CN201962335U - Electron beam smelting furnace - Google Patents
Electron beam smelting furnace Download PDFInfo
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- CN201962335U CN201962335U CN2010206867046U CN201020686704U CN201962335U CN 201962335 U CN201962335 U CN 201962335U CN 2010206867046 U CN2010206867046 U CN 2010206867046U CN 201020686704 U CN201020686704 U CN 201020686704U CN 201962335 U CN201962335 U CN 201962335U
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Abstract
The utility model discloses an electron beam smelting furnace, which comprises a furnace body with a feeding port and a discharging port, a feeding mechanism is arranged on one side of the furnace body, and a horizontal crucible and an ingot casting crucible are sequentially arranged in the furnace body from front to back. The horizontal crucible is arranged at the feeding port, the ingot casting crucible is arranged closely behind the horizontal crucible and lower than the horizontal crucible, and electron guns are respectively fixed above the horizontal crucible and the ingot casting crucible. The smelting furnace also comprises a motor driving system for feeding, smelting and discharging of materials, and an ingot-puller mechanism bears the ingot casting and controls the ascending and descending of the ingot casting. The electro beam smelting furnace is provided with a vacuum system, an electric control cabinet and an observation window. The feeding mechanism is either a monolithic material feeding device or a bulk material feeding device, and at least two high-power electro guns are respectively fixed above the horizontal crucible and the ingot casting crucible. The smelting furnace is suitable for various refractory metals, alloys, compound of the alloys and composite materials, especially polycrystalline silicon.
Description
Technical field
The utility model relates to a kind of electron beam melting furnace.
Background technology
The expansion with Application Areas of developing rapidly along with China's advanced manufacturing industry, demand to high pure metal and alloy is more and more, conventional smelting process has been difficult to meet the demands, and the vacuum electron beam melting is a kind of effective method of purification, and is particularly more effective for the metal and the alloy that have under smelting temperature than low-steam pressure.
High-tech development has proposed new requirement to the performance of material, and the discovery of the new function of material and use and to promote high-tech development, therefore, has just become one of main research object of Materials science as the metal of material foundation.But, the announcement of metal person's character feature and often use since wherein the existence of impurity be affected, have only and metal is carried out deep purifying purify, could further disclose its intrinsic propesties originally, thereby find its new function and open up new application.Raw-material high-purity changing into to developing the key components of high-performance advanced material of future generation, electron beam melting furnace is the essential equipment of melting and purification refractory metal.
Electron beam technology is a kind of high energy beam current processing technology of noncontact processing.It utilizes through high tension electrostatic field and electromagnetic field and quickens to flow as thermal source with the high-energy electron of assembling, and workpiece or material are implemented various special processing.Because it has that energy density is high, thermo-efficiency is high, accurate easily control and characteristics such as multi-functional, obtained using widely at the industry-by-industry of industrial circle, be one of indispensable physical process means of development in Hi-Tech.
Electron beam melting is to utilize the electron beam of high-energy-density to produce high temperature when the bombardment metal to make melting of metal.Because this process is to carry out in a vacuum, and the time that material is in molten state can control on demand, therefore can obtain refining effect preferably, obtain highly purified material easily.This is the important feature that electron beam melting is better than other vacuum melting.
Electron beam melting furnace is the specific equipment of high temperature refractory melting and purification.Electron beam melting is carried out under high vacuum, the temperature of superheat height during melting, and the time of keeping liquid state is long, makes the refining purification effect of material be able to carry out fully effectively.During electron beam melting, material mainly outgases, the volatilization of decomposition, deoxidation, metallic impurity and the come-up etc. of molten impurity not.Wherein, molten impurity floats and is enriched in the ingot casting top, can remove when crop.
Mostly the feeding unit of existing electron beam melting furnace is to design at the material of carrying bar, plate etc. than moulding, generally moves transmission with the feeding chassis, by trailer wagon charged bin is pushed in the stove.When needs are carried bulk cargo, then can't realize carrying, so the design of the feeding unit of bulk cargo effectively raises production efficiency, saved cost.
Electron beam gun is as the core component of electron beam melting furnace, and the quality of its performance directly affects the quality of electron beam melting furnace performance.In addition, to a certain extent, the size decision of the power of electron beam gun is in the size of electron beam melting furnace power, but the development of electron beam gun is along with the increase gradually of power, various melting technologies also require more and more harsher to every function of electron beam gun, for example: the length of deflection angle, spot size, electron beam and scanning geomery etc. has proposed requirements at the higher level, so its corresponding development difficulty also correspondingly increases greatly.
