CN202107634U - Glass substrate adopting membrane system structure and plated with membrane layer - Google Patents
Glass substrate adopting membrane system structure and plated with membrane layer Download PDFInfo
- Publication number
- CN202107634U CN202107634U CN2011202514389U CN201120251438U CN202107634U CN 202107634 U CN202107634 U CN 202107634U CN 2011202514389 U CN2011202514389 U CN 2011202514389U CN 201120251438 U CN201120251438 U CN 201120251438U CN 202107634 U CN202107634 U CN 202107634U
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- rete
- glass substrate
- antireflection
- coating layer
- layer
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Abstract
The embodiment of the utility model discloses a glass substrate adopting a membrane system structure and plated with a coating layer. The glass substrate comprises an antireflection and reflection reducing mixed coating layer generated at the single side or the double sides of the glass substrate by the magnetron sputtering method, wherein the antireflection and reflection reducing coating layer is in a laminated structure of a low refraction index coating layer and a high refraction index coating layer; and a carbonitride coating layer is generated at the other side of the antireflection and reflection reducing mixed coating layer by the magnetron sputtering method. With the adoption of the glass substrate provided by the utility model, the quality of a protective screen is ensured, and the anti-scuffing, wear resistant and superhard scratch resistant capabilities are strong.
Description
Technical field
The utility model relates to the demonstration field, relates in particular to a kind of film structure and is coated with the glass substrate of rete.
Background technology
In present demonstration field, various display devices emerge in an endless stream, like TV, computer, outdoor display screen, Medical Instruments, pick up camera, display case glass etc.Is a kind of conventional means and adopt protection screen to display device protection, and general protection screen adopts antireflection anti-reflection (AR) rete on glass substrate, still a little less than the wear-resisting and scratch resistance ability of this protection screen, can't satisfy the specification of quality of product.
The utility model content
The utility model embodiment technical problem to be solved is, a kind of film structure is provided and is coated with the glass substrate of rete, and to guarantee the quality of protection screen, wear-resisting and superhard scratch resistance ability is strong.
In order to solve the problems of the technologies described above; The utility model embodiment has proposed a kind of film structure; Comprise the anti-reflection mixed membranous layer of antireflection; And the carbonitride compound rete that is created on this antireflection antireflective coating one side, the anti-reflection mixed membranous layer of said antireflection is the stepped construction of low-index film and high refractive index layer.
Correspondingly; The utility model embodiment also provides a kind of glass substrate that is coated with rete; Comprise glass substrate, adopt magnetron sputtering method to be created on the anti-reflection mixed membranous layer of antireflection of this glass substrate single or double; And adopt magnetron sputtering method to generate carbonitride compound rete at the anti-reflection mixed membranous layer another side of said antireflection, wherein, the anti-reflection mixed membranous layer of said antireflection is the stepped construction of low-index film and high refractive index layer.
Further, said low-index film is a silica coating, and said high refractive index layer is Niobium Pentxoxide rete or titanium oxide film layer, and said carbonitride compound rete is the CNx rete.
Further, be disposed with the first Niobium Pentxoxide rete, first silica coating, the second Niobium Pentxoxide rete, second silica coating and CNx rete on the said glass substrate.
Correspondingly, the utility model embodiment also provides a kind of glass substrate that is coated with rete, it is characterized in that, comprises glass substrate, adopts magnetron sputtering method to be created on the carbonitride compound rete of this glass substrate single or double.
The utility model embodiment is through providing a kind of film structure and being coated with the glass substrate of rete; The employing of antireflection is anti-reflection mixed membranous layer carbonitride compound rete has guaranteed under the wear-resisting wiping trier 1KG pressure that film is not fallen in 10000 frictions back and forth, is 2000 friction durabilities more than 5 times of conventional rete; Key scratch resistance flower test 10KG pressure cut do not occur 50 times back and forth; Pencil hardness is estimated surface hardness and is reached more than the 9H; It is strong that rete has the wear-resisting and superhard scratch resistance ability of scratch resistance wound; The anti-reflection mixed membranous layer of antireflection has guaranteed high permeability characteristic and the scratch resistant superhard characteristic of friction resistant more than 97%, has prolonged the work-ing life of protection screen, makes it meet the application of touch-screen more; In the design of film system, use the silica coating compensation glass substrate film-forming temperature of the anti-reflection mixed membranous layer of antireflection; Increased the bonding force of carbonitride compound rete, the generation of avoided owing to breaking of producing greatly of substrate and coating materials stress-difference, peel off, film forming inequality and hardness being hanged down phenomenon; With the glass substrate temperature of the high vacuum condition of vacuum tightness 5.0E-3,100-160 degree centigrade, adopt intermediate frequency power supply, 500-900 watt low sputtering power; And the cooperation of argon gas, oxygen optimum proportion; Formation condition as silica coating, Niobium Pentxoxide rete or titanium oxide film layer; And, the glass substrate temperature of the high vacuum condition of vacuum tightness 5.0E-3,100-160 degree centigrade, adopt intermediate frequency power supply, 500-900 watt low sputtering power, with the cooperation of argon gas, oxygen optimum proportion; As the formation condition of carbonitride compound rete, avoided further that carbonitride compound rete breaks, the generation of peeling phenomenon.
