CN201637680U - Detection device for detecting appearance of light-emitting diode grains - Google Patents
Detection device for detecting appearance of light-emitting diode grains Download PDFInfo
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- CN201637680U CN201637680U CN2010201048823U CN201020104882U CN201637680U CN 201637680 U CN201637680 U CN 201637680U CN 2010201048823 U CN2010201048823 U CN 2010201048823U CN 201020104882 U CN201020104882 U CN 201020104882U CN 201637680 U CN201637680 U CN 201637680U
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Abstract
The utility model discloses a detection device for detecting the appearance of light-emitting diode grains, which comprises a detection platform, a spectroscope, a first light source and an image sensor, wherein the detection platform is provided with a movable hollow platform; a wafer provided with a plurality of light-emitting diode grains is arranged on the hollow platform; the spectroscope is arranged above the detection platform; the first light source is arranged on one side of the spectroscope; a first beam generated by the first light source is projected to the spectroscope to generate a second beam projected to the upper surfaces of the light-emitting diode grains; the second beam is reflected into a third beam projected upwards by the upper surfaces of the light-emitting diode grains; and the image sensor is arranged above the spectroscope to receive the third beam passing through the spectroscope so as to obtain images of the upper surface of each light-emitting diode grain. The detection device for detecting the appearance of the light-emitting diode grains can avoid manual operation and ink waste to reduce manufacturing cost and improve efficiency and also can calculate the amount and regions of the defective light-emitting diode wafers by a computer.
Description
Technical field
The utility model relates to a kind of pick-up unit that is used for detecting the LED crystal particle outward appearance.
Background technology
The fraction defective of wafer reduces and the output raising is the index that present industry is vied each other, but still have 3% fraction defective on the whole, in the electronic wafer manufacturing, roughly have " yellow light area ", " sedimentary province ", " diffusion region ", " implantation region ", " cutting area " reaches " test section " and waits each flow process, these fraction defectives may come from any district of above-mentioned processing procedure.These bad wafers have scratch or spread characteristics such as incomplete, so on color and luster, can the different of a little be arranged with good wafer, can bad wafer point be gone up ink (Ink) identification via the mode of artificial visual, again that those are bad wafer is chosen to shave from the full wafer wafer and is removed.The above-mentioned work of choosing bad wafer is lost time and is inefficent very much, and use ink can cause the waste of environmental pollution and cost again, this is because production run itself can't accurately be controlled and have how many bad wafers on the wafer or which is the zone of bad wafer, these shortcomings have caused wastes many on processing cost, so when improving the product yield, how to learn that the number of bad wafer and the zone of bad wafer are present industry problem demanding prompt solutions.
The utility model content
In order to overcome above-mentioned defective of the prior art, the utility model provides a kind of pick-up unit that is used for detecting the LED crystal particle outward appearance, except can exempting the waste of manual work and ink, more can calculate the quantity and the zone of bad LED wafer, and then make the manufacture process that removes bad LED wafer more convenient by computer.
In order to solve the problems of the technologies described above, according to wherein a kind of scheme of the present utility model, provide a kind of pick-up unit that is used for detecting the LED crystal particle outward appearance, it comprises: a detection platform, a spectroscope, one first light source, an and Image Sensor.Wherein, this detection platform has a hollow platform movably, and wherein a wafer with a plurality of LED crystal particle is placed on the hollow platform of this detection platform.This spectroscope is arranged at the top of this detection platform.This first light source can be adjusted emission wavelength along with the type of described LED crystal particle, it is arranged at this spectroscopical side, wherein first light beam that produced of this first light source is invested this spectroscope, producing second light beam of investing the upper surface of described LED crystal particle, and the upper surface of this second light beam by described LED crystal particle is reflected into the 3rd light beam of projection upwards.This Image Sensor is arranged at this spectroscopical top, passes through this spectroscopical the 3rd light beam to receive, and then obtains the image of the upper surface of each LED crystal particle.
