CN201728582U - 一种具有较高上盘提升平稳度的晶片研磨机 - Google Patents

一种具有较高上盘提升平稳度的晶片研磨机 Download PDF

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CN201728582U
CN201728582U CN2010202622213U CN201020262221U CN201728582U CN 201728582 U CN201728582 U CN 201728582U CN 2010202622213 U CN2010202622213 U CN 2010202622213U CN 201020262221 U CN201020262221 U CN 201020262221U CN 201728582 U CN201728582 U CN 201728582U
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grinding machine
wafer grinding
smoothness
gripper shoe
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张继昌
段有志
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DAQING JIACHANG JINGNENG INFORMATION MATERIALS CO., LTD.
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DAQING JIACHANG SCIENCE AND TECHNOLOGY Co Ltd
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Abstract

一种具有较高上盘提升平稳度的晶片研磨机。主要解决现有技术中的晶片研磨机在定位托盘带动提升架上行时会发生轻微晃动，易导致部分晶片被压裂的技术问题。其特征在于：在所述汽缸提升杆(4)底端连接的定位托盘(6)的上端面与提升架(5)顶端的下端面之间有一块支撑板(8)，所述支撑板(8)主体为一块平板，在该平板的一侧开有一个带有弧形面(10)的滑动凹槽(9)，所述汽缸提升杆(4)位于所述滑动凹槽(9)内。该种晶片研磨机能够在定位托盘带动提升架上行时保证提升的平稳度，避免了晶片被压裂的生产损失的发生，并且具有结构简单，安装、维护方便的特点。

Description

一种具有较高上盘提升平稳度的晶片研磨机
技术领域：
本实用新型涉及一种应用于半导体晶片研磨领域的装置，具体的说，是涉及一种具有较高上盘提升平稳度的晶片研磨装置。
背景技术：
优质硅及砷化稼等晶片是制造半导体器件的原始材料.为了使晶片平整，并消除切割过程中所造成的损伤，获得完美的衬底材料，晶片必须要经过研磨，才有可能制出合格的器件，因此，晶片研磨机是半导体制造领域中必不可少的一种装置。现有的晶片研磨机分为大型的晶片研磨机和小型的晶片研磨机两种，大型的晶片研磨机采用液压缸整体提升，而小型的晶片研磨机则由气压提升杆的定位托盘带动提升架上行，由此产生的技术问题是：在定位托盘带动提升架上行时，由于两者之间非固定连接，因此提升架会发生轻微晃动，该晃动非常容易导致连接于提升架底端的研磨盘产生微小倾斜，最终使得部分晶片被压裂。
实用新型内容：
为了背景技术中提到的现有技术中存在的问题，本实用新型提供一种具有较高上盘提升平稳度的晶片研磨机，该种晶片研磨机能够在定位托盘带动提升架上行时保证提升的平稳度，避免了晶片被压裂的生产损失的发生，并且具有结构简单，安装、维护方便的特点。
本实用新型的技术方案是：该种具有较高上盘提升平稳度的晶片研磨机，包括支架、汽缸、汽缸提升杆、提升架、研磨盘以及固定有研磨齿圈和太阳轮的研磨机底座，以及该研磨机对应的电控箱等常规部分。其中做出改进之处在于：在所述汽缸提升杆底端连接的定位托盘的上端面与提升架顶端的下端面之间设置有一块支撑板，所述支撑板主体为一块平板，在该平板的一侧开有一个带有弧形面的滑动凹槽，所述汽缸提升杆位于所述滑动凹槽内。
此外，为使操作人员在操作时能够有较大的空间，可以使所述支撑板上在开有滑动凹槽的对侧面为圆弧形侧面。
本实用新型具有如下有益效果：采用本种结构的晶片研磨机，由于在所述汽缸提升杆底端连接的定位托盘的上端面与提升架顶端的下端面之间设置有一块支撑板，该支撑板主体为一块平板，在该平板的一侧开有一个带有弧形面的滑动凹槽，所述汽缸提升杆位于所述滑动凹槽内，当汽缸提升杆上行时，底端连接的定位托盘会带动该支撑板同时上行，该支撑板继而使得上行的作用力平衡分配到提升架的顶端，由此避免了在提升过程中，提升架发生晃动的现象。并且所进行的这种改进结构非常简单，极易安装和维护。
附图说明：
图1是现有技术中采用的晶片研磨机的结构示意图。
图2是本实用新型的结构示意图。
图3是本实用新型中应用的支撑板的结构示意图。
图中1-定量泵，2-支架，3-汽缸，4-汽缸提升杆，5-提升架，6-定位托盘，7-研磨盘，8-支撑板，9-滑动凹槽，10-弧形面，11-太阳轮，12-研磨齿圈。
具体实施方式：
下面结合附图对本实用新型作进一步说明：
图1为现有技术中所采用的研磨机的结构示意图，如图所示，包括定量泵1、支架2、汽缸3、汽缸提升杆4、提升架5、研磨盘7以及固定有研磨齿圈12和太阳轮11的研磨机底座，以及该研磨机对应的电控箱等常规部分。由图中可见，在定位托盘带动提升架上行时，由于两者之间非固定连接，因此提升架会发生轻微晃动，该晃动非常容易导致连接于提升架底端的研磨盘产生微小倾斜，最终使得部分晶片被压裂。如图2所示，为本实用新型的结构示意图，改动之处在于，在所述汽缸提升杆4底端连接的定位托盘6的上端面与提升架5顶端的下端面之间设置有一块支撑板8，所述支撑板8的结构如图3所示，其主体为一块平板，在该平板的一侧开有一个带有弧形面10的滑动凹槽9，将此支撑板与汽缸提升杆连接后，所述汽缸提升杆位于该滑动凹槽内。这样，当汽缸提升杆上行时，底端连接的定位托盘会带动该支撑板同时上行，该支撑板继而使得上行的作用力平衡分配到提升架的顶端，由此避免了在提升过程中，提升架发生晃动的现象。并且所进行的这种改进结构非常简单，极易安装和维护。此外，为使操作人员在操作时能够有较大的空间，可以将所述支撑板8上在开有滑动凹槽9的对侧面设置为圆弧形侧面，以配合提升架顶端的弧形结构。

