CN201634755U - Shock-absorption supporting mechanism and lifting device with shock-absorption supporting mechanism - Google Patents
Shock-absorption supporting mechanism and lifting device with shock-absorption supporting mechanism Download PDFInfo
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- CN201634755U CN201634755U CN2009202742049U CN200920274204U CN201634755U CN 201634755 U CN201634755 U CN 201634755U CN 2009202742049 U CN2009202742049 U CN 2009202742049U CN 200920274204 U CN200920274204 U CN 200920274204U CN 201634755 U CN201634755 U CN 201634755U
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Abstract
The utility model discloses a shock-absorption supporting mechanism which comprises an installation plate, a bearing plate, a connecting piece and a position-limiting piece. The connecting piece and the position-limiting piece which are parallel to each other are connected between the installation plate and the bearing plate, the connecting piece comprises a connecting post and an elastic element, the upper end of the connecting post is movably connected with the bearing plate, and the lower end of the connecting post is movably connected with the installation plate; the elastic element is sheathed outside the connecting post, presenting the compressed shape; the upper end of the elastic element leans against the bearing plate, the lower end of the elastic element leans against the installation plate, the lower end of the position-limiting piece is connected with the installation plate, the upper end of the position-limiting piece extends along the direction of the bearing plate, and a soft cushioning pad is arranged at the upper end of the position-limiting piece. With the functions of cushioning and shock absorption, the shock-absorption supporting mechanism can avoid rigid mechanical contact between the bearing plate and an object to be borne, and prevent damage to the object to be borne. The shock-absorption supporting mechanism has simple structure and is convenient for maintenance. The utility model further discloses a lifting device with the shock-absorption supporting mechanism.
Description
Technical field
The utility model relates to a kind of supporting mechanism, relate in particular to a kind of have a pooling feature be used for vibration damping supporting mechanism that the flat-type device is supported and lifting device with this vibration damping supporting mechanism.
Background technology
Flat-panel monitor (FPD, Flat Panel Display) approaches advantages such as light, that power consumption is little, radiation is low because of having, to become the main product in the indicating meter, flat-panel monitor comprises that mainly liquid-crystal display LCD (LiquidCrystal Display), plasma show PDP (Plasma Display Panel), ORGANIC ELECTROLUMINESCENCE DISPLAYS OLED (Organic Light Emitting Display) and Surface-conduction Electron-emitter Display SED several big type of skills such as (Surface-conduction Electron-emitter Display); The production of various types of displays part all needs to utilize glass etc. to carry out vacuum plating as substrate, be deposited on multilayer film on the glass substrate in succession, with OLED is example, the making of OLED is mostly adopted with ITO (indium tin oxide) glass or the quartzy substrate of making, utilize evaporated device deposit multilayer film in succession on glass substrate, its technology is generally and forms a transparent anode on glass substrate, depositing hole injection layer, hole transmission layer, luminescent layer, electron transfer layer and electron injecting layer on anode successively, is the metallic cathode layer at last; As seen substrate plays a part very important in the OLED processing procedure, in numerous production process of OLED and subsequent technique, substrate need pass through many processing steps, therefore, in these are made, need repeatedly support and lifting substrate, make by extremely thin and frangible glass or quartz and the substrate of OLED is many, for quality and the precision that guarantees OLED, in the course of processing automatization of processing substrate is required the support that is used for substrate, the supporting mechanism of lifting also to be required higher precision more and more higher the time.
Existing being used for supported supporting mechanism with lifting to substrate, a kind of do not have a buffer shock-absorbing function, the supporting mechanism substrate of directly conflicting, substrate is supported with lifting process in, rigid mechanical contact causes supported easily and/or by the substrate breakage of lifting, reduces yield of products; Another kind of supporting mechanism has pneumatic cushioning function or liquid-springing function, this class supporting mechanism can be introduced propulsion sources such as supporting mechanism and cylinder or hydro-cylinder in the vacuum evaporation equipment when mounted, inevitably like this brought pollution from equipment itself to vacuum environment, reduce the degree of cleaning of vacuum apparatus, influence the evaporation effect; Simultaneously, cylinder or hydro-cylinder etc. are introduced vacuum apparatus, make complex structure, the installation difficulty of supporting mechanism, the manufacturing cost height, and supporting mechanism is positioned at vacuum apparatus, maintenance difficult.
