CN107086430B - A kind of third harmonic generation ultraviolet laser - Google Patents
A kind of third harmonic generation ultraviolet laser Download PDFInfo
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- CN107086430B CN107086430B CN201710433213.7A CN201710433213A CN107086430B CN 107086430 B CN107086430 B CN 107086430B CN 201710433213 A CN201710433213 A CN 201710433213A CN 107086430 B CN107086430 B CN 107086430B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
- H01S3/109—Frequency multiplication, e.g. harmonic generation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/06708—Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
- H01S3/06716—Fibre compositions or doping with active elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/10084—Frequency control by seeding
Abstract
The invention discloses a kind of third harmonic generation ultraviolet laser, above-mentioned third harmonic generation ultraviolet laser includes the seed source, laser amplifier and three times frequency module of light connects, and seed source is gain switch picosecond seed source；Laser amplifier is the casacade multi-amplifier of light connects；Three times frequency module successively includes condenser lens, two frequency-doubling crystals and its heating furnace, frequency tripling crystal and its heating furnace, ultraviolet light separator and collimator in optical path, wherein condenser lens, two frequency-doubling crystals and its heating furnace, frequency tripling crystal and its coaxial setting of heating furnace, two frequency-doubling crystals are three lithium borates (LBO) crystal of a type-Ⅱphase matching, and frequency tripling crystal is three lithium borates (LBO) crystal of two type-Ⅱphase matchings.According to the third harmonic generation ultraviolet laser that the present invention realizes, the seed light repetition rate of generation is adjustable, adjustable pulse width, and be picosecond magnitude, and be single mode, linearly polarized light, after amplification and frequency tripling, the feature of ultraviolet laser is consistent with seed light, and power is up to 50% up to 35W, efficiency.
Description
Technical field
The invention belongs to field of lasers, more particularly to a kind of third harmonic generation ultraviolet laser.
Background technique
Ultraviolet (UV) laser has in industrial micro Process field to be widely applied, and such as the mark of industrial part, drilling, is drawn
Piece, welding, cutting and micro Process, electronic package, the micro-component stereo shaping of medical instrument etc..In addition, in micro- electricity
Sub-, spectrum analysis, optical data storage, CD control, Atmospheric Survey, photochemistry, photobiology, space optical communication, laser lure
The material atom fluorescence and UV of hair, which absorb (fluorescence of such as Si atom is induced, freezes and controlled) and medical field, also to be had widely
Application prospect.
Especially in industrial processing field, since the short photon energy of the wavelength of UV laser is high, focal beam spot can be smaller,
And high-energy UV photon can directly destroy the chemical bond of material, relative to " hot melt " process of infrared laser, UV laser processing
When be " cold erosion " effect, this allow processing size it is smaller, the precision of processing is improved.Existing industrial processing field
The method for generating ultraviolet light is by solid-state, semiconductor laser as pumping source, and it is purple to generate frequency tripling by frequency doubling non-linear's technology
Outer light.However, the ultraviolet light generated in this way is mostly multi-mode laser, beam quality is bad, is not able to satisfy industrial fine
The demand of processing.In addition, being needed in system largely using the optical element in own space, structure is complicated, increases debugging difficulty, no
Conducive to industrial mass production.
(patent name is " 10W grades of semiconductor diode pump to the Chinese patent application of Publication No. CN201937162U
355nm ultraviolet laser ") and Publication No. CN105633785A Chinese patent application (patent name be a kind of " mode locking
The light path system of ultraviolet laser ") in, it is that a large amount of optical mirror slip is applied using semiconductor pumped ultraviolet laser
Resonant cavity of different shapes is formed, the requirement to optical alignment and fixation is relatively high.In addition diode pumped solid state laser light
Light conversion efficiency is low, to obtain high-power ultraviolet light output, need to form array using multiple semiconductor lasers, increase system
Complexity and energy consumption.
Currently, the exploitation that the rapid development of optical fiber laser is ultraviolet laser provides more choices, such as apply
(name of patent application is the " gain switch type picosecond of adjustable pulse width for number Chinese invention patent application for being 201110156920.9
Pulse seed source ") it is referred to the optical fiber laser based on MOPA structure, it is identical to obtain by the seed light for amplifying high quality
The high power laser light of mode, high conversion efficiency, output facula is high-quality, and picosecond of single mode, linear polarization is generated using the seed source
Laser has the characteristics that high-precision, high stability, is very suitable to industrial processes, how to utilize it in ultraviolet laser field,
It is higher to develop performance, it is more simple and compact, and it is suitble to the new laser of industrial production application, it is urgently to be resolved at present
The technical issues of.
