CN202049929U - Active jaw mechanism for clamping photomask - Google Patents
Active jaw mechanism for clamping photomask Download PDFInfo
- Publication number
- CN202049929U CN202049929U CN2011201719080U CN201120171908U CN202049929U CN 202049929 U CN202049929 U CN 202049929U CN 2011201719080 U CN2011201719080 U CN 2011201719080U CN 201120171908 U CN201120171908 U CN 201120171908U CN 202049929 U CN202049929 U CN 202049929U
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- CN
- China
- Prior art keywords
- active
- rotating disk
- photomask
- claw
- supporting base
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
The utility model relates to an active jaw mechanism for clamping a photomask. The active jaw mechanism comprises a supporting seat, a swing cylinder, an active jaw with a clamping port, an active shaft sleeve, an expansion sleeve and an active rotating disk, wherein the swing cylinder is arranged on the supporting seat; the active rotating disk is arranged on the supporting seat through the active shaft sleeve and is connected with a rotor of the swing cylinder; the active jaw is connected with the active rotating disk through the expansion sleeve; and the supporting seat or/and the swing cylinder is/are provided with an angle sensor for controlling swing angle. The active jaw mechanism has the characteristics of rational structure, convenience in mounting and debugging and capability of controlling turning angle of the photomask.
Description
Technical field
The utility model relates to a kind of active click-on mechanism of the photomask that is installed, and belongs to technical field of manufacturing semiconductors.
Background technology
" photomask " is to be used for the masterplate of printed circuit in batches in the integrated circuit (IC) chip manufacturing.By photoetching process, the circuit pattern on the photomask is printed onto on the Silicon Wafer in enormous quantities.Therefore any defective on the photomask all can cause very big influence to the rate of finished products of chip.
Advanced at present photomask cleaning is that photomask is placed in the flushed channel, cell body and outer cell body structure combining in flushed channel adopts, in the pallet of movable carriage is arranged in the cell body and form shallow slot structure, cell body was connected with bearing in the bracket of carriage passed, during cleaning, only need photomask is lain in the pallet, when in pallet is crimped on, being sealing condition on the cell body, make that photomask is horizontal to be immersed in the soup, to remove the photoresist on photomask surface, when on the carriage when mobile, the pallet and the interior cell body of carriage are broken away from, soup is discharged by the discharge opeing runner in the cell body outside interior cell body row puts, realize that by the nozzle that is arranged on outer cell body and the carriage spray towards clear, reaches the effect that photomask is cleaned.Disclose at present the device that some grasp photomask automatically, volume is bigger, can't carry out level and grasp, place and upset in rinse bath, and can not be applied to above-mentioned cleaning, as adopt artificial placement and pick up photomask, not only influence cleaning efficiency, and influence cleaning performance.
Summary of the invention
The purpose of this utility model provides a kind of rational in infrastructure, and Installation and Debugging are convenient, can control the active click-on mechanism of the photomask that is installed of photomask flip angle.
The utility model is that the technical scheme that reaches above-mentioned purpose is: a kind of active click-on mechanism of the photomask that is installed, it is characterized in that: comprise supporting base, oscillating cylinder, active claw with bayonet socket, driving axle housing and ringfeder and active rotating disk, oscillating cylinder is installed on the supporting base, initiatively rotating disk is installed on the supporting base and with the rotor of oscillating cylinder by driving axle housing and is connected, initiatively claw is connected with the active rotating disk by ringfeder, supporting base or/and be equipped with on the oscillating cylinder control pendulum angle angular transducer, or supporting base or/and be equipped with on the oscillating cylinder wobble detection angle near switch.
The utility model initiatively click-on mechanism adopts active pivoted housing and the initiatively rotating disk and initiatively claw that is installed on the supporting base, and the active claw is by on ringfeder and the active rotating disk, be connected with the rotor of oscillating cylinder by the active rotating disk, compact conformation is reasonable, Installation and Debugging are very convenient, and the active claw of changing different model is very convenient.The utility model at supporting base or/and oscillating cylinder be equipped with control pendulum angle angular transducer, by angular transducer control oscillating cylinder flip angle, control is convenient, improved the reliable and accuracy of placing and grasping photomask and photomask is overturn, realize the automatic card-loading photomask and improve photomask cleaning efficiency and cleaning performance, can satisfy the clamping and the upset requirement of different size photomask.
Description of drawings
Below in conjunction with accompanying drawing embodiment of the present utility model is described in further detail.