Therefore, be badly in need of a kind ofly having the bumper and absorbing shock function, guaranteeing the evaporated device high cleanliness, and vibration damping supporting mechanism simple in structure, easy to maintenance.
The utility model content
The purpose of this utility model is to provide a kind of and has bumper and absorbing shock function, assurance evaporated device high cleanliness, and vibration damping supporting mechanism simple in structure, easy to maintenance.
Another purpose of the present utility model is to provide a kind of lifting device with vibration damping supporting mechanism, and this lifting device can be kept the high cleanliness of evaporated device, and simple in structure, easy to maintenance.
For achieving the above object, the technical solution of the utility model is: a kind of vibration damping supporting mechanism is provided, comprise mounting plate, loading plate, web member and locating part, described web member and described locating part are connected between described mounting plate and the described loading plate in parallel to each other, wherein, described web member comprises joint pin and elastic element, the upper end of described joint pin and described loading plate flexibly connect, the lower end of described joint pin and described mounting plate flexibly connect, described elastic element is being sheathed on outside the described joint pin of compression shape, and the upper end of described elastic element and described loading plate are conflicted, the lower end of described elastic element and described mounting plate are conflicted, the lower end of described locating part is connected with described mounting plate, and the described loading plate direction of the upper end edge of described locating part is extended, and the upper end of described locating part also is provided with the softish cushion plate.
Preferably, described vibration damping supporting mechanism also comprises nut, and the lower end of described joint pin passes described loading plate successively and described mounting plate is connected with described nut thread, and the upper end of described joint pin and described loading plate are inconsistent; When the stressed effect of mounting plate when the effect that joint pin moves upward or loading plate is stressed moves downward, being sheathed on the outer elastic element of joint pin is further compressed, the elastic force that elastic element produces puts on by the power on the loaded object loading plate and plays shock absorption, produce bigger vibration when preventing the loading plate loaded object, and then avoid carrying with being contacted to make and be damaged by the conflict object by rigid between the loaded object.
Preferably, the lower end of described locating part is threaded with described mounting plate, and the upper end of described locating part has the mounting groove that indent forms, and described cushion plate is fixed in the described mounting groove and protrudes described mounting groove; When mounting plate moves upward or loading plate when moving downward, the locating part restriction displacement that mounting plate moves upward or loading plate moves downward also can further play shock absorption, avoids rigid mechanical contact; Simultaneously, cushion plate is fixed in the described mounting groove, when cushion plate bears pressure between mounting plate and the loading plate, can reduce its transverse deformation, strengthens its surge capability, increases work-ing life.
What the lifting device that the utility model provides was fixedly installed in outside the vacuum cavity and the one end seals stretches in the vacuum cavity, described lifting device comprises driving mechanism, vibration damping supporting mechanism and at least three group post rod mechanisms, fixedly connected with the base plate of described vacuum cavity in the upper end of described vibration damping supporting mechanism, the lower end is connected with described driving mechanism, fixedly connected with the lower end of described vibration damping supporting mechanism in the lower end of described post rod mechanism, the upper end of described post rod mechanism is stretched in the described vacuum cavity and with described vacuum cavity and articulated hermetically; Described vibration damping supporting mechanism of described drive mechanism and described post rod mechanism move reciprocatingly, wherein, described vibration damping supporting mechanism comprises mounting plate, web member and locating part, described web member and described locating part are connected between the base plate and described mounting plate of described vacuum cavity in parallel to each other, and described mounting plate is connected with described driving mechanism; Described web member comprises joint pin and elastic element, fixedly connected with the base plate of described vacuum cavity in the upper end of described joint pin, the lower end of described joint pin and described mounting plate flexibly connect, described elastic element is being sheathed on outside the described joint pin of compression shape, and the upper end of described elastic element and the base plate of described vacuum cavity are conflicted, the lower end of described elastic element and described mounting plate are conflicted, the lower end of described locating part is connected with described mounting plate, the base plate direction of the described vacuum cavity of upper end edge of described locating part is extended, and the upper end of described locating part also is provided with the softish cushion plate; The upper end of described post rod mechanism is stretched in the described vacuum cavity and with described vacuum cavity and is articulated hermetically, fixedlys connected with described mounting plate in the lower end.
