CN201555808U - Device capable of nondestructively testing surface of planar object - Google Patents
Device capable of nondestructively testing surface of planar object Download PDFInfo
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- CN201555808U CN201555808U CN2009202453462U CN200920245346U CN201555808U CN 201555808 U CN201555808 U CN 201555808U CN 2009202453462 U CN2009202453462 U CN 2009202453462U CN 200920245346 U CN200920245346 U CN 200920245346U CN 201555808 U CN201555808 U CN 201555808U
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Abstract
The utility model relates to a device capable of nondestructively testing the surface of an object and is characterized in that a laser and an object to be tested are arranged in the way that the included angle between the optical axis of the laser and the central axis of the object to be tested is 0.001 to 20 degrees; a microobjective is arranged on the optical axis of the laser and is between the laser and the object to be tested; an optical wedge with fixed shear angle, a convex lens and a linear array CCD are sequentially arranged on the central axis of the reflected beam of a sample to be measured; the linear array CCD is fixed on a micrometric displacement platform capable of moving in one-dimension direction; the image signals collected by the linear array CCD are output to a computer; and the control signals of the computer are output to the micrometric displacement platform capable of moving in one-dimension direction for controlling the movement of the micrometric displacement platform capable of moving in one-dimension direction. In the utility model, by utilizing the method of sweeping of the linear array CCD, corresponding moving track of the micrometric displacement platform can be designed according to the surface of the sample to be measured, and the speckle pattern obtained through sweeping along the moving track can eliminate the defocusing phenomenon of speckle image, therefore, the sensitivity of the flaw detection is effectively improved.
Description
Technical field
The utility model relates to the device on a kind of Non-Destructive Testing flat objects surface, belongs to the optics technical field of nondestructive testing.
Background technology
Numeral speckle-shearing interferometry technology is a kind of whole audience based on laser, the measuring technique of noncontact surface deformation (displacement or strain).Shear mirror with small angle of wedge is placed the front of imaging len, what make body surface a bit produces a pair of two pictures with very little dislocation on image planes, because body surface is by laser lighting, make because two width of cloth clip images of dislocation generation are interfered mutually and formed one and comprise the cutting speckle field of interference pattern at random.The dislocation picture interferes with each other on as the plane, form the speckle interference image and collect in the computing machine through image pick-up card, two width of cloth speckle images before and after the distortion are done subtracted each other or related operation promptly can show the speckle striped of deformation of body information on computers in real time by CCD.
Numeral speckle-shearing interferometry technology has in real time, the whole audience, noncontact, harmless, mechanism simply, need not advantage such as vibration abatement.Because testing result is not influenced by the testing sample rigid motion, detector need not vibration abatement, provides technical foundation for being applied to the production testing line.Simultaneously, Computer Image Processing and analytic system can be monitored and measure the defective in the sample in real time, and be efficient and convenient.Require to become the basis that digital speckle-shearing interferometry technology maturation is applied to tire, compound substance and metal field to the high precision of measuring samples and to hanging down of measurement environment, it can detect typical defects such as inside tires micro-bubble and carcass separation, and can determine the cross section place of defective.
At present, the image collecting device that lossless detection method and device adopted based on digital cutting speckle principle is area array CCD or face battle array CMOS, for example, Guangzhou SCUT Bestry Auto Co., Ltd's publication number is the patent of invention of CN1632543A, Korea Tyre Co., Ltd's publication number is the patent of invention of CN1916563A, and people such as Y.Y.Hung utilize distortion of speckle interference art Measuring Object and acoplanarity displacement in " the Shearography:An opticalmeasurement technique and applications " that delivered in 2005 on Materials Science and Engineering.In addition, the laser digital cutting speckle tire nondestructive testing instrument that German Steinbichler company produces can detect the whole piece tire, a scan period can finish in 2min, defect resolution is 1mm, and detecting the tire largest outer diameter is 1600mm, and maximum section width is 600mm.But the sensor devices of this detector detection system also is made up of several area array CCDs.
