CN201438080U - 扩散炉自动舟升降装置 - Google Patents
扩散炉自动舟升降装置 Download PDFInfo
- Publication number
- CN201438080U CN201438080U CN2009201096580U CN200920109658U CN201438080U CN 201438080 U CN201438080 U CN 201438080U CN 2009201096580 U CN2009201096580 U CN 2009201096580U CN 200920109658 U CN200920109658 U CN 200920109658U CN 201438080 U CN201438080 U CN 201438080U
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- Prior art keywords
- guide rail
- automatic boat
- diffusion furnace
- worm
- lifting device
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application Number | Priority Date | Filing Date | Title |
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CN2009201096580U CN201438080U (zh) | 2009-06-30 | 2009-06-30 | 扩散炉自动舟升降装置 |
Applications Claiming Priority (1)
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CN2009201096580U CN201438080U (zh) | 2009-06-30 | 2009-06-30 | 扩散炉自动舟升降装置 |
Publications (1)
Publication Number | Publication Date |
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CN201438080U true CN201438080U (zh) | 2010-04-14 |
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CN2009201096580U Expired - Lifetime CN201438080U (zh) | 2009-06-30 | 2009-06-30 | 扩散炉自动舟升降装置 |
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CN (1) | CN201438080U (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102386282A (zh) * | 2011-11-18 | 2012-03-21 | 青岛赛瑞达设备制造有限公司 | 整体升降式软着陆推拉舟 |
CN102817010A (zh) * | 2011-06-10 | 2012-12-12 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 单臂升降装置和双臂升降装置 |
CN104328502A (zh) * | 2014-11-06 | 2015-02-04 | 北京七星华创电子股份有限公司 | 一种卧式扩散炉的自动送料装置 |
-
2009
- 2009-06-30 CN CN2009201096580U patent/CN201438080U/zh not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102817010A (zh) * | 2011-06-10 | 2012-12-12 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 单臂升降装置和双臂升降装置 |
CN102386282A (zh) * | 2011-11-18 | 2012-03-21 | 青岛赛瑞达设备制造有限公司 | 整体升降式软着陆推拉舟 |
CN104328502A (zh) * | 2014-11-06 | 2015-02-04 | 北京七星华创电子股份有限公司 | 一种卧式扩散炉的自动送料装置 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 100015 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100016 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20180510 Address after: 100176 8 Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing Patentee before: North China Science and technology group Limited by Share Ltd. |
|
CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20100414 |