Claims (2)

1.一种具有较高上盘提升平稳度的晶片研磨机，包括支架(2)、汽缸(3)、汽缸提升杆(4)、提升架(5)、研磨盘(7)以及固定有研磨齿圈(12)和太阳轮(11)的研磨机底座，其特征在于：在所述汽缸提升杆(4)底端连接的定位托盘(6)的上端面与提升架(5)顶端的下端面之间有一块支撑板(8)，所述支撑板(8)主体为一块平板，在该平板的一侧开有一个带有弧形面(10)的滑动凹槽(9)，所述汽缸提升杆(4)位于所述滑动凹槽(9)内。
2.根据权利要求1所述的一种具有较高上盘提升平稳度的晶片研磨机，其特征在于：所述支撑板(8)上在开有滑动凹槽(9)的对侧面为圆弧形侧面。
CN2010202622213U 2010-07-19 2010-07-19 一种具有较高上盘提升平稳度的晶片研磨机 Expired - Lifetime CN201728582U (zh)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105690239A (zh) * 2014-11-24 2016-06-22 上海亨通光电科技有限公司 LiNbO3集成光学器件用芯片研磨方法
CN105810614A (zh) * 2016-04-05 2016-07-27 福建晶安光电有限公司 一种单晶硅圆片分离机构

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105690239A (zh) * 2014-11-24 2016-06-22 上海亨通光电科技有限公司 LiNbO3集成光学器件用芯片研磨方法
CN105810614A (zh) * 2016-04-05 2016-07-27 福建晶安光电有限公司 一种单晶硅圆片分离机构

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