CN201868406U - 基板对位装置、基板传送平台及系统 - Google Patents
基板对位装置、基板传送平台及系统 Download PDFInfo
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- CN201868406U CN201868406U CN2010205921630U CN201020592163U CN201868406U CN 201868406 U CN201868406 U CN 201868406U CN 2010205921630 U CN2010205921630 U CN 2010205921630U CN 201020592163 U CN201020592163 U CN 201020592163U CN 201868406 U CN201868406 U CN 201868406U
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CN2010205921630U CN201868406U (zh) | 2010-10-29 | 2010-10-29 | 基板对位装置、基板传送平台及系统 |
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CN201868406U true CN201868406U (zh) | 2011-06-15 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN104425332A (zh) * | 2013-09-04 | 2015-03-18 | 英飞凌科技股份有限公司 | 用于半导体器件的动态对准的方法和设备 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104425332A (zh) * | 2013-09-04 | 2015-03-18 | 英飞凌科技股份有限公司 | 用于半导体器件的动态对准的方法和设备 |
CN104425332B (zh) * | 2013-09-04 | 2017-07-04 | 英飞凌科技股份有限公司 | 用于半导体器件的动态对准的方法和设备 |
US10041973B2 (en) | 2013-09-04 | 2018-08-07 | Infineon Technologies Ag | Method and apparatus for dynamic alignment of semiconductor devices |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
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Owner name: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY Effective date: 20150630 Owner name: JINGDONGFANG SCIENCE AND TECHNOLOGY GROUP CO., LTD Free format text: FORMER OWNER: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY CO., LTD. Effective date: 20150630 |
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C41 | Transfer of patent application or patent right or utility model | ||
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Effective date of registration: 20150630 Address after: 100015 Jiuxianqiao Road, Beijing, No. 10, No. Patentee after: BOE Technology Group Co., Ltd. Patentee after: Beijing BOE Photoelectricity Science & Technology Co., Ltd. Address before: 100176 Beijing economic and Technological Development Zone, West Central Road, No. 8 Patentee before: Beijing BOE Photoelectricity Science & Technology Co., Ltd. |
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CX01 | Expiry of patent term | ||
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Granted publication date: 20110615 |