CN201512417U - 30-pair-rod polycrystalline silicon reducing furnace - Google Patents
30-pair-rod polycrystalline silicon reducing furnace Download PDFInfo
- Publication number
- CN201512417U CN201512417U CN200920242485XU CN200920242485U CN201512417U CN 201512417 U CN201512417 U CN 201512417U CN 200920242485X U CN200920242485X U CN 200920242485XU CN 200920242485 U CN200920242485 U CN 200920242485U CN 201512417 U CN201512417 U CN 201512417U
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- polycrystalline silicon
- furnace
- silicon reducing
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Abstract
The utility model relates to a 30-pair-rod polycrystalline silicon reducing furnace, which consists of a base plate and a furnace body, and is characterized in that 30 pairs of electrodes are arranged on the furnace base plate during the design of the structure, and a plurality of air inlet spraying nozzles are uniformly arranged on the base plate, the height of the furnace body is more than 3 m, so the feeding gas in the polycrystalline silicon reducing furnace can be more uniformly distributed during the reaction, the reaction is more adequate, the quantity of the polycrystalline rods is more, and the diameter is larger; the height of the silicon rod reaches 2500 mm, and the growth diameter reaches 150 mm; and at the same time, the measures for increasing the height of the furnace body are adopted, so the reaction efficiency and the yield of the single furnace can be remarkably improved, and the yield of a single furnace can be increased to 5 to 6 tons.
Description
Technical field
The utility model relates to a kind of reduction furnace that polysilicon is used of producing, particularly a kind of with the output that improves single stove and cut down the consumption of energy into purpose greatly to excellent number polycrystalline silicon reducing furnace.
Background technology
Polycrystalline silicon reducing furnace is a key equipment of producing polycrystalline silicon raw material, is again the equipment of a highly energy-consuming simultaneously.Therefore, the design of reduction furnace and manufacturing directly have influence on output, quality and the production cost of product.Along with striving unexpectedly of polysilicon market is growing more intense, require production of polysilicon must accomplish to make full use of the production means, enhance productivity, reduce production costs.Therefore, exploitation greatly to excellent number reduction furnace for output, quality improve in production of polysilicon enterprise, reducing investment outlay seems particularly important.
Existing polycrystalline silicon reducing furnace structure is made up of chassis, body of heater, and the stove main body adopts stainless material.Electrode, inlet mouth and reduction tail gas venting port are set on the chassis.From saving energy and reduce the cost, enhance productivity, reduce production costs consideration, its single furnace output remains further to be improved.
Summary of the invention
The purpose of this utility model is based on by detailed design calculation, when structure design, take into full account the production efficiency of reduction furnace, improve output and quality product, structure and size to the cooling chamber of existing polycrystalline silicon reducing furnace chassis and body of heater are optimized design, reach the output that improves polysilicon and cut down the consumption of energy, reduce the cost of production of polysilicon, improve the quality of products and reduce investment outlay.
Constructional feature of the present utility model has realized above-mentioned purpose of design.The utility model is a kind of 30 pairs of excellent polycrystalline silicon reducing furnaces, constitute by chassis and body of heater, on body of heater and chassis, be provided with cooling water cavity and water coolant intake-outlet, be furnished with electrode, inlet mouth and venting port on the chassis, the chassis adopts fastening piece to be connected with body of heater, it is characterized in that:
Body of heater is provided with 9 windows that are used to observe and measure temperature, divides 120 ° of upper, middle and lower-rankings uniform;
The number of electrodes that is provided with on the chassis is 30 pairs, and three circles are uniform on 360 ° dividing on the chassis: inner ring is 5 counter electrode, and centre circle is 10 counter electrode, and the outer ring is 15 counter electrode, and from coil to coil increases by 5 pairs; The chassis is provided with 8 nozzles of air supply and divides two circles to distribute: be provided with 2 nozzles of air supply at a distance of 180 ° between inner ring and the centre circle electrode, between centre circle and the outer ring electrode on 360 ° 6 nozzles of air supply of uniform distribution;
Center chassis is provided with the air outlet of reduction tail gas.
In order to satisfy the production needs of this high yield polysilicon with reduction furnace, the polycrystalline silicon reducing furnace height is provided with greater than 3.0 meters.
The utility model when structure design owing to adopted on the stove chassis and to adopt big logarithm electrode, evenly a plurality of nozzles of air supply are set, feed gas when reacting in the polycrystalline silicon reducing furnace is more evenly distributed, react more abundant, polycrystalline silicon rod is more, longer, growth diameter is bigger, has also taked to increase considerably measures such as body of heater height and diameter simultaneously, thereby significantly improved reaction efficiency and single furnace output, made single furnace output bring up to the 5-6 ton.
Description of drawings
Fig. 1 is the schematic appearance of these 30 pairs of polycrystalline silicon reducing furnaces.