Summary of the invention
Aiming at the above defects or improvement requirements of the prior art, the present invention provides a kind of third harmonic generation ultraviolet laser,
The laser includes the seed source, laser amplifier and three times frequency module of light connects, which is characterized in that described kind
Component is gain switch picosecond seed source；The laser amplifier is the casacade multi-amplifier of light connects；The three times frequency module exists
It successively include condenser lens, two frequency-doubling crystals and its heating furnace, frequency tripling crystal and its heating furnace, ultraviolet light separator in optical path
And collimator, wherein the condenser lens, two frequency-doubling crystal and its heating furnace, the frequency tripling crystal and its heating furnace are total
Axis setting, two frequency-doubling crystals are three lithium borates (LBO) crystal of a type-Ⅱphase matching, and frequency tripling crystal is two type-Ⅱphase matchings
Three lithium borates (LBO) crystal.
Further, the two frequency-doubling crystals principal plane is X/Y plane, and crystal angle is θ=90 °,Described three times
Frequency principal plane of crystal is YZ plane, and crystal angle isThe X of the Z axis of two frequency-doubling crystal and the frequency tripling crystal
Axis direction is identical.
Further, the product of the frequency tripling crystal length and deviation angle is the two frequency-doubling crystals length and deviation angle
2 times of product.
Further, the two frequency-doubling crystals front and rear surfaces all plate the anti-reflection film of infrared light and green light, and the frequency tripling is brilliant
Body front surface plates infrared light and green light anti-reflection film, cutting angle are Brewster angle.
Further, the fiber amplifier includes the level-one mode pump amplifier set gradually, the pumping of second level multimode
Amplifier, three-level multimode pumped amplifier and level Four multimode pumped amplifier.
Further, the level-one mode pump amplifier is that unidirectionally the first polarization-maintaining of pumping or two directional pump mixes ytterbium light
It is fine；The second level multimode pumped amplifier is the second polarization-maintaining Yb dosed optical fiber of unidirectional pumping or two directional pump；The three-level is more
Mould pumped amplifier is the third polarization-maintaining Yb dosed optical fiber of unidirectional pumping or two directional pump；The level Four multimode pumped amplifier is
4th polarization-maintaining Yb dosed optical fiber of unidirectional pumping or two directional pump.
Further, the gain switch picosecond seed source includes the gain switch laser set gradually along optical path, light
Fine coupler, single longitudinal mode locking device and chirp compensation module, the output end of the gain switch laser pass through fiber coupling
Device is connect with the single longitudinal mode locking device and the chirp compensation module respectively.
Further, the gain switch laser is by electric pulse generator, signal generator, DC bias supplies and F-
P semiconductor laser is sequentially connected composition.
Further, the single longitudinal mode locking device is DFB semiconductor laser or fiber grating；The chirp compensation
Module is chirp grating or chirp compensation photon band-gap optical fiber.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, have below beneficial to effect
Fruit: using gain switch picosecond seed source, and the seed light repetition rate of generation is adjustable, adjustable pulse width, and is picosecond magnitude, and
And be single mode, linearly polarized light, amplified with after frequency tripling, the feature of ultraviolet laser is consistent with seed light, and power is up to 35W, effect
Rate is up to 50%；Whole equipment is all optical fibre structure, simple and compact for structure not during complicated optical fiber align, is suitble to industry
Production and application.
Detailed description of the invention
Fig. 1 is the system composed structure schematic diagram for the third harmonic generation ultraviolet laser realized according to the present invention；
Fig. 2 is the two angle automatching lbo crystals installation matching schematic diagram in the ultraviolet laser realized according to the present invention；
(a) it is installation in the same direction, is (b) reversed installation, (c) LBO1 is non-critical phase matching (NCPM) and Temperature Matching, and LBO2 is two types
It is infrared light with wherein solid line, pecked line is green light, and dotted line is ultraviolet light；
Fig. 3 is the ultraviolet light conversion efficiency and infrared light obtained in the laser realized according to the present invention using distinct methods
The relationship of power；
Fig. 4 is that the relationship between repetition and uv power and transfer efficiency in the laser realized according to the present invention is shown
It is intended to.