Preferable, the image of the upper surface of each LED crystal particle can demonstrate the anodal weld pad and the negative pole weld pad of each LED crystal particle.
Preferable, further comprise: one can adjust the secondary light source of emission wavelength along with the type of described LED crystal particle, it is arranged at the below of this detection platform, first light beam that wherein this secondary light source produced passes this hollow platform and invests the lower surface of described LED crystal particle, and by this Image Sensor to watch the external form image of each LED crystal particle.
Preferable, the emission wavelength of this first light source is identical or inequality with the emission wavelength of this secondary light source.
Preferable, further comprise: one can adjust the annular light source of emission wavelength along with the type of described LED crystal particle, it is arranged between this spectroscope and this detection platform, first light beam that wherein this annular light source produced is invested the side of described LED crystal particle in the mode that tilts, and by this Image Sensor to watch the side image of each LED crystal particle.
Preferable, the emission wavelength of this first light source is identical or inequality with the emission wavelength of this annular light source.
Preferable, this annular light source comprises one group of light source, and it is made up of a plurality of light emitting diodes that are downward-sloping and are arranged in ring-type.
Preferable, this annular light source comprises two groups of light sources, and each group light source is made up of a plurality of light emitting diodes that are downward-sloping and are arranged in ring-type.
Preferable, further comprise: one is used to coat this first light source, this spectroscope and this annular light source and the shell that only exposes two openings, and this shell presents the T font.
Preferable, further comprise: a ultrasound wave thimble and a suction nozzle, wherein this ultrasound wave thimble is arranged at the below of this detection platform, to remove underproof LED crystal particle by hyperacoustic vibration mode, and this suction nozzle is arranged at the top of this detection platform, so that above-mentioned underproof LED crystal particle is siphoned away.
Therefore, the beneficial effects of the utility model are: the utility model is wasted so that manufacturing cost reduction and the efficient raising except exempting manual work and ink, more can calculate the quantity and the zone of bad LED wafer, and then make the processing procedure that removes bad LED wafer more convenient by computer.And, by the quantity and the zone of learning bad LED wafer, make and in making the LED wafer process, more can grasp the reason that causes bad LED wafer, and then make the yield of LED wafer increase.
For enabling further to understand feature of the present utility model and technology contents, see also following about detailed description of the present utility model and accompanying drawing, yet appended graphic only for reference with the explanation usefulness, be not to be used for the utility model is limited.
Description of drawings
Fig. 1 is used for detecting the front-view schematic diagram of first embodiment of the pick-up unit of LED crystal particle outward appearance for the utility model;
Fig. 2 is the schematic top plan view of the anodal weld pad and the negative pole weld pad of the utility model LED crystal particle;
Fig. 3 is used for detecting the front-view schematic diagram of second embodiment of the pick-up unit of LED crystal particle outward appearance for the utility model;
Fig. 4 is used for detecting the front-view schematic diagram of the 3rd embodiment of the pick-up unit of LED crystal particle outward appearance for the utility model;
Fig. 5 is the schematic perspective view of the annular light source of the utility model the 3rd embodiment;
Fig. 6 is used for detecting the local enlarged diagram of the 3rd embodiment of the pick-up unit of LED crystal particle outward appearance for the utility model;
Fig. 7 uses the diagrammatic cross-section of shell for the utility model the 3rd embodiment; And
Fig. 8 is used for detecting the process flow diagram of the detection method of LED crystal particle outward appearance for the utility model is related.