At first, electron beam gun produce electron beam generation systems--the structure of-rifle core directly influences the track of performance, emissive power and the electron beam of an electron beam gun, and then have influence on the performance of whole electron beam gun.Therefore, can think in some sense: the rifle core is the core component of electron beam gun (particularly great-power electronic rifle).The rifle core of electron beam gun is worked under vacuum, high temperature and high pressure (several ten thousand volts of voltages) state, so can the electron beam gun that whether rationally directly determining of the design of rifle cored structure works better use.Especially powerful electron beam gun is in working order the time, the cathod system part temperatures of its rifle head is all very high, if structure have slightly unreasonable then can cause loose contact between the gas leakage of frequent electrion, electron beam gun rifle core, the component and open circuit, component distortion and sintering wait a series of serious consequences together, causes electron beam gun to use.Therefore have only the structure of the related components by changing the rifle core to remedy high-power rifle core design and use in the difficulty that run into.
Increase along with electron beam gun power, the volume of the deflection scanning device in the electron beam gun light path system also becomes increasing, because the deflection scanning device is seated on the electron beam gun gun platform, thereby cause the base of electron beam gun bigger, thereby the flange diameter of electron beam melting furnace that electron beam gun is installed accordingly is bigger.But in view of the current client request electron beam melting furnace will have the powerful requirement of several megawatts, existing one can not reach requirement to the power of electron beam gun far away, so can only on a body of heater a plurality of electron beam gun be housed.But then, based on the requirement of production technique, the distance between the electron beam gun again can not be too big.Therefore, along with the increasing of power just produced rifle body base too big with the rifle body between apart from the contradiction between too little, furtherly, to satisfy that actual engineering uses be a problem that needs to be resolved hurrily to the structure that just how to reduce the deflection scanning device to reach the purpose that reduces rifle body base diameter.
Electron beam gun is the very equipment of " fragile ", requires its inner component very clean, otherwise the generation of phenomenons such as the sparking of can discharging.When the electron beam melting furnace vacuum breaker, if the vacuum chamber of electron beam gun can not airtight protection, it is indoor to make many dusts in the stove be flushed to rifle, and particularly the rifle core is indoor.
The utility model content
The purpose of this utility model provides a kind of high performance electronic bundle smelting furnace.
For achieving the above object, the utility model is taked following design:
A kind of electron beam melting furnace comprises that one has the body of heater of opening for feed and discharge port, and a side of body of heater is established feed mechanism, is equipped with horizontal crucible, ingot casting crucible in the body of heater from front to back successively; Described horizontal crucible places the opening for feed place, and after the adjacent horizontal crucible of ingot casting crucible and position is lower than horizontal crucible; Above horizontal crucible and ingot casting crucible, all be fixed with electron beam gun; Comprise that also one is used to finish the motor driving system of feeding, melting and discharging whole process, the dragging ingot mechanism carrying ingot casting and control its lifting of this dragging system; This electron beam melting furnace is furnished with vacuum system and electrical control cubicles and viewing window; Described feed mechanism is at least a kind of in material all in one piece feeding unit and the bulk cargo feeding unit; Horizontal crucible and ingot casting crucible top are fixed with a great-power electronic rifle at least.
Described bulk cargo feeding unit can be bulk or particulate state bulk cargo feed drum structure.Wherein, described feed drum structure comprises opening for feed on one, the major ingredient tube of discharge port is arranged down, and the lower opening below of this major ingredient tube is provided with a funnel, and the lower opening of funnel is connected to a chute; This funnel and chute all are located in the tightness system, and the sealing device has gas port, and have a control open-and-close mechanism; Have the pipeline that is used to vacuumize at major ingredient tube side.
Described control open-and-close mechanism is pneumatic cylinder or hydraulic cylinder device; Be provided with the barrel liner in the described barrel; But described major ingredient tube is provided with the sealing cover of folding.
The rifle core of described great-power electronic rifle is high-power rifle core, and the filament of rifle core is peripherally equipped with the inner cover that is used for the bombarding current pack; The coil chamber of placing first magnetic lens is equipped with in the magnetic lens of configuration at least two groups coupling and block the hole in the light path system of electron beam between anode seat and rifle chamber doffing, what the band water-cooled was housed between rifle chamber doffing and base blocks the hole seat, is equipped with on it and blocks the hole; Deflection and sweep coil are housed on the base of rifle, are the coil of second magnetic lens on deflection and sweep coil; Dispose an air-cooled cooling unit, be added with a rifle cover in the outside of rifle core, a blower fan is installed on the rifle cover, utilize described safety screen, one group of ventilating duct to reach the cover member that outside cathode assembly, is equipped with and around rifle core body, enclose the structure cooling air duct jointly.
