CN201728583U - 一种可减少调压次数的晶片研磨机 - Google Patents

一种可减少调压次数的晶片研磨机 Download PDF

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CN201728583U
CN201728583U CN2010202622232U CN201020262223U CN201728583U CN 201728583 U CN201728583 U CN 201728583U CN 2010202622232 U CN2010202622232 U CN 2010202622232U CN 201020262223 U CN201020262223 U CN 201020262223U CN 201728583 U CN201728583 U CN 201728583U
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wafer
hoisting frame
grinding machine
pressure regulation
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张继昌
段有志
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DAQING JIACHANG JINGNENG INFORMATION MATERIALS CO., LTD.
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DAQING JIACHANG SCIENCE AND TECHNOLOGY Co Ltd
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Abstract

一种可减少调压次数的晶片研磨机。主要解决现有技术中的研磨机每次研磨都需要进行2次调压，导致能源消耗较大的问题。其特征在于：汽缸提升杆的底端连接有一个定位托盘；晶片研磨机还包括一个提升架、一个研磨粉注入槽架以及一个研磨盘，研磨粉注入槽架固定于研磨盘的上部，由研磨粉注入槽架引出的研磨粉注入管接入所述研磨盘上的研磨粉输入端；提升架的上端开有一个“U”形口，并在此“U”形口的开口处连接有一个限位销，汽缸提升杆中位于定位托盘以上的杆体插入“U”形口内，形成滑动连接；提升架的底端与研磨盘之间为固定连接。该种晶片研磨机能够在每次磨制时减少掉一次调压过程，在一定程度上节约了能源，降低了晶片的生产成本。

Description

一种可减少调压次数的晶片研磨机
技术领域：
本实用新型涉及一种应用于半导体晶片研磨领域的装置，具体的说，是涉及一种可减少调压次数的晶片研磨装置。
背景技术：
优质硅及砷化稼等晶片是制造半导体器件的原始材料.为了使晶片平整，并消除切割过程中所造成的损伤，获得完美的衬底材料，晶片必须要经过研磨，才有可能制出合格的器件，因此，晶片研磨机是半导体制造领域中必不可少的一种装置。现有的晶片研磨机普遍采用的都是研磨盘的结构，在提升及下放研磨盘时都需要通过调压来实现对应的汽缸控制。这样一种结构的晶片研磨机，虽然能够确保提升及下放研磨盘的精确度，但是每完成一次晶片的研磨都需要完成提升和下放研磨盘共2次的调压过程。对于大型的晶片研磨机，一次能够磨制几十片晶片，这样的能源消耗还算合理，但是对于小型的晶片研磨机，例如一次只能磨制5～6片晶片的砷化稼研磨机，如果每次磨制都需要经历这种调压过程就会十分浪费能源，增加生产成本。
实用新型内容：
为了解决背景技术中所提到的现有技术中存在的问题，本实用新型提供一种可减少调压次数的晶片研磨机，该种晶片研磨机能够在每次磨制时减少掉一次调压过程，在一定程度上节约了能源，降低了晶片的生产成本。
本实用新型的技术方案是：该种可减少调压次数的晶片研磨机，包括研磨粉定量泵、支架、汽缸、汽缸提升杆以及固定有研磨齿圈和太阳轮的研磨机底座，其中所述汽缸提升杆的底端连接有一个定位托盘；所述晶片研磨机还包括一个提升架、一个研磨粉注入槽架以及一个研磨盘，所述研磨粉注入槽架固定于研磨盘的上部，由所述研磨粉注入槽架引出的研磨粉注入管接入所述研磨盘上的研磨粉输入端；所述提升架的上端开有一个“U”形口，并在此“U”形口的开口处连接有一个限位销，所述汽缸提升杆中位于定位托盘以上的杆体插入所述“U”形口内，形成滑动连接；所述提升架的底端与所述研磨盘之间为固定连接。
本实用新型具有如下有益效果：采用本种结构的晶片研磨机，比照现有技术而言，研磨盘不再直接与汽缸提升杆直接相连，而是与一个增加的提升架相连，通过计算出待磨制的晶片可以承受的正压力来确定需要选择的研磨盘的重量，使得下放研磨盘时不再需要调压，因而在每次磨制时减少掉一次调压过程，在一定程度上节约了能源，降低了晶片的生产成本。
附图说明：
图1是本实用新型的结构示意图。
图中1-研磨粉定量泵，2-支架，3-汽缸，4-汽缸提升杆，5-提升架，6-定位托盘，7-研磨盘，8-研磨粉注入槽架，9-“U”形口，10-限位销，11-太阳轮，12-研磨齿圈。
具体实施方式：
下面结合附图对本实用新型作进一步说明：
图1为本实用新型的结构示意图，如图所示，所述可减少调压次数的晶片研磨机，包括研磨粉定量泵1、支架2、汽缸3、汽缸提升杆4以及固定有研磨齿圈12和太阳轮11的研磨机底座，其做出改进之处在于：所述汽缸提升杆4的底端连接有一个定位托盘6；所述晶片研磨机还包括一个提升架5、一个研磨粉注入槽架8以及一个研磨盘7，所述研磨粉注入槽架8固定于研磨盘7的上部，由所述研磨粉注入槽架8引出的研磨粉注入管接入所述研磨盘7上的研磨粉输入端；所述提升架5的上端开有一个“U”形口9，并在此“U”形口9的开口处连接有一个限位销10，所述汽缸提升杆4中位于定位托盘6以上的杆体插入所述“U”形口9内，形成滑动连接；所述提升架5的底端与所述研磨盘7之间为固定连接。这样一来，研磨盘不再如现有技术中采用直接与汽缸提升杆相连的方式，而是与一个增加的提升架相连，事先需要通过计算出待磨制的晶片可以承受的正压力来确定选择的研磨盘的重量，选择好后，下放研磨盘时就不再需要调压，因而在每次磨制时可以减少掉一次调压过程，在一定程度上节约了能源，降低了晶片的生产成本。

Claims (1)

1.一种可减少调压次数的晶片研磨机，包括研磨粉定量泵(1)、支架(2)、汽缸(3)、汽缸提升杆(4)以及固定有研磨齿圈(12)和太阳轮(11)的研磨机底座，其特征在于：所述汽缸提升杆(4)的底端连接有一个定位托盘(6)；所述晶片研磨机还包括一个提升架(5)、一个研磨粉注入槽架(8)以及一个研磨盘(7)，所述研磨粉注入槽架(8)固定于研磨盘(7)的上部，由所述研磨粉注入槽架(8)引出的研磨粉注入管接入所述研磨盘(7)上的研磨粉输入端；所述提升架(5)的上端开有一个“U”形口(9)，并在此“U”形口(9)的开口处连接有一个限位销(10)，所述汽缸提升杆(4)中位于定位托盘(6)以上的杆体插入所述“U”形口(9)内，形成滑动连接；所述提升架(5)的底端与所述研磨盘(7)之间为固定连接。
CN2010202622232U 2010-07-19 2010-07-19 一种可减少调压次数的晶片研磨机 Expired - Lifetime CN201728583U (zh)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105773327A (zh) * 2016-03-22 2016-07-20 海宁市永发刀剪有限公司 理发剪刀头生产用研磨机

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105773327A (zh) * 2016-03-22 2016-07-20 海宁市永发刀剪有限公司 理发剪刀头生产用研磨机
CN105773327B (zh) * 2016-03-22 2018-01-19 海宁市永发刀剪有限公司 理发剪刀头生产用研磨机

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