[main element symbol description]
Wafer W LED crystal particle d
Anodal weld pad P
Negative pole weld pad N
Side S
First light source, 3 first light beam L1
The second light beam L2
The 3rd light beam L3
The first light beam L1 "
The second light beam L2 "
Shell C open C 10
Ultrasound wave thimble U
Suction nozzle M
Embodiment
See also shown in Figure 1ly, the utility model first embodiment provides a kind of pick-up unit that is used for detecting the LED crystal particle outward appearance, and it comprises: a detection platform 1, a spectroscope 2, one first light source 3, an and Image Sensor 4.This detection platform 1 has a hollow platform 10 movably, and it has a perforation 100, and wherein a wafer W with a plurality of LED crystal particle d is placed on the hollow platform 10 of this detection platform 1, and this spectroscope 2 is arranged at the top of this detection platform 1.
Moreover, this first light source 3 is arranged at this spectroscopical side, and this first light source 3 can be adjusted emission wavelength along with the type of these LED crystal particle d, wherein the first light beam L1 that produced of this first light source 3 invests this spectroscope 2, producing second a light beam L2 who invests the upper surface of these LED crystal particle d, and the upper surface of this second light beam L2 by these LED crystal particle d is reflected into the 3rd a light beam L3 of projection upwards.In addition, this Image Sensor 4 is arranged at the top of this spectroscope 2, to receive the 3rd light beam L3 through this spectroscope 2, and then obtain the image (image of this LED crystal particle d can be analyzed by computer) of the upper surface of each LED crystal particle d, wherein the image of the upper surface of each LED crystal particle d demonstrates anodal weld pad (P-type) P and negative pole weld pad (N-type) N (as shown in Figure 2) of each LED crystal particle d.Particularly, after above-mentioned LED crystal particle d process alligatoring,, can obviously learn the relative position of anodal weld pad P and negative pole weld pad N, be beneficial to promote the accuracy of routing (Bonding) process on the subsequent production line by using the utility model.
In addition, this pick-up unit further comprises: a ultrasound wave thimble U and a suction nozzle M, wherein this ultrasound wave thimble U is arranged at the below of this detection platform 1, to remove underproof LED crystal particle by hyperacoustic vibration mode, and this suction nozzle M is arranged at the top of this detection platform 1, so that above-mentioned underproof LED crystal particle d is siphoned away.Therefore, the utility model can remove underproof LED crystal particle by above-mentioned nondestructive mode.
See also shown in Figure 3, the utility model second embodiment provides a kind of pick-up unit that is used for detecting the LED crystal particle outward appearance, it comprises: a detection platform 1, a spectroscope 2, one first light source 3, an Image Sensor 4, an and secondary light source 5, wherein this secondary light source 5 is arranged at the below of this detection platform 1, and this secondary light source 5 can be adjusted emission wavelength along with the type of these LED crystal particle d.Moreover, in a second embodiment: the first light beam L1 ' that this secondary light source 5 produced passes this hollow platform 10 and invests the lower surface of these LED crystal particle d, and with being used of first light source 3 of first embodiment under, can take place with the situation of avoiding LED crystal particle d to have the edge to burst apart by the external form image (that is image LED crystal particle d around) of this Image Sensor 4 to watch each LED crystal particle d.In addition, according to different detection demands, the emission wavelength of this first light source 3 can be identical or inequality with the emission wavelength of this secondary light source 5.Certainly, second embodiment also can cooperate the ultrasound wave thimble U of first embodiment and suction nozzle M to use.
See also shown in Figure 4, the utility model the 3rd embodiment provides a kind of pick-up unit that is used for detecting the LED crystal particle outward appearance, it comprises: a detection platform 1, a spectroscope 2, one first light source 3, an Image Sensor 4, a secondary light source 5, an and annular light source 6, wherein this annular light source 6 is arranged between this spectroscope 2 and this detection platform 1, and this annular light source 6 can be adjusted emission wavelength along with the type of these LED crystal particle d.Moreover, in the 3rd embodiment: the first light beam L1 that this annular light source 6 is produced, " invest the side of these LED crystal particle d in the mode that tilts, form reflection and invest the second light beam L2 of this Image Sensor 4 ".In addition, with being used of first light source 3 of second embodiment or secondary light source 5 under, watching the side image of each LED crystal particle d, and then can find further that the situation whether LED crystal particle d has the edge to burst apart takes place by this Image Sensor 4.In addition, according to different detection demands, the emission wavelength of this first light source 3 can be identical or inequality with the emission wavelength of this annular light source 6.