The core structure of the deflection scanning coil of described electron beam gun can be circular.
The valve of the rifle chamber of described great-power electronic rifle can adopt the push-pull valve that has water-cooling structure.
Described electron beam gun rifle core has heat-sink unit, this heat-sink unit upper and lower radiator can be radial web pattern; In the junction of electron beam gun rifle core and filament fixed block, available screw compresses filament by a middle pressing plate; It is good that the longitudinal wall profile of electron beam gun rifle core porcelain seat is designed to the undulate structure.
Described dragging system adopts at least a in fully automatic operation and the manual control mode.
Describedly drag ingot mechanism to adopt frequency modulation motor to control it to drag ingot speed.
The utility model electron beam melting furnace is applicable to various refractory metals, alloy and its compound and matrix material, especially polysilicon.
The utility model has the advantages that:
1. be equipped with two kinds of feeding manners, make that quality, size and the shape range of choice of supplied materials are big;
2. even carry bulk cargo, utilize the new bulk cargo feeding unit that is equipped with, can accomplish that charging is even, working stability.
3. the great-power electronic rifle of Pei Beiing can produce the steady operation power of 800KW, can satisfy the melting of various refractory metals, alloy and its compound and matrix material.
4. added the push-pull valve that performance is more stable in electron beam gun rifle chamber, made electron beam gun under situation about working long hours, it is very clean that rifle core chamber keeps, thereby reduced electrion.
5. smelting temperature and speed can be controlled flexibly; The quality product height, non-environmental-pollution; The energy utilization efficiency height, 20% the power loss of only having an appointment.
Description of drawings
Fig. 1 is the utility model electron beam melting furnace structure one preferred embodiment synoptic diagram (master analyses and observe).
Fig. 2 is a structural representation embodiment illustrated in fig. 1 (overlooking).
Fig. 3 is another example structure synoptic diagram of the utility model electron beam melting furnace (master analyses and observe).
Fig. 4 is a structural representation embodiment illustrated in fig. 3 (overlooking).
Fig. 5 is the another example structure synoptic diagram of the utility model electron beam melting furnace (master analyses and observe).
Fig. 6 is a structural representation embodiment illustrated in fig. 5 (overlooking).
Fig. 7 is the bulk cargo feeding unit structural representation of the utility model electron beam melting furnace.
Fig. 8 is the great-power electronic rifle structural representation of the utility model electron beam melting furnace.
Fig. 9 is the electron beam gun rifle cored structure synoptic diagram of the utility model great-power electronic rifle.
Figure 10 is the last radiator structure synoptic diagram of the utility model electron beam gun rifle core.
Figure 11 is the push-pull valve unit principle of compositionality figure of the utility model great-power electronic rifle.
Figure 12 is the deflection scanning core structure synoptic diagram of prior art electron beam gun.
Below in conjunction with drawings and the specific embodiments the utility model is described in further details.
Embodiment
Consult Fig. 1～shown in Figure 6, the utility model electron beam melting furnace comprises that one has the body of heater 1 of opening for feed and discharge port, one side of body of heater is established feed mechanism 3(Fig. 1 and is shown a preferred embodiment, and feed mechanism is provided with material all in one piece feeding unit 3 and bulk cargo feeding unit 3 ' simultaneously; The feed mechanism of Fig. 3 embodiment only is provided with; Bulk cargo feeding unit 3 '; The feed mechanism of Fig. 5 embodiment only is provided with material all in one piece feeding unit 3), be equipped with horizontal crucible 4, ingot casting crucible 5 in the body of heater from front to back successively; Described horizontal crucible places the opening for feed place, and after the ingot casting crucible 5 adjacent horizontal crucibles 4 and position is lower than horizontal crucible; Above horizontal crucible and ingot casting crucible, all be fixed with two electron beam gun 2; Comprise that also one is used to finish the motor driving system of feeding, melting and discharging whole process, the ingot mechanism 6 of dragging of this dragging system carries ingot castings and controls its lifting; This electron beam melting furnace is furnished with vacuum system 8 and electrical control cubicles 9 and viewing window 7; Chief creating point of the present utility model is: described feed mechanism is at least a kind of in material all in one piece feeding unit and the bulk cargo feeding unit; Horizontal crucible and ingot casting crucible top all are fixed with two great-power electronic rifles.
Described oven body part is band water jacket horizontal circular or square cavity, and both sides are movable fire doors, body of heater respectively with electron beam gun 2, vacuum system 8, feeding unit 3, cold-crucible 4, drag ingot device 6 to link to each other with viewing window 7.
