CN201853941U - All-solid triple frequency laser - Google Patents
All-solid triple frequency laser Download PDFInfo
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- CN201853941U CN201853941U CN2010205059210U CN201020505921U CN201853941U CN 201853941 U CN201853941 U CN 201853941U CN 2010205059210 U CN2010205059210 U CN 2010205059210U CN 201020505921 U CN201020505921 U CN 201020505921U CN 201853941 U CN201853941 U CN 201853941U
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Abstract
The utility model discloses an all-solid triple frequency laser, belonging to the field of non-linear optics. The all-solid triple frequency laser comprises a laser light source, a focusing system, a frequency doubling system and a sum frequency system, wherein the fundamental frequency laser output by the laser light source passes through the focusing system and then enters the frequency doubling system to generate the frequency doubling light, and the frequency doubling light and the residual fundamental frequency light enter the sum frequency system to generate the frequency tripling light; the all-solid triple frequency laser also comprises a fundamental frequency light power density adjusting device in front of the focusing system, and a deviation compensation device arranged between the frequency doubling system and the sum frequency system; the fundamental frequency light power density adjusting device can adjust the fundamental frequency light power density continuously; the deviation compensation device can adjust the deviation compensation value continuously. The frequency doubling conversion efficiency of the ultraviolet laser is greatly improved by optimizing the laser power density and the deviation compensation rate, and the cost of the ultraviolet laser is greatly reduced by using a birefringent crystal or dispersion glass as the deviation compensation device.
Description
Technical field
The utility model belongs to non-linear optical field, relates to a kind of frequency double laser, particularly a kind of all solid state frequency tripling laser.
Background technology
Since the sixties in last century, laser came out, owing to its intensity height, good directionality, coherence cause easily people's extensive concern, and be applied to a plurality of fields such as illumination, measurement and medical treatment.Over nearly 40 years, continuous development along with laser technology, the appearance of locked mode, accent Q and CPA technology, the intensity of laser is constantly improved, its advantage in field of laser processing is also more and more obvious, and all solid state laser is more because its high conversion efficiency, high light beam quality and high stability are subjected to the favor of laser processing industry.
Present all solid state laser mainly with wavelength at the semiconductor laser of 800～1000nm as pumping source, to Nd:YAG crystal or Nd:YVO as operation material
4Crystal encourages, and by Q-regulating technique, the generation wavelength is that 1064nm, pulse duration are that a few ns to tens ns, power are several watts to tens watts pulse laser.Because this type of laser pulse width is short, good beam quality, and working stability, conversion efficiency height are so be widely used in aspects such as laser marking, Laser Micro-Machining, laser drilling and laser biology.As everyone knows, laser has confidential relation in the application and the optical maser wavelength of above-mentioned each side, be in particular in: on the one hand, the energy of laser single photon is hv, and itself and wavelength have confidential relation, optical maser wavelength is short more, the single photon energy is big more, and for Excited Fluorescence Combined spectrum, optical maser wavelength is short more, its needed number of photons is then few more, so its probability that excites is bigger.On the other hand, but the size of laser focal beam spot and optical maser wavelength have confidential relation, and in general, the focal beam spot of laser can calculate with following formula:
As can be seen, optical maser wavelength is short more from formula, but the laser focal beam spot is more little, and for laser processing Laser Micro-Machining particularly, but the size of laser focal beam spot has directly determined the size of machining accuracy; In addition, wavelength belongs to near-infrared laser greater than the laser of 800nm, and wavelength belongs near ultraviolet laser less than the laser of 400nm, the thermal effect of infrared laser is more intense, and the photochemical effect of Ultra-Violet Laser is apparent in view, and at different application, the advantage of different wavelength of laser is also inequality.So all solid state laser when making great efforts to improve its power output, is also striving to find the way that improves wavelength conversion efficiency.