Preferably, the upper end of described joint pin is passed described mounting plate and is connected with the base thread of described vacuum cavity, and the lower end of described joint pin and described mounting plate are inconsistent; When mounting plate is activated mechanism's driving, mounting plate moves upward along joint pin, the drive post rod mechanism moves upward, elastic element is further compressed, the elastic force that elastic element produces is applied to by the power on the conflict object post rod mechanism and plays shock absorption, produce bigger vibration when preventing post rod mechanism conflict object, and then avoid post rod mechanism to be damaged with being contacted to make by the conflict object by rigid between the conflict object.
Preferably, the lower end of described locating part is threaded with described mounting plate, and the upper end of described locating part has the mounting groove that indent forms, and described cushion plate is fixed in the described mounting groove and protrudes described mounting groove; When mounting plate moved upward, the displacement that locating part restriction mounting plate moves upward also can further play shock absorption, avoids rigid mechanical contact; Simultaneously, cushion plate is fixed in the described mounting groove, when cushion plate bears pressure between mounting plate and the vacuum cavity base plate, can reduce its transverse deformation, strengthens its surge capability, increases work-ing life.
Preferably, the push rod that described post rod mechanism has web plate and protrudes out from described web plate, described web plate is fixedlyed connected with described mounting plate, and described push rod stretches in the described vacuum cavity and with described vacuum cavity and articulates hermetically; The web plate of post rod mechanism is fixedlyed connected with mounting plate, just can drive fore-set mechanism and the motion of vibration damping supporting mechanism by a driving mechanism, does not need a plurality of driving mechanisms, makes to drive the difficulty reduction, and then improves the processing efficiency of substrate; And articulating hermetically with vacuum cavity of post rod mechanism avoids propulsion source to pollute to vacuum environment, influences the product technological effect, improves the degree of cleaning of vacuum environment, guarantees yield of products.
Preferably, described lifting device also comprises corrugated tube, the upper end of described corrugated tube and the bottom of described vacuum cavity are tightly connected, the vacuum cavity place that is connected with described sylphon seal offers access opening, the upper end of described push rod is passed described access opening freely, the lower end of described push rod is placed in the described corrugated tube, and the lower end of described corrugated tube and described web plate are tightly connected; Push rod lower end and web plate are positioned at outside the vacuum cavity, therefore vibration damping supporting mechanism and driving mechanism are installed on outside the vacuum cavity,, avoid propulsion source to pollute to vacuum environment, influence the product technological effect, improve the degree of cleaning of vacuum environment, guarantee yield of products; Simultaneously, the upper end of corrugated tube and the bottom of vacuum cavity are tightly connected, and lower end and web plate are tightly connected, and corrugated tube is realized the static seal of vacuum cavity with vibration damping supporting mechanism and driving mechanism and vacuum cavity seal isolation, guarantees its high cleanliness.
Compared with prior art, because the utility model vibration damping supporting mechanism, comprise mounting plate, loading plate, web member and locating part, described web member and described locating part are connected between described mounting plate and the described loading plate in parallel to each other, wherein, described web member comprises joint pin and elastic element, the upper end of described joint pin and described loading plate flexibly connect, the lower end of described joint pin and described mounting plate flexibly connect, the upper end of described elastic element and described loading plate are conflicted, the lower end of described elastic element and described mounting plate are conflicted, the lower end of described locating part is connected with described mounting plate, the described loading plate direction of the upper end edge of described locating part is extended, and the upper end of described locating part also is provided with the softish cushion plate; When the stressed effect of mounting plate when the effect that joint pin moves upward or loading plate is stressed moves downward, elastic element is further compressed, the elastic force that elastic element produces puts on by the power on the loaded object loading plate and plays shock absorption, produce bigger vibration when preventing the loading plate loaded object, and then avoid loading plate to be damaged to bearing part with being contacted to make by rigid between the loaded object; Mounting plate moves upward or loading plate moves downward in the process, and the displacement of locating part restriction mounting plate or loading plate motion also can further play shock absorption, avoids rigid mechanical contact, prevents to be damaged by loaded object; Simultaneously, this vibration damping supporting mechanism is simple in structure, and assembling is quick, and is easy to maintenance, and production cost is reduced greatly; And this vibration damping supporting mechanism can separate with supported object in use, avoids propulsion source to pollute supported object, thereby guarantees the degree of cleaning of supported object, improves the quality of product.Because the utility model lifting device has above-mentioned vibration damping supporting mechanism, therefore, the utility model lifting device also has above-mentioned advantage.