Described material all in one piece feeding unit 3 can be realized bar, plate, strip raw material and larger-size out-of-shape material feeding, is the general a kind of feeding manners of now most of smelting furnaces, does not give unnecessary details herein.This material all in one piece feeding unit comprises box for feeding odd and pay-off, and the melting material is constantly moved forward, to guarantee raw material pointwise fusing.
Referring to Fig. 7, described bulk cargo feeding unit can be the feed drum structure, comprises the major ingredient tube 2 that opening for feed is arranged on, discharge port is arranged down, and the lower opening below of this major ingredient tube 2 is provided with a funnel 6, and the lower opening of funnel is connected to a chute 11; This funnel 6 and chute 11 all are located in the body of heater; 6 in barrel 2 and funnel have valve system 7, use bearing fixing, have a control open-and-close mechanism, and are provided with tightness system 3.But on described major ingredient tube, be provided with the sealing cover 1 of folding.Barrel 2 can be a doline as shown in Figure 1.Described barrel planted agent is provided with barrel liner 5, as the protective layer of barrel, avoids silicon directly to contact with barrel, and all the other material compositions are brought in the silicon.One side of described barrel 2 is provided with pipeline 4, is used to vacuumize, and guarantees normal work climate.Described control open-and-close mechanism can be pneumatic cylinder or hydraulic cylinder device.Control open-and-close mechanism shown in the present embodiment is a Pneumatic cylinder device, connects cylinder connection piece 10 by connecting rod 9, in order to the control folding, can realize manually and control automatically.The chute 11 that connects under the funnel can be circular or square, rectangle or the like, with circle is good, to avoid dead angle and corner angle the situation that youngster stops up to occur, or seal or do not seal, be fixed on the body of heater by clamp 12, the chute adjustable angle is adjusted the chute angle as required, guarantees that bulk cargo can fall into crucible smoothly.Bulk cargo feeding unit of the present utility model makes block and feed particulate material is progressively fallen in the horizontal crucible by the funnel type device and melted, and realizes its semicontinuous charging, and easy to operate, charging is even, working stability.
Electron beam gun mainly by auxiliary cathode, cathode block, accelerating anode, rifle chamber, block parts such as orifice plate, magnetic focusing lens, slide valve, magnetic scanning lens and form.The power of the electron beam gun that the utility model is selected for use can be adjusted by the power of adjusting high-voltage power supply as required.Electron beam is under vacuum condition, and the negative electrode of electron beam gun is heated the back and produces the thermoelectron effusion.Under the effect of acceleration voltage (greater than 20kV), thermoelectron anode (zero potential) accelerated motion.Because the effect of bunching electrode, electron beam passes through from the anodic centre hole, continues motion downwards, through the repeatedly focusing of magnetic focusing lens and the adjusting of magnetic scanning lens, make electron beam accurately and the surface of fuel rod is bombarded in the concentrated area, make kinetic energy change heat energy into, for melting provides thermal source.
Fig. 8 shows the structure of the great-power electronic rifle of the utility model electron beam melting furnace employing, the great-power electronic rifle of its maximum stable operating power 800kw, major parts has electron beam gun rifle core 4, anode 7, first magnetic lens 9, push-pull valve 12, argon gas delivery system 13, blocks hole 15, second magnetic lens 17 and deflection scanning lens 18, and it installs at rifle chamber top cylinder 5, anode seat 8, first magnetic lens cover 10 respectively, blocks on hole seat 16, the rifle body base 19.Be equipped with in the described rifle core 4 and high-power cathode block that is complementary of 800kw and bunching electrode; The anode 7 that is complementary with the high-power rifle core of 800kw is installed on the anode seat 8; In order to satisfy the requirement of great-power electronic rifle vacuum pressure reduction, in the light path system of electron beam, disposed two with the high-power magnetic lens that is complementary 9 of 800kw and 15 and block hole 13; Single in order to satisfy simultaneously in addition the integrally-built needs of high-power and electron beam melting furnace of electron beam gun 800kw; the deflection scanning structure has been carried out thorough change: rifle core 4 is installed on the top cylinder 5; rifle core cover 2 is housed on the electron beam gun core, and its main purpose is to carry out high-pressure security protection.Simultaneously a blower fan 1 that is used to cool off the rifle core is housed, to be used for guaranteeing the vacuum-sealing requirement of rifle core on the top of rifle core cover.The anode seat 8 of mounting strap water-cooled between the rifle chamber top cylinder and the first magnetic lens coil chamber; At described electron beam gun base 17, block hole seat 14, anode seat 8, rifle chamber top cylinder 5 and doffing 11 and parts such as hand hole 6 and viewing window 12 and be equipped with the water channel that passes through for water coolant, guaranteed the sealing property of each interface, and then the vacuum necessary environment is provided for every stable performance work of electron beam gun.