The conversion of optical maser wavelength at present mainly is that the nonlinear effect by crystal realizes, can be divided into frequency-doubled conversion with and frequently change two kinds, its conversion efficiency mainly is subjected to the influence of laser power density and walk-off effect.In general, laser power density is big more, and conversion efficiency is high more.Thereby present frequency multiplication or and frequently system mainly be by light beam being focused on or improving laser power and improve the power density of laser in nonlinear crystal, for identical lasing condition and focused condition, then do not have to propose to improve the method for laser power density targetedly, thereby missed the chance of optimizing laser-conversion efficiency.For walk-off effect, frequency doubling system can be eliminated it by the mode of serviceability temperature coupling, but for the frequency effect, it is difficult to find suitable crystal to carry out the temperature coupling, so walk-off effect is for particularly evident with the influence of frequency system.The measure of taking at walk-off effect in the prior art is that it is compensated, promptly enter and introduce one earlier before the system frequently and walk in advance from amount at the light of two kinds of different frequencies, this walk in advance from the amount with two kinds of light beams with the frequency system in walk to separate from direction opposite, size has certain association, thus the efficient of raising and frequency system.Though this kind method can improve to a certain extent and efficient frequently, for walk in advance from the optimal value of size never have a definite conclusion, and do not consider that power density is to walking the influence from compensation result.The outstanding shortcoming of another of prior art is: it is walked from the compensation nonlinear crystals that adopt more and realizes, the thickness of nonlinear crystal with walk from compensation rate direct relation is arranged, so in order to adjust away the nonlinear crystal that need select a series of different lengths from compensation rate for use, its shortcoming is that nonlinear crystal costs an arm and a leg, if the crystal number selected for use too much then can cause whole walk too high from the cost of bucking-out system; And the thickness of nonlinear crystal can only be a series of point, can not carry out continuous adjustment to walking from compensation rate, so be difficult for finding away the optimal value from compensation.
Present frequency tripling system mainly by frequency doubling system with and frequently system constitute jointly, even adopted above-mentioned walking from bucking-out system being optimized with the frequency conversion efficiency, its conversion efficiency that obtains is the highest also only about 25%, can't further improve.Thereby limited the application of frequency tripling light greatly.The improvement that the utility model proposes at above-mentioned shortcoming just, purpose is to provide the frequency double laser of Senior Three frequency doubled light conversion efficiency.
The utility model content
The purpose of this utility model is to overcome the shortcoming that exists in the above-mentioned prior art, and a kind of all solid state frequency tripling laser is provided.By adopting the laser power density adjusting device and walking, seek optimum frequency tripling switch condition, thereby improve the conversion efficiency of frequency tripling laser from compensation arrangement.
The purpose of this utility model is achieved through the following technical solutions:
A kind of all solid state frequency tripling laser is characterized in that comprising a LASER Light Source, fundamental frequency optical power density adjusting device, focusing system, frequency doubling system, walks from compensation arrangement and frequency system; Wherein, the basic frequency laser of described LASER Light Source output successively through described fundamental frequency optical power density adjusting device, focusing system, frequency doubling system, walk from compensation arrangement and export after the system frequently.
Described optical power density adjusting device is one group of beam expanding lens; Described beam expanding lens is a pair of confocal concavees lens and convex lens.
Described optical power density adjusting device comprises a different many groups beam expanding lens and the rotatable rotating disks of expansion beam ratio, and many groups beam expanding lens that this expansion beam ratio is different is installed on respectively on the described rotatable rotating disk.
Described optical power density adjusting device is an expansion beam ratio continuously controllable beam expanding lens; Described beam expanding lens comprises concavees lens and the variable convex lens group of a focal length, and the variable convex lens group of wherein said focal length comprises the convex lens that two spacings are adjustable; Distance between described convex lens group and the described concavees lens is adjustable.
Described walking from compensation arrangement is a birefringece crystal, the polarization direction of fundamental frequency light or frequency doubled light is consistent in one optical axis of birefringece crystal and the described frequency doubling system emergent light, and make fundamental frequency light and frequency doubled light walk from direction with described and frequently in the system walk from direction opposite.
Described frequency doubling system emergent light through described walk from fundamental frequency light and frequency doubled light behind the compensation arrangement walk from amount for fundamental frequency light and frequency doubled light described and walk half frequently in the system from amount.