Description of drawings
Fig. 1 is the cross section structure synoptic diagram of the utility model vibration damping supporting mechanism.
Fig. 2 is the enlarged view of A part among Fig. 1.
Fig. 3 is the enlarged view of B part among Fig. 1.
Fig. 4 is the cross section structure synoptic diagram of the utility model lifting device.
Fig. 5 is the cross section structure synoptic diagram of the user mode of the utility model lifting device.
Embodiment
With reference now to accompanying drawing, describe embodiment of the present utility model, the similar elements label is represented similar elements in the accompanying drawing.
As shown in Figure 1-Figure 3, the utility model vibration damping supporting mechanism 30, comprise mounting plate 32, loading plate 31, web member 34 and locating part 33, web member 34 and locating part 33 are connected between mounting plate 32 and the loading plate 31 in parallel to each other, wherein, web member 34 comprises joint pin 341 and elastic element 342, the upper end of joint pin 341 and loading plate 31 flexibly connect, the lower end of joint pin 341 and mounting plate 32 flexibly connect, elastic element 342 is being sheathed on outside the joint pin 341 of compression shape, and the upper end of elastic element 342 and loading plate 31 are conflicted, the lower end of elastic element 342 and mounting plate 32 are inconsistent, the lower end of locating part 33 is connected with mounting plate 32, and the direction of the upper end edge loading plate 31 of locating part 33 is extended, and the upper end of locating part 33 also is provided with softish cushion plate 332.Particularly, joint pin is preferably bolt 341 in the utility model, elastic element is preferably spring 342 in the utility model, mounting plate 32 is provided with open holes 321 and open holes 322, loading plate 31 is provided with threaded mounting hole 311, the lower end of bolt 341 is run through threaded mounting hole 311 and open holes 321 successively and is threaded with nut 344, the upper surface of the upper end of joint pin 341 and loading plate 31 is inconsistent and be lower than the upper surface of loading plate 31, on bolt 341, be arranged with two confinement ring 343a, 343b, spring 342 is being set in outside the joint pin 341 of compression shape, and the upper end of spring 342 and confinement ring 343a are inconsistent, the lower end of spring 342 and confinement ring 343b are inconsistent, therefore, under the effect of spring 342 elastic force, confinement ring 343a and loading plate 31 are conflicted, and confinement ring 343b and mounting plate 32 are inconsistent, and spring 342 is being fixed between mounting plate 32 and the loading plate 31 of compression shape; The lower end of locating part 33 is run through the open holes 322 on the mounting plate 32 and is threaded with described mounting plate 32 by nut 333a, 333b, by setting nut 333a and nut 333b, can regulate the height of locating part 33, and then regulate the displacement that mounting plate 32 or loading plate 31 move, the direction of the upper end edge loading plate 31 of locating part 33 is extended, the upper end of locating part 33 has the mounting groove 331 that indent forms, described cushion plate 332 by screw retention in described mounting groove 331 and protrude described mounting groove 331; The effect that is subjected to power when mounting plate 32 along joint pin 341 moves upward or loading plate 31 is stressed effect when joint pin 341 moves downward, spring 342 is further compressed, the elastic force that spring 342 produces puts on by the power on the loaded object loading plate 31 and plays shock absorption, produce bigger vibration when preventing loading plate 31 loaded objects, and then avoid loading plate 31 and the object that is carried is damaged by rigid contact the between the loaded object; In addition, the locating part 33 restriction displacements that mounting plate 32 moves upward or loading plate 31 moves downward also can further play shock absorption, avoid rigid mechanical contact; Cushion plate 332 is fixed in the described mounting groove 331, when cushion plate 332 bears the pressure of mounting plate 32, can reduce its transverse deformation, strengthens its surge capability, increases work-ing life.
