CN202185678U - Device for manufacturing metal film group hole through ultrashort pulse laser - Google Patents
Device for manufacturing metal film group hole through ultrashort pulse laser Download PDFInfo
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- CN202185678U CN202185678U CN 201120268510 CN201120268510U CN202185678U CN 202185678 U CN202185678 U CN 202185678U CN 201120268510 CN201120268510 CN 201120268510 CN 201120268510 U CN201120268510 U CN 201120268510U CN 202185678 U CN202185678 U CN 202185678U
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- pulse laser
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- workbench
- laser
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Abstract
The utility model relates to a device for manufacturing metal film group holes through ultrashort pulse lasers, wherein the output terminal of a high frequency short pulse laser is provided with an optical shutter and the output terminal of the optical shutter is provided with a beam expanding lens. The output terminal of the beam expanding lens is provided with a 45-degree holophote. The output terminal of the 45-degree holophote is sequentially provided with a vibrating lens and a scanning field lens. The scanning field lens is right opposite a work platform. A CCD contraposition observation system is arranged over the work platform. A set of clamping cylinders are arranged on the work platform. One side of the work platform is provided with an air blowing system and the other side of the work platform is provided with a dust collecting system. Another dust collecting system is arranged at the lower part of work platform. The focal point of the ultrashort pulse laser is on metal thin film materials through the optical focusing of the ultrashort pulse laser, so that the energy of the ultrashort pulse laser is efficiently utilized. The pulse number and the pulse time for manufacturing each metal film aperture are modulated through controlling the pulse number and the pulse duration time of the ultrashort pulse laser. Then the required apertures on each metal film are successively machined.
Description
Technical field
The utility model relates to the device that a kind of ultra-short pulse laser is made metallic film crowd hole, belongs to the laser micro-machining technology field.
Background technology
Crowd hole preparation method has electronic beam drilling, spark eroding punching, electrochemistry punching, helical form punching and ultrasonic drilling at present.The electronic beam drilling rapidoprint is fixed as metal material, and processing unit (plant) can only carry out in a vacuum, otherwise electronics is braked when colliding with atom, turns to then.Spark eroding drilling method rapidoprint can only be conductive material, and punching speed is slower, and whole processing charges is higher.The device of electrochemistry punching need be processed in liquid electrolyte, but the manufacturing procedure complicacy is loaded down with trivial details, and the cycle of making the hole is longer.The helical form punching is removed material through cutting way, but the quality requirement of drill bit is higher, and very easy loss drill bit, and maintenance cost is comparatively expensive.Ultrasonic drilling produces microcrack to base material easily, and to the base material damage, the processed and applied restriction is comparatively strict.
The definition of laser drilling is thermal source with the laser beam, adopts the heat abstraction method to carry out the material separation technology, thereby forms the material processing method in specific aperture.Laser beam is focused at material surface; Make the material surface temperature sharply raise and reach the evaporation vaporized state of material; Thereby realize the removal of material, comprised material to the absorption of beam energy and the heat transfer process in the material, in this process; Material is heated the sharply process of gasification takes place, and depends primarily on laser and material effects time and laser beam intensity.
Because the sustainable growth demand in fuel oil filter, fluid pump Industrial Metal filter product and the industry of Aero-Space pneumatic element of auto industry; Be manufactured with the processing request of degree of precision and greater efficiency for the crowd hole of metallic film; Traditional processing method can't realize; Therefore; Need a kind of method and apparatus of breaking through the processing group hole of traditional fabrication technology especially, and laser receives the attention of industry-by-industry all the more as manufacturing process advanced in the modern industry; Realize that through laser the feasibility and the practicality of making metallic film crowd hole also obtain increasing checking, but also do not have a kind of ability high efficiency and high accuracy to make making equipment and the process that metallic film goes to group hole at present as yet.
Summary of the invention
The purpose of the utility model is to overcome the deficiency that prior art exists, the device that provides a kind of ultra-short pulse laser to make metallic film crowd hole, solve in present little processing working (machining) efficiency low, be prone to produce problems such as consumptive material and selectivity are not strong.
The purpose of the utility model realizes through following technical scheme:
Ultra-short pulse laser is made the device in metallic film crowd hole, and characteristics are: the output of high-frequency short-pulse laser is furnished with optical gate, and the output of optical gate is provided with beam expanding lens; The output of beam expanding lens is furnished with 45 degree completely reflecting mirrors; The output of 45 degree completely reflecting mirrors is furnished with galvanometer and field mirror successively, and field mirror is right against workbench, and the top of said workbench is furnished with CCD contraposition observing system; Be equipped with one group on the said workbench and clamp cylinder; One side of said workbench is furnished with scavenger system, and the opposite side of workbench is equipped with dust-precipitating system, and the below of workbench also is equipped with dust-precipitating system.
Further, above-mentioned ultra-short pulse laser is made the device in metallic film crowd hole, and said high-frequency short-pulse laser is that wavelength is that < 355nm ultraviolet or deep ultraviolet, pulsewidth are at 100fs～100ns, the frequency laser instrument at 10KHz～50MHz.
