CN201255574Y - Electronic beam smelting device - Google Patents

Electronic beam smelting device Download PDF

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Publication number
CN201255574Y
CN201255574Y CNU2008201093272U CN200820109327U CN201255574Y CN 201255574 Y CN201255574 Y CN 201255574Y CN U2008201093272 U CNU2008201093272 U CN U2008201093272U CN 200820109327 U CN200820109327 U CN 200820109327U CN 201255574 Y CN201255574 Y CN 201255574Y
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China
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water
hole
crucible
electron
vacuum chamber
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Expired - Lifetime
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CNU2008201093272U
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Chinese (zh)
Inventor
李合非
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Beihang University
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Beihang University
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Abstract

The utility model discloses an electron-beam melting system which comprises an electron-beam system (1), a vacuum system (2), a crucible (3), a power system (4) a cooling water system (5), a shielding gas source (6), a supporting machine frame (7), a rotating mechanism (8), a magnet liquid sealing member (9) and a hollowed water cooling mechanism (10). The electron gun (11) of the electron-beam system (1) is installed on the upper part (25) of a vacuum chamber (21) of the vacuum system (2). The magnet liquid sealing member (9) and a driven wheel (83) are installed between the lower part (24) of the vacuum chamber (21) of the vacuum system (2) and the upper part (71) of the supporting machine frame (7). The magnet liquid sealing member (9) is arranged above the driven wheel (83). The crucible (3) is arranged at the central position in the vacuum chamber (21). The bottom of the crucible (3) is connected with a sleeve (101) of the hollowed water cooling mechanism (10). The hollowed water cooling mechanism (10) and the rotating mechanism (8) are installed on the supporting machine frame (7).

Description

Electron-beam melting system
Technical field
The utility model relates to a kind of electron-beam melting system.
Background technology
Electronic torch melting (electron beam melting) is supplied with a kind of vacuum melting method that furnace charge melts by electron bombard with energy.The equipment that adopts electron beam to carry out melting is also referred to as electron-beam melting system, is to utilize the kinetic energy of high-velocity electrons to convert heat energy to, and then makes a kind of vacuum melting equipment of metal molten.
The major parameter of electronic torch melting has:
(1) vacuum, vacuum all has very big influence to the quality and the operation of melting product.At first the vacuum height is no matter from thermodynamics or dynamic (dynamical) angle, all favourable to removing impurity.
Vacuum also has influence on the emission of electron beam except that the purity that influences product, vacuum is lower than 10 -4Glow discharge then easily takes place and makes the device current overload in millimetres of mercury, makes melting to carry out.
(2) speed of melting, correct selection speed of melting is to improving the purity and the also very big meaning of productive rate of product.
Under the certain situation of melting power, change the time that melting speed means that the temperature that changes the molten bath and material at high temperature stop.Power one is regularly if speed of melting reduces, and the cold burden of fusing is few in the unit interval on the one hand, and more energy is used for the heating in molten bath, so the temperature in molten bath raises; On the other hand,, draw ingot speed also to reduce because of the speed of fusing reduces, thus material to be in time of melt state elongated, these two factors all help impurity and get rid of from melt.
Speed of melting also influences productive rate and power consumption except that influencing purity, speed is slow excessively, and then the evaporation of metals loss increases, and productive rate reduces, and power consumption increases.Generally discharge quantity is big when melting once, and speed of melting should be smaller, and is then fast during secondary smelting, in order further to obtain more highly purified ingot casting, then needs melting for the third time sometimes, and then speed more should be accelerated, with the ingot structure that guarantees to obtain meeting the requirements.
(3) melting power
During electronic torch melting, melting power also is one of important parameters; When speed of melting is certain, improve melting power, the temperature in molten bath is raise, help the removal of impurity; The consumption of the volatilization loss of metal and electric energy also increases but then, so that power should be suitable in the process is controlled.
At present, electron-beam melting system (referring to shown in Figure 5) includes electron beam system 1, vacuum system 2, crucible 3, power-supply system 4, cooling water system 5, protection source of the gas 6 at least.