As Fig. 1-shown in Figure 4, what the utility model lifting device 100 was fixedly installed in outside the vacuum cavity 20 and the one end seals stretches in the vacuum cavity 20, it comprises driving mechanism 10, vibration damping supporting mechanism 30 and four groups of post rod mechanisms 40, fixedly connected with the base plate of vacuum cavity 22 in the upper end of vibration damping supporting mechanism 30, the lower end is connected with driving mechanism 10, all fixedly connected with the lower end of vibration damping supporting mechanism 30 in the lower end of post rod mechanism 40, the upper end is stretched in the vacuum cavity 20 and with vacuum cavity 20 and articulated hermetically; Driving mechanism 10 is preferably cylinder assembly; Vibration damping supporting mechanism 30 comprises mounting plate 32, web member 34 and locating part 33, mounting plate 32 lower ends are connected with cylinder assembly 10, fixedly connected with the base plate 22 of vacuum cavity by web member 34 in the upper end, web member 34 comprises joint pin 341 and elastic element 342, fixedly connected with the base plate of vacuum cavity 22 in the upper end of joint pin 341, the lower end of joint pin 341 and mounting plate 32 flexibly connect, elastic element 342 is being sheathed on outside the joint pin 341 of compression shape, and the upper end of elastic element 342 and the base plate of vacuum cavity 22 are conflicted, and the lower end of elastic element 342 and mounting plate 32 are conflicted; Locating part 33 is arranged between the base plate 22 of vacuum cavity and the mounting plate 32 and with web member 34 and is parallel to each other, the lower end of described locating part 33 is connected with mounting plate 32, the direction of the base plate 22 of the upper end edge vacuum cavity of described locating part 33 is extended, and the upper end of locating part 33 also is provided with softish cushion plate 332; The lower end of post rod mechanism 20 is symmetric to be connected on the mounting plate 32 of vibration damping supporting mechanism 30, and the upper end is stretched in the vacuum cavity 20 and with vacuum cavity 20 and articulated hermetically; Particularly, joint pin is preferably bolt 341 in the utility model, elastic element is preferably spring 342 in the utility model, mounting plate 32 is provided with open holes 321 and open holes 322, the open holes 321 that the upper end of bolt 341 is run through on the mounting plate 32 is threaded with the base plate 22 of vacuum cavity, the lower end of joint pin and mounting plate 32 are inconsistent, on bolt 341, be arranged with two confinement ring 343a, 343b, spring 342 is being set in outside the joint pin 341 of compression shape, the upper end of spring 342 and confinement ring 343a are inconsistent, the lower end of spring 342 and confinement ring 343b are inconsistent, therefore, under the effect of spring 342 elastic force, the base plate 22 of confinement ring 343a and vacuum cavity is conflicted, confinement ring 343b and mounting plate 32 are inconsistent, and spring 342 is between the base plate that is fixed in mounting plate 32 and vacuum cavity 22 that compresses shape; The lower end of locating part 33 is run through the open holes 322 on the mounting plate 32 and is passed through nut 333a, 333b and is connected with described mounting plate 32, base plate 22 directions of the upper end edge vacuum cavity of locating part 33 are extended, the upper end of locating part 33 has the mounting groove 331 that indent forms, described cushion plate 332 by screw retention in described mounting groove 331 and protrude described mounting groove 331; The push rod 402 that post rod mechanism 40 has web plate 401 and protrudes out from described web plate 401, web plate 401 is fixedlyed connected with mounting plate 32, and push rod 402 stretches in the vacuum cavity 20 and with described vacuum cavity 20 and articulates