CN201466047U - Printing positioning device for silicon chips - Google Patents

Printing positioning device for silicon chips Download PDF

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Publication number
CN201466047U
CN201466047U CN2009200651308U CN200920065130U CN201466047U CN 201466047 U CN201466047 U CN 201466047U CN 2009200651308 U CN2009200651308 U CN 2009200651308U CN 200920065130 U CN200920065130 U CN 200920065130U CN 201466047 U CN201466047 U CN 201466047U
Authority
CN
China
Prior art keywords
silicon chip
workbench
ccd
half tone
tetragon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2009200651308U
Other languages
Chinese (zh)
Inventor
张恩理
娄志林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HUNAN TLNZ SOLAR TECHNOLOGY Co Ltd
Original Assignee
HUNAN TLNZ SOLAR TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HUNAN TLNZ SOLAR TECHNOLOGY Co Ltd filed Critical HUNAN TLNZ SOLAR TECHNOLOGY Co Ltd
Priority to CN2009200651308U priority Critical patent/CN201466047U/en
Application granted granted Critical
Publication of CN201466047U publication Critical patent/CN201466047U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model relates to a print positioning device for silicon chips. A screen printplate is arranged on a machine table. Five groups of unidirectional charge coupled devices (CCD) are arranged below the machine table, and distributed on the four sides of a tetragon or a chamber tetragon. Two of the five groups of unidirectional charge coupled devices (CCD) are distributed on the one side of the tetragon or the chamber tetragon, and the other three groups of unidirectional charge coupled devices (CCD) are respectively distributed on the other three sides of the tetragon or the chamber tetragon. The print positioning device is used for detecting the rotating error and the moving error of silicon chips and positioning silicon chips.

Description

The silicon chip print nest
Technical field
The utility model relates to a kind of silicon chip print nest.
Background technology
At present; along with expanding economy; people's living standard is more and more higher; more and more to energy demand; simultaneously environmental protection is brought bigger pressure, for addressing this problem, more and more countries is put into effect Chinese Financial Subsidy Policies; encourage to use the cleaning renewable resource, the photovoltaic industry has obtained development fast.Solar battery sheet printing navigation system adopts 4 groups of charge-coupled device (CCD)s mostly, detects the center of four edges, is difficult to detect small rotation and displacement error, causes printing precision not high.
Summary of the invention
The purpose of this utility model provides a kind of solar cell print nest.
The technical scheme that its technical problem that solves the utility model adopts is: there is half tone the workbench top, five groups of unidirectional charge coupled devices (CCD) are installed under the workbench, and be distributed on quadrangle or the tetragonal four edges of chamfering, there are two groups of unidirectional charge coupled devices (CCD) to be distributed on described quadrangle or the tetragonal limit of chamfering, three groups of charge-coupled device (CCD)s are arranged respectively on quadrangle or tetragonal three limits of chamfering, be used to detect the rotation error and the displacement error of silicon chip.
When new half tone was installed, whole workbench rose, and CCD obtains the half tone pattern position and preserves.Silicon chip is sent into workbench, and position, silicon chip limit is caught by the CCD system, concerns between calculating and the half tone position, drives the operation of the moving three-dimensional workbench of adjusting automatically, realizes location automatically.
Position fixing process: CCD1 cooperates CCD2 to detect silicon chip anglec of rotation θ, cooperates CCD3, CCD4, CCD5 detection position deviation and dimensional tolerance again, and the half tone first impression is adjusted by artificial, and it is fixing to adjust the back.Reach the precalculated position according to deviation driving movable workbench X, three variablees of Y, θ.Make half tone and silicon chip entirely on the center, reach the purpose of location.
Control system: adopt the Industry Control computer, the Windows program control system, man machine operation interface is provided with multiple printing mode, and technology personnel also can be provided with various modes and preserve automatically, freely select for different working conditions.
The closed loop control that movable workbench adopts ball screw to combine with servo-drive.Workbench is established the thimble with adsorption function.
The beneficial effects of the utility model are, because five groups of CCD of employing can prevent that the location of solar battery sheet before printing from producing rotation and mobile deviation, it is located accurately and fast.
Description of drawings
Fig. 1 is a schematic diagram of the present utility model.
Fig. 2 is one of silicon chip CCD distribution schematic diagram.
Fig. 3 is two CCD distribution schematic diagrams of silicon chip.
1. charge-coupled device (CCD)s among the figure, 2. half tone, 3. silicon chip, 4. workbench.
Embodiment
By Fig. 1 to Fig. 3 as can be known, five groups of unidirectional charge coupled devices are installed on a plane under the workbench, there is half tone the workbench top, two groups of unidirectional charge coupled devices are installed on quadrangle or the tetragonal limit of chamfering, with respectively near the flex point 2mm place at two ends, three groups of charge coupled devices are distributed in its excess-three bar limit and to be optimum in midpoint, are used to detect the rotation error and the displacement error of silicon chip, in order to the Control work platform silicon chip are positioned.
When the anglec of rotation that is used for detection plane was installed new half tone, whole workbench rose, and CCD obtains the half tone pattern position and preserves.Silicon chip is sent into air-breathing workbench, and position, silicon chip limit is caught by the CCD system, concerns between calculating and the half tone position, drives the operation of the moving three-dimensional workbench of adjusting automatically, realizes location automatically.
CCD:1024 * 1280; Vision area: 7 * 5mm; Positioning accuracy :≤0.03mm
Position fixing process: CCD1 cooperates CCD2 to detect silicon chip anglec of rotation θ, cooperates CCD3, CCD4, CCD5 detection position deviation and dimensional tolerance again, and (the half tone first impression is adjusted by artificial, and it is fixing to adjust the back.Reach the precalculated position according to deviation driving movable workbench X, three variablees of Y, θ.Make half tone and silicon chip entirely on the center, reach the purpose of automatic location.
About the reciprocal running precision of CCD to location influence: the closed loop control of adopting ball screw to combine with servo-drive, repetitive positioning accuracy guarantee as long as be marked at CCD within sweep of the eye, to influence not obvious to positioning result at ± 0.015mm.Because two-way location, CCD gets half tone pattern image (being equivalent at every turn redefine positioning reference) earlier.
Adopt the Industry Control computer, the Windows program control system, man machine operation interface is provided with multiple printing mode, and technology personnel also can be provided with various modes and preserve automatically, freely select for different working conditions.
The workbench alignment system:
A. workbench aligning structure: CCD absorbs the silicon chip image automatically, linear motor driving workbench alignment system.
B. adsorb with blow attached: automatically fixedly silicon chip printing of absorption, chromatography is accurate.Automatically blow attached, the convenient silicon chip that manually picks and places.
C. worktable lifting structure: the worktable lifting height is a servo-drive, the adjustable height precision, and numeral is set.
D. bench top needle construction: the silicon chip loading and unloading are adopted and are refuted the fork thimble structure, the thimble design and installation on workbench, whole equal tool adsorption functions of thimble.