Realize the utility model 800kw(or superpower more) the great-power electronic rifle, top priority is to make its rifle core can launch powerful electron beam, by rigorous calculating l-G simulation test in large quantities and repeatedly after the demonstration, design according to the principle of work of electron beam gun electron emissive system (rifle core), focusing system, deflection scanning system and cooling system etc. electron beam gun, successfully be developed into can steady operation at the electron beam gun of 800kw power capability.Having satisfied does not domesticly have the great-power electronic rifle and influences national economy and the eager requirement of national defense construction.As shown in Figure 5, the rifle core of the utility model great-power electronic rifle is the electron emissive system that has been made of electron beam gun negative electrode 20, clamp ring 19, bunching electrode 21, inner cover 16, filament 18 and anode 22.Filament 18 forms a loop by related components such as filament fixed block 15 and two terminal stud 1A above the rifle core and 1B, negative electrode 20 is connected with nethermost terminal stud 1 by outer cover part, thereby make negative electrode 20 and filament 18 form secondary high tension loop, anode 22 is connected with the earth, and itself and negative electrode 20 form main high tension loop.The periphery of part that is connected with filament 18 is equipped with radiator 7, at last radiator 7 ventilating duct 6 is housed; The periphery of part that is connected with negative electrode 20 is equipped with down radiator 11, on the radiator 11 ventilating duct 10 down is being housed down.The important improvement point is: at the inner cover 16 that is used for the bombarding current pack that is peripherally equipped with of filament, prolonged the work-ing life of filament, improved the service efficiency of electron beam melting furnace.The principle of design of general cathodes heated indirectly by an el utilization is: when the rifle core was worked, the electronics that overflow on the filament surface flew to negative electrode 20 under the effect of secondary high tension electrostatic field, form anticathode electron-bombardment, thereby finished anticathode heating function.But the phenomenon that then can occur dispersing in the process of electronics this range transmission between filament and negative electrode, thereby a part of electron-bombardment that causes filament emission is outside negative electrode 20, this phenomenon has caused the idle work of rifle core to increase on the one hand, the temperature of rifle core raises, and then the sealing of rifle core had higher requirement, otherwise cause rifle core (particularly great-power electronic rifle rifle core) gas leakage not work when serious; Caused the power that bombards on the negative electrode not enough on the other hand, caused the cathode temperature of rifle core lower, can not reach the temperature requirement that electronics overflows from cathode surface, thereby can't draw electron beam; Last aspect is: the temperature that has improved filament in order to solve the problem of can not drawing electron beam, but along with the raising of filament temperature, then obviously descend the work-ing life of filament, thus frequent replacing filament has caused the working efficiency of electron beam melting furnace to reduce.Added that in the periphery of filament the use properties of electron beam gun rifle core is improved greatly after the inner cover 16, because inner cover 16 and filament are on same potential, fly to from filament the process of negative electrode at electronics, 16 bunching actions of playing bombarding current of inner cover, thus avoided the generation of above-mentioned phenomenon.It is simple in structure, but effect is obvious.Another important improvement point is: the structure of filament fixed block 15 and the fixed form of filament are improved.The filament mode of being fixed and clamped that is adopted before not improving is to adopt a screw directly to compress filament, adopt this mode to make filament when being fixed and clamped, be in " stress " state, when electron beam gun is worked, the filament fixed block of filament and anchored filament all can be under the high temperature (more than 2000 ℃), in hot operation, filament is torsional deformation then, causes bombarding current undesirable, and burn-out life is short.Now by on the basis of original structure, adding a pressing plate, thereby make filament be in " state of nature " when screw is rotated tightening, be not subjected to stress, improved the work-ing life of filament greatly, improved the working efficiency of electron beam melting furnace accordingly, and the power of the bombarding cathode piece that is consumed when producing the electron beam of same watt level reduces greatly, thereby makes the sealing effectiveness of rifle core better.Important improvement point is again: the cooling structure to electron beam gun rifle core improves.The wind direction of blower fan as shown in Figure 5, along the rifle wire mandrel rifle core is dried from top to bottom, at first through having the heating panel 2 of mesh, most of afterwards air communication cross ventilating duct 4(its mainly act on be make flowing air as much as possible at the rifle core body the air channel or the slit in pass, can under the onesize situation of power of fan, realize better cooling performance like this) enter radiator 7, last radiator 7 is disc shape shape and structures, as shown in Figure 6, air-flow flows through between per two disc, and the outermost cylinder of disc has played the effect of ventilating duct.Air-flow from radiator 7 enter ventilating duct 10 and radiator 11 down down after coming out again, same, the structure of following radiator 11 also can be designed to same structure formation with last radiator 7, is the structure of a disc shape shape.Air communication has played good cooling effect to the rifle core after crossing two groups of ventilating ducts and radiator, has satisfied the cooling requirement of great-power electronic rifle rifle core, has solved the not good drawback of air cooling effect, has more avoided many defectives of water-cooled.The another improvement of the utility model electron beam gun rifle core is: by being the porcelain seat to rifle core print seat 12() improvement of structure is improved the insulation level of rifle core.Increasing along with electron beam gun power, the voltage of main high-voltage power supply also improves accordingly, correspondingly the insulation level of electron beam gun rifle core is also had higher requirement, this rifle core makes the edge of rifle core print seat adopt wavy shaped configuration, insulated lengths has extended, thereby make insulation level improve the electrion phenomenon when having avoided high power work.