hermetically; Particularly, offer access opening on the base plate 22 of vacuum cavity, the upper end of push rod 402 is passed access opening freely and is stretched in the vacuum cavity 20, the lower end of push rod 402 is positioned at outside the vacuum cavity 20 web plate 401 is fixedlyed connected with mounting plate 32, corrugated tube 403 is sheathed on the lower end of push rod 402, corrugated tube 403 1 ends are fixed in the access opening place of the base plate 22 of vacuum cavity by flange 404, access opening is sealed in the corrugated tube 403, the other end is fixed in by flange 404 on the web plate 401 of post rod mechanism 40, realizes the sealing of post rod mechanism 40 and vacuum cavity 20.The web plate 401 of fore-set mechanism 40 is connected with the mounting plate 32 of vibration damping supporting mechanism 30, mounting plate 32 is connected with cylinder assembly 10, by cylinder assembly 10 drive installation plates 32, when mounting plate 32 drive fore-set mechanisms 40 move upward, the elastic force that the spring 342 of vibration damping supporting mechanism 30 produces is applied to by the power on the conflict object post rod mechanism 40 and plays shock absorption, produce bigger vibration when preventing post rod mechanism 40 conflict objects, and then avoid post rod mechanism 40 to be damaged with being contacted to make by the conflict object by rigid between the conflict object, and locating part 33 can limit the displacement that mounting plate 32 moves upward and can further play shock absorption, avoids rigid mechanical contact and damages supported object.
In conjunction with Fig. 4, Fig. 5, the principle of the utility model lifting device 100 is elaborated.During original state, supported object is positioned on the push rod 402, when cylinder assembly 10 moves from bottom to top, drive installation plate 32 moves upward, mounting plate 32 drives the post rod mechanism 40 that connects thereon and moves upward, when push rod 402 moves upward, corrugated tube 403 is compressed, being sheathed on joint pin 341 outer springs 342 is simultaneously also further compressed, the elastic force that spring 342 produces is applied to by the power on the conflict object push rod 402 and plays shock absorption, produce bigger vibration when preventing push rod 402 conflict objects, and then avoid push rod 402 to be damaged with being contacted to make by the conflict object by rigid between the conflict object; Locating part 33 can limit the displacement that mounting plate 32 moves upward and can further play shock absorption, further avoids rigid mechanical contact, and the object that prevents to be conflicted is damaged; When quilt conflict object be conditioned put in place or be transported away after, cylinder assembly 10 moves downward, compression spring 342 and corrugated tube 403 are released and reset, and recover starting position; The cushion plate 332 of locating part 33 is fixed in the mounting groove 331, when cushion plate 332 bears the pressure of mounting plate 32, can reduce its transverse deformation, strengthens its surge capability, increases its work-ing life; The lower end of locating part 33 is run through the open holes 322 on the mounting plate 32 and is connected with mounting plate 32 by nut, can be according to the stroke of cylinder assembly 10 and the position of practical application adjusting locating part 33 upper nuts, regulate the height of locating part 33, and then regulate the displacement of restriction mounting plate 32 motions; The upper end of corrugated tube 403 and the bottom of vacuum cavity 22 are tightly connected, lower end and web plate 401 are tightly connected, corrugated tube 403 is with vibration damping vibration damping supporting mechanism 30 and driving mechanism 10 and vacuum cavity 20 seal isolation, avoid propulsion source to pollute to vacuum environment, realize the static seal of vacuum cavity 20, guarantee its high cleanliness.
