CN201955067U - 一种基板玻璃厚度在线测量仪 - Google Patents
一种基板玻璃厚度在线测量仪 Download PDFInfo
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105091764A (zh) * | 2015-09-06 | 2015-11-25 | 苏州南光电子科技有限公司 | 基于激光和ccd的玻璃厚度测量系统的测量方法 |
CN110095590A (zh) * | 2019-04-23 | 2019-08-06 | 深圳市华星光电半导体显示技术有限公司 | 玻璃基板残材侦测方法及装置 |
CN112229337A (zh) * | 2020-10-20 | 2021-01-15 | 蚌埠中光电科技有限公司 | 一种用于高世代基板玻璃在线无损厚度测量装置 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105091764A (zh) * | 2015-09-06 | 2015-11-25 | 苏州南光电子科技有限公司 | 基于激光和ccd的玻璃厚度测量系统的测量方法 |
CN110095590A (zh) * | 2019-04-23 | 2019-08-06 | 深圳市华星光电半导体显示技术有限公司 | 玻璃基板残材侦测方法及装置 |
CN112229337A (zh) * | 2020-10-20 | 2021-01-15 | 蚌埠中光电科技有限公司 | 一种用于高世代基板玻璃在线无损厚度测量装置 |
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Legal Events
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C53 | Correction of patent for invention or patent application | ||
CB03 | Change of inventor or designer information |
Inventor after: Zhao Xiaoli Inventor after: Tan Jun Inventor after: Li Jianpeng Inventor after: Wu Wen Inventor before: Zhao Xiaoli Inventor before: Tan Jun Inventor before: Li Jianpeng |
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COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: ZHAO XIAOLI TAN JUN LI JIANPENG TO: ZHAO XIAOLI TAN JUN LI JIANPENG WU WEN |
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C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110831 Termination date: 20121222 |