Summary of the invention
The purpose of this utility model provides a kind of electron-beam melting system, this electron-beam melting system has overcome the simple function that existing electron-beam melting system only carries out alloy melting, by adding rotating mechanism and hollow water-cooled mechanism, not only realize the melting of alloy, also can carry out the preparation of alloy monocrystalline.This electron-beam melting system includes electron beam system (1), vacuum system (2), crucible (3), power-supply system (4), cooling water system (5), protection source of the gas (6), frames (7), rotating mechanism (8), magnetic liquid sealant (9) and hollow water-cooled mechanism (10);
The electron gun (11) of electron beam system (1) is installed on the top (25) of vacuum chamber (21) of vacuum system (2);
Between the bottom (24) of the vacuum chamber (21) of vacuum system (2) and the top (71) of frames (7) magnetic liquid sealant (9), driven pulley (83) are installed, magnetic liquid sealant (9) is in the top of driven pulley (83);
Crucible (3) places the center in the vacuum chamber (21), and the bottom of crucible (3) is connected with the sleeve (101) of hollow water-cooled mechanism (10); Crucible (3) adopts oxygenless copper material processing;
Hollow water-cooled mechanism (10), rotating mechanism (8) are installed on the frames (7);
The vacuum chamber (21) of vacuum system (2) is double-deck water-cooling structure, and internal layer (202) is a corrosion resistant plate, and outer (201) are carbon steel or corrosion resistant plate, is cooling water channel (203) between internal layer (202) and outer (201); The top (25) of vacuum chamber (21) is provided with safety valve (204), A through hole (205), and ring flange (207) is installed in the A through hole (205), and the sleeve of electron gun (11) is installed on the ring flange (207); The left end (26) of vacuum chamber (21) is provided with observation window (23); The right-hand member (27) of vacuum chamber (21) is provided with charging aperture (22); The bottom (24) of vacuum chamber (21) is provided with B through hole (206), and magnetic liquid sealant (9) is installed in the B through hole (206);
Crucible (3) is double-deck water-cooled trapezium structure; Be cooling-water duct (32) between crucible inwall (34) and the crucible outer wall (33); The bottom of crucible (3) is provided with joint (35), and the center of joint (35) is provided with C through hole (37), and C ball bearing (38) is installed in the C through hole (37), and C ball bearing (38) is socketed on the sleeve (101) of hollow water-cooled mechanism (10); Bottom, the molten chamber (31) of the crucible of crucible (3) is conical bottom (36);
Frames (7) is made of last strutbeam (71), following strutbeam (72), base (74), is provided with reinforcement (74) between last strutbeam (71) and the following strutbeam (72), and following strutbeam (72) is installed on the base (74); Last strutbeam (71) is provided with D through hole (711), E through hole (712), and A ball bearing (713) is installed in the D through hole (711), and E through hole (712) is used for the output of motor (81) and passes; A ball bearing (713) is socketed on the sleeve (101) of hollow water-cooled mechanism (10); Following strutbeam (72) is provided with F through hole (721), and B ball bearing (722) is installed in the F through hole (721);
Rotating mechanism (8) is made of motor (81), driving wheel (82), driven pulley (83) and belt (84), motor (81) is installed on the strutbeam (71), driving wheel (82) is socketed on the output shaft of motor (81), driven pulley (83) is installed on the sleeve (101) of hollow water-cooled mechanism (10), and driving wheel (82), driven pulley (83) connect by belt (84);
Magnetic liquid sealant (9) comprises ring flange (91), sealing ring (93), and ring flange (91) is fixed together by screw with sealing ring (93), and the G through hole (92) of ring flange (91) aligns with the H through hole (94) of sealing ring (93); The upper and lower end parts of sealing ring (93) is equipped with D ball bearing (95), E ball bearing (96), and D ball bearing (95), E ball bearing (96) are socketed in respectively on the sleeve (101) of hollow water-cooled mechanism (10);
Hollow water-cooled mechanism (10) is the tube-in-tube structure, and hollow water-cooled mechanism (10) includes sleeve (101), water inlet pipe (102), mount pad (10a), water supply connector (10b), backwater joint (10c); Mount pad (10a) is fixedly connected on the base (73); The lower end of water inlet pipe (102) is provided with water supply connector (10b), water supply connector (10b) is connected with an end of water inlet pipe (51), the other end of water inlet pipe (51) is connected on the cooling water system (5), realizes that the cold water in the cooling water system (5) injects intake tunnel (104); The lower end of sleeve (101) is provided with backwater joint (10c), backwater joint (10c) is connected with an end of return pipe (52), the other end of return pipe (52) is connected on the cooling water system (5), realizes that the recirculated water in the backwater channel (103) is back in the cooling water system (5).