Substantive distinguishing features and obvious improvement that the utility model technical scheme is outstanding are mainly reflected in:
The utility model makes its optical focus focus on processed metallic film material through ultrashort pulse laser is carried out optical focus, realizes the energy of optimized efficient utilization laser instrument; Control the duration between pulse number and the pulse of ultrashort pulse laser through the control system, finally modulate the pulse number and the burst length that form each metallic film aperture; Through the control system, process required aperture on each metallic film respectively successively, finally accomplish the processing technology in all apertures on the whole film; Auxiliary air blowing, getter device in the process are to obtain comparatively high-quality, high efficiency crowd hole manufacture craft.The range of work does not receive the restriction of Material Physics, mechanical performance, can process any hard, soft, crisp, heat-resisting or refractory metal and nonmetallic materials.Be easy to processed complex profile, fine surface and flexible part.Be prone to obtain favorable surface quality, thermal stress, residual stress, flow harden, heat affected area etc. are all smaller.Various processing methods are prone to be compounded to form new process, and are easy to utilize.
Description of drawings
Below in conjunction with accompanying drawing the utility model technical scheme is described further:
Fig. 1: the structural representation of the utility model.
The implication of each Reference numeral among the figure:
1-high-frequency short-pulse laser; 2-optical gate; 3-beam expanding lens; 4-45 degree completely reflecting mirrors; 5-galvanometer; 6-field mirror; 7-CCD contraposition observing system; 8-clamping cylinder; 9-workbench; 10-scavenger system; 11-dust-precipitating system; 12-metallic film.
The specific embodiment
The utility model utilizes the light path focusing system of modulating pulse laser pulse, metallic film is carried out the technology in group hole and makes, to obtain the metallic film crowd hole product of stability and high efficiency.
As shown in Figure 1, ultra-short pulse laser is made the device in metallic film crowd hole, and the output of high-frequency short-pulse laser 1 is furnished with optical gate 2; Said high-frequency short-pulse laser is that wavelength is that < 355nm ultraviolet or deep ultraviolet, pulsewidth are at 100fs～100ns, the frequency laser instrument at 10KHz～50MHz; The output of optical gate 2 is provided with beam expanding lens 3, and the output that the output of beam expanding lens 3 is furnished with 45 degree completely reflecting mirrors, 4,45 degree completely reflecting mirrors 4 is furnished with galvanometer 5 and field mirror 6 successively; Field mirror 6 is right against workbench 9; The top of workbench 9 is furnished with CCD contraposition observing system 7, is equipped with one group on the workbench 9 and clamps cylinder 8, and a side of workbench 9 is furnished with scavenger system 10; The opposite side of workbench 10 is equipped with dust-precipitating system 11, and the below of workbench 10 also is equipped with dust-precipitating system.
When said apparatus is used to make metallic film crowd hole; Laser spot focuses on the upper surface that is positioned at metallic film before the processing; The laser that high-frequency short-pulse laser 1 sends specifically can be controlled the opening and closing of optical gate 2 by the software control induced signal through optical gate 2 gauge tap light, carries out coaxial expansion bundle through 3 pairs of light beams of beam expanding lens behind the optical gate 2 control laser beams; The angle of divergence of improving beam propagation makes beam path alignment; The size of the final focal beam spot of control laser makes to obtain desirable spot size, thereby realizes the purpose of laser stabilization boring; The light beam that expands after restrainting arrives 45 degree completely reflecting mirrors 4; Light path vertically alters course, and arrives galvanometer 5 and field mirror 6 then, and scanning patter is converted into data signal; Figure transforms and on the metallic film on the workbench 9 12, punches; Certainly, metallic film 12 clamped cylinders 8 clamp evens up, and makes metallic film 12 on same focussing plane; The dust that etching produces produces air-flow by scavenger system 10, and confirms the air blowing angle according to vibration mirror scanning angle and laser focal, and target is taken and grasped to the location mark that CCD contraposition observing system 7 will import, and software processes control laser instrument begins bright dipping processing then.At this moment, scavenger system 10 is started working with dust-precipitating system 11, and the air blowing angle is to get according to vibration mirror scanning angle and laser focal calculating, makes it cooperate big flow dust arrester to reach best dust collecting effect under angle in specific blowing afloat.
Ultra-short pulse laser is shorter than the characteristic time of most chemistry and physical reactions (such as machinery and thermodynamics); Peak power is high; Because the middle each other unique multi-photon absorption process of ultrashort laser pulse and material; Its machining accuracy can break through the bottleneck of coherent limit, thus make nanoprocessing and corresponding little/many conceptions of nano-electron, little/receive optics become possibility.Ultrafast laser pulse train can be controlled ionization process, optionally ground state rotation etc. in ionized atom, the control molecule.The utility model is controlled the process (selective excitation/ionization) of machined material Electron absorption laser photon through ultrafast pulse sequences Design (regulating the energy of individual pulse and interpulse delay), and then controls phase transition process, improves machining accuracy.