Fig. 1 is the initiatively structural representation of click-on mechanism of the utility model.
Fig. 2 is the initiatively blast structural representation of click-on mechanism of the utility model.
Fig. 3 is that the utility model active click-on mechanism is installed in the structural representation on the workbench.
Wherein: 1-claw, 1-1-bayonet socket, 2-overcoat, 3-connecting axle, the protruding axle of 3-1-, 4-ringfeder, 5-plane bearing, 6-driving axle housing, 7-is marked closely screw, the 8-spring, and the 9-ball, 10-connects dish, the 11-oscillating cylinder, the 12-angular transducer, 13-is rotating disk initiatively, the 14-oil groove, 15-jump ring, 16-supporting base, the passive click-on mechanism of 17-, 18-photomask, 19-workbench.
Embodiment
See shown in Fig. 1～3, the active click-on mechanism of the photomask that is installed of the present utility model, comprise supporting base 16, oscillating cylinder 11, have active claw, driving axle housing 6 and the ringfeder 4 of bayonet socket and rotating disk 13 initiatively, oscillating cylinder 11 is installed on the supporting base 16, and initiatively rotating disk 13 is installed on the supporting base 16 and with the rotor of oscillating cylinder 11 by driving axle housing 6 and is connected.Initiatively click-on mechanism is installed on the workbench 19 and the diagonal angle setting with passive click-on mechanism 17, and supporting base 16 is installed on the supporting plate with slide block along mobile on the line slideway, promptly picks up photomask 18 or unclamps photomask 18 and be placed on the pallet.See shown in Fig. 1,2, the utility model driving axle housing 6 is T-shaped, the T shape end of driving axle housing 6 is connected with supporting base 16 by securing member, the other end is spacing by the jump ring 15 that is installed on the active rotating disk 13, initiatively rotating disk 13 is connected with the rotor of oscillating cylinder 11 by connecing dish 10, initiatively rotating disk 13 coils 10 and can adopt key to be connected with connecing, or adopt plug-in to connect, plane bearing 5 is arranged in the bearing pedestal of rotating disk 13 initiatively and withstands on the T shape end face of driving axle housing 6, initiatively rotating disk 13 or driving axle housing 6 are provided with oil groove 14, so can make initiatively rotating disk 13 stability of rotation, flexible.See shown in Figure 1, the utility model initiatively is provided with two location holes on the rotating disk 13 at least, driving axle housing 6 is provided with ball hole, the screw 7 of marking closely that is installed on the supporting base 16 withstands in the location notch of active rotating disk 13 by the ball 9 that spring 8 will be arranged on the driving axle housing 6, after oscillating cylinder 11 drive active rotating disks 13 are turned to required angle, by 9 pairs of initiatively rotating disk 13 lockings of ball, and improve the accuracy of operation.
See Fig. 1, shown in 2, active claw of the present utility model is connected with active rotating disk 13 by ringfeder 4, so have the characteristics easily of debugging, initiatively claw is made of connecting axle 3 and claw 1, claw 1 is provided with bayonet socket 1-1, bayonet socket 1-1 on the claw 1 adopts V-shaped groove or U-lag, convenient card is connected on the photomask 18, claw 1 is connected with connecting axle 3 by securing member, and the protruding axle 3-1 of connecting axle 3 inboards is connected with ringfeder 4, and initiatively rotating disk 13 is provided with screw, dog screw is installed on the active rotating disk 13 and withstands on the ringfeder 4, ringfeder 4 reliably is connected with connecting axle 3, and claw rotates to drive initiatively, and the outside has the overcoat 2 of slot and is sleeved on connecting axle 3 and the claw 1.
See shown in Fig. 1,2, supporting base 16 of the present utility model is or/and be equipped with the angular transducer 12 of wobble detection angle on the oscillating cylinder 11, or supporting base 16 or/and be equipped with on the oscillating cylinder 11 the wobble detection angle near switch, the pendulum angle of the rotor by angular transducer 12 wobble detection cylinders 11, satisfy the upset requirement of photomask 18, angular transducer 12 of the present utility model can adopt angular displacement sensor etc.
See shown in Fig. 1,3, during the utility model work, initiatively click-on mechanism and passive click-on mechanism move to the photomask direction under the drive of supporting plate, make claw 1 and passive claw catch photomask 18, driving jaws 1 by the oscillating cylinder on the active click-on mechanism 11 again rotates, passive claw rotates with jaw 1 simultaneously, detects claw 1 up to angular transducer 12 and is turned to required angle.After claw 1 upset put in place, angular transducer 12 sends signal made swing gas stop upset, and overturn when not putting in place when claw initiatively, and angular transducer 12 does not send signal and the flip angle that continues to overturn up to being controlled sends signal.
