CN202078883U - Constant-flow-rate liquid feeding device in germane generating system - Google Patents
Constant-flow-rate liquid feeding device in germane generating system Download PDFInfo
- Publication number
- CN202078883U CN202078883U CN2011201635579U CN201120163557U CN202078883U CN 202078883 U CN202078883 U CN 202078883U CN 2011201635579 U CN2011201635579 U CN 2011201635579U CN 201120163557 U CN201120163557 U CN 201120163557U CN 202078883 U CN202078883 U CN 202078883U
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- germane
- feed liquid
- liquid
- pipe
- compensating groove
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Abstract
The utility model provides a constant-flow-rate liquid feeding device in a germane generating system. The feeding device consists of a burdening liquid storage tank, a pressure gauge, a stirrer, a balancing tank, a ball float valve, a metering pump, a ventilating pipe and liquid pipes. A burdening opening (9), the stirrer (10) and the pressure gauge (11) are arranged on the upper portion of the burdening liquid storage tank (1), the upper portion of the burdening liquid storage tank (1) is communicated with the balancing tank (2) via the ventilating pipe (5), the lower portion of the burdening liquid storage tank (1) is connected to the balancing tank (2) via one liquid pipe (8), the liquid pipe (8) is connected with the ball float valve (3) at a liquid outlet of the balancing tank (2), the bottom of the balancing tank (2) is connected to the metering pump (4) via the other liquid pipe, and liquid is outputted via the metering pump (4) and enters the germane generating system. Flow rate of the liquid supplied for the germane generating system is constant, stable germane production is guaranteed, and air cannot enter the germane generating system from the liquid feeding device to affect purity of germane.
Description
Technical field
The utility model relates to a kind of in producing the germane product, and germane generation systems constant flow rate drips the device of feed liquid.Belong to the special equipment field.
Background technology
Germane is a kind of important electron gas, is mainly used in chemical vapour deposition (CVD), is the important source material of making all kinds of germanic thin-film materials.
Germane has several class methods: germanium alloy and acid or ammoniacal liquor solution; The acidity of electrolysis germanium dioxide or the electrolysis of alkaline solution; The reducing process of the oxide of germanium salt or germanium, wherein reducing process mainly is that the mode of reactive liquid solution is carried out, this will negate should in feed liquid drip flow and need stablize steadily carry out so that germane reacts, obtain stable air-flow and be beneficial to purify and collect.
The utility model content
At the deficiencies in the prior art, the purpose of this utility model is providing a kind of device that drips feed liquid in germane is produced to germane generation systems constant flow rate, this device can make the feed liquid constant flow of supplying with generation systems, the gas flow that produces is steady, and can avoid air to enter the germane generation systems from reinforced liquid device.
Realize that the technical scheme that the utility model purpose is adopted is: a kind of germane generation systems constant flow rate drips the device of feed liquid, it is characterized in that: described feeding device is made up of batching fluid reservoir 1, agitator 10, Pressure gauge 11, compensating groove 2, measuring pump 4; Described batching fluid reservoir 1 top is provided with ingredients mouth 9, and described agitator 10 and Pressure gauge 11 are installed on the batching fluid reservoir 1, and described batching fluid reservoir 1 top is communicated with compensating groove 2 via breather pipe 5, and compensating groove 2 is received via feed liquid pipe 8 in the bottom; Measuring pump 4 is linked by feed liquid pipe 8 in compensating groove 2 bottoms, and feed liquid delivers into the germane generation systems by measuring pump 4.
Above-mentioned germane generation systems constant flow rate drips the device of feed liquid, and it is further characterized in that: described batching fluid reservoir 1 top also is provided with air inlet pipe 6 and escape pipe 7, and described feed liquid pipe 8 links to each other with ball-cock assembly 3 at compensating groove 2 liquid outlets; Described compensating groove 2 can be for a plurality of, and each compensating groove 2 all has supporting ball-cock assembly 3, feed liquid pipe 8, breather pipe 5 and measuring pump 4, and a plurality of compensating groove 2 shared batching fluid reservoirs 1 are many cover germane generation systems feed liquid.
The beneficial effects of the utility model are: supply with the feed liquid constant flow of germane generation systems, the gas flow of generation is steady, and what guaranteed to produce is stable, and has avoided air to enter the germane generation systems from reinforced liquid device influencing germane purity.This apparatus structure is simple, and is practical and convenient.
Description of drawings
Fig. 1 is the structural representation of the utility model feeding device.
Among the figure: 1, batching fluid reservoir, 2, compensating groove, 3, ball-cock assembly, 4, measuring pump, 5, breather pipe, 6, air inlet pipe, 7, escape pipe, 8, the feed liquid pipe, 9, ingredients mouth, 10, agitator, 11, Pressure gauge.
The specific embodiment
Below in conjunction with accompanying drawing of the present utility model, further describe its specific embodiment.