Describedly walk to comprise a birefringece crystal and the rotatable rotating disk that a group length is different that the birefringece crystal that this group length is different is installed on respectively on the described rotatable rotating disk from compensation arrangement.
Describedly walk to comprise a chromatic dispersion plate glass and a rotatable rotary platform that described chromatic dispersion plate glass is installed on the described rotatable rotary platform from compensation arrangement.
Described chromatic dispersion plate glass is fused silica glass or ZF
2Glass, its thickness is less than or equal to 10mm; Be coated with the anti-reflection film of fundamental frequency light and two kinds of different wave lengths of frequency doubled light on the two logical light faces of described chromatic dispersion plate glass.
Described frequency doubling system and describedly walk between compensation arrangement, also to be inserted with an optical power density adjusting device; Described walking from compensation arrangement and described and also be inserted with a focusing system between the system frequently.
Main contents of the present utility model are:
The utility model relates to a kind of all solid state frequency tripling laser, comprises resonant cavity, pumping source, operation material, acousto-optic Q modulation device and frequency tripling system, and resonant cavity adopts refrative cavity type, operation material Nd:YdVO
4Crystal places the centre of resonant cavity, and pumping source is the semiconductor laser of 888nm, by the mode of end pump laser crystal is carried out pumping, and wherein, the frequency tripling system can be following two kinds of situations:
1) a kind of laser frequency tripling system, it comprises that mainly focusing system, frequency doubling system reach and the frequency system, and basic frequency laser enters frequency doubling system after focusing on through focusing system, produces two frequency doubled lights in frequency doubling system, two frequency doubled lights and remaining fundamental frequency light are injected and the frequency system together, produce frequency tripling light; Wherein, this system also comprises fundamental frequency optical power density adjusting device before focusing system, frequency doubling system and and frequently between the system, also be provided with away from compensation arrangement.
Fundamental frequency optical power density adjusting device can be for one group of different beam expanding lens of expansion beam ratio, by using different beam expanding lenss, can change the spot size of the fundamental frequency light that incides in the focusing system.
The different beam expanding lenss that expand beam ratio are put and can be placed on the rotatable rotating disk, realize the switching of beam expanding lens by the rotation of rotating disk.
Walk from compensation arrangement to be birefringece crystal that the thickness of birefringece crystal satisfies: by walk from fundamental frequency light and frequency doubled light behind the compensation arrangement walk from amount for fundamental frequency light and frequency doubled light with the frequency system in walk half from amount.
Walk from compensation arrangement to be the birefringece crystal of one group of different length,, realize walking adjustment from compensation rate by using the birefringece crystal of different length.
The birefringece crystal of different length can be positioned on the rotatable rotating disk, realizes the switching of different length birefringece crystal by the rotation of rotating disk.
In above-mentioned frequency tripling system, the distance between focusing system and the frequency doubling system can change, and frequency doubling system can adopt the mode of temperature coupling.
At frequency doubling system and walk between compensation arrangement, also to be inserted with a power density adjusting device, walk from compensation arrangement and and also be inserted with a focusing system between the system frequently.
The characteristics of said system are, by using one group of beam expanding lens, change the spot size of the fundamental frequency light that incides focusing system, according to formula 1 as can be known, its can change fundamental frequency light frequency doubling system with and the power density in the system frequently, thereby realize the adjusting of power density, again with walk from compensation arrangement to match, can obtain optimum frequency tripling conversion efficiency; Owing to walk from compensation arrangement only to adopt birefringece crystal just can realize in the native system, so greatly reduce the cost of system; And in frequency doubling system, adopt the temperature matching way, eliminated the influence of walk-off effect frequency doubling system; By change to distance between focusing system and the frequency doubling system, can adjust the power density of fundamental frequency light in frequency doubling system separately, make frequency doubling system with and frequently system can distinguish and independently seek the density optimal value; Also can by at frequency doubling system and walk between bucking-out system, to insert again power density adjusting device and focusing system come to the frequency system in laser power density further regulate.