Ultrashort pulse laser is carried out optical focus, make its optical focus focus on processed metallic film material, realize the energy of optimized efficient utilization laser instrument; Control the duration between pulse number and the pulse of ultrashort pulse laser through the control system, finally modulate the pulse number and the burst length that form each metallic film aperture; Through the control system, process required aperture on each metallic film respectively successively, finally accomplish the processing technology in all apertures on the whole film; Auxiliary air blowing, getter device in the process are to obtain comparatively high-quality, high efficiency crowd hole manufacture craft.
The utility model range of work does not receive the restriction of Material Physics, mechanical performance, can process any hard, soft, crisp, heat-resisting or refractory metal and nonmetallic materials.Be easy to processed complex profile, fine surface and flexible part.Be prone to obtain favorable surface quality, thermal stress, residual stress, flow harden, heat affected area etc. are all smaller.Various processing methods are prone to be compounded to form new process, and are easy to utilize.
What need understand is: the above only is the preferred implementation of the utility model; For those skilled in the art; Under the prerequisite that does not break away from the utility model principle; Can also make some improvement and retouching, these improvement and retouching also should be regarded as the protection domain of the utility model.
Claims (2)
1. ultra-short pulse laser is made the device in metallic film crowd hole; It is characterized in that: the output of high-frequency short-pulse laser (1) is furnished with optical gate (2); The output of optical gate (2) is provided with beam expanding lens (3), and the output of beam expanding lens (3) is furnished with 45 degree completely reflecting mirrors (4), and the output of 45 degree completely reflecting mirrors (4) is furnished with galvanometer (5) and field mirror (6) successively; Field mirror (6) is right against workbench (9); The top of said workbench (9) is furnished with CCD contraposition observing system (7), is equipped with one group on the said workbench (9) and clamps cylinder (8), and a side of said workbench (9) is furnished with scavenger system (10); The opposite side of workbench (10) is equipped with dust-precipitating system (11), and the below of workbench (10) also is equipped with dust-precipitating system.
2. ultra-short pulse laser according to claim 1 is made the device in metallic film crowd hole, it is characterized in that: said high-frequency short-pulse laser is that wavelength is that < 355nm ultraviolet or deep ultraviolet, pulsewidth are at 100fs～100ns, the frequency laser instrument at 10KHz～50MHz.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120268510 CN202185678U (en) | 2011-07-27 | 2011-07-27 | Device for manufacturing metal film group hole through ultrashort pulse laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120268510 CN202185678U (en) | 2011-07-27 | 2011-07-27 | Device for manufacturing metal film group hole through ultrashort pulse laser |
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| Publication Number | Publication Date |
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| CN202185678U true CN202185678U (en) | 2012-04-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201120268510 Expired - Lifetime CN202185678U (en) | 2011-07-27 | 2011-07-27 | Device for manufacturing metal film group hole through ultrashort pulse laser |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102319960A (en) * | 2011-07-27 | 2012-01-18 | 苏州德龙激光有限公司 | Device and method for making metal film group holes by using ultra-short pulse laser |
| CN103586586A (en) * | 2013-10-22 | 2014-02-19 | 苏州镭明激光科技有限公司 | Pulse laser etching device used for transparent electroconductive thin film and control method of pulse laser etching device |
| CN103817444A (en) * | 2014-02-25 | 2014-05-28 | 烟台白马包装有限公司 | Method for punching holes in plastic film in non-contact mode |
| CN105598593A (en) * | 2016-02-29 | 2016-05-25 | 深圳英诺激光科技有限公司 | Laser processing system and method used for hard and brittle material drilling |
| WO2018205482A1 (en) * | 2017-05-11 | 2018-11-15 | 英诺激光科技股份有限公司 | Filtering film processed using laser and laser processing system |
-
2011
- 2011-07-27 CN CN 201120268510 patent/CN202185678U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102319960A (en) * | 2011-07-27 | 2012-01-18 | 苏州德龙激光有限公司 | Device and method for making metal film group holes by using ultra-short pulse laser |
| CN103586586A (en) * | 2013-10-22 | 2014-02-19 | 苏州镭明激光科技有限公司 | Pulse laser etching device used for transparent electroconductive thin film and control method of pulse laser etching device |
| CN103817444A (en) * | 2014-02-25 | 2014-05-28 | 烟台白马包装有限公司 | Method for punching holes in plastic film in non-contact mode |
| CN105598593A (en) * | 2016-02-29 | 2016-05-25 | 深圳英诺激光科技有限公司 | Laser processing system and method used for hard and brittle material drilling |
| CN105598593B (en) * | 2016-02-29 | 2018-05-22 | 英诺激光科技股份有限公司 | For the laser-processing system and method for hard brittle material drilling |
| WO2018205482A1 (en) * | 2017-05-11 | 2018-11-15 | 英诺激光科技股份有限公司 | Filtering film processed using laser and laser processing system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 215021 Suzhou Industrial Park, Jiangsu, Hong Zhong Road, No. 77 Patentee after: Suzhou Delphi Laser Co., Ltd. Address before: 215021 Suzhou Industrial Park, Jiangsu, Hong Zhong Road, No. 77 Patentee before: Suzhou Delphi Laser Co., Ltd. |
|
| CX01 | Expiry of patent term |
Granted publication date: 20120411 |
|
| CX01 | Expiry of patent term |