As shown in Figure 1, the feeding device of present embodiment is made up of batching fluid reservoir 1, Pressure gauge 11, agitator 10, compensating groove 2, ball-cock assembly 3, measuring pump 4, breather pipe 5, feed liquid pipe 8.Ingredients mouth 9, agitator 10 and Pressure gauge 11 are arranged at batching fluid reservoir 1 top, and are communicated with compensating groove 2 via breather pipe 5, and compensating groove 2 is received by feed liquid pipe 8 in the bottom; Feed liquid pipe 8 links to each other with ball-cock assembly 3 at compensating groove 2 liquid outlets; Measuring pump 4 is linked by feed liquid pipe 8 in compensating groove 2 bottoms, and feed liquid enters the germane generation systems by measuring pump 4 outputs.
During use, add needed raw material from ingredients mouth 9, seal charge door 9, turn on agitator 10 is joined refining liquid; Air inlet pipe 6 connects nitrogen, and escape pipe 7 connects vavuum pump, with keeping 0.02 ~ 0.05MPa malleation after the atmosphere in the nitrogen replaceable equipment; Make feed liquid flow into compensating groove 2, liquid level is opened measuring pump 4 and is mixed up flow by ball-cock assembly 3 controls, and feed liquid is with constant flow rate input germane generation systems.
Add the feed liquid process and under the controlled atmosphere protection, carry out all the time, thereby avoided air to enter the germane generation systems from reinforced liquid device.
This device can be many cover germane generation systems feed liquid by a plurality of compensating groove 2 shared batching fluid reservoirs 1 according to circumstances.
Though the invention with preferred embodiment openly as above; but embodiment and accompanying drawing are not to be used for limiting the invention; anyly be familiar with this skill person; in the spirit and scope that do not break away from the invention; can do various variations or retouching from working as, but same within the protection domain of the invention.Therefore the protection domain of the invention should with the application claim was defined is as the criterion.
Claims (3)
1. a germane generation systems constant flow rate drips the device of feed liquid, it is characterized in that: described feeding device is made up of batching fluid reservoir (1), agitator (10), Pressure gauge (11), compensating groove (2), measuring pump (4); Described batching fluid reservoir (1) top is provided with ingredients mouth (9), described agitator (10) and Pressure gauge (11) are installed on the batching fluid reservoir (1), described batching fluid reservoir (1) top is communicated with compensating groove (2) via breather pipe (5), and compensating groove (2) is received via feed liquid pipe (8) in the bottom; Measuring pump (4) is linked by feed liquid pipe (8) in compensating groove (2) bottom, and feed liquid delivers into the germane generation systems by measuring pump (4).
2. germane generation systems constant flow rate according to claim 1 drips the device of feed liquid, it is characterized in that: described batching fluid reservoir (1) top also is provided with air inlet pipe (6) and escape pipe (7), and described feed liquid pipe (8) links to each other with ball-cock assembly (3) at compensating groove (2) liquid outlet.
3. germane generation systems constant flow rate according to claim 2 drips the device of feed liquid, it is characterized in that: described compensating groove (2) is for a plurality of, each compensating groove (2) all has supporting ball-cock assembly (3), feed liquid pipe (8), breather pipe (5) and measuring pump (4), and the shared batching fluid reservoirs of a plurality of compensating grooves (2) (1) are many cover germane generation systems feed liquid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201635579U CN202078883U (en) | 2011-05-21 | 2011-05-21 | Constant-flow-rate liquid feeding device in germane generating system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201635579U CN202078883U (en) | 2011-05-21 | 2011-05-21 | Constant-flow-rate liquid feeding device in germane generating system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202078883U true CN202078883U (en) | 2011-12-21 |
Family
ID=45339540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011201635579U Expired - Fee Related CN202078883U (en) | 2011-05-21 | 2011-05-21 | Constant-flow-rate liquid feeding device in germane generating system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202078883U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106237932A (en) * | 2016-08-22 | 2016-12-21 | 金堆城钼业股份有限公司 | A kind of liquid preparation automatic adding device and control method |
-
2011
- 2011-05-21 CN CN2011201635579U patent/CN202078883U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106237932A (en) * | 2016-08-22 | 2016-12-21 | 金堆城钼业股份有限公司 | A kind of liquid preparation automatic adding device and control method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: NANJING CHINA GERMANIUM TECHNOLOGY CO., LTD. Free format text: FORMER NAME: NANJING GERMANIUM TECHNOLOGY CO., LTD. |
|
| CP01 | Change in the name or title of a patent holder |
Address after: 211165 general road, Jiangning Development Zone, Jiangsu, Nanjing, China, No. 718 Patentee after: CHINA GERMANIUM CO., LTD. Address before: 211165 general road, Jiangning Development Zone, Jiangsu, Nanjing, China, No. 718 Patentee before: Nanjing Germanium Technology Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111221 Termination date: 20170521 |