Claims (5)
1. the active click-on mechanism of the photomask that is installed, it is characterized in that: comprise supporting base (16), oscillating cylinder (11), active claw with bayonet socket, driving axle housing (6) and ringfeder (4) and active rotating disk (13), oscillating cylinder (11) is installed on the supporting base (16), active rotating disk (13) is installed in supporting base (16) by driving axle housing (6) and upward and with the rotor of oscillating cylinder (11) is connected, initiatively claw is connected with active rotating disk (13) by ringfeder (4), supporting base (16) is or/and be equipped with the angular transducer (12) of wobble detection angle on the oscillating cylinder (11), or supporting base (16) or/and be equipped with on the oscillating cylinder (11) the wobble detection angle near switch.
2. the active click-on mechanism of the photomask that is installed according to claim 1, it is characterized in that: described driving axle housing (6) is T-shaped, the T shape end of driving axle housing (6) is connected with supporting base (16) by securing member, the other end is spacing by the jump ring (15) that is installed on the active rotating disk (13), initiatively rotating disk (13) is connected with the rotor of oscillating cylinder (11) by connecing dish (10), plane bearing (5) is arranged in the bearing pedestal of rotating disk (13) initiatively and withstands on the T shape end face of driving axle housing (6), and initiatively rotating disk (13) or driving axle housing (6) are provided with oil groove (14).
3. the active click-on mechanism of the photomask that is installed according to claim 1, it is characterized in that: described active claw is made of connecting axle (3) and claw (1), claw (1) is provided with bayonet socket (1-1), claw (1) is connected with connecting axle (3) by securing member, the inboard protruding axle (3-1) of connecting axle (3) is connected with ringfeder (4), and the overcoat (2) that the outside has slot is sleeved on connecting axle (3) and the claw (1).
4. the active click-on mechanism of the photomask that is installed according to claim 1, it is characterized in that: be provided with two location holes on the described active rotating disk (13) at least, driving axle housing (6) is provided with ball hole, and the screw (7) of marking closely that is installed on the supporting base (16) withstands in the location notch of active rotating disk (13) by the ball (9) that spring (8) will be arranged on the driving axle housing (6).
5. the active click-on mechanism of the photomask that is installed according to claim 1 is characterized in that: described active rotating disk (13) is provided with screw, and dog screw is installed in active rotating disk (13) and goes up and withstand on the ringfeder (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201719080U CN202049929U (en) | 2011-05-26 | 2011-05-26 | Active jaw mechanism for clamping photomask |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201719080U CN202049929U (en) | 2011-05-26 | 2011-05-26 | Active jaw mechanism for clamping photomask |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202049929U true CN202049929U (en) | 2011-11-23 |
Family
ID=44990228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011201719080U Expired - Lifetime CN202049929U (en) | 2011-05-26 | 2011-05-26 | Active jaw mechanism for clamping photomask |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202049929U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102582879A (en) * | 2011-11-30 | 2012-07-18 | 郑州市彦峰塑料包装有限公司 | Semi-automatic sealing machine |
| CN105717751A (en) * | 2014-12-04 | 2016-06-29 | 上海微电子装备有限公司 | Mask loading device and calibration method thereof |
-
2011
- 2011-05-26 CN CN2011201719080U patent/CN202049929U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102582879A (en) * | 2011-11-30 | 2012-07-18 | 郑州市彦峰塑料包装有限公司 | Semi-automatic sealing machine |
| CN105717751A (en) * | 2014-12-04 | 2016-06-29 | 上海微电子装备有限公司 | Mask loading device and calibration method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP02 | Change in the address of a patent holder |
Address after: 213022, Changzhou, Jiangsu province north of the Yangtze River North Road No. three building No. 25, West first floor Patentee after: Changzhou Ruize Microelectronics Technology Co., Ltd. Address before: 213022, No. 25 middle Yangtze Road, Xinbei District, Jiangsu, Changzhou 3-318 Patentee before: Changzhou Ruize Microelectronics Technology Co., Ltd. |
|
| CP02 | Change in the address of a patent holder | ||
| CX01 | Expiry of patent term |
Granted publication date: 20111123 |
|
| CX01 | Expiry of patent term |