates hole (44) through bearing and the interior upward axle of last back-up block (5) and is connected, and is fixed with power transmission wheel B in the upper end of last axle (7), and said power transmission wheel B is connected with power transmission wheel A; The lower end of last axle (7) is arranged in the vacuum cavity; Said bottom of going up axle (7) closely is connected with the interior last seal box (23) of last stove neck (24) and is slidingly matched, and on the top shoe mounting face (42) of last back-up block (5), is fixed with slide block, and said slide block is slidingly matched with the last slide rail (4) that is arranged on frame (2) mounting face; Said power transmission wheel B and power transmission wheel A are through band transmission or chain drive or meshing transmission.

5. basic boron proofing unit is melted in crystalline material according to claim 4 district; It is characterized in that: a said side that goes up back-up block (5) is equipped with the limit switch push pedal, and said limit switch push pedal is gone up a protection mechanism of (7) up-down with two limit switch A (20) formation that are installed in frame (20) or go up on the axle bed of axle elevating screw (8) two ends.

6. basic boron proofing unit is melted in crystalline material according to claim 1 district; It is characterized in that: said bottom hoisting appliance comprises lower shaft (14), Connection Block A (15), step-down gear C (16), following back-up block (17), motor C (32), lower shaft elevating screw (33), glidepath (34), step-down gear D (35), Connection Block D (36) and motor D (37); Be fixed with step-down gear C (16) on the upper stage terrace of said back-up block (17) front end down; The power intake of said step-down gear C (16) is connected with motor C (32) through Connection Block A (15); The main shaft of said motor C (32) is connected with the power input shaft of step-down gear C (16) through shaft coupling; Clutch end at step-down gear C (16) is provided with PTO; Said PTO passes down back-up block (17) and is connected with power transmission wheel C, and the following leading screw that in following back-up block (17), is provided with penetrates hole (46) internal fixing has screw, and said screw cooperates with lower shaft elevating screw (33) wire connection; Said lower shaft elevating screw (33) two ends are fixed on the bottom surfaces of frame (2) mounting face through axle bed; Be provided with step-down gear D (35) on the top of lower shaft elevating screw (33) one end mount pads, the clutch end of step-down gear D (35) is connected with lower shaft elevating screw (33) lower end, and the power intake of said step-down gear D (35) is connected with motor D (37) through Connection Block D (36); The main shaft of said motor D (37) is connected with the power input shaft of step-down gear D (35) through shaft coupling; Lower shaft (14) penetrates hole (47) through bearing with the interior lower shaft of following back-up block (17) and is connected, and is fixed with power transmission wheel D in the lower end of lower shaft (14), and said power transmission wheel D is connected with power transmission wheel C; The upper end of lower shaft (14) is arranged in the vacuum furnace body; The top of said lower shaft (14) closely is connected with the interior lower seal box (13) of following stove neck (12) and is slidingly matched, and on the sliding block mounting face (45) of following back-up block (17), is fixed with slide block, and said slide block is slidingly matched with the glidepath (34) that is arranged on frame (2) mounting face; Said power transmission wheel D and power transmission wheel C are through band transmission or chain drive.

7. basic boron proofing unit is melted in crystalline material according to claim 6 district; It is characterized in that: a said side of back-up block (17) down is equipped with the limit switch push pedal, and said limit switch push pedal forms the protection mechanism that lower shaft (14) goes up and down with the two limit switch B (31) that are installed on frame (20) or lower shaft elevating screw (33) the two ends axle bed.

8. basic boron proofing unit is melted in crystalline material according to claim 1 district; It is characterized in that: said DP (38) is connected with vacuum pump through flexible pipe; DP (38) is provided with vacuum detection instrument, is provided with height adjusting block A (40) in the bottom of DP (38).

9. basic boron proofing unit is melted in crystalline material according to claim 1 district; It is characterized in that: be provided with base (39) in the bottom of frame (2); The bottom of said base (39) is provided with adjustment piece B (41), is provided with at least two hoisting rings (1) in the upper end of frame (2).