Description of drawings
Fig. 1 is the structure cutaway view of the utility model electron-beam melting system.
Fig. 2 is the cutaway view of crucible of the present utility model.
Fig. 3 is the cutaway view of the utility model magnetic liquid sealant.
Fig. 4 is the cutaway view of the hollow water-cooled of the utility model mechanism's middle sleeve and water inlet pipe.
Fig. 4 A is the structure chart of the hollow water-cooled of the utility model mechanism's middle sleeve and water inlet pipe.
Fig. 5 is the structure schematic diagram of existing electron-beam melting system.
Among the figure: 1. electron beam system 11. electron guns 2. vacuum systems 21. vacuum chambers
22. 25. upper ends, charging aperture 23. observation windows, 24. lower ends, 26. left ends
27. right-hand member 201. outer 202. internal layers, 203. cooling water channels, 204. safety valves
205.A through hole 206.B through hole 207. ring flanges 3. crucibles 31. crucibles melt the chamber
32. cooling-water duct 33. crucible outer walls 34. crucible inwalls 35. joints 36. conical bottom
37.C through hole 38.C ball bearing 4. power-supply systems 5. cooling water systems 51. water inlet pipes
52. 72. times strutbeams of strutbeam on return pipe 6. protection sources of the gas 7. frames 71.
73. base 74. reinforcement 711.D through hole 712.E through hole 713.A ball bearings
721.F through hole 722.B ball bearing 8. rotating mechanisms 81. motors
82. driving wheel 83. driven pulleys 84. belts 9. magnetic liquid sealant
91. ring flange 92.G through hole 93. sealing ring 94.H through hole 95.D ball bearings
96.E the hollow water-cooled of ball bearing 10. mechanism 101. sleeves, 102. water inlet pipes
103. backwater channel 104. intake tunnel 10a. mount pad 10b. water supply connector 10c. backwater joints
The specific embodiment
Below in conjunction with accompanying drawing the utility model is described in further detail.
Referring to shown in Figure 1; a kind of electron-beam melting system of the present utility model includes electron beam system 1, vacuum system 2, crucible 3, power-supply system 4, cooling water system 5, protection source of the gas 6, frames 7, rotating mechanism 8, magnetic liquid sealant 9 and hollow water-cooled mechanism 10.
The electron gun 11 of electron beam system 1 is installed on the top 25 of vacuum chamber 21 of vacuum system 2; In the utility model, electron gun 11 can be one, also can be two, three.When using many electron guns, the exit point that electron gun needs only the electronic beam current that guarantees the electron gun outgoing in 25 installation sites, top of vacuum chamber 21 is in crucible 3, and the sweep limits of many electron guns on material (placing in the crucible 3) can overlap; Required energy when electron beam system 1 is used to the material melting is provided.The power of electron gun 11 can reach 800kW, and operating voltage can be 0~30kV.In the utility model, this electron beam system 1 adopts the commercially available prod.
Between the bottom 24 of the vacuum chamber 21 of vacuum system 2 and the top 71 of frames 7 magnetic liquid sealant 9, driven pulley 83 are installed, magnetic liquid sealant 9 is above driven pulley 83.In the utility model, this vacuum system 2 includes vavuum pump group and vacuum chamber 21, the vacuum when the vavuum pump group provides the required material melting of vacuum chamber 21.Vacuum chamber 21 remains on 10 in the duty of material melting -3Pa~10 -5The vacuum of Pa.The vavuum pump group can constitute for molecular pump+lobe pump+slide valve pump, or is that molecule booster pump+sliding vane rotary pump constitutes.