See also shown in Figure 5ly, the annular light source 6 of the 3rd embodiment comprises two groups of light sources 60 (also can be and have only one group of light source), and each group light source 60 is made up of a plurality of light emitting diodes 600 that are downward-sloping and are arranged in ring-type.According to Fig. 5 for example, each the group light source 60 can by line up two the circle light-emitting diodes 600 be formed.Therefore, as shown in Figure 6, " mode that can tilt is invested the side S of these LED crystal particle d to the first light beam L1 that this annular light source 6 is produced, and the situation that whether has the edge to burst apart with clear understanding LED crystal particle d takes place.
See also shown in Figure 7, the 3rd embodiment further comprises: one is used to coat the shell C of this first light source 3, this spectroscope 2 and this annular light source 6, this shell C only exposes two open C 10, and this shell C presents the T font, to avoid taking place producing from the light source that this first light source 3 and this annular light source 6 are projected the situation of light leak.
In addition, see also shown in Figure 8ly, the pick-up unit that the utility model provides is used for detecting the LED crystal particle outward appearance can use following detection method, and it comprises the following steps:
Step S100 is: at first, one pick-up unit is provided, it has first light source 3 and an Image Sensor 4 that a detection platform 1, a spectroscope 2, can be adjusted emission wavelength along with the type of these LED crystal particle d, wherein this detection platform 1 has a hollow platform 10 movably, this spectroscope 2 is arranged at the top of this detection platform 1, this first light source 3 is arranged at a side of this spectroscope 2, and this Image Sensor 4 is arranged at the top of this spectroscope 2.
Step S102 is: a wafer W with a plurality of LED crystal particle d is placed on the hollow platform 10 of this detection platform 1.
Step S104 is: the first light beam L1 that this first light source 3 is produced invests this spectroscope 2, producing second a light beam L2 who invests the upper surface of these LED crystal particle d, and the upper surface of this second light beam L2 by these LED crystal particle d is reflected into the 3rd a light beam L3 of projection upwards.
Step S106 is: pass through the 3rd light beam L3 of this spectroscope 2 by this Image Sensor 4 with reception, and then obtain the image (as shown in Figure 1) of the upper surface of each LED crystal particle d.
Moreover, this pick-up unit further comprises: one can adjust the secondary light source 5 of emission wavelength along with the type of these LED crystal particle d, it is arranged at the below of this detection platform 1, the first light beam L1 ' that this secondary light source 5 produced in addition passes this hollow platform 10 and invests the lower surface of these LED crystal particle d, and by this Image Sensor 4 to watch the external form image (as shown in Figure 3) of each LED crystal particle d.
In addition, this pick-up unit further comprises: one can adjust the annular light source 6 of emission wavelength along with the type of those LED crystal particle d, it is arranged between this spectroscope 2 and this detection platform 1, the first light beam L1 that produced of this annular light source 6 in addition " invest the side S of these LED crystal particle d in the mode that tilts, and by this Image Sensor 4 to watch the side image (as shown in Figure 4) of each LED crystal particle d.