Description of drawings
Fig. 1 is first kind of structure iron of the glass substrate that is coated with rete of the utility model embodiment.
Fig. 2 is second kind of structure iron of the glass substrate that is coated with rete of the utility model embodiment.
Fig. 3 is the third structure iron of the glass substrate that is coated with rete of the utility model embodiment.
Fig. 4 is the 4th a kind of structure iron of the glass substrate that is coated with rete of the utility model embodiment.
Fig. 5 is the 5th a kind of structure iron of the glass substrate that is coated with rete of the utility model embodiment.
Embodiment
Below in conjunction with accompanying drawing, embodiment is elaborated to the utility model.
With reference to Fig. 1; The glass substrate that is coated with rete of the utility model embodiment comprises glass substrate 1, adopt magnetron sputtering method to be created on the two-sided AR mixed membranous layer of this glass substrate 1; And adopt magnetron sputtering method to generate carbonitride compound rete at AR mixed membranous layer another side, wherein, the AR mixed membranous layer is the stepped construction of low-index film and high refractive index layer; Particularly, low-index film is silicon-dioxide (SiO
2) rete, high refractive index layer is Niobium Pentxoxide (Nb
2O
5) rete, carbonitride compound rete is the CNx rete, is disposed with a Nb on the glass substrate 1
2O
5Rete 2, a SiO
2Rete 3, the 2nd Nb
2O
5Rete 4, the 2nd SiO
2Rete 5 and CNx rete 6, wherein, the x span can be arbitrary value among the 0.4-1.5.
Above-mentioned AR mixed membranous layer and carbonitride compound rete have formed the new membrane architecture of the utility model embodiment, repeat no more here.
The utility model embodiment adopts multilayer film magnetron sputtering film technique under coldcondition, processed to have wear resistance and superhard DLC film, and the method that on glass substrate, prepares rete of the utility model embodiment mainly is:
Adopt vertical many casings continuous magnetron sputtering method plating multilayer technique; And plasma emission spectroscopy monitoring method (PEM) system; At the two-sided AR mixed membranous layer that is coated with respectively of glass substrate, can realize that 420-680nm wave band reflectivity all 1% once, expanded the antiradar reflectivity loan; Reduced light intensity and changed injury eyesight; The stepped construction of AR mixed membranous layer and CNx rete has guaranteed high permeability characteristic and the scratch resistant superhard characteristic of friction resistant more than 97%, has prolonged the work-ing life of protection screen, makes it meet the application of touch-screen more.
The formation condition of above-mentioned CNx rete comprises: glass substrate temperature, graphite target direct supply, the 500-900 watt low sputtering power of the high vacuum condition of vacuum tightness 5.0E-3,100-160 degree centigrade (as getting 100,120,150,160 degrees centigrade of equivalences), and argon gas (Ar) and nitrogen (N
2) certain proportion (like 90:6) mark condition milliliter per minute (sccm), certainly, argon gas and nitrogen mainly according to vacuum apparatus configuring condition different adjustment, can also be got other numerical value as its ratio of groundwork gas.
Above-mentioned SiO
2Rete, Nb
2O
5The formation condition of rete comprises: the glass substrate temperature of the high vacuum condition of vacuum tightness 5.0E-3,100-160 degree centigrade (as getting 100,120,150,160 degrees centigrade of equivalences), adopt intermediate frequency power supply, 500-900 watt low sputtering power, with argon gas and oxygen as its ratio of groundwork gas according to vacuum apparatus configuring condition different adjustment.
The film structure of the utility model embodiment has transmitance greater than more than 97% at the 420-680nm wave band; Reflectivity is less than 1% once optical characteristics, and wear test adopt under 1 kilogram of pressure 10000 times not demoulding, pencil hardness 9H do not scratch, the metallic hard thing surface 2 kgfs 30 times experiment effect that do not damage of cut back and forth.Present technique can be applied to the glass surface plated film and make superhard resist and analogous products.
As a kind of embodiment, above-mentioned glass substrate 1 only single face generation has above-mentioned new membrane architecture, and is as shown in Figure 2.And the design of two-sided rete is in order to reach high effect of passing through low reflection on the above-mentioned glass substrate 1.
As a kind of embodiment, above-mentioned low-index film and high refractive index layer can also adopt other materials that suits the requirements, and can also be titanium oxide (TiO like high refractive index layer
2) rete etc., TiO
2The formation condition of rete and above-mentioned SiO
2Rete, Nb
2O
5The formation condition of rete roughly the same repeats no more here.