In all the appended drawings, identical appended drawing reference is used to denote the same element or structure, in which: 1-gain switch
Picosecond seed source, 2-electric pulse generators, 3-signal amplifiers, 4-direct current biasings, 5-DC power supplies, 6-F-P semiconductors
Laser, 7-DFB semiconductor lasers, 8-fiber couplers, 9-chirp gratings, 10-fiber amplifiers, 11-polarization-maintainings every
From device, 12-forward direction wavelength division multiplexers (WDM), 13-forward direction mode pump laser devices, the 14-the first polarization-maintaining Yb dosed optical fiber, 15-
Backward wavelength division multiplexer, 16-backward mode pump laser devices, 17-polarization-maintaining isolators, 18-forward direction multimode pumping couplers,
19-forward direction multimode pump lasers, the 20-the second polarization-maintaining Yb dosed optical fiber, 21-backward multimode pumping couplers, 22-is backward more
Mould pumping organ's device, 23-polarization-maintaining isolators, 24-forward direction multimode pumping couplers, 25-forward direction multimode pump lasers,
26-third polarization-maintaining Yb dosed optical fibers, 27-backward multimode pumping couplers, 28-backward multimode pump lasers, 29-polarization-maintainings every
From device, 30-dichroic mirrors (reflect signal light, transmit pump light), 31-signal coupled lens, the 32-the four polarization-maintaining Yb dosed optical fiber,
33-pump coupling lens, 34-dichroic mirrors (reflection signal light, transmit pump light), 35-dichroic mirrors (reflected pump light, transmission
Signal light), 36-pumping collimation lenses, 37-multimode pump lasers, 38-beam expanding lens, 39-polarization-maintaining isolators, 40-three
Times frequency module, 41-ir reflectors, 42-condenser lenses, 43-two frequency-doubling crystals and heating furnace, 44-frequency tripling crystal and
Heating furnace, 45-ultraviolet light separators, 46-ultraviolet light separators, 47-collimators.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting a conflict with each other can be combined with each other.
As shown in Figure 1, a kind of third harmonic generation ultraviolet laser of the invention, including pumping source, fiber amplifier 10 and frequency multiplication
Module 40.
Wherein: pumping source adjustable, adjustable pulse width gain switch picosecond seed source 1 for repetition rate.The gain switch skin
Second seed source 1 includes gain switch laser, fiber coupler 8, single longitudinal mode locking device and the chirp of polarization maintaining optical fibre connection
Compensating module, the output end of gain switch laser by fiber coupler 8 respectively with single longitudinal mode locking device and chirp compensation
Module connection.The gain switch laser of the present embodiment by electric pulse generator 2, signal amplifier 3, DC bias current source 4,
The F-P semiconductor laser 6 of 5 and 1033nm is constituted.The dfb semiconductor that single longitudinal mode locking device in the present embodiment is 1033nm
Laser 7, chirp compensation module are chirp grating 9.
When work, electric pulse generator 2 generates the adjustable radiofrequency signal of repetition rate, and repetition rate adjustable range is in 10k
~100MHz changes direct current biasing 4 by adjusting DC power supply 5, makes F-P semiconductor laser 6 in threshold value hereinafter, then radio frequency is believed
Number through signal amplifier 3 amplification after load gain can be generated on F-P semiconductor laser 6.F-P semiconductor laser 6 generates
Oscillation, before second oscillation peaks occurs, electric pulse gain disappears, and F-P semiconductor laser 6 exports the short arteries and veins of picosecond at this time
Punching.The longitudinal mode for using the DFB semiconductor laser 7 of 1033nm that F-P semiconductor laser 6 is generated is in locking shape always
State can arbitrarily adjust the repetition rate of electric pulse generator 2, to adjust the repetition rate of output optical pulse.9 needle of chirp grating
The chirp distribution of output pulse is used to compress or stretched pulse width, to realize adjustable pulse width, pulse-width regulated range 50~
500ps.The seed optical power that gain switch picosecond pulse seed source 1 generates is generally within 1mW.