At the needs of 800kw great-power electronic rifle, designed argon gas control focusing system in addition.In general, at the power of electron beam gun hour, the electric current of electron beam is less, thereby the diameter in each cross section of corresponding electron beam is also less, but along with the increase of power, promptly the diameter of electron beam become increasing, thereby the focusing quality of electron beam also becomes worse and worse, to such an extent as to make electron beam impact anode and block other places that should not arrive such as hole, cause electron beam gun to damage, and then can't work.At this problem, by being fed micro-argon gas, the electron beam gun vacuum chamber changes its vacuum tightness, and its vacuum tightness is remained in the stable range reach best with focusing effect, guarantee that the emission of electron beam focuses on; In the inner acquisition 1 * 10 of body of heater
-3Pa vacuum tightness prevents burning, impels impurity evaporation.
Therefore, the utility model has added argon gas conveying closed loop control system on the powerful electron beam gun of 800kw, its principle is: vacuumometer is the detected data in rifle chamber are sent to industrial computer, industrial computer is handled data, when the difference of the value of rifle chamber vacuum tightness and setting reaches certain degree, industrial computer is sent instruction needle-valve is moved, and then the vacuum tightness of change rifle chamber, form a closed loop automatic control system, the vacuum tightness of electron beam gun vacuum chamber is maintained about a certain numerical value, and then make beam diameter become less relatively.This phenomenon shows in the electron beam furnace smelt stage, do not need to open the argon gas needle-valve when furnace chamber pressure is higher, only more just need to open needle-valve, make the suitable reduction of the vacuum tightness of rifle chamber to realize the preferable focusing power of electron beam in the higher venting of the purity of furnace charge.The development of argon gas control focusing system has reached our re-set target, impacts the knotty problem of damaging electron beam gun on the light path system sidewall of rifle chamber to such an extent as to solved the great-power electronic rifle under the big situation of electron beam current.
Can thoroughly solve because of the electron beam gun base is big by change deflection scanning iron-core coil structure in addition and can't realize the less contradiction of distance between rifle and the rifle.Electron beam gun deflection scanning core structure originally as shown in Figure 8, increase along with electron beam gun power, the volume of the deflection scanning device in the electron beam gun light path system also becomes increasing, thereby cause the base of electron beam gun bigger, but in view of current client request will be equipped with many electron beam gun at an electron beam melting furnace, and based on the requirement of production technique, the distance between the electron beam gun again can not be too big.Therefore, along with the increasing of power just produced rifle body base too big with the rifle body between apart from the contradiction between too little.According to stationary magnetic field and time-varying magnetic field in iron core propagation law and to the reasonable simplification of structure, the structure of the deflection scanning iron core of electron beam gun has been carried out improving completely, last project organization is defined as the deflection scanning device of an annulus as iron core, it is simple in structure, easy to process, easy to loading and unloading, manufacturing cost reduces greatly, and most importantly its physical dimension reduced greatly than originally, so before having realized for the needs that satisfy smelting technology can't be implemented on the smelting furnace install many demand of great-power electronic rifle.