Fig. 2 is stove chassis electrode, nozzle of air supply and venting port distribution schematic diagram.
Embodiment 1
As shown in the figure, the utility model is 30 pairs of polycrystalline silicon reducing furnaces of a kind of high yield, is made of chassis 9 and body of heater 5, and the chassis adopts ring flange to be connected with body of heater.Body of heater 5 and chassis 9 are provided with cooling water cavity chuck 7, and chuck is provided with the water coolant intake-outlet.
Body of heater is provided with 9 windows 4 that are used to observe and measure temperature, divides 120 ° of upper, middle and lower-rankings uniform;
The number of electrodes that is provided with on the chassis is 30 pairs, and divide three circles to distribute on the chassis: inner ring is 5 counter electrode, and centre circle is 10 counter electrode, and the outer ring is 15 counter electrode, and from coil to coil increases by 5 counter electrode;
The chassis is provided with 8 nozzles of air supply 11, is dividing two circles to distribute on the chassis: to be provided with 2 nozzles of air supply between inner ring and the centre circle electrode, 6 nozzles of air supply of uniform distribution between centre circle and the outer ring electrode;
Center chassis is provided with the air outlet 1 of reduction tail gas;
The height of polycrystalline silicon rod is designed to 2500mm,, growth diameter is 150mm, therefore, the body of heater height of these 30 pairs of excellent polycrystalline silicon reducing furnaces is greater than 3.0 meters.
Because these 30 pairs of polycrystalline silicon reducing furnaces have adopted and adopted big logarithm electrode on the stove chassis, evenly a plurality of nozzles of air supply have been set, when making in the polycrystalline silicon reducing furnace reaction feed gas be more evenly distributed, react more abundant, polycrystalline silicon growth is better faster, measures such as corresponding increase body of heater height and diameter have also been taked simultaneously, significantly improved production of polysilicon efficient, increased substantially single furnace output, made single furnace output bring up to the 5-6 ton.
Claims (4)
1.30 to excellent polycrystalline silicon reducing furnace, constitute by chassis and body of heater, on body of heater and chassis, be provided with cooling water cavity and be used for the intake-outlet that water coolant passes in and out, be furnished with electrode, inlet mouth and venting port on the chassis, the chassis adopts fastening piece to be connected with body of heater, it is characterized in that on body of heater, being provided with 9 windows that are used to observe and measure temperature, divide 120 ° of upper, middle and lower-rankings uniform.
2. polysilicon reduction furnace according to claim 1, it is characterized in that number of electrodes is 30 pairs, three circles are uniform on 360 ° dividing on the chassis, inner ring is 5 counter electrode, centre circle is 10 counter electrode, and the outer ring is 15 counter electrode, and center chassis is provided with the air outlet of reduction tail gas, the chassis is provided with 8 nozzles of air supply: be provided with 2 nozzles of air supply at a distance of 180 ° between inner ring and the centre circle electrode, between centre circle and the outer ring electrode on 360 ° 6 nozzles of air supply of uniform distribution.
3. polysilicon reduction furnace according to claim 1 is characterized in that the polycrystalline silicon reducing furnace height is greater than 3.0 meters.
4. polysilicon reduction furnace according to claim 2 is characterized in that the polycrystalline silicon reducing furnace height is greater than 3.0 meters.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920242485XU CN201512417U (en) | 2009-10-12 | 2009-10-12 | 30-pair-rod polycrystalline silicon reducing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920242485XU CN201512417U (en) | 2009-10-12 | 2009-10-12 | 30-pair-rod polycrystalline silicon reducing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201512417U true CN201512417U (en) | 2010-06-23 |
Family
ID=42483824
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200920242485XU Expired - Lifetime CN201512417U (en) | 2009-10-12 | 2009-10-12 | 30-pair-rod polycrystalline silicon reducing furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201512417U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102198940A (en) * | 2011-04-06 | 2011-09-28 | 天津大学 | Gas inlet distributor and application thereof to polycrystalline silicon reduction furnace |
| CN102936013A (en) * | 2012-11-19 | 2013-02-20 | 中国恩菲工程技术有限公司 | Polycrystalline silicon reduction furnace |
-
2009
- 2009-10-12 CN CN200920242485XU patent/CN201512417U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102198940A (en) * | 2011-04-06 | 2011-09-28 | 天津大学 | Gas inlet distributor and application thereof to polycrystalline silicon reduction furnace |
| CN102198940B (en) * | 2011-04-06 | 2013-02-06 | 天津大学 | Gas inlet distributor and application thereof in polycrystalline silicon reduction furnace |
| CN102936013A (en) * | 2012-11-19 | 2013-02-20 | 中国恩菲工程技术有限公司 | Polycrystalline silicon reduction furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20100623 |
|
| CX01 | Expiry of patent term |