As a kind of embodiment, above-mentioned AR mixed membranous layer can also adopt other stepped constructions that waits as shown in Figure 3.
With reference to Fig. 4, the glass substrate that is coated with rete of the utility model embodiment comprises glass substrate 1, adopt magnetron sputtering method to be created on the two-sided carbonitride compound rete of this glass substrate 1, and carbonitride compound rete is a CNx rete 6.Certainly, can also only generate CNx rete 6 at glass substrate 1 single face, as shown in Figure 5.
The above is the embodiment of the utility model; Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the utility model principle; Can also make some improvement and retouching, these improvement and retouching also are regarded as the protection domain of the utility model.
Claims (5)
1. film structure; It is characterized in that; Comprise the anti-reflection mixed membranous layer of antireflection, and the carbonitride compound rete that is created on this antireflection antireflective coating one side, the anti-reflection mixed membranous layer of said antireflection is the stepped construction of low-index film and high refractive index layer.
2. glass substrate that is coated with rete; It is characterized in that; Comprise glass substrate, adopt magnetron sputtering method to be created on the anti-reflection mixed membranous layer of antireflection of this glass substrate single or double; And adopt magnetron sputtering method to generate carbonitride compound rete at the anti-reflection mixed membranous layer another side of said antireflection, wherein, the anti-reflection mixed membranous layer of said antireflection is the stepped construction of low-index film and high refractive index layer.
3. the glass substrate that is coated with rete as claimed in claim 2 is characterized in that, said low-index film is a silica coating, and said high refractive index layer is Niobium Pentxoxide rete or titanium oxide film layer, and said carbonitride compound rete is the CNx rete.
4. the glass substrate that is coated with rete as claimed in claim 3 is characterized in that, is disposed with the first Niobium Pentxoxide rete, first silica coating, the second Niobium Pentxoxide rete, second silica coating and CNx rete on the said glass substrate.
5. a glass substrate that is coated with rete is characterized in that, comprises glass substrate, adopts magnetron sputtering method to be created on the carbonitride compound rete of this glass substrate single or double.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202514389U CN202107634U (en) | 2011-07-15 | 2011-07-15 | Glass substrate adopting membrane system structure and plated with membrane layer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202514389U CN202107634U (en) | 2011-07-15 | 2011-07-15 | Glass substrate adopting membrane system structure and plated with membrane layer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202107634U true CN202107634U (en) | 2012-01-11 |
Family
ID=45433077
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202514389U Expired - Fee Related CN202107634U (en) | 2011-07-15 | 2011-07-15 | Glass substrate adopting membrane system structure and plated with membrane layer |
Country Status (1)
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|---|---|
| CN (1) | CN202107634U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102351438A (en) * | 2011-07-15 | 2012-02-15 | 深圳市三鑫精美特玻璃有限公司 | Method for preparing membrane on glass substrate and glass substrate and membrane system structure |
| CN106698971A (en) * | 2016-12-19 | 2017-05-24 | 深圳市三鑫精美特玻璃有限公司 | Semi-transparent semi-reflection anti-scratch mirror glass and preparation technology |
| CN108726891A (en) * | 2018-08-17 | 2018-11-02 | 北京汉能光伏投资有限公司 | Low radiation coated glass and preparation method thereof |
| CN111164463A (en) * | 2017-07-31 | 2020-05-15 | 康宁股份有限公司 | Hard antireflective coatings |
| CN111362588A (en) * | 2018-12-25 | 2020-07-03 | 深圳市三鑫精美特玻璃有限公司 | AR glass with ultraviolet-proof function and production process thereof |
-
2011
- 2011-07-15 CN CN2011202514389U patent/CN202107634U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102351438A (en) * | 2011-07-15 | 2012-02-15 | 深圳市三鑫精美特玻璃有限公司 | Method for preparing membrane on glass substrate and glass substrate and membrane system structure |
| CN106698971A (en) * | 2016-12-19 | 2017-05-24 | 深圳市三鑫精美特玻璃有限公司 | Semi-transparent semi-reflection anti-scratch mirror glass and preparation technology |
| CN111164463A (en) * | 2017-07-31 | 2020-05-15 | 康宁股份有限公司 | Hard antireflective coatings |
| CN108726891A (en) * | 2018-08-17 | 2018-11-02 | 北京汉能光伏投资有限公司 | Low radiation coated glass and preparation method thereof |
| CN108726891B (en) * | 2018-08-17 | 2024-03-29 | 上海祖强能源有限公司 | Low-emissivity coated glass and preparation method thereof |
| CN111362588A (en) * | 2018-12-25 | 2020-07-03 | 深圳市三鑫精美特玻璃有限公司 | AR glass with ultraviolet-proof function and production process thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120111 Termination date: 20170715 |
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| CF01 | Termination of patent right due to non-payment of annual fee |