Crucible 3 places the center in the vacuum chamber 21, and the bottom of crucible 3 is connected with the sleeve 101 of hollow water-cooled mechanism 10; Crucible 3 adopts oxygenless copper material processing;
Hollow water-cooled mechanism 10, rotating mechanism 8 are installed on the frames 7;
Protection source of the gas 6 is used to provide vacuum chamber 21 required protective atmosphere when the material melting, as Ar gas.
Power-supply system 4 is used to supply with vacuum system 2, cooling water system 5, rotating mechanism 8 required electric energy.
Referring to shown in Figure 1, the vacuum chamber 21 of vacuum system 2, vacuum chamber 21 is double-deck water-cooling structure, and internal layer 202 is a corrosion resistant plate, and outer 201 can be carbon steel or corrosion resistant plate, are cooling water channel 203 between the internal layer 202 and outer 201; The top 25 of vacuum chamber 21 is provided with safety valve 204, A through hole 205, and ring flange 207 is installed in the A through hole 205, and the sleeve of electron gun 11 is installed on the ring flange 207; The left end 26 of vacuum chamber 21 is provided with observation window 23; The right-hand member 27 of vacuum chamber 21 is provided with charging aperture 22; The bottom 24 of vacuum chamber 21 is provided with B through hole 206, and magnetic liquid sealant 9 is installed in the B through hole 206.Magnetic liquid sealant 9 is socketed on the sleeve 101 of hollow water-cooled mechanism 10.
The design of safety valve 204: when vacuum chamber 21 internal pressures surpassed the allowable pressure of safety valve 204 settings, safety valve 204 was opened exhausts automatically, and while vavuum pump group is cut off the power supply automatically, electron gun 11 cuts off the power supply automatically.
Observation window 23: can the duty of clear observation electron gun 11 in the molten bath by this observation window 23 operators.
Charging aperture 22: by this charging aperture 22 material is put into, a perhaps external automatic feed system is realized continuous feeding melting material.
Referring to Fig. 1, shown in Figure 2, crucible 3 is double-deck water-cooled trapezium structure, and material is an oxygen-free copper; Be cooling-water duct 32 between crucible inwall 34 and the crucible outer wall 33; The bottom of crucible 3 is provided with joint 35, and the center of joint 35 is provided with C through hole 37, and C ball bearing 38 is installed in the C through hole 37, and C ball bearing 38 is socketed on the sleeve 101 of hollow water-cooled mechanism 10, provides recirculated cooling water for cooling-water duct 32 simultaneously; Molten 31 bottoms, chamber of the crucible of crucible 3 are conical bottom 36; The molten chamber 31 of crucible is used for the melting material.Joint 35 is connected with magnetic liquid sealant 9.
Referring to shown in Figure 1, frames 7 is made of last strutbeam 71, following strutbeam 72, base 74, is provided with reinforcement 74 between last strutbeam 71 and the following strutbeam 72, and following strutbeam 72 is installed on the base 74; Last strutbeam 71 is provided with D through hole 711, E through hole 712, and A ball bearing 713 is installed in the D through hole 711, and E through hole 712 is used for the output of motor 81 and passes; A ball bearing 713 is socketed on the sleeve 101 of hollow water-cooled mechanism 10;
Following strutbeam 72 is provided with F through hole 721, and B ball bearing 722 is installed in the F through hole 721; B ball bearing 722 is socketed on the sleeve 101 of hollow water-cooled mechanism 10;
Referring to shown in Figure 1, rotating mechanism 8 is made of motor 81, driving wheel 82, driven pulley 83 and belt 84, belt 84 is enclosed within on driving wheel 82, the driven pulley 83, motor 81 is installed on the strutbeam 71, driving wheel 82 is socketed on the output shaft of motor 81, driven pulley 83 is installed on the sleeve 101 of hollow water-cooled mechanism 10, and driving wheel 82, driven pulley 83 drive by belt 84.In the utility model, drive driving wheels 82 by motor 81 and rotate, and then belt 84, driven pulley 83 rotate, make crucible 3 in vacuum chamber 21, rotate.