2) a kind of laser frequency tripling system, it comprises that mainly focusing system, frequency doubling system reach and the frequency system, basic frequency laser enters frequency doubling system after focusing on through focusing system, in frequency doubling system, produce two frequency doubled lights, two frequency doubled lights and remaining fundamental frequency light are injected and the frequency system together, produce frequency tripling light wherein, before focusing system, also comprise the fundamental frequency optical power density adjusting device of serially power density of fundamental frequency light being regulated, frequency doubling system and and frequently between the system, also be provided with and can carry out continuously adjustable from offset and walk walking from compensation arrangement.
Fundamental frequency optical power density adjusting device is an expansion beam ratio continuously controllable beam expanding lens.
Walking from compensation arrangement is the rotatable dispersion means of an angle.Dispersion means can be a dull and stereotyped fused silica glass sheet that tilts.
Focusing system and the distance between the frequency doubling system in the frequency tripling system can change.Frequency doubling system adopts the mode of temperature coupling that the phase place of frequency doubling system is mated.
At frequency doubling system and walk between compensation arrangement, also to be inserted with a power density adjusting device, walk from compensation arrangement and and also be inserted with a focusing system between the system frequently.
The characteristics of said system are that the power density adjusting device adopt to expand beam ratio can the continuously adjustable beam expanding lens, thereby realizes the continuous adjustment of power density; Walk from compensation arrangement and then mainly adopt dispersive glass, change to walk, thereby can realize away continuous adjusting from compensation rate from compensation rate by the angle that changes glass and incident beam; Because two devices all can carry out trickle continuous variation, thus very help seeking the optimal value of conversion efficiency, and, can further reduce the cost of frequency tripling system by using dispersive glass.
The material of plate glass is the bigger material of chromatic dispersion, and promptly the refringence of the light of two kinds of different wave lengths in plate glass is bigger, and it can be fused silica glass or ZF
2Glass, thickness are generally less than and equal 10mm.
Be coated with the anti-reflection film of two kinds of different wave lengths on the two logical light faces of plate glass, be used to reduce the reflection loss of light on plate glass of two kinds of wavelength.
Plate glass places on the rotatable rotary platform, and the rotation of rotating platform can manual or electronic control, and the rotation by rotating platform drives plate glass and rotates, thereby changes the angle between plate glass and the laser, realizes the continuous adjustment from compensation rate.
Walk from compensation arrangement to adopt polylith plate glass to be composed in series, walk from compensation rate so as to increasing.
Compared with prior art, good effect of the present utility model is:
The utility model is by adding fundamental frequency optical power density adjusting device, provided the new method of heightening laser power density, thereby improved the laser-conversion efficiency of frequency tripling laser greatly, adjusting device of the present utility model can realize the continuous adjusting to power density simultaneously, is convenient to the technical staff and seeks the optimum power density value; Further, of the present utility model walking from compensation arrangement adopts birefringece crystal or plate glass to replace nonlinear crystal of the prior art, thereby saved the cost of frequency tripling laser greatly, simultaneously walking from compensation arrangement in the utility model can realize continuous adjusting to compensation rate having improved compensation precision greatly.