Fiber amplifier 10 is total to level Four, including level-one mode pump source amplifier, the second level multimode pumping source set gradually
Amplifier, three-level multimode pumping source amplifier and level Four multimode pump source amplifier.Between seed source and fiber amplifier 10, light
Between the level Four of fiber amplifier 10, respectively by polarization-maintaining isolator 11,17,23,29,39 between fiber amplifier and three times frequency module
Separate.The first polarization-maintaining Yb dosed optical fiber 14 that level-one mode pump amplifier is 5/130 μm, using two directional pump mode, forward direction
Mode pump laser device 13 and backward mode pump laser device 16 are 200mW/976nm specification；Second level multimode pumped amplifier
For 10/125 μm of the second polarization-maintaining Yb dosed optical fiber 20, using two directional pump mode, forward direction multimode pump laser 19 and backward
Multimode pump laser 22 is 7W/915nm specification；Three-level multimode pumped amplifier is that 30/250 μm of third polarization-maintaining mixes ytterbium light
Fibre 26, using two directional pump mode, forward direction multimode pump laser 25 and backward multimode pump laser 28 are 20W/
975nm specification；The 4th polarization-maintaining Yb dosed optical fiber 32 that level Four multimode pumped amplifier is 85/260 μm, the optical fiber are photonic crystal light
Fibre, using backward pump mode, multimode pump laser 37 is 180W/975nm specification.
The work process of fiber amplifier 10 are as follows: the seed light for the 1033nm that above-mentioned gain switch picosecond seed source 1 generates
By polarization-maintaining isolator 11, the laser of its only one polarization state is made to enter fiber amplifier 10, guarantees the linear polarization of laser
Property.Power before from the 200mW/976nm of level-one single mode amplifier to the generation of mode pump laser device 13 is 200mW, wavelength is
The pump light and 1033nm seed light of 976nm is coupled into the first polarization-maintaining Yb dosed optical fiber 14 to wavelength division multiplexer (WDM) 12 by preceding,
It realizes and amplifies in its fibre core, while the backward mode pump laser device 16 that power is 200mW, wavelength is 976nm passes through retonation wave
Division multiplexer 15 is coupled into the first polarization-maintaining type Yb dosed optical fiber 14, amplifies seed light.Pass through front and back two directional pump, seed light
Power can be amplified to 50mW.The unidirectional pump mode that level-one amplification can amplify only with forward direction or amplify backward；Level-one is put
Laser after big passes through polarization-maintaining isolator 17 again and enters second level multimode pumped amplifier, the 7w/ of second level multimode pumped amplifier
The pump light that the forward direction multimode pump laser 19 of 915nm issues is mixed before to multimode pumping coupler 18 into the second polarization-maintaining
Amplify seed light in the covering of ytterbium optical fiber 20, while the pumping that the backward multimode pump laser 22 of 7w/915nm issues
Amplify seed light in the covering that light enters the second polarization-maintaining Yb dosed optical fiber 20 to multimode pumping coupler 21 after passing through.Second level
Amplification continues laser to be amplified to 500mW.Likewise, second level amplification can also be used it is preceding to amplification and the unidirectional pumping amplified backward
Mode；The laser of second level amplification passes through polarization-maintaining isolator 23 again and enters three-level multimode amplifier, except it uses the of 30/250 μm
Outside the forward direction multimode pump laser 25 of three polarization-maintaining Yb dosed optical fibers 26 and 20W/976nm, backward multimode pump laser 28, work
Principle is identical as second level amplification.Certainly, three-level amplifies the unidirectional pump mode that preceding Xiang Fang great can also be used or amplify backward；Most
Afterwards, the laser of three-level amplification passes through polarization-maintaining isolator 29, and dichroic mirror (reflection signal light, transmit pump light) 30, signal coupling is saturating
Mirror 31 enter 32 fibre core of the 4th polarization-maintaining Yb dosed optical fiber in, backward 37 pump light of multimode pump laser through pump collimation lens 36,
Dichroic mirror (reflected pump light, transmission signal light) 35, dichroic mirror (reflection signal light, transmit pump light) 34, pump coupling lens
Signal light is set to amplify in 33 the 4th polarization-maintaining Yb dosed optical fibers 32 of entrance.After level Four is amplified, the power of laser can amplify
To 70W.