Referring to Fig. 1, shown in Figure 3, magnetic liquid sealant 9 comprises ring flange 91, sealing ring 93, and ring flange 91 and sealing ring 93 are fixed together by screw, and the G through hole 92 of ring flange 91 aligns with the H through hole 94 of sealing ring 93; The upper and lower end parts of sealing ring 93 is equipped with D ball bearing 95, E ball bearing 96, and D ball bearing 95, E ball bearing 96 are socketed in respectively on the sleeve 101 of hollow water-cooled mechanism 10.
Shown in Fig. 1, Fig. 4, Fig. 4 A, hollow water-cooled mechanism 10 is the tube-in-tube structure, and hollow water-cooled mechanism 10 includes sleeve 101, water inlet pipe 102, mount pad 10a, water supply connector 10b, backwater joint 10c; Mount pad 10a is fixedly connected on the base 73; The lower end of water inlet pipe 102 is provided with water supply connector 10b, and water supply connector 10b is connected with an end of water inlet pipe 51, and the other end of water inlet pipe 51 is connected on the cooling water system 5, realizes that the cold water in the cooling water system 5 injects intake tunnel 104; The lower end of sleeve 101 is provided with backwater joint 10c, and backwater joint 10c is connected with an end of return pipe 52, and the other end of return pipe 52 is connected on the cooling water system 5, realizes that the recirculated water in the backwater channel 103 is back in the cooling water system 5.
The electron-beam melting system of the utility model design adopts less combination of devices just can carry out the electronic torch melting function, equipment simple in structure, volume is relatively little; Rotating mechanism 8 not only can carry out the melting of refractory alloy with the combination of hollow water-cooled mechanism 10, also can carry out the function of electron beam single crystal furnace simultaneously.The electron-beam melting system overall structure is open, is convenient to operation, observes and is convenient to manual adjustment.

Claims (4)

1, a kind of electron-beam melting system, this electron-beam melting system includes electron beam system (1), vacuum system (2), crucible (3), power-supply system (4), cooling water system (5), protection source of the gas (6), frames (7), it is characterized in that: also include rotating mechanism (8), magnetic liquid sealant (9) and hollow water-cooled mechanism (10); The electron gun (11) of electron beam system (1) is installed on the top (25) of vacuum chamber (21) of vacuum system (2);
Between the bottom (24) of the vacuum chamber (21) of vacuum system (2) and the top (71) of frames (7) magnetic liquid sealant (9), driven pulley (83) are installed, magnetic liquid sealant (9) is in the top of driven pulley (83);
Crucible (3) places the center in the vacuum chamber (21), and the bottom of crucible (3) is connected with the sleeve (101) of hollow water-cooled mechanism (10);
Hollow water-cooled mechanism (10), rotating mechanism (8) are installed on the frames (7);
The vacuum chamber (21) of vacuum system (2) is double-deck water-cooling structure, and internal layer (202) is a corrosion resistant plate, and outer (201) are carbon steel or corrosion resistant plate, is cooling water channel (203) between internal layer (202) and outer (201); The top (25) of vacuum chamber (21) is provided with safety valve (204), A through hole (205), and ring flange (207) is installed in the A through hole (205), and the sleeve of electron gun (11) is installed on the ring flange (207); The left end (26) of vacuum chamber (21) is provided with observation window (23); The right-hand member (27) of vacuum chamber (21) is provided with charging aperture (22); The bottom (24) of vacuum chamber (21) is provided with B through hole (206), and magnetic liquid sealant (9) is installed in the B through hole (206);
Crucible (3) is double-deck water-cooled trapezium structure; Be cooling-water duct (32) between crucible inwall (34) and the crucible outer wall (33); The bottom of crucible (3) is provided with joint (35), and the center of joint (35) is provided with C through hole (37), and C ball bearing (38) is installed in the C through hole (37), and C ball bearing (38) is socketed on the sleeve (101) of hollow water-cooled mechanism (10); Bottom, the molten chamber (31) of the crucible of crucible (3) is conical bottom (36);