The valve of described great-power electronic rifle rifle chamber can adopt the push-pull valve of water-cooling structure.When electron beam melting furnace is purified to polysilicon, particularly when heat is big, can produce more dust and impurity, be flushed in the electron beam gun having a large amount of dusts when empty coming out of the stove brokenly, performance to electron beam gun causes very big negative impact, therefore, in electron beam gun, install push-pull valve additional and be very important, but present existing push-pull valve all can not satisfy requirement steady in a long-term.The utility model has designed a kind of push-pull valve that can use water-cooled and have automatic control, it utilizes lever and four-bar mechanism principle, outside vacuum, use cylinder that valve is opened and closed, as shown in Figure 7, design has guide path 121 on the valve plate of push-pull valve 12, the opening and closing that the piston rod 123 of cylinder is implemented valve through transmission rod 122, its simple in structure being easy to is realized.On valve body, be added with the red copper watercooling jacket, sealing-ring and valve body to valve have carried out cooling completely, thereby solved valve body in the pyritous working spaces internal strain of electron beam gun and the sealing-ring problems such as distortion that at high temperature follow the string, thereby can make the push-pull valve can long-term stable operation.
The utility model has also designed in addition: in the junction of electron beam gun rifle core and filament fixed block, available screw compresses filament by a middle pressing plate; The longitudinal wall profile undulate structure of electron beam gun rifle core porcelain seat porcelain seat (being gun platform) is good.
Controlling System of the present utility model can be made up of upper computer, large-scale touch-screen, PLC programmable logic controller, A/D interface, communication interface, transmitter, encoder etc., realizes the control to each system.
Described dragging system adopts at least a in fully automatic operation and the manual control mode.Describedly drag ingot mechanism to adopt frequency modulation motor to control it to drag ingot speed.Drag ingot mechanism to keep being rotated cooling molten bath, continuous drop-down ingot metal and molten bath by molten ingot metal and molten bath.Drag ingot mechanism to adopt and vertically drag spindle blade to drag ingot, drag spindle blade can rotate also and can level shift out, so that move to unloading station from the smelter position.Drag the ingot adjustable-speed, adopt frequency modulation motor control.
After referring to Fig. 1 the utility model melting material and horizontal crucible 4 being adjusted, sealing, bleed, check leak rate, logical water coolant, after body of heater 1 and rifle chamber 2 vacuumize and reach working order, the melting material is sent into the horizontal crucible of body of heater top by feed mechanism 3, the filament pre-heating degassing, after recovering vacuum tightness, horizontal valve between rifle chamber 2 and the body of heater 1 is opened, and the input high voltage direct current regulates focusing on and magnetic deflection field, make electron beam alignment charge bar and crucible, with ingot partial melting at the bottom of the crucible, behind the formation molten bath, can carry out melting, along with melt raw material constantly splashes into horizontal crucible 4, weld pool surface constantly rises, and drags ingot device 6 constantly to draw ingot simultaneously, makes weld pool surface keep liquid level certain.
The various embodiments described above can not break away under the scope of the present utility model in addition some variations, thus above explanation comprises and accompanying drawing shown in structure should be considered as exemplary, but not in order to limit the protection domain that the utility model is applied for a patent.
Claims (8)
1. an electron beam melting furnace comprises that one has the body of heater of opening for feed and discharge port, and a side of body of heater is established feed mechanism, is equipped with horizontal crucible, ingot casting crucible in the body of heater from front to back successively; Described horizontal crucible places the opening for feed place, and after the adjacent horizontal crucible of ingot casting crucible and position is lower than horizontal crucible; Above horizontal crucible and ingot casting crucible, all be fixed with electron beam gun; Comprise that also one is used to finish the motor driving system of feeding, melting and discharging whole process, the dragging ingot mechanism carrying ingot casting and control its lifting of this dragging system; This electron beam melting furnace is furnished with vacuum system and electrical control cubicles and viewing window; It is characterized in that:
Described feed mechanism is at least a kind of in material all in one piece feeding unit and the bulk cargo feeding unit;
The top of horizontal crucible and ingot casting crucible all is fixed with at least one the great-power electronic rifle.
2. electron beam melting furnace according to claim 1, it is characterized in that: described bulk cargo feeding unit is the feed drum structure, comprise the major ingredient tube that opening for feed is arranged on, discharge port is arranged down, the lower opening below of this major ingredient tube is provided with a funnel, and the lower opening of funnel is connected to a chute; This funnel and chute all are located in the body of heater; Be fixed with valve system between barrel and funnel, and have a control open-and-close mechanism, be provided with tightness system simultaneously; Have the pipeline that is used to vacuumize at major ingredient tube side.
3. electron beam melting furnace according to claim 2 is characterized in that: described control open-and-close mechanism is pneumatic cylinder or hydraulic cylinder device; Be provided with the barrel liner in the described barrel; But described major ingredient tube is provided with the sealing cover of folding.