Area array CCD or CMOS area as the speckle pattern recording medium are generally less, and its sum of all pixels is limited.If utilize image device to big view field imaging, the resolution of the cutting speckle picture that area array CCD is gathered can reduce, and then has reduced the detection sensitivity of fault in material.Therefore based on the Non-Destructive Testing of area array CCD, can't reach big visual field area and highly sensitive requirement simultaneously.In addition,, surpass the depth of field restriction of imaging system, and area array CCD is a directrix plane if the detected materials surface undulation is bigger, be imaged on the area array CCD surface picture some can produce the out of focus phenomenon.Because be subjected to the influence of image recording media, the sensitivity of digital speckle-shearing interferometry technology and resolution can not further improve.
Summary of the invention
The technical matters that solves
For fear of the deficiencies in the prior art part, the utility model proposes the device on a kind of Non-Destructive Testing flat objects surface, can design corresponding pushing away according to the testing sample surface topography and sweep track, so that it is clear Jiao to push away the picture of sweeping the testing sample that obtains; Simultaneously, line array CCD is with respect to the area array CCD low price of equal resolution, and the light-sensitive surface size is big, can reduce the detection cost significantly.
Technical scheme
The device on a kind of Non-Destructive Testing flat objects surface is characterized in that comprising laser instrument 1, microcobjective 2, the wedge 4 that the angle of shear is fixing, and convex lens 5, line array CCD 6, the one dimension direction moves micro-displacement platform 7 and computing machine 8; The optical axis of laser instrument 1 and the central axis of tested article are 0.01 °～20 ° angles to be placed, and microcobjective 2 is being set on the optical axis of laser instrument 1 and between the tested article; On the central axis of sample folded light beam, set gradually the angle of shear fixing wedge 4, convex lens 5 and line array CCD 6; The one dimension direction that is fixed in line array CCD 6 moves on the micro-displacement platform 7, and the picture signal that line array CCD 6 is gathered exports computing machine 8 to, and the control signal of computing machine exports the one dimension direction to and moves micro-displacement platform 7 control one dimension directions and move moving of micro-displacement platform 7; Described line array CCD is positioned on the picture plane of sample by convex lens 5 imagings; Described shearing elements 4 is close to convex lens 5 and is placed; Adjusting described microcobjective 2 makes apart from the position of sample by microcobjective 2 and expands the whole sample of beam lighting surface behind the bundle.
Described laser instrument 1 adopts helium-neon laser.
Described line array CCD 6 is the charge-coupled image sensor that one-dimensional array distributes for pixel.
Described line array CCD 6 is linear array CMOS.
The device basic operational steps on Non-Destructive Testing flat objects of the present utility model surface is: the light beam that laser instrument sends shines testing sample after being converted into the bigger plane light wave of spherical light wave or spot size by parallel beam expand device, light beam by sample scattering forms speckle field at sample surfaces, and this speckle field is through forming the two speckle pictures that misplace mutually on the picture plane of sample behind the shearing elements with behind the imaging device.Described line array CCD is arranged on the micro-displacement platform and is positioned at the picture plane, and the line of pixels column direction is vertical with the direction that staggers of speckle picture.Micro-displacement platform is moving on perpendicular to line array CCD line of pixels column direction under the computer control that electrically connects with it, and drives line array CCD to carrying out the continuous sweep collection as the plane, forms several one dimension images.The mode of stepping accuracy that can be by controlling described micro-displacement platform is controlled the sampling precision of moving direction; The stepping accuracy of micro-displacement platform can be less than the unit pixel size of line array CCD.Several one dimension images can be utilized digital image processing techniques to handle and a synthetic width of cloth two dimension shearing speckle pattern by the computing machine with the line array CCD electric connection.Utilize line array CCD to gather the cutting speckle figure of described sample distortion front and back respectively, image before and after the two amplitude variation shapes by relevant or cut algorithm mutually and means such as Digital Image Processing are carried out numerical operation, finally obtains the speckle interference fringe pattern of butterfly macules shape clearly by computing machine.
