CN201778106U - Rectangular plane magnetic control cathode structure in vacuum coating equipment - Google Patents
Rectangular plane magnetic control cathode structure in vacuum coating equipment Download PDFInfo
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- CN201778106U CN201778106U CN2010202715557U CN201020271555U CN201778106U CN 201778106 U CN201778106 U CN 201778106U CN 2010202715557 U CN2010202715557 U CN 2010202715557U CN 201020271555 U CN201020271555 U CN 201020271555U CN 201778106 U CN201778106 U CN 201778106U
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Abstract
The utility model relates to a rectangular plane magnetic control cathode structure in vacuum coating equipment. The rectangular plane magnetic control cathode structure comprises a shielding case, a layer of heat-conducting carbon film and a magnetic circuit component, wherein the shielding case is arranged at the peripheries of a cathode body and a target material press strip; the layer of heat-conducting carbon film is arranged between a cooling back plate and the target material; the magnetic circuit component is fixed in the cathode body and located on the lower part of the cooling back plate, and comprises an external permanent magnet made from permanent magnetic material, a magnetic yoke, a magnetic conduction bolt made from magnetic conduction ferro magnetic material or soft magnetic material, an internal permanent magnet made from permanent magnetic material and two shunt blocks made from the magnetic conduction ferro magnetic material or soft magnetic material between the external permanent magnet and the internal permanent magnet; the shunt blocks are fixedly connected to the magnetic yoke through the magnetic conduction bolt; and the external permanent magnet and the internal permanent magnet are stuck on the magnetic yoke. The spatial distribution of the magnetic field of the magnetic circuit component is changed by arrangement of the shunt blocks, the distribution uniformity of the parallel magnetic induction intensity on the surface of the target material is improved, and the utilization rate of the target material is effectively increased.
Description
Technical field
The utility model relates to a kind of vacuum coating film equipment, relates in particular to the rectangular plane magnetic control cathode construction in this vacuum coating film equipment.
Background technology
The rectangular plane magnetic control negative electrode is one of key equipment of present large-area glass filming equipment.
Patent of invention " Magnetron Sputtering Cathode " (contriver Richard P.Welty, United States Patent (USP), the patent No. 4892633) has been introduced a kind of rectangular plane magnetic control negative electrode.This rectangular plane magnetic control cathode needle utilizes the low characteristics of interest rate that the magnetic structure of rectangular plane magnetic control negative electrode is improved to target in the present industrial application.It has increased the splitter of high magnetic permeability in magnetic structure, this structural modification the Distribution of Magnetic Field of negative electrode, improve the homogeneity (as shown in Figure 3) that the parallel magnetic induction density of target material surface distributes, promptly improved the width of target etching runway, improved the utilization ratio of target effectively.In industrial application, the rectangle plane negative electrode of this magnetic structure helps reducing production costs, and shortens and changes the target cycle.
But, there is following shortcoming in the rectangle plane negative electrode of this magnetic structure: because the thinner thickness (generally at 2-3mm) of splitter and be the material of high magnetic permeability, be subjected to the influence of dimensional precision own and high-intensity magnetic field magnetism, when mounted, its assembly precision is difficult to satisfy the requirement of design accuracy, so it is the magnetron cathode of this structure magnetic field homogeneity in the longitudinal direction is difficult to control, therefore relatively poor with its sedimentary uniformity of film.These shortcomings are particularly outstanding in long rectangular plane magnetic control negative electrode (length is greater than 2m) application.
Summary of the invention
The utility model technical issues that need to address have provided the rectangular plane magnetic control cathode construction in a kind of vacuum coating film equipment, are intended to solve the above problems.
In order to solve the problems of the technologies described above, the utility model is achieved through the following technical solutions:
The utility model comprises: two ends are provided with the cover plate of sealing-ring; Fixedly install bench insulator at described cover plate; Cathode is placed on the bench insulator, and is fixed together by insulation screw and cover plate; In the cathode upper fixed cooling backboard is set; Target press strip by the target both sides on described cooling backboard is fixed target; The target press strip is fixedly connected on the cathode; Periphery at cathode and target press strip is provided with shielding case; Between cooling backboard and target, one deck heat conduction carbon film is set also; Also comprise: a magnetic circuit assembly; Described magnetic circuit assembly is fixedly installed in the cathode and is positioned at the bottom of cooling backboard; The magnetic conduction screw that described magnetic circuit assembly comprises the outer permanent magnet be made up of permanent magnet material, yoke, is made up of the ferromagnetic substance or the soft magnetic materials of magnetic conduction, the interior permanent magnet of forming by permanent magnet material and two branching blocks of forming by the ferromagnetic substance or the soft magnetic materials of magnetic conduction between permanent magnet and the interior permanent magnet outside; Branching block is connected on the yoke by the magnetic conduction screw retention; Outer permanent magnet and interior permanent magnet are bonded on the yoke.
