CN106231713A - A kind of electronic gun for electron beam melting furnace room of applying argon gas - Google Patents

A kind of electronic gun for electron beam melting furnace room of applying argon gas Download PDF

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Publication number
CN106231713A
CN106231713A CN201610822949.9A CN201610822949A CN106231713A CN 106231713 A CN106231713 A CN 106231713A CN 201610822949 A CN201610822949 A CN 201610822949A CN 106231713 A CN106231713 A CN 106231713A
Authority
CN
China
Prior art keywords
electron beam
argon
gun
room
filled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610822949.9A
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Chinese (zh)
Inventor
李明阳
韩伟东
刘军
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Baoji Nonferrous Metal Material Co Ltd
Original Assignee
Baoji Nonferrous Metal Material Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Baoji Nonferrous Metal Material Co Ltd filed Critical Baoji Nonferrous Metal Material Co Ltd
Priority to CN201610822949.9A priority Critical patent/CN106231713A/en
Publication of CN106231713A publication Critical patent/CN106231713A/en
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00Heating by electric discharge
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02Electron guns
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02Electron guns
    • H01J3/027Construction of the gun or parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

The invention reside in the electronic gun for electron beam melting furnace room that a kind of applying argon gas is provided, to solve to stablize deflection of a beam of electrons, it is achieved the problem precisely focusing on scanning.The thinking of the present invention is by installing argon flow amount control valve at gun chamber, it is filled with argon to electron beam gun indoor, and moderate control is filled with the flow of argon, argon ionizes generation positive charge under the effect of high voltage electric field, so electronics with effusion neutralizes, thus reach stable deflection of a beam of electrons, it is achieved precisely focus on scanning.While the present invention solves electron beam generation drifting problem, melting effective power is also given full play to, and electron beam scanning is accurate, track clear, and the steady quality of ingot casting is excellent.Additionally, Electron Beam Focusing of the present invention precisely scans, melting effective power have also been obtained and gives full play to so that the service life of electron gun significantly extends.

Description

A kind of electronic gun for electron beam melting furnace room of applying argon gas
Technical field
The invention belongs to metal smelt technical field, relate to electron beam furnace, particularly to the electronics of a kind of applying argon gas Bundle smelting furnace gun chamber.
Background technology
Electron beam furnace (hereinafter referred to as " electron beam furnace ") is under vacuum and high-voltage dc state, it is common that Under the effect of 40kv, red-hot electronics effusion forms electron beam, hits on the material that need to melt with high speed, huge Kinetic energy is converted into heat energy, is melted by refractory metal, and fusion temperature is up to 3500 degrees centigrade.At present, the difficulty such as tantalum, niobium, tungsten The melting of molten metal purifies all uses electron beam furnace, low-melting-point metal impurity first to volatilize, thus goes the removal of impurity to reach purification of metals Purpose.Generally, electron beam furnace by rifle room, furnace chamber and draws ingot system to form.Rifle room is the fine vacuum position of electron beam furnace, is also Its core position, the electron beam that the filament of its electron gun emits controls to produce deflection by coil current under a high vacuum, Reach required electron beam form.But electron beam is electronegative, also exist in the case of line is big, easily occur drift to ask Topic, often cannot precisely focus on concentration infusibility material, have impact on the utilization of electron beam furnace effective power, and waste is big, and electronics Bundle scanning track is unintelligible, also affects the quality of melting ingot casting.
Summary of the invention
In order to solve the problems referred to above, the thinking of the present invention is by installing argon flow amount control valve in rifle room, to electron beam Rifle indoor are filled with argon, and moderate control is filled with the flow of argon, and argon then ionizes under the effect of high voltage electric field and produces positive electricity Lotus, the so electronics with effusion neutralize, thus reach stable deflection of a beam of electrons, it is achieved precisely focus on scanning, improve Melting Quality.
Concrete technical scheme is:
The electronic gun for electron beam melting furnace room of a kind of applying argon gas, including cylindrical electron beam gun room (1), its feature exists In: along the internal circumference space of electron beam gun room (1) uniform setting or non-uniform be provided with at least 4 focus coils (2), The side of electron beam gun room (1) is provided with argon flow amount control valve (4), the top of electron beam gun room (1) is provided with electron beam (5), wherein, control described argon flow amount control valve (4) and argon can be filled with in electron beam gun room (1).
Further it is improved by: described focus coil (2) is 4,6 or 8 and uniform is symmetrical arranged.
Further it is improved by: in described electron beam gun room (1), be filled with the flow-control of argon at 2L/min~8L/ min。
Further be improved by: be filled with in described electron beam gun room (1) flow-control of argon 3.5,5,6, 6.5 or 7.5L/min.
The beneficial effects of the present invention is:
1, rifle room be the fine vacuum position of electron beam furnace after being filled with argon, electron beam passes through coil current under a high vacuum Control will not produce deflection drift, reaches required electron beam form.Avoiding while electron beam drifts about, melting has Effect power also can give full play to, and electron beam scanning is accurate, track clear, and the steady quality of ingot casting is excellent.
2 additionally, at melting refractory metal, owing to equipment vacuum degree is high, and electron beam divergence, actually active in melting The while of under powered, also have impact on the service life of electron gun, Electron Beam Focusing of the present invention precisely scans, melting effective power Give full play to so that the service life of electron gun significantly extends.
Accompanying drawing explanation
Fig. 1 is the internal structure schematic diagram of the present invention.
In figure, 1--electron beam gun room, 2-focus coil, 4--argon flow amount control valve, 5--electron beam.
Detailed description of the invention
Combine accompanying drawing in detail below embodiment is further described.
As it is shown in figure 1, be the internal structure schematic diagram of the electronic gun for electron beam melting furnace room of a kind of applying argon gas of the present invention, Electron beam furnace is vertical shape tube structure.It includes electron beam gun room 1, focus coil 2, argon flow amount control valve 4, electron beam 5, its The left side dashed box of middle argon flow amount control valve 4 represents the signal of argon stream;The dotted line of electron beam 5 bottom represents showing of electronic beam current Meaning.The present invention's is by installing argon flow amount control valve 4 in rifle room 1, is filled with argon in electron beam gun room 1, appropriateness or Joining control flow, argon is ionized generation positive charge, thus reaches the effect of stable deflection of a beam of electrons.The way implemented It is: near the internal circumference of electron beam gun room 1, not with circular contact, namely uniform in space near circumference Being provided with at least 4 focus coils 2, the most uniform setting or non-uniform setting, the present embodiment is preferably 4 focus coils 2, surrounding symmetry is uniform;Argon flow amount control valve 4, the external stream of argon flow amount control valve 4 it is provided with in the side of electron beam gun room 1 Amount valve, then in electron beam gun room 1, it is filled with argon after being communicated to argon bottle, it is filled with argon flow amount and controls 2~8L/min, only exist Being filled with argon during melting, melting closes argon flow amount control valve 4 after terminating, and is filled with the stream of argon in described electron beam gun room 1 Amount controls in 3.5,5,6,6.5 or 7.5L/min effect best;The top of electron beam gun room 1 is provided with electron beam 5, electron beam 5 are sent by electron beam generator, and form electronic beam current and be filled in electron beam gun room 1.
When, after electron beam generator divergent bundle 5, its electron beam is divergent shape, therefore installs focus coil additional in its underpart, Utilizing electromagnetic principle, electronegative electronically forms electronic beam current, after electronics runs a segment distance, occurs secondary to dissipate, therefore Continue it is focused on, in order to complete next step deflection of electronics, enter furnace chamber and complete the fusing of material.