In addition, the mode of above-mentioned this Image Sensor 4 this LED crystal particle of acquisition d can be: launch an of short duration light beam when illuminating these LED crystal particle d when this first light source 3, this Image Sensor 4 is the image of a LED crystal particle d of fechtable; Launch an of short duration light beam when illuminating these LED crystal particle d when this secondary light source 5, this Image Sensor 4 is the image of a LED crystal particle d of fechtable; Launch an of short duration light beam when illuminating these LED crystal particle d when this annular light source 6, this Image Sensor 4 is the image of a LED crystal particle d of fechtable.Above-mentioned step can separately carry out also can carrying out in regular turn, to give an example in regular turn, can be: (this moment, secondary light source 5 was closed) → these Image Sensor 4 captures (certainly for of short duration unlatching first light source 3 → these Image Sensor 4 captures → of short duration unlatching secondary light source 5 (this moment, first light source 3 was closed) → these Image Sensor 4 captures → of short duration unlatching annular light source 6, above-mentioned order also can be along with user's demand is arranged in pairs or groups arbitrarily), all images that obtain can intersect comparison at last, detect the quality of these LED crystal particle d whether good (for instance, can beat the catoptrical reflection coefficient that is produced when the LED crystal particle d and judge whether the surface of this LED crystal particle d has bad stain or defective) in mode accurately by light beam.
In sum, the utility model is wasted so that manufacturing cost reduction and the efficient raising except exempting manual work and ink, more can calculate the quantity and the zone of bad LED wafer, and then make the manufacture process that removes bad LED wafer more convenient by computer.And, by the quantity and the zone of learning bad LED wafer, make and in making the LED wafer process, more can grasp the reason that causes bad LED wafer, and then make the yields of LED wafer increase.
Therefore the above only is a preferable possible embodiments of the present utility model, is not to limitation of the present utility model, and the equivalence techniques done of every utilization the utility model instructions and accompanying drawing content changes, and all is contained in the scope of the present utility model.
Claims (10)
1. a pick-up unit that is used for detecting the LED crystal particle outward appearance is characterized in that, comprising:
One detection platform, it has a hollow platform movably, and wherein a wafer with a plurality of LED crystal particle is placed on the hollow platform of this detection platform;
One spectroscope, it is arranged at the top of this detection platform;
One can adjust first light source of emission wavelength along with the type of described LED crystal particle, it is arranged at this spectroscopical side, wherein first light beam that produced of this first light source is invested this spectroscope, producing second light beam of investing the upper surface of described LED crystal particle, and the upper surface of this second light beam by described LED crystal particle is reflected into the 3rd light beam of projection upwards; And
One Image Sensor, it is arranged at this spectroscopical top, passes through this spectroscopical the 3rd light beam to receive, and then obtains the image of the upper surface of each LED crystal particle.
2. the pick-up unit that is used for detecting the LED crystal particle outward appearance according to claim 1 is characterized in that: the image of the upper surface of each LED crystal particle demonstrates the anodal weld pad and the negative pole weld pad of each LED crystal particle.
3. the pick-up unit that is used for detecting the LED crystal particle outward appearance according to claim 1, it is characterized in that, further comprise: one can adjust the secondary light source of emission wavelength along with the type of described LED crystal particle, it is arranged at the below of this detection platform, first light beam that wherein this secondary light source produced passes this hollow platform and invests the lower surface of described LED crystal particle, and by this Image Sensor to watch the external form image of each LED crystal particle.
4. the pick-up unit that is used for detecting the LED crystal particle outward appearance according to claim 3 is characterized in that: the emission wavelength of this first light source is identical or inequality with the emission wavelength of this secondary light source.
5. the pick-up unit that is used for detecting the LED crystal particle outward appearance according to claim 1, it is characterized in that, further comprise: one can adjust the annular light source of emission wavelength along with the type of described LED crystal particle, it is arranged between this spectroscope and this detection platform, first light beam that wherein this annular light source produced is invested the side of described LED crystal particle in the mode that tilts, and by this Image Sensor to watch the side image of each LED crystal particle.
6. the pick-up unit that is used for detecting the LED crystal particle outward appearance according to claim 5 is characterized in that: the emission wavelength of this first light source is identical or inequality with the emission wavelength of this annular light source.
7. the pick-up unit that is used for detecting the LED crystal particle outward appearance according to claim 5 is characterized in that: this annular light source comprises one group of light source, and it is made up of a plurality of light emitting diodes that are downward-sloping and are arranged in ring-type.