After 4 grades of amplifications, power 70W, wavelength 1033nm, the picosecond laser that repetition is 300kHz pass through collimating mirror 38
Enter three times frequency module 40 with polarization-maintaining isolator 39.Three times frequency module includes ir reflector 41, condenser lens 42, two frequencys multiplication
Crystal and heating furnace 43, frequency tripling crystal and heating furnace 44, ultraviolet light separator 45, ultraviolet light separator 46 and collimator 47.
Wherein condenser lens 42, two frequency-doubling crystals and heating furnace 43, frequency tripling crystal and the coaxial setting of heating furnace 44.Its detailed process
Are as follows: the infrared laser (P-polarized light) that diameter is the 1033nm of 2mm is after the lens 42 of focal length 300mm focus, in two frequency-doubling crystals
And green light is generated in heating furnace 43；The frequency-tripled effect that green light and remaining infrared light generates in crystal and heating furnace 43 projects purple
Outer light；Ultraviolet light is extracted by the ultraviolet light separator 46 of two panels, then ultraviolet light is collimated using collimator 47, is obtained
The ultraviolet light of high quality.
As shown in Fig. 2 (a), two frequency-doubling crystals be a type angle automatching LBO, Z-direction outwardly, length 15mm, θ=
90 °,Front and rear surfaces plate the anti-reflection film of 1033nm+516.5nm, and the temperature of heating furnace is 50 DEG C.For a type angle
It spends for matched lbo crystal, infrared light is o light, and green light is e light, and the process of two frequencys multiplication is o+o → e, due toGreen light
Deviation angle be greater than 0 be 4.1mrad.Frequency tripling crystal be two type angle automatching LBO, X-direction outwardly, length 15mm, θ=
50.8 °,Front surface plates the anti-reflection film of 1033nm+516.5nm, and plated film is not Brewster angle cutting, angle to rear surface
It is 32 °, the temperature of heating furnace is 45 DEG C.For the lbo crystal of two type angle automatchings, infrared light, ultraviolet light is o light, green
Light is e light, and the process of frequency tripling is o+e → o, and green light deviation angle is 9.3mrad.Since ultraviolet light is o light, so rear surface is not
Plated film is cut into Brewster angle, and ultraviolet light can be transmitted all.Identical as LBO2 major axes orientation additionally, due to LBO1, LBO1 is
Similar uniaxial negative crystal, LBO2 are similar positive uniaxial crystal, and green light walk-off effect in two crystal can mutually compensate.In order to
Realize that better walk-off effect compensates, the product of LBO2 length and deviation angle is 2 times of the product of LBO1 length and deviation angle, and
Girdling the waist among LBO1 and LBO2 after infrared light focusing.Extraordinary walk-off effect compensation may be implemented in the structure of Fig. 2 (a),
It tests as a comparison, compares the ultraviolet light conversion efficiency of three kinds of structures in Fig. 2, as shown in Figure 3.It is obvious that walk-off effect is got over
Good is compensated, and ultraviolet light conversion efficiency is higher.
It is illustrated in figure 4 using gain switch seed source, by level Four fiber amplifier, the ultraviolet light that then frequency tripling obtains
The curve that power and transfer efficiency change with laser repetition rate.It is obvious that maximal ultraviolet optical power is 33W in figure, highest turns
Changing efficiency is 50%.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (12)
1. a kind of third harmonic generation ultraviolet laser, the laser includes the seed source (1) of light connects, laser amplifier (10) and three
Times frequency module (40), which is characterized in that the seed source (1) is gain switch picosecond seed source (1)；The laser amplifier
It (10) is the casacade multi-amplifier of light connects；The three times frequency module (40) successively includes condenser lens (42), two times in optical path
Frequency crystal and its heating furnace (43), frequency tripling crystal and its heating furnace (44), ultraviolet light separator (45,46) and collimator
(47), wherein the condenser lens (42), two frequency-doubling crystal and its heating furnace (43), the frequency tripling crystal and its heating
Furnace (44) coaxial setting, two frequency-doubling crystals are three lithium borates (LBO) crystal of a type-Ⅱphase matching, and frequency tripling crystal is two class phases
Matched three lithium borate (LBO) crystal in position.