Frames (7) is made of last strutbeam (71), following strutbeam (72), base (74), is provided with reinforcement (74) between last strutbeam (71) and the following strutbeam (72), and following strutbeam (72) is installed on the base (74); Last strutbeam (71) is provided with D through hole (711), E through hole (712), and A ball bearing (713) is installed in the D through hole (711), and E through hole (712) is used for the output of motor (81) and passes; A ball bearing (713) is socketed on the sleeve (101) of hollow water-cooled mechanism (10); Following strutbeam (72) is provided with F through hole (721), and B ball bearing (722) is installed in the F through hole (721);
Rotating mechanism (8) is made of motor (81), driving wheel (82), driven pulley (83) and belt (84), motor (81) is installed on the strutbeam (71), driving wheel (82) is socketed on the output shaft of motor (81), driven pulley (83) is installed on the sleeve (101) of hollow water-cooled mechanism (10), and driving wheel (82), driven pulley (83) connect by belt (84);
Magnetic liquid sealant (9) comprises ring flange (91), sealing ring (93), and ring flange (91) is fixed together by screw with sealing ring (93), and the G through hole (92) of ring flange (91) aligns with the H through hole (94) of sealing ring (93); The upper and lower end parts of sealing ring (93) is equipped with D ball bearing (95), E ball bearing (96), and D ball bearing (95), E ball bearing (96) are socketed in respectively on the sleeve (101) of hollow water-cooled mechanism (10);
Hollow water-cooled mechanism (10) is the tube-in-tube structure, and hollow water-cooled mechanism (10) includes sleeve (101), water inlet pipe (102), mount pad (10a), water supply connector (10b), backwater joint (10c); Mount pad (10a) is fixedly connected on the base (73); The lower end of water inlet pipe (102) is provided with water supply connector (10b), water supply connector (10b) is connected with an end of water inlet pipe (51), the other end of water inlet pipe (51) is connected on the cooling water system (5), realizes that the cold water in the cooling water system (5) injects intake tunnel (104); The lower end of sleeve (101) is provided with backwater joint (10c), backwater joint (10c) is connected with an end of return pipe (52), the other end of return pipe (52) is connected on the cooling water system (5), realizes that the recirculated water in the backwater channel (103) is back in the cooling water system (5).
2, electron-beam melting system according to claim 1 is characterized in that: the power of electron gun (11) can reach 800kW, and operating voltage can be 0~30kV.
3, electron-beam melting system according to claim 1 is characterized in that: vacuum chamber (21) remains on 10 in the duty of material melting -3Pa~10 -5The vacuum of Pa.
4, electron-beam melting system according to claim 1 is characterized in that: crucible (3) adopts oxygenless copper material processing.
CNU2008201093272U 2008-07-18 2008-07-18 Electronic beam smelting device Expired - Lifetime CN201255574Y (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
CNU2008201093272U CN201255574Y (en) 2008-07-18 2008-07-18 Electronic beam smelting device

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Publication Number Publication Date
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107356114A (en) * 2017-08-14 2017-11-17 核工业理化工程研究院 Vacuum electron beam smelting cold crucible
CN114705041A (en) * 2022-06-07 2022-07-05 沈阳真空技术研究所有限公司 Cooling device and cooling method for vacuum consumable-furnace crystallizer
CN116086185A (en) * 2023-04-07 2023-05-09 无锡市胜钢超硬材料有限公司 Nickel base alloy melting device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107356114A (en) * 2017-08-14 2017-11-17 核工业理化工程研究院 Vacuum electron beam smelting cold crucible
CN107356114B (en) * 2017-08-14 2023-08-01 核工业理化工程研究院 Cold crucible for vacuum electron beam melting
CN114705041A (en) * 2022-06-07 2022-07-05 沈阳真空技术研究所有限公司 Cooling device and cooling method for vacuum consumable-furnace crystallizer
CN114705041B (en) * 2022-06-07 2022-08-16 沈阳真空技术研究所有限公司 Cooling device and cooling method for vacuum consumable-furnace crystallizer
CN116086185A (en) * 2023-04-07 2023-05-09 无锡市胜钢超硬材料有限公司 Nickel base alloy melting device
CN116086185B (en) * 2023-04-07 2024-01-05 无锡市胜钢超硬材料有限公司 Nickel base alloy melting device

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Effective date of abandoning: 20080718

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