Description of drawings
Fig. 1 is the schematic diagram of frequency tripling of the present utility model system;
Fig. 1 (a) is the index path of frequency tripling system
Fig. 1 (b) is the ray plot of frequency tripling system
11-parallel beam expand device (optical power density adjusting device), the 12-focusing system, 13-frequency doubling system, 14-are walked from compensation arrangement, 15-and frequency system;
Fig. 2 is the schematic diagram of a kind of power density adjusting device of the present utility model;
The compound mode 1 of confocal concavees lens of Fig. 2 (a) and convex lens
The compound mode 2 of confocal concavees lens of Fig. 2 (b) and convex lens
The compound mode 3 of confocal concavees lens of Fig. 2 (c) and convex lens
Three groups of beam expanding lenss of Fig. 2 (d) are positioned over a rotatable disk schematic diagram
Fig. 3 is a kind of schematic diagram of walking from compensation arrangement of the present utility model;
The separation schematic diagram of Fig. 3 (a)～different birefringece crystal length of Fig. 3 (c)
The crystal of three different lengths of Fig. 3 (d) is positioned over a rotatable disk schematic diagram
Fig. 4 is the schematic diagram of the frequency tripling system of the utility model embodiment 3;
Fig. 4 (a) is the index path of frequency tripling system
Fig. 4 (b) is the ray plot of frequency tripling system
41-parallel beam expand device (optical power density adjusting device), the 42-focusing system, the 43-frequency doubling system, 44-parallel beam expand device, 45-are walked from compensation arrangement, 46-focusing system, 47-and frequency system;
Fig. 5 is the schematic diagram of the frequency tripling system of the utility model embodiment 4;
Fig. 5 (a) is the frequency tripling system schematic
The concrete structure figure of Fig. 5 (b) power density adjusting device 51
Fig. 5 (c) rotates schematic diagram from compensation arrangement 54 along the z direction
The continuous adjustable light power density regulating apparatus of 51-, the 52-focusing system, 53-frequency doubling system, 54-are walked from compensation arrangement, 55-and frequency system, 56-concavees lens, 57-convex lens, 58-convex lens;
Fig. 6 is the schematic diagram of a kind of all solid state laser described in the utility model;
61-parallel beam expand device (optical power density adjusting device), 62-focusing system, 63-frequency doubling system, 64-walk from compensation arrangement, 65-and frequency system, 66a～66f: speculum, and 67-acoustooptic modulation Q opens the light, the 68-operation material, the 69a-semiconductor laser, 69b-focus lamp, 69c-speculum.
Embodiment
Below, describe embodiment of the present utility model in conjunction with the accompanying drawings in detail.
Embodiment 1:
Fig. 1 is the schematic diagram of frequency tripling described in the utility model system, and wherein Fig. 1 (a) is the index path of frequency tripling system, can be clearly seen that the expansion bundle and the focusing situation of light beam from Fig. 1 (a); Fig. 1 (b) is the ray plot of frequency tripling system, can be clearly seen that walking from the compensation situation of light beam from Fig. 1 b.This system comprises parallel beam expand device (power density adjusting device) 11, focusing system 12, and frequency doubling system 13 is walked from compensation arrangement 14 and frequency system 15; Wherein parallel beam expand device 11 is made up of a pair of confocal concavees lens and convex lens, fundamental frequency light is exaggerated certain proportion through its spot diameter behind the parallel beam expand device, expand hot spot behind the bundle be focused focus on after device is collected frequency multiplication and and frequently in the system, according to formula (1), for identical focusing system, the size of its focal beam spot and the diameter of launching spot are inversely proportional to, so fundamental frequency light is focused device after by parallel beam expand device again and assembles, can improve fundamental frequency light the frequency multiplication device and and the power density in the device frequently, improve frequency multiplication and and conversion efficiency frequently.
Frequency doubling system 13 of the present utility model is made up of LBO and TEC temperature control system, and wherein the cutting angle of LBO is theta=90, phi=0, and the mode that adopts temperature to mate, the coupling temperature is 150 ℃, is provided by the TEC temperature control system.Owing to adopt the temperature matching way, frequency doubled light and fundamental frequency light can not walk from, shg efficiency is only determined by the power density of fundamental frequency light.The power density of fundamental frequency light can be adjusted by beam-expanding system on the one hand, also can move frequency doubling system by prolonging the x direction, change the distance between frequency doubling system and the focusing system, and then the power density of change fundamental frequency light in frequency-doubling crystal, the advantage of this mode is to adjust the power density of fundamental frequency light in frequency doubling system separately, and can not influence fundamental frequency light with the frequency system in power density.
Of the present utility model and frequency system 15 also is made up of LBO and TEC temperature control system, the cutting angle of different with frequency doubling system is LBO is theta=44.6, phi=90, adopt the mode of angle coupling, temperature is controlled at 55 ℃ by the TEC temperature control system, and according to the nonlinear optics principle, can calculate the deviation angle of LBO under this kind condition is 0.54 °, for length is the LBO of 20mm, and it walks from length is 188.5 μ m.If do not walk from compensation arrangement, fundamental frequency light enters with frequency doubled light and just begins to separate gradually after the system frequently, makes conversion efficiency descend gradually, therefore in order to improve conversion efficiency, needs to insert from compensation arrangement.