The vibration damping supporting mechanism 30 of the utility model lifting device 100 comprises mounting plate 32, web member 34 and locating part 33, mounting plate 32 lower ends are connected with cylinder assembly 10, fixedly connected with the base plate 22 of vacuum cavity by web member 34 in the upper end, web member 34 comprises joint pin 341 and elastic element 342, fixedly connected with the base plate of vacuum cavity 22 in the upper end of joint pin 341, the lower end of joint pin 341 and mounting plate 32 flexibly connect, elastic element 342 is being sheathed on outside the joint pin 341 of compression shape, and the upper end of elastic element 342 and the base plate of vacuum cavity 22 are inconsistent, the lower end of elastic element 342 and mounting plate 32 are inconsistent, the lower end of locating part 33 is connected with mounting plate 32, base plate 22 directions of the upper end edge vacuum cavity of locating part 33 are extended, the upper end of locating part 33 also is provided with softish cushion plate 332, the lower end of post rod mechanism 40 is symmetric to be connected on the mounting plate 32 of vibration damping supporting mechanism 30, and the upper end is stretched in the vacuum cavity 20 and with vacuum cavity 20 and articulated hermetically; When mounting plate 32 when joint pin 341 moves upward, elastic element 342 is further compressed, the elastic force that elastic element 342 produces puts on by the power on the loaded object post rod mechanism 40 and plays shock absorption, produce bigger vibration when preventing post rod mechanism 40 loaded objects, and then avoid post rod mechanism 40 to be damaged with being contacted to make by the conflict object by rigid between the loaded object; Mounting plate 32 moves upward in the process, and the displacement that locating part 33 restriction mounting plates 32 move upward also can further play shock absorption, avoids rigid mechanical contact, prevents to be damaged by loaded object; Lifting device 100 is simple in structure, and assembling is quick, and production cost reduces greatly; Post rod mechanism 42 is installed on outside the vacuum cavity 20 by vibration damping supporting mechanism 30, and be tightly connected by corrugated tube 403 in the middle of post rod mechanism 40 and the vacuum cavity 20, with vibration damping supporting mechanism 30 and driving mechanism 10 and vacuum cavity 20 seal isolation, avoid propulsion source to pollute, realize the static seal of vacuum cavity 20, guarantee its high cleanliness to vacuum environment, improve the quality of product, post rod mechanism 40 and vibration damping supporting mechanism 30 are installed on outside the vacuum cavity 20, are convenient to maintenance, and be easy to maintenance.
The utility model lifting device 100 is not limited to the support of substrate and lifting, also can be used for the support and the lifting of similar object according to actual needs.
The driving mechanism 10 of the utility model support pillar equipment and principle thereof etc. are well known to those of ordinary skill in the art, no longer are described in detail at this.
Above disclosed only is preferred embodiment of the present utility model, can not limit the interest field of the utility model certainly with this, and therefore the equivalent variations of being done according to the utility model claim still belongs to the scope that the utility model is contained.
Claims (8)
1. vibration damping supporting mechanism, comprise mounting plate, loading plate, web member and locating part, described web member and described locating part are connected between described mounting plate and the described loading plate in parallel to each other, it is characterized in that: described web member comprises joint pin and elastic element, the upper end of described joint pin and described loading plate flexibly connect, the lower end of described joint pin and described mounting plate flexibly connect, described elastic element is being sheathed on outside the described joint pin of compression shape, and the upper end of described elastic element and described loading plate are conflicted, the lower end of described elastic element and described mounting plate are conflicted, the lower end of described locating part is connected with described mounting plate, the described loading plate direction of the upper end edge of described locating part is extended, and the upper end of described locating part also is provided with the softish cushion plate.
2. vibration damping supporting mechanism as claimed in claim 1 is characterized in that: also comprise nut, the lower end of described joint pin passes described loading plate successively and described mounting plate is connected with described nut thread, and the upper end of described joint pin and described loading plate are inconsistent.
3. vibration damping supporting mechanism as claimed in claim 1, it is characterized in that: the lower end of described locating part is threaded with described mounting plate, the upper end of described locating part has the mounting groove that indent forms, and described cushion plate is fixed in the described mounting groove and protrudes described mounting groove.