8. the pick-up unit that is used for detecting the LED crystal particle outward appearance according to claim 5 is characterized in that: this annular light source comprises two groups of light sources, and each group light source is made up of a plurality of light emitting diodes that are downward-sloping and are arranged in ring-type.
9. the pick-up unit that is used for detecting the LED crystal particle outward appearance according to claim 5, it is characterized in that, further comprise: one is used to coat this first light source, this spectroscope and this annular light source and the shell that only exposes two openings, and this shell presents the T font.
10. the pick-up unit that is used for detecting the LED crystal particle outward appearance according to claim 1, it is characterized in that, further comprise: a ultrasound wave thimble and a suction nozzle, wherein this ultrasound wave thimble is arranged at the below of this detection platform, to remove underproof LED crystal particle by hyperacoustic vibration mode, and this suction nozzle is arranged at the top of this detection platform, so that above-mentioned underproof LED crystal particle is siphoned away.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201048823U CN201637680U (en) | 2010-01-27 | 2010-01-27 | Detection device for detecting appearance of light-emitting diode grains |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201048823U CN201637680U (en) | 2010-01-27 | 2010-01-27 | Detection device for detecting appearance of light-emitting diode grains |
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| CN201637680U true CN201637680U (en) | 2010-11-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010201048823U Expired - Fee Related CN201637680U (en) | 2010-01-27 | 2010-01-27 | Detection device for detecting appearance of light-emitting diode grains |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102213680A (en) * | 2010-04-09 | 2011-10-12 | 久元电子股份有限公司 | Device and method for detecting luminous diode grain appearance |
| CN103551319A (en) * | 2013-10-24 | 2014-02-05 | 大连华工创新科技股份有限公司 | Detection and cutting equipment for diaphragm material |
| CN104132946A (en) * | 2013-05-03 | 2014-11-05 | 政美应用股份有限公司 | LED wafer detection apparatus and method thereof |
| CN104550054A (en) * | 2014-12-29 | 2015-04-29 | 苏州凯锝微电子有限公司 | Grain crystal sorting device |
| CN104550055A (en) * | 2014-12-30 | 2015-04-29 | 苏州凯锝微电子有限公司 | Crystal grain sorting machine |
| CN105797966A (en) * | 2015-12-07 | 2016-07-27 | 常州市武进区半导体照明应用技术研究院 | Mixed-Bin selecting method and device for LED wafer chips |
| CN110739246A (en) * | 2019-09-03 | 2020-01-31 | 福建晶安光电有限公司 | method for measuring warping degree of wafer |
-
2010
- 2010-01-27 CN CN2010201048823U patent/CN201637680U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102213680A (en) * | 2010-04-09 | 2011-10-12 | 久元电子股份有限公司 | Device and method for detecting luminous diode grain appearance |
| CN104132946A (en) * | 2013-05-03 | 2014-11-05 | 政美应用股份有限公司 | LED wafer detection apparatus and method thereof |
| CN103551319A (en) * | 2013-10-24 | 2014-02-05 | 大连华工创新科技股份有限公司 | Detection and cutting equipment for diaphragm material |
| CN103551319B (en) * | 2013-10-24 | 2015-12-02 | 大连华工创新科技股份有限公司 | The detection of diaphragm material and cutting equipment |
| CN104550054A (en) * | 2014-12-29 | 2015-04-29 | 苏州凯锝微电子有限公司 | Grain crystal sorting device |
| CN104550055A (en) * | 2014-12-30 | 2015-04-29 | 苏州凯锝微电子有限公司 | Crystal grain sorting machine |
| CN105797966A (en) * | 2015-12-07 | 2016-07-27 | 常州市武进区半导体照明应用技术研究院 | Mixed-Bin selecting method and device for LED wafer chips |
| CN110739246A (en) * | 2019-09-03 | 2020-01-31 | 福建晶安光电有限公司 | method for measuring warping degree of wafer |
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