Of the present utility modelly walk to constitute by a birefringece crystal from compensation arrangement 14, by the nonlinear optics principle as can be known, when light beam incides in the birefringece crystal, its o light component and e light component can walk from.Because fundamental frequency light that penetrates from frequency doubling system and frequency doubled light exactly are the mutually perpendicular two-beam in polarization direction, so by selecting the optical axis direction of birefringece crystal, can so that fundamental frequency light and frequency doubled light walk from, and its walk from direction with the frequency system in walk from direction opposite, so can to the frequency system in walk from compensating, improve and conversion efficiency frequently.Preferably, consider the influence of laser power density simultaneously to conversion efficiency, for shown in Figure 1 walking from compensation arrangement, its walk from compensation rate should and frequently system walk from compensation rate 1/3 to 1/2 between.
By system as shown in Figure 1, simultaneously to the power density of laser with walk that the two is optimized from compensation rate, can significantly improve the conversion efficiency of frequency tripling system, realize the laser of output high-power frequency tripling light.
Embodiment 2:
Fig. 2 is the schematic diagram of power density adjusting device described in the utility model (parallel beam expand device), Fig. 2 (a), Fig. 2 (b), Fig. 2 (c) are respectively the combination of three pairs of confocal concavees lens and convex lens, wherein the focal distance ratio of convex lens and concavees lens is respectively 1.5,2,2.5, by optical principle as can be known, directional light is by behind these three groups of beam expanding lenss, spot diameter can be enlarged 1.5,2,2.5 times respectively, according to formula (1) as can be known, its by identical focusing system after, its frequency doubling system with and frequently the power density in the system also by 1.5,2,2.5 times of corresponding raisings.Regulate for convenience, three groups of beam expanding lenss can be positioned on the rotatable disk, shown in Fig. 2 (d), can realize the switching of different beam expanding lenss, thereby realize the variable adjustment of laser power density by the disk rotation.
Fig. 3 is the schematic diagram of walking from compensation arrangement described in the utility model, and Fig. 3 (a), Fig. 3 (b), Fig. 3 (c) are respectively the birefringece crystal of same material, identical cutting angle, different length, wherein two this be that crystal can be quartz, calcite etc.From figure, can obviously find out because fundamental frequency light is different with the frequency doubled light polarization direction, one as one of o light as e light can in birefringece crystal, produce walk from.Under the material situation identical with cutting angle, it walks from amount only relevant with the length of crystal.So can realize away from the adjustment of measuring by the crystal that switches different length.For easy to adjust, the crystal of three different lengths can be positioned on the rotatable disk, shown in Fig. 3 (d), can realize the switching of different length crystal, thereby realize variable adjustment from amount by the disk rotation.
If Fig. 2 (d) and Fig. 3 (d) shown device are installed in the same frequency tripling system, then can search out optimum frequency tripling conversion efficiency by cooperatively interacting between the two.
Embodiment 3:
Fig. 4 is a frequency tripling system of the present utility model, as different from Example 1, it is at frequency doubling system 43 and walk to be inserted with parallel beam expand device 44 again between compensation arrangement 45, walk from compensation arrangement 45 and and frequently be inserted with focusing system 46 between the system 47, and and frequently system can move along the x direction with respect to focusing system 46.
Compare with embodiment 1, the advantage of this system be can by parallel beam expand device 44 and 46 nearly steps of focusing system improve fundamental frequency light and frequency doubled light with the frequency system in power density, because in general, all lower by fundamental frequency light behind the frequency doubling system and frequency doubled light energy, so, need expand bundle again in order still to keep higher power density.And compensation rate and the power density walked from bucking-out system have substantial connection, prior art before all reckons without the influence of power density to the optimal compensation amount when considering to walk from compensation, and according to our experimental result, for the frequency tripling system, its optimal compensation amount is different with the optimal compensation amount that embodiment 1 provides, and it needs further to seek and refinement.
