CN201677551U

CN201677551U - Welding structure of Aluminum nitride (AlN) ceramics and metal

Info

Publication number: CN201677551U
Application number: CN201020197831XU
Authority: CN
Inventors: 刘志平; 郝宏坤; 扬哲; 李晓蒙; 张文娟
Original assignee: CETC 13 Research Institute
Current assignee: CETC 13 Research Institute
Priority date: 2010-05-21
Filing date: 2010-05-21
Publication date: 2010-12-22
Anticipated expiration: 2020-05-21

Abstract

The utility model discloses a welding structure of aluminum nitride (AlN) ceramics and metal belonging to the welding field of AIN and metal. The utility model comprises an AIN ceramic substrate and a welded metal layer, between which is disposed a buffer layer comprising tungsten, molybdenum or tungsten-molybdenum alloy. By using the tungsten or molybdenum-buffer layer, which has thermal expansion coefficient similar to that of the AIN ceramics, the low reliability of the welding structure of the AIN ceramic and the metal with higher thermal expansion coefficient can be prevented.

Description

The Welding Structure of aluminium nitride ceramics and metal

Technical field

The utility model belongs to the reliable welding field of aluminium nitride ceramics and metal, relates in particular to the Welding Structure of a kind of microelectronics with aluminium nitride ceramics and metal.

Background technology

Aluminium nitride ceramics is a kind of novel ceramic material, it has high thermal conductivity, low thermal coefficient of expansion, high insulation characterisitic and high mechanical strength, and characteristics such as nontoxic, can be used in the occasion of high heat radiation and high insulation, substitute low Heat Conduction Material commonly used at present, as aluminium oxide ceramics etc., be applied to electronics industry, be more suitable for the large scale integrated circuit requirement.

In the practical application of aluminium nitride ceramics, often aluminium nitride ceramics and various metal parts need be welded, but because the thermal coefficient of expansion of aluminium nitride ceramics is lower, and the thermal coefficient of expansion of most of metal materials is all higher, as kovar alloy, copper or aluminium, therefore, the thermal coefficient of expansion of aluminium nitride ceramics and most of metal materials does not match, and is difficult to the coupling welding.Cause in welding process, produce bigger thermal stress, might destroy metal layer and leak gas, when thermal stress surpasses aluminium nitride ceramics intensity with being connected of aluminium nitride ceramics, also might cause the cracking of aluminium nitride ceramics, thereby cause serious integrity problem.

The utility model content

The technical problems to be solved in the utility model provides the Welding Structure of high aluminium nitride ceramics of a kind of reliability and metal.

For solving the problems of the technologies described above, technical solution adopted in the utility model is: it comprises the metal level of aluminium nitride ceramics substrate and welding, is provided with the cushion of tungsten, molybdenum or tungsten-molybdenum alloy between aluminium nitride ceramics substrate and metal level.

The utility model choose with the tungsten of aluminium nitride ceramics material thermal coefficient of expansion comparison match or molybdenum material as cushion, earlier aluminium nitride ceramics substrate and tungsten or molybdenum are welded, and then will be welded with the higher metal material of the aluminium nitride ceramics of tungsten or molybdenum and other thermal coefficient of expansions and weld.Because tungsten or molybdenum material have played the effect of buffering thermal stress in the centre, improved the soldering reliability of the higher metal material of aluminium nitride ceramics and thermal coefficient of expansion, especially when the aluminium nitride ceramics of large-size and Metal Material Welding, this effect is more obvious.

Adopt the utility model to solve that aluminium nitride ceramics does not match with most of thermal expansion metal coefficient and the problem of the soldering reliability difference that causes has effectively been avoided the cracking phenomena of aluminium nitride ceramics or the phenomenon that the aluminium nitride ceramics packaging part leaks gas.

Description of drawings

Fig. 1 is a vertical view schematic diagram of the present utility model;

Fig. 2 be among Fig. 1 A-A to cross-sectional schematic.

The specific embodiment

Referring to Fig. 1, the utility model comprises the metal level 1 of aluminium nitride ceramics substrate 3 and welding as can be seen, is provided with the cushion 2 of tungsten or molybdenum between aluminium nitride ceramics substrate 3 and metal level 1.

About 800 ℃, with aluminium nitride ceramics substrate 3 and tungsten or molybdenum or tungsten-molybdenum alloy welding, form aluminium nitride tungsten or aluminium nitride molybdenum structure, because aluminium nitride tungsten or aluminium nitride molybdenum form by high temperature sintering, have higher binding strength, reliability and air-tightness, can carry out the plating kovar alloy or weld with various metals.About 800 ℃, weld metal layers 1 on the cushion 2 of tungsten or molybdenum forms reliable Welding Structure again.

Claims

1. the Welding Structure of aluminium nitride ceramics and metal, the metal level (1) that it comprises aluminium nitride ceramics substrate (3) and welding is characterized in that: the cushion (2) that is provided with tungsten, molybdenum or tungsten-molybdenum alloy between aluminium nitride ceramics substrate (3) and metal level (1).