4. electron beam melting furnace according to claim 1 is characterized in that: the rifle core of described great-power electronic rifle is high-power rifle core, and the filament of rifle core is peripherally equipped with the inner cover that is used for the bombarding current pack; The coil chamber of placing first magnetic lens is equipped with in the magnetic lens of configuration at least two groups coupling and block the hole in the light path system of electron beam between anode seat and rifle chamber doffing, what the band water-cooled was housed between rifle chamber doffing and base blocks the hole seat, is equipped with on it and blocks the hole; Deflection and sweep coil are housed on the base of rifle, are the coil of second magnetic lens on deflection and sweep coil; Dispose an air-cooled cooling unit, be added with a rifle cover in the outside of rifle core, a blower fan is installed on the rifle cover, utilize described safety screen, one group of ventilating duct to reach the cover member that outside cathode assembly, is equipped with and around rifle core body, enclose the structure cooling air duct jointly.
5. electron beam melting furnace according to claim 4 is characterized in that: the core structure of the deflection scanning coil of described electron beam gun is circular.
6. electron beam melting furnace according to claim 4 is characterized in that: the valve of described rifle chamber adopts the push-pull valve that has water-cooling structure.
7. electron beam melting furnace according to claim 4 is characterized in that: electron beam gun rifle core has heat-sink unit, and the upper and lower radiator of this heat-sink unit is radial web pattern; In the junction of electron beam gun rifle core and filament fixed block, compress filament by a middle pressing plate with screw; The longitudinal wall profile undulate structure of electron beam gun rifle core porcelain seat.
8. electron beam melting furnace according to claim 1 is characterized in that: described dragging system adopts at least a in fully automatic operation and the manual control mode.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2010206867046U CN201962335U (en) | 2010-12-29 | 2010-12-29 | Electron beam smelting furnace |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2010206867046U CN201962335U (en) | 2010-12-29 | 2010-12-29 | Electron beam smelting furnace |
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| CN201962335U true CN201962335U (en) | 2011-09-07 |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102564123A (en) * | 2010-12-29 | 2012-07-11 | 北京有色金属研究总院 | Electron beam smelting furnace |
| CN105755293A (en) * | 2014-12-18 | 2016-07-13 | 北京有色金属研究总院 | Vertical feeding system of vacuum electron-beam melting furnace |
| CN104862498B (en) * | 2015-06-08 | 2016-08-24 | 中冶建工集团有限公司 | Electron beam furnace installation engineering method |
| CN106231713A (en) * | 2016-08-27 | 2016-12-14 | 宝鸡众有色金属材料有限公司 | A kind of electronic gun for electron beam melting furnace room of applying argon gas |
| CN108941487A (en) * | 2018-06-20 | 2018-12-07 | 昆明理工大学 | A kind of electron-beam cold bed furnace water cooling Cu crystallizer and titanium alloy preparation method |
| CN111485115A (en) * | 2020-06-03 | 2020-08-04 | 云南钛业股份有限公司 | Method for controlling Al element volatilization by adjusting vacuum degree of electron beam cold hearth furnace |
-
2010
- 2010-12-29 CN CN2010206867046U patent/CN201962335U/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102564123A (en) * | 2010-12-29 | 2012-07-11 | 北京有色金属研究总院 | Electron beam smelting furnace |
| CN102564123B (en) * | 2010-12-29 | 2014-03-05 | 北京有色金属研究总院 | Electron beam smelting furnace |
| CN105755293A (en) * | 2014-12-18 | 2016-07-13 | 北京有色金属研究总院 | Vertical feeding system of vacuum electron-beam melting furnace |
| CN105755293B (en) * | 2014-12-18 | 2018-02-23 | 北京有色金属研究总院 | A kind of vertical feeding system of vacuum electron beam melting furnace |
| CN104862498B (en) * | 2015-06-08 | 2016-08-24 | 中冶建工集团有限公司 | Electron beam furnace installation engineering method |
| CN106231713A (en) * | 2016-08-27 | 2016-12-14 | 宝鸡众有色金属材料有限公司 | A kind of electronic gun for electron beam melting furnace room of applying argon gas |
| CN108941487A (en) * | 2018-06-20 | 2018-12-07 | 昆明理工大学 | A kind of electron-beam cold bed furnace water cooling Cu crystallizer and titanium alloy preparation method |
| CN111485115A (en) * | 2020-06-03 | 2020-08-04 | 云南钛业股份有限公司 | Method for controlling Al element volatilization by adjusting vacuum degree of electron beam cold hearth furnace |
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Effective date of registration: 20190624 Address after: 101407 No. 11 Xingke East Street, Yanqi Economic Development Zone, Huairou District, Beijing Patentee after: Research Institute of engineering and Technology Co., Ltd. Address before: No. 2, Xinjie street, Xicheng District, Beijing, Beijing Patentee before: General Research Institute for Nonferrous Metals |
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