Embodiment 4:
Fig. 5 (a) is the schematic diagram of another frequency tripling system of the utility model.Compare with embodiment 1, the improvement of present embodiment is: power density adjusting device 51 adopts and expands the continuously adjustable parallel beam expand device of beam ratios, realizes continuous adjustment to laser power density by the spot diameter that continuously changes fundamental frequency light; Walk from compensation arrangement 54 and adopt dispersive glass, refractive index by utilizing light makes fundamental frequency light and frequency doubled light separately along with the change of wavelength changes, thereby form and to walk in advance, adopt the advantage of dispersive glass to be to realize away by the angle of rotatory dispersion glass continuous adjusting from compensation rate from amount.
Compare with embodiment 1,3, the maximum characteristics of present embodiment are to realize laser power density and the continuous adjusting of walking from compensation rate, more help seeking the optimum translation condition, can significantly improve conversion efficiency.Owing to walk from compensation arrangement to adopt dispersive glass, greatly reduce the cost of whole system simultaneously, and easy to adjust, make whole system simple.
The concrete structure of power density adjusting device 51 is shown in Fig. 5 (b), whole system can be made of three eyeglasses, the convex lens 57,58 of two gap variables constitute the variable convex lens group of focal length, by adjusting the distance between concavees lens 56 and the convex lens group, change the distance between the convex lens 57,58 simultaneously, can realize expanding the continuous variation of beam ratio.
Walking from compensation arrangement 54 has dull and stereotyped fused silica glass to constitute, after fundamental frequency light and frequency doubled light are injected plate glass at a certain angle, owing to the difference of refractive index is separated, pass another surface parallel ejaculation in back of plate glass, exist one in advance to walk from amount between fundamental frequency light and the frequency doubled light this moment, walks in advance from the big I of measuring by realizing along z direction Rotating Plates glass.Usually selecting the thickness of plate glass is 10mm.
Embodiment 5
Fig. 6 is the schematic diagram of all solid state laser described in the utility model, and speculum 66a～66f constitutes resonant cavity jointly, and the semiconductor laser 69a of 888nm and focus lamp 69b, speculum 69c constitute the pump light system jointly, to the Nd:YVO as operation material
4Laser crystal 68 carries out pumping, produces the laser of 1064nm, and acoustooptic modulation Q opens the light and 67 places a side of laserresonator that laser is modulated, and makes whole system output pulsed light; Pulse laser is injected after the outgoing mirror output by parallel beam expand device 61, focusing system 62, frequency doubling system 63, is walked from compensation arrangement 64 and the frequency tripling system that constitutes of system 65 frequently, produce the laser of 355nm, by parallel beam expand device 61 with walk the optimization that realizes the output of 355nm laser from compensation arrangement 64.
Although the utility model is made specific descriptions with reference to the above embodiments, but for the person of ordinary skill of the art, should be appreciated that and can make amendment or improve based on the disclosed content of the utility model, and these modifications and improving all within spirit of the present utility model and scope.
Claims (10)
1. an all solid state frequency tripling laser is characterized in that comprising a LASER Light Source, fundamental frequency optical power density adjusting device, focusing system, frequency doubling system, walks from compensation arrangement and frequency system; Wherein, the basic frequency laser of described LASER Light Source output successively through described fundamental frequency optical power density adjusting device, focusing system, frequency doubling system, walk from compensation arrangement and export after the system frequently.
2. frequency tripling laser as claimed in claim 1 is characterized in that described optical power density adjusting device is one group of beam expanding lens; Described beam expanding lens is a pair of confocal concavees lens and convex lens.
3. frequency tripling laser as claimed in claim 2, it is characterized in that described optical power density adjusting device comprises a different many groups beam expanding lens and the rotatable rotating disks of expansion beam ratio, many groups beam expanding lens that this expansion beam ratio is different is installed on respectively on the described rotatable rotating disk.
4. frequency tripling laser as claimed in claim 1 is characterized in that described optical power density adjusting device is an expansion beam ratio continuously controllable beam expanding lens; Described beam expanding lens comprises concavees lens and the variable convex lens group of a focal length, and the variable convex lens group of wherein said focal length comprises the convex lens that two spacings are adjustable; Distance between described convex lens group and the described concavees lens is adjustable.