Claims (4)

1. silicon chip chromatography positioner, it is characterized in that: there is half tone the top, and there is workbench the below, between half tone and workbench moving guide rail is housed, four groups of bi-directional charge coupled apparatuses are installed on the moving guide rail, are used for detecting respectively the position of printing grid line and half tone and move with the Control work platform.
2. silicon chip chromatography positioner as claimed in claim 1 is characterized in that: the closed loop control that movable workbench adopts ball screw to combine with servo-drive.
3. silicon chip chromatography positioner as claimed in claim 1, it is characterized in that: workbench is established the thimble with adsorption function.
4. silicon chip chromatography positioner as claimed in claim 1 is characterized in that: adopt the Industry Control computer.
CN2009200651308U 2009-04-27 2009-04-27 Printing positioning device for silicon chips Expired - Fee Related CN201466047U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009200651308U CN201466047U (en) 2009-04-27 2009-04-27 Printing positioning device for silicon chips

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2009200651308U CN201466047U (en) 2009-04-27 2009-04-27 Printing positioning device for silicon chips

Publications (1)

Publication Number Publication Date
CN201466047U true CN201466047U (en) 2010-05-12

Family

ID=42393395

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009200651308U Expired - Fee Related CN201466047U (en) 2009-04-27 2009-04-27 Printing positioning device for silicon chips

Country Status (1)

Country Link
CN (1) CN201466047U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102673106A (en) * 2012-05-09 2012-09-19 华中科技大学 Silk screen print positioning equipment and method for photovoltaic solar silicon chip
CN102969255A (en) * 2012-11-01 2013-03-13 上海集成电路研发中心有限公司 System and method for obtaining position information of silicon wafers through static scanning

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102673106A (en) * 2012-05-09 2012-09-19 华中科技大学 Silk screen print positioning equipment and method for photovoltaic solar silicon chip
CN102673106B (en) * 2012-05-09 2014-05-07 华中科技大学 Silk screen print positioning equipment and method for photovoltaic solar silicon chip
CN102969255A (en) * 2012-11-01 2013-03-13 上海集成电路研发中心有限公司 System and method for obtaining position information of silicon wafers through static scanning

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20100512

Termination date: 20150427

EXPY Termination of patent right or utility model