4. lifting device, be fixedly installed in the stretching in the vacuum cavity of the outer and one end sealing of vacuum cavity, described lifting device comprises driving mechanism, vibration damping supporting mechanism and at least three group post rod mechanisms, fixedly connected with the base plate of described vacuum cavity in the upper end of described vibration damping supporting mechanism, the lower end is connected with described driving mechanism, fixedly connected with the lower end of described vibration damping supporting mechanism in the lower end of described post rod mechanism, the upper end of described post rod mechanism is stretched in the described vacuum cavity and with described vacuum cavity and is articulated hermetically, described vibration damping supporting mechanism of described drive mechanism and described post rod mechanism move reciprocatingly, it is characterized in that: described vibration damping supporting mechanism comprises mounting plate, web member and locating part, described web member and described locating part are connected between the base plate and described mounting plate of described vacuum cavity in parallel to each other, and described mounting plate is connected with described driving mechanism; Described web member comprises joint pin and elastic element, fixedly connected with the base plate of described vacuum cavity in the upper end of described joint pin, the lower end of described joint pin and described mounting plate flexibly connect, described elastic element is being sheathed on outside the described joint pin of compression shape, and the upper end of described elastic element and the base plate of described vacuum cavity are conflicted, the lower end of described elastic element and described mounting plate are conflicted, the lower end of described locating part is connected with described mounting plate, the base plate direction of the described vacuum cavity of upper end edge of described locating part is extended, and the upper end of described locating part also is provided with the softish cushion plate; The upper end of described post rod mechanism is stretched in the described vacuum cavity and with described vacuum cavity and is articulated hermetically, fixedlys connected with described mounting plate in the lower end.
5. as lifting device as described in the claim 4, it is characterized in that: the upper end of described joint pin is passed described mounting plate and is connected with the base thread of described vacuum cavity, and the lower end of described joint pin and described mounting plate are inconsistent.
6. lifting device as claimed in claim 4, it is characterized in that: the lower end of described locating part is threaded with described mounting plate, the upper end of described locating part has the mounting groove that indent forms, and described cushion plate is fixed in the described mounting groove and protrudes described mounting groove.
7. want 4 described lifting devices as right, it is characterized in that: the push rod that described post rod mechanism has web plate and protrudes out from described web plate, described web plate is fixedlyed connected with described mounting plate, and described push rod stretches in the described vacuum cavity and with described vacuum cavity and articulates hermetically.
8. want 7 described lifting devices as right, it is characterized in that: described lifting device also comprises corrugated tube, the upper end of described corrugated tube and the base plate of described vacuum cavity are tightly connected, the base plate place of the vacuum cavity that is connected with described sylphon seal offers access opening, the upper end of described push rod is passed described access opening freely, the lower end of described push rod is placed in the described corrugated tube, and the lower end of described corrugated tube and described web plate are tightly connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202742049U CN201634755U (en) | 2009-12-01 | 2009-12-01 | Shock-absorption supporting mechanism and lifting device with shock-absorption supporting mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202742049U CN201634755U (en) | 2009-12-01 | 2009-12-01 | Shock-absorption supporting mechanism and lifting device with shock-absorption supporting mechanism |
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| Publication Number | Publication Date |
|---|---|
| CN201634755U true CN201634755U (en) | 2010-11-17 |
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| CN2009202742049U Expired - Lifetime CN201634755U (en) | 2009-12-01 | 2009-12-01 | Shock-absorption supporting mechanism and lifting device with shock-absorption supporting mechanism |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106251777A (en) * | 2016-09-20 | 2016-12-21 | 吉首大学 | Large-scale damping electronic display with heat pump dehumidifying |
| CN107917321A (en) * | 2017-11-16 | 2018-04-17 | 常州信息职业技术学院 | A kind of good computer display of barrier propterty |
| CN109775116A (en) * | 2019-01-25 | 2019-05-21 | 侯玉闯 | A kind of short distance transportation packaging bag |
| CN114471842A (en) * | 2022-01-27 | 2022-05-13 | 上海山美环保装备股份有限公司 | Vertical shaft component structure of vertical shaft type impact crusher |
| CN114657536A (en) * | 2022-03-23 | 2022-06-24 | 广东省智能机器人研究院 | MOCVD equipment for ZnO film growth |
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2009
- 2009-12-01 CN CN2009202742049U patent/CN201634755U/en not_active Expired - Lifetime
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106251777A (en) * | 2016-09-20 | 2016-12-21 | 吉首大学 | Large-scale damping electronic display with heat pump dehumidifying |
| CN106251777B (en) * | 2016-09-20 | 2019-02-05 | 吉首大学 | Large-scale damping electronic display with heat pump dehumidifying |
| CN107917321A (en) * | 2017-11-16 | 2018-04-17 | 常州信息职业技术学院 | A kind of good computer display of barrier propterty |
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