Compared with prior art, the beneficial effects of the utility model are: branching block the spatial distribution that has changed magnetic circuit assembly magnetic field is set, improved the homogeneity that the parallel magnetic induction density of target material surface distributes, improved the utilization ratio of target effectively.
Description of drawings
Fig. 1 is the utility model structural representation;
Fig. 2 is the structural representation of magnetic circuit assembly among Fig. 1;
Fig. 3 is the magnetic line of force distribution schematic diagram that the plane magnetic control negative electrode of splitter is set in the magnetic circuit assembly in the prior art;
Fig. 4 is the magnetic line of force distribution schematic diagram that the plane magnetic control negative electrode of branching block is not set in the magnetic circuit assembly;
Fig. 5 is provided with the magnetic line of force distribution schematic diagram of the plane magnetic control negative electrode of branching block in the magnetic circuit assembly for the utility model;
Fig. 6 is provided with the plane magnetic control cathode targets surface of branching block in the magnetic circuit assembly for the utility model parallel magnetic induction density distributes.
Embodiment
Below in conjunction with accompanying drawing and embodiment the utility model is described in further detail:
By Fig. 1, Fig. 2 as seen: the utility model comprises: two ends are provided with the cover plate 1 of sealing-ring 10; Fixedly install bench insulator 2 at described cover plate 1; Cathode 8 is placed on the bench insulator 2, and is fixed together by insulation screw and cover plate 1; In cathode 8 upper fixed cooling backboard 7 is set; Target press strip 4 by target 5 both sides on described cooling backboard 7 is fixing with target 5; Target press strip 4 is fixedly connected on the cathode 8; Periphery at cathode 8 and target press strip 4 is provided with shielding case 9; Between cooling backboard 7 and target 5, one deck heat conduction carbon film 6 is set also; Also comprise: a magnetic circuit assembly 3; Described magnetic circuit assembly 3 is fixedly installed in the cathode 8 and is positioned at the bottom of cooling backboard 7; The magnetic conduction screw 13 that described magnetic circuit assembly 3 comprises the outer permanent magnet 11 be made up of permanent magnet material, yoke 12, is made up of the ferromagnetic substance or the soft magnetic materials of magnetic conduction, the interior permanent magnet of forming by permanent magnet material 14 and two branching blocks of forming by the ferromagnetic substance or the soft magnetic materials of magnetic conduction 15 between permanent magnet 11 and the interior permanent magnet 14 outside; Branching block 15 is fixedly connected on the yoke 12 by magnetic conduction screw 13; Outer permanent magnet 11 and interior permanent magnet 14 are bonded on the yoke 12.
The utility model provides a kind of not only can effectively improve target utilization but also can improve the inhomogeneity rectangular plane magnetic control negative electrode of deposit film.
Constructional feature of the present utility model is that also described branching block adopts ferromagnetic substance and soft magnetic materials to make.
Fig. 4 is the magnetic line of force distribution schematic diagram that the plane magnetic control negative electrode of branching block is not set in the magnetic circuit assembly, Fig. 5 is the utility model is provided with the plane magnetic control negative electrode of branching block 15 in magnetic circuit assembly 3 a magnetic line of force distribution schematic diagram, and Fig. 6 is provided with the plane magnetic control cathode targets surface of branching block 15 in magnetic circuit assembly 3 for the utility model parallel magnetic induction density distributes.Find by contrast, branching block 15 the spatial distribution that has changed magnetic circuit assembly 3 magnetic fields is set, improved the homogeneity that target 5 surperficial parallel magnetic induction density distribute.
In the utility model branching block the spatial distribution that has changed magnetic circuit assembly magnetic field is set, improved the homogeneity that the parallel magnetic induction density of target material surface distributes, improved the utilization ratio of target effectively.
The thickness of branching block is bigger in the utility model, and when being processed into strip, the dimensional precision of itself guarantees that easily assembly precision can satisfy the requirement of design accuracy, so the utility model can guarantee magnetron cathode magnetic field homogeneity in the longitudinal direction.
The utility model is provided with the heat conduction carbon film between target and cooling backboard, increased the heat exchange area of target, and the target cooling fully can be worked under the condition than high power density.
Installation and removal are convenient in structure setting of the present utility model.
Referring to Fig. 1, present embodiment has cover plate 1, bench insulator 2, magnetic circuit assembly 3, target press strip 4, target 5, heat conduction carbon film 6, cooling backboard 7, cathode 8, shielding case 9 and sealing-ring 10.Magnetic circuit assembly 3 is fixedly installed in the cathode 8 and is positioned at the bottom of cooling backboard 7.
In the present embodiment, magnetic circuit assembly 3 comprises outer permanent magnet 11, yoke 12, magnetic conduction screw 13, and interior permanent magnet 14 and branching block 15. branching blocks 15 are fixedly connected on yoke 12 by magnetic conduction screw 13; Outer permanent magnet 11 and interior permanent magnet 14 are bonded on the yoke 12.Branching block 15 and magnetic conduction screw 13 adopt the ferromagnetic substance or the soft magnetic materials of magnetic conduction to make, and outer permanent magnet 11 and interior permanent magnet 14 are the permanent magnet material member.