2. third harmonic generation ultraviolet laser as described in claim 1, which is characterized in that the two frequency-doubling crystals principal plane is flat for XY
Face, crystal angle are θ=90 °,The frequency tripling principal plane of crystal is YZ plane, and crystal angle isIt is described
The Z axis of two frequency-doubling crystals is identical as the X-direction of the frequency tripling crystal.
3. third harmonic generation ultraviolet laser as claimed in claim 1 or 2, which is characterized in that the frequency tripling crystal length with walk
The product of digression is 2 times of the product of the two frequency-doubling crystals length and deviation angle.
4. third harmonic generation ultraviolet laser as claimed in claim 3, which is characterized in that the two frequency-doubling crystals front and rear surfaces are all plated
The anti-reflection film of infrared light and green light, the frequency tripling crystal front surface plating infrared light and green light anti-reflection film, cutting angle are Bruce
Special angle.
5. third harmonic generation ultraviolet laser as claimed in claim 4, which is characterized in that the fiber amplifier (10) includes successively
Level-one mode pump amplifier, second level multimode pumped amplifier, three-level multimode pumped amplifier and the pumping of level Four multimode of setting
Amplifier.
6. third harmonic generation ultraviolet laser as claimed in claim 5, which is characterized in that the level-one mode pump amplifier is single
To pumping or the first polarization-maintaining Yb dosed optical fiber (14) of two directional pump；The second level multimode pumped amplifier be unidirectional pumping or
Second polarization-maintaining Yb dosed optical fiber (20) of two directional pump；The three-level multimode pumped amplifier is unidirectional pumping or two directional pump
Third polarization-maintaining Yb dosed optical fiber (26)；The level Four multimode pumped amplifier is that unidirectionally the 4th polarization-maintaining of pumping or two directional pump is mixed
Ytterbium optical fiber (32).
7. the third harmonic generation ultraviolet laser as described in any one of claim 1-2 or 4-6, which is characterized in that the gain
Switch picosecond seed source (1) includes the gain switch laser set gradually along optical path, fiber coupler (8), single longitudinal mode locking
Device and chirp compensation module, the output end of the gain switch laser by fiber coupler (8) respectively with the Dan Zong
Mode locking device is connected with the chirp compensation module.
8. third harmonic generation ultraviolet laser as described in claim 3, which is characterized in that the gain switch picosecond seed source
It (1) include the gain switch laser set gradually along optical path, fiber coupler (8), single longitudinal mode locking device and chirp compensation
Module, the output end of the gain switch laser by fiber coupler (8) respectively with the single longitudinal mode locking device and institute
State the connection of chirp compensation module.
9. third harmonic generation ultraviolet laser as claimed in claim 7, which is characterized in that the gain switch laser is by electric pulse
Generator (2), signal generator (3), DC bias supplies and F-P semiconductor laser (6) are sequentially connected composition.
10. third harmonic generation ultraviolet laser as claimed in claim 8, which is characterized in that the gain switch laser is by electric arteries and veins
It rushes generator (2), signal generator (3), DC bias supplies and F-P semiconductor laser (6) and is sequentially connected composition.
11. third harmonic generation ultraviolet laser according to claim 9, it is characterised in that: the single longitudinal mode locking device is DFB
Semiconductor laser (7) or fiber grating；The chirp compensation module is chirp grating (9) or chirp compensation photon band gap
Optical fiber.
12. third harmonic generation ultraviolet laser according to claim 10, it is characterised in that: the single longitudinal mode locking device is
DFB semiconductor laser (7) or fiber grating；The chirp compensation module is chirp grating (9) or chirp compensation photon
Band gap fiber.
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| CN108767640A (en) * | 2018-05-25 | 2018-11-06 | 国科世纪激光技术（天津）有限公司 | A kind of novel low ultraviolet solid state laser with high green light |
| CN108988107A (en) * | 2018-08-15 | 2018-12-11 | 武汉安扬激光技术有限责任公司 | A kind of femtosecond ultraviolet laser |
| CN109830884B (en) * | 2019-03-28 | 2021-05-14 | 上海交通大学 | Modular vacuum ultraviolet laser device |
| CN114374137B (en) * | 2021-12-29 | 2024-03-26 | 武汉安扬激光技术股份有限公司 | Optical fiber ultraviolet femtosecond laser |
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