Beneficial effect
The device on the Non-Destructive Testing flat objects surface that the utility model proposes, thereby owing to drive line array CCD pushing away to sweep to gather as the plane and obtain several one dimension images to sample by micro-displacement platform, with its processing and synthetic width of cloth two dimension speckle pattern, effectively increased the area of the visual field of writing down again.And, control to push away and sweep precision by changing step value size that line array CCD pushes away micro-displacement platform in the inswept journey, if the stepping accuracy of described micro-displacement platform is set to the unit pixel size less than line array CCD, can also improve the sampling precision of speckle pattern along the micro-displacement platform moving direction.In addition, when the testing sample surface undulation is big, utilize the picture on the speckle pattern that traditional area array CCD obtains to produce out of focus, can cause to detect corresponding to the defective of out of focus part.And utilize line array CCD to push away the method for sweeping, and can be according to the moving track of the corresponding micro-displacement platform of testing sample surface design, push away along described moving track and to sweep the out of focus phenomenon that the speckle pattern that obtains has been eliminated the speckle picture, thereby effectively improved the sensitivity of defects detection.
Description of drawings
Fig. 1: embodiment device structural representation
1-laser instrument, 2-microcobjective, 3-testing sample, fixing wedge, 5-convex lens, 6-line array CCD, 7-micro-displacement platform, the 8-computing machine of the 4-angle of shear.
Embodiment
Now in conjunction with the embodiments, accompanying drawing is further described the utility model:
Device embodiment: see also Fig. 1:
In the present embodiment, laser instrument adopts helium-neon laser, is the sample of a coarse plane and loading stress but testing sample 3 adopts the surface.
Present embodiment comprises laser instrument 1, parallel beam expand device 2, shearing elements 4, imaging device 5, line array CCD 6, micro-displacement platform 7 and computing machine 8; Laser instrument 1 adopts helium-neon laser, and parallel beam expand device 2 adopts microcobjective, and shearing elements 4 is the fixing wedge of the angle of shear, and imaging device 5 is convex lens, and micro-displacement platform 7 moves micro-displacement platform for the one dimension direction.
The optical axis of helium-neon laser and the central axis of tested article are 10 ° of angles and place, on the optical axis of helium-neon laser and between the tested article microcobjective is being set, this beam expander is become relevant spherical light wave, and the adjustment microcobjective makes by the whole sample of the beam lighting surface behind the microcobjective expansion bundle apart from the position of sample; Set gradually the angle of shear fixing wedge, convex lens and line array CCD 6 on the central axis of sample folded light beam, line array CCD 6 is fixed in the one dimension direction and moves micro-displacement platform; The fixing wedge of the angle of shear is close to convex lens, and the two-beam of adjusting the wedge of fixing through the angle of shear is with respect to testing sample axis symmetry, and angle is 10 ° between the two-beam; Line array CCD places sample to pass through on the picture plane of convex lens imaging.
The picture signal that line array CCD 6 is gathered exports computing machine 8 to, the picture signal that 8 couples of CCD6 of computing machine gather handle and display process after image; The control signal of computing machine exports moving of micro-displacement platform 7 control micro-displacement platforms 7 to.
The groundwork process of present embodiment is: the light pencil that described helium-neon laser 1 sends expands bundle by microcobjective and is relevant spherical light wave.Spherical wave shines testing sample 3 backs by the sample surfaces scattering, and produces relevant speckle field at sample surfaces.It is that light wave is penetrated in 10 ° two beam spreadings that the diffuse lightwave of sample surfaces forms direction of propagation angle after through the fixing wedge of the angle of shear, after the light wave planoconvex lens is penetrated in two beam spreadings, forms two speckle pictures of dislocation mutually on the picture plane of sample, or is referred to as the cutting speckle picture.The speckle picture is gathered by being arranged on the one-dimensional micro-displacement platform 7 and being in as the line array CCD 6 on plane, and guarantees that the line of pixels column direction of line array CCD 6 is parallel with the dislocation direction of speckle picture.The one dimension direction moves micro-displacement platform 7 and is moving on perpendicular to line array CCD 6 line of pixels column directions under computing machine 8 control, and drives 6 pairs of line array CCDs and carry out the continuous sweep collection as the plane, obtains several one dimension images.In the scanning collection process, control sampling precision perpendicular to line array CCD 6 line of pixels column directions by the mode of stepping accuracy of control micro-displacement platform 7.Several one dimension images can be by handling and a synthetic width of cloth two dimension shearing speckle image H with the computing machine 8 of line array CCD 6 electric connections
2, then to two width of cloth image H before and after vacuumizing
1And H
2Carry out related operation, obtain image H
3, then to image H
3Adopt mean filter method or median filtering method to carry out filtering, remove occur many and obtain image H with the line array CCD pixel with wide bright fringes along line array CCD line of pixels column direction
4, obtain the diagnosis testing sample whether occur damaging the speckle interference fringe pattern of butterfly macules shape.