In concrete the enforcement, the corresponding structure setting also comprises:
As shown in Figure 1, bench insulator 2 is fixedly installed on the cover plate 1, and cathode 8 is placed on the bench insulator 2, and fixing with cover plate 1 by the insulation screw; Cooling backboard 7 is fixedly installed on the cathode 8; Target 5 is pressed on the cooling backboard 7 by target press strip 4, and the purpose that one deck heat conduction carbon film 6 reaches increases the thermocontact area between target 5 and the cooling backboard 7 is set between cooling backboard 7 and the target 5; Target press strip 4 is fixed and is connected in cathode 8, plays the effect that compresses target 5 simultaneously; In the periphery of cathode 8 and target press strip 4, complete cycle is provided with shielding case 9, will guarantee that simultaneously the gap between cathode 8, target press strip 4 the two and the shielding case 9 should be between 1.5～2mm.
In concrete the enforcement, target press strip combination 4, cathode 8, heat conduction carbon film 6, cooling backboard 7 and shielding case 9 are no magnetic material members.
Claims (1)
1. the rectangular plane magnetic control cathode construction in the vacuum coating film equipment, comprising: two ends are provided with the cover plate of sealing-ring; Fixedly install bench insulator at described cover plate; Cathode is placed on the bench insulator, and is fixed together by insulation screw and cover plate; In the cathode upper fixed cooling backboard is set; Target press strip by the target both sides on described cooling backboard is fixed target; The target press strip is fixedly connected on the cathode; Periphery at cathode and target press strip is provided with shielding case; It is characterized in that: between cooling backboard and target, one deck heat conduction carbon film is set also; Also comprise: a magnetic circuit assembly; Described magnetic circuit assembly is fixedly installed in the cathode and is positioned at the bottom of cooling backboard; The magnetic conduction screw that described magnetic circuit assembly comprises the outer permanent magnet be made up of permanent magnet material, yoke, is made up of the ferromagnetic substance or the soft magnetic materials of magnetic conduction, the interior permanent magnet of forming by permanent magnet material and two branching blocks of forming by the ferromagnetic substance or the soft magnetic materials of magnetic conduction between permanent magnet and the interior permanent magnet outside; Branching block is connected on the yoke by the magnetic conduction screw retention; Outer permanent magnet and interior permanent magnet are bonded on the yoke.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202715557U CN201778106U (en) | 2010-07-27 | 2010-07-27 | Rectangular plane magnetic control cathode structure in vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202715557U CN201778106U (en) | 2010-07-27 | 2010-07-27 | Rectangular plane magnetic control cathode structure in vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201778106U true CN201778106U (en) | 2011-03-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010202715557U Expired - Lifetime CN201778106U (en) | 2010-07-27 | 2010-07-27 | Rectangular plane magnetic control cathode structure in vacuum coating equipment |
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| Country | Link |
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| CN (1) | CN201778106U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107151784A (en) * | 2017-05-26 | 2017-09-12 | 中国电子科技集团公司第四十八研究所 | A kind of negative electrode magnetron sputtering target assembly |
| CN108130516A (en) * | 2018-01-03 | 2018-06-08 | 梧州三和新材料科技有限公司 | A kind of Vacuum Deposition cathode target using foam metal enhancing cooling |
| US10636635B2 (en) | 2013-07-03 | 2020-04-28 | Oerlikon Surface Solutions Ag, Pfäffikon | Target, adapted to an indirect cooling device, having a cooling plate |
| CN115505890A (en) * | 2022-11-28 | 2022-12-23 | 中科纳微真空科技(合肥)有限公司 | Magnetron sputtering planar cathode and magnetic circuit thereof |
-
2010
- 2010-07-27 CN CN2010202715557U patent/CN201778106U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10636635B2 (en) | 2013-07-03 | 2020-04-28 | Oerlikon Surface Solutions Ag, Pfäffikon | Target, adapted to an indirect cooling device, having a cooling plate |
| CN107151784A (en) * | 2017-05-26 | 2017-09-12 | 中国电子科技集团公司第四十八研究所 | A kind of negative electrode magnetron sputtering target assembly |
| CN107151784B (en) * | 2017-05-26 | 2019-08-16 | 中国电子科技集团公司第四十八研究所 | A kind of cathode magnetron sputtering target assembly |
| CN108130516A (en) * | 2018-01-03 | 2018-06-08 | 梧州三和新材料科技有限公司 | A kind of Vacuum Deposition cathode target using foam metal enhancing cooling |
| CN115505890A (en) * | 2022-11-28 | 2022-12-23 | 中科纳微真空科技(合肥)有限公司 | Magnetron sputtering planar cathode and magnetic circuit thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20110330 |