Claims (3)

1. an electronic gun for electron beam melting furnace room for applying argon gas, including cylindrical electron beam gun room (1), its feature exists Uniform or non-in: internal circumference space along electron beam gun room (1) uniform it is provided with at least 4 focus coils (2), at electron beam The side of rifle room (1) is provided with argon flow amount control valve (4), the top of electron beam gun room (1) is provided with electron beam (5), its In, controlling described argon flow amount control valve (4) can be filled with argon in electron beam gun room (1);Fill in described electron beam gun room (1) Enter the flow-control of argon at 2L/min~8L/min.
The electronic gun for electron beam melting furnace room of a kind of applying argon gas the most as claimed in claim 1, it is characterised in that: described focusing Coil (2) is 4,6 or 8 and uniform is symmetrical arranged.
The electronic gun for electron beam melting furnace room of a kind of applying argon gas the most as claimed in claim 1 or 2, it is characterised in that: described It is filled with the flow-control of argon 3.5,5,6,6.5 or 7.5L/min.
CN201610822949.9A 2016-08-27 2016-08-27 A kind of electronic gun for electron beam melting furnace room of applying argon gas Pending CN106231713A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610822949.9A CN106231713A (en) 2016-08-27 2016-08-27 A kind of electronic gun for electron beam melting furnace room of applying argon gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610822949.9A CN106231713A (en) 2016-08-27 2016-08-27 A kind of electronic gun for electron beam melting furnace room of applying argon gas

Publications (1)

Publication Number Publication Date
CN106231713A true CN106231713A (en) 2016-12-14

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Family Applications (1)

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CN201610822949.9A Pending CN106231713A (en) 2016-08-27 2016-08-27 A kind of electronic gun for electron beam melting furnace room of applying argon gas

Country Status (1)

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CN (1) CN106231713A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109136528A (en) * 2018-09-25 2019-01-04 宁波诺丁汉大学 A kind of devices and methods therefor refining ndfeb magnet crystallite dimension

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2322309A1 (en) * 2009-11-13 2011-05-18 ISU GmbH Method and device for thermal processing of workpieces with an electron beam and gas
CN201962335U (en) * 2010-12-29 2011-09-07 北京有色金属研究总院 Electron beam smelting furnace
CN102564123A (en) * 2010-12-29 2012-07-11 北京有色金属研究总院 Electron beam smelting furnace
CN205992996U (en) * 2016-08-27 2017-03-01 宝鸡一众有色金属材料有限公司 A kind of electronic gun for electron beam melting furnace room of applying argon gas

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2322309A1 (en) * 2009-11-13 2011-05-18 ISU GmbH Method and device for thermal processing of workpieces with an electron beam and gas
CN201962335U (en) * 2010-12-29 2011-09-07 北京有色金属研究总院 Electron beam smelting furnace
CN102564123A (en) * 2010-12-29 2012-07-11 北京有色金属研究总院 Electron beam smelting furnace
CN205992996U (en) * 2016-08-27 2017-03-01 宝鸡一众有色金属材料有限公司 A kind of electronic gun for electron beam melting furnace room of applying argon gas

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109136528A (en) * 2018-09-25 2019-01-04 宁波诺丁汉大学 A kind of devices and methods therefor refining ndfeb magnet crystallite dimension

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