CN201639771U - Capacitance microphone - Google Patents
Capacitance microphone Download PDFInfo
- Publication number
- CN201639771U CN201639771U CN 200920260397 CN200920260397U CN201639771U CN 201639771 U CN201639771 U CN 201639771U CN 200920260397 CN200920260397 CN 200920260397 CN 200920260397 U CN200920260397 U CN 200920260397U CN 201639771 U CN201639771 U CN 201639771U
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- CN
- China
- Prior art keywords
- backboard
- vibrating diaphragm
- capacitance microphone
- utility
- model
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
The utility model provides a capacitance microphone, which comprises a base with a cavity, a diaphragm and a back plate. The back plate is divided into three layers of structures sequentially including an insulating layer, a structural layer and an anti-corrosion layer. The capacitance microphone can reduce corrosion degree of the back plate.
Description
Technical field
The utility model relates to a kind of capacitance microphone, relates in particular to a kind of micro-electro-mechanical microphone.
Background technology
Development along with wireless telecommunications, Global Mobile Phone Users is more and more, the user not only is satisfied with conversation to the requirement of mobile phone, and want high-quality communication effect can be provided, especially at present the development of mobile multimedia technology, the speech quality of mobile phone becomes more important, and the microphone of mobile phone is as the voice pick device of mobile phone, and its design quality directly influences speech quality.
And the microphone of using more and better performances at present is microelectromechanical-systems microphone (Micro-Electro-Mechanical-System Microphone, be called for short MEMS), in the correlation technique, backboard is corroded easily, therefore is necessary to provide a kind of novel capacitance microphone.
The utility model content
The technical problem that the utility model need solve provide a kind of can reduce backboard be corroded degree capacitance microphone.
According to the above-mentioned technical problem that needs solution, designed a kind of capacitance microphone, comprise the substrate that is provided with cavity, vibrating diaphragm and backboard, described backboard is divided into three-decker, is followed successively by insulating barrier, structure sheaf and etch resistant layer.
Preferably, between described backboard and vibrating diaphragm, be provided with anti-adsorbent equipment.
Preferably, described anti-adsorbent equipment is to be arranged on first on the backboard plane relative with vibrating diaphragm projection or to be arranged on second projection on the vibrating diaphragm plane relative with backboard.
Preferably, described vibrating diaphragm is a polycrystalline silicon material.
The beneficial effects of the utility model are: because backboard adopts three-decker, so reduced the possibility that backboard is corroded.
Description of drawings
Fig. 1 is the generalized section of an embodiment of the utility model;
Fig. 2 is the enlarged drawing of A part among the utility model Fig. 1.
Embodiment
The utility model is described in further detail below in conjunction with drawings and embodiments.
The capacitance microphone that the utility model provides is mainly used in the electronic equipments such as mobile phone, is used to receive sound.It mainly comprises substrate (not shown), vibrating diaphragm 2 and the backboard 1 that is provided with cavity.
Referring to Fig. 1 and Fig. 2, backboard 1 is divided into three-decker, is followed successively by insulating barrier 11, structure sheaf 12 and etch resistant layer 13.
Because backboard 1 is divided into above-mentioned three layers, so reduced the degree that backboard 1 is corroded.
Be provided with anti-adsorbent equipment between backboard 1 and the vibrating diaphragm 2, this anti-adsorbent equipment can be arranged on first projection 14 on the relative plane of backboard 1 and vibrating diaphragm 2, and this first projection 14 can prevent that vibrating diaphragm 2 and backboard 1 are attached together.Also can be arranged on second projection (not shown) on the relative plane of vibrating diaphragm 2 and backboard 1.Anti-adsorbent equipment also can be the groove that is separately positioned on vibrating diaphragm 2 and the backboard 1.Certainly, anti-adsorbent equipment is not limited to aforesaid way, prevents that the device that backboard 1 and vibrating diaphragm 2 are attached together all belongs to protection range of the present utility model as long as can reach.
Vibrating diaphragm 2 can be arranged between backboard 1 and the substrate, certainly, also can be that backboard 1 is arranged between vibrating diaphragm 2 and the substrate.
Above-mentioned which kind of execution mode no matter, vibrating diaphragm 2 can adopt polycrystalline silicon material.
Above-described only is a kind of execution mode of the present utility model; should be pointed out that for the person of ordinary skill of the art at this, under the prerequisite that does not break away from the utility model creation design; can also make improvement, but these all belong to protection range of the present utility model.
Claims (4)
1. a capacitance microphone comprises the substrate that is provided with cavity, and vibrating diaphragm and backboard is characterized in that: described backboard is divided into three-decker, is followed successively by insulating barrier, structure sheaf and etch resistant layer.
2. capacitance microphone according to claim 1 is characterized in that: be provided with anti-adsorbent equipment between described backboard and vibrating diaphragm.
3. capacitance microphone according to claim 2 is characterized in that: described anti-adsorbent equipment is to be arranged on first on the backboard plane relative with vibrating diaphragm projection or to be arranged on second projection on the vibrating diaphragm plane relative with backboard.
4. capacitance microphone according to claim 1 is characterized in that: described vibrating diaphragm is a polycrystalline silicon material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200920260397 CN201639771U (en) | 2009-11-16 | 2009-11-16 | Capacitance microphone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200920260397 CN201639771U (en) | 2009-11-16 | 2009-11-16 | Capacitance microphone |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201639771U true CN201639771U (en) | 2010-11-17 |
Family
ID=43084279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200920260397 Expired - Lifetime CN201639771U (en) | 2009-11-16 | 2009-11-16 | Capacitance microphone |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201639771U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103731771A (en) * | 2013-12-20 | 2014-04-16 | 苏州恒听电子有限公司 | Corrosion-resistant telephone receiver |
-
2009
- 2009-11-16 CN CN 200920260397 patent/CN201639771U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103731771A (en) * | 2013-12-20 | 2014-04-16 | 苏州恒听电子有限公司 | Corrosion-resistant telephone receiver |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170606 Address after: Singapore Ang Mo Kio 65 Street No. 10 techpoint Building 1 floor, No. 8 Co-patentee after: AAC Acoustic Technologies (Changzhou) Co., Ltd. Patentee after: AAC Technologies (Singapore) Co., Ltd. Address before: Wujin Nanxiashu town Jiangsu city Changzhou province 213167 Co-patentee before: AAC Acoustic Technologies (Shenzhen) Co., Ltd. Patentee before: AAC Acoustic Technologies (Changzhou) Co., Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20101117 |