5. frequency tripling laser as claimed in claim 1, it is characterized in that described walking from compensation arrangement is a birefringece crystal, the polarization direction of fundamental frequency light or frequency doubled light is consistent in one optical axis of birefringece crystal and the described frequency doubling system emergent light, and make fundamental frequency light and frequency doubled light walk from direction with described and frequently in the system walk from direction opposite.
6. frequency tripling laser as claimed in claim 5, it is characterized in that described frequency doubling system emergent light through described walk from fundamental frequency light and frequency doubled light behind the compensation arrangement walk from amount for fundamental frequency light and frequency doubled light described and walk half frequently in the system from amount.
7. frequency tripling laser as claimed in claim 5 is characterized in that describedly walking to comprise a birefringece crystal and the rotatable rotating disk that a group length is different from compensation arrangement that the birefringece crystal that this group length is different is installed on respectively on the described rotatable rotating disk.
8. frequency tripling laser as claimed in claim 1 is characterized in that describedly walking to comprise a chromatic dispersion plate glass and a rotatable rotary platform from compensation arrangement that described chromatic dispersion plate glass is installed on the described rotatable rotary platform.
9. frequency tripling laser as claimed in claim 8 is characterized in that described chromatic dispersion plate glass is fused silica glass or ZF
2Glass, its thickness is less than or equal to 10mm; Be coated with the anti-reflection film of fundamental frequency light and two kinds of different wave lengths of frequency doubled light on the two logical light faces of described chromatic dispersion plate glass.
10. frequency tripling laser as claimed in claim 1 is characterized in that described frequency doubling system and describedly walks also to be inserted with an optical power density adjusting device between compensation arrangement; Described walking from compensation arrangement and described and also be inserted with a focusing system between the system frequently.
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| CN104104005A (en) * | 2014-06-06 | 2014-10-15 | 中国科学院理化技术研究所 | Walk-off compensation device of double-lath structure |
| CN107946891A (en) * | 2017-12-14 | 2018-04-20 | 湖北工业大学 | A kind of high-power ultraviolet solid-state laser |
| CN112269260A (en) * | 2020-09-27 | 2021-01-26 | 北京卓镭激光技术有限公司 | Laser switching device and method |
| CN114374139A (en) * | 2021-11-30 | 2022-04-19 | 天津大学佐治亚理工深圳学院 | Method for generating femtosecond deep ultraviolet laser based on compensation plate and laser |
| CN114442314A (en) * | 2022-01-04 | 2022-05-06 | 中国科学院上海光学精密机械研究所 | Temperature-controlled birefringent crystal-based short pulse laser third-order dispersion compensation and regulation and control method |
-
2010
- 2010-08-26 CN CN2010205059210U patent/CN201853941U/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104104005A (en) * | 2014-06-06 | 2014-10-15 | 中国科学院理化技术研究所 | Walk-off compensation device of double-lath structure |
| CN104104005B (en) * | 2014-06-06 | 2017-02-15 | 中国科学院理化技术研究所 | Walk-off compensation device of double-lath structure |
| CN107946891A (en) * | 2017-12-14 | 2018-04-20 | 湖北工业大学 | A kind of high-power ultraviolet solid-state laser |
| CN107946891B (en) * | 2017-12-14 | 2019-09-17 | 湖北工业大学 | A kind of high-power ultraviolet solid-state laser |
| CN112269260A (en) * | 2020-09-27 | 2021-01-26 | 北京卓镭激光技术有限公司 | Laser switching device and method |
| CN112269260B (en) * | 2020-09-27 | 2023-03-21 | 北京卓镭激光技术有限公司 | Laser switching device and method |
| CN114374139A (en) * | 2021-11-30 | 2022-04-19 | 天津大学佐治亚理工深圳学院 | Method for generating femtosecond deep ultraviolet laser based on compensation plate and laser |
| CN114442314A (en) * | 2022-01-04 | 2022-05-06 | 中国科学院上海光学精密机械研究所 | Temperature-controlled birefringent crystal-based short pulse laser third-order dispersion compensation and regulation and control method |
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