The beneficial effect of present embodiment is: thus drive line array CCD pushing away to sweep to gather as the plane and obtain several one dimension images by micro-displacement platform to sample, and by computing machine with the synthetic width of cloth two dimension shearing speckle pattern of these several one dimension images, when the size of line array CCD and pixel number are big, this method can obtain the speckle pattern than large format, thereby realizes the Non-Destructive Testing of large-size sample; And, control to push away and sweep precision by changing step value size that line array CCD pushes away micro-displacement platform in the inswept journey, if the stepping accuracy of described micro-displacement platform is set to the unit pixel size less than line array CCD, can also improve the sampling precision of speckle pattern along the micro-displacement platform moving direction.
Claims (4)
1. the device on a Non-Destructive Testing flat objects surface is characterized in that comprising laser instrument (1), microcobjective (2), the wedge (4) that the angle of shear is fixing, and convex lens (5), line array CCD (6), the one dimension direction moves micro-displacement platform (7 and computing machine (8); The optical axis of laser instrument (1) and the central axis of tested article are 0.01 °～20 ° angles to be placed, and microcobjective (2) is being set on the optical axis of laser instrument (1) and between the tested article; On the central axis of sample folded light beam, set gradually the angle of shear fixing wedge (4), convex lens (5) and line array CCD (6); The one dimension direction that is fixed in line array CCD (6) moves on the micro-displacement platform (7), the picture signal that line array CCD (6) is gathered exports computing machine (8) to, and the control signal of computing machine exports the one dimension direction to and moves micro-displacement platform (7) control one dimension direction and move moving of micro-displacement platform (7); Described line array CCD is positioned on the picture plane of sample by convex lens (5) imaging; The fixing wedge (4) of the described angle of shear is close to convex lens (5) placement, and the two-beam of adjusting the wedge of fixing through the angle of shear (4) is with respect to testing sample axis symmetry, and angle is 0.01 °～20 ° between the two-beam; Adjusting described microcobjective (2) makes apart from the position of sample by microcobjective (2) and expands the whole sample of beam lighting surface behind the bundle.
2. the device on Non-Destructive Testing flat objects according to claim 1 surface is characterized in that: described laser instrument (1) adopts helium-neon laser.
3. the device on Non-Destructive Testing flat objects according to claim 1 surface is characterized in that: described line array CCD (6) is the charge-coupled image sensor that one-dimensional array distributes for pixel.
4. according to the device on claim 1 or 3 described Non-Destructive Testing flat objects surfaces, it is characterized in that: described line array CCD (6) is linear array CMOS.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202453462U CN201555808U (en) | 2009-11-19 | 2009-11-19 | Device capable of nondestructively testing surface of planar object |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202453462U CN201555808U (en) | 2009-11-19 | 2009-11-19 | Device capable of nondestructively testing surface of planar object |
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| CN201555808U true CN201555808U (en) | 2010-08-18 |
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| CN2009202453462U Expired - Fee Related CN201555808U (en) | 2009-11-19 | 2009-11-19 | Device capable of nondestructively testing surface of planar object |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111226110A (en) * | 2018-08-10 | 2020-06-02 | 合刃科技（深圳）有限公司 | Detection method and system |
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2009
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111226110A (en) * | 2018-08-10 | 2020-06-02 | 合刃科技（深圳）有限公司 | Detection method and system |
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| C14 | Grant of patent or utility model | ||
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| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100818 Termination date: 20111119 |