CN201417715Y - Capacitive radio-frequency micro mechanical switch of torsion beam - Google Patents
Capacitive radio-frequency micro mechanical switch of torsion beam Download PDFInfo
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- CN201417715Y CN201417715Y CN2009203066999U CN200920306699U CN201417715Y CN 201417715 Y CN201417715 Y CN 201417715Y CN 2009203066999 U CN2009203066999 U CN 2009203066999U CN 200920306699 U CN200920306699 U CN 200920306699U CN 201417715 Y CN201417715 Y CN 201417715Y
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- cantilever beam
- mechanical switch
- frequency micro
- micro mechanical
- medium layer
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Abstract
A capacitive radio-frequency micro mechanical switch of torsion beam relates to a capacitive radio-frequency micro mechanical switch. The utility model aims at the following problems: the prior-art radio-frequency micro mechanical (RF-MEMS) switch mainly adopts the folded beam or cable-stayed beam structure; the capacitive radio-frequency micro mechanical switch has over-high driving voltage whichfar exceeds the standard voltage 5V of the CMOS integrated circuit. The upper end face of a substrate is connected with a lower end face of a first insulation medium layer. The upper end face of thefirst insulation medium layer is respectively connected with a plurality of signal output lines. The upper end faces of the signal output lines are connected with the lower end face of an anchor. A cantilever beam is composed of a flexible cantilever beam and a torsion cantilever beam which are integrated. One end of the flexible cantilever beam is fixed to the anchor, and the other end is connected with the lower end face of the upper electrode. The capacitive radio-frequency micro mechanical switch of torsion beam provided by the utility model is used for controlling the on and off of the high frequency signal.
Description
Technical field
The utility model relates to a kind of condenser type radio frequency micro-machinery switch.
Background technology
At present, condenser type radio frequency micromechanics (RF-MEMS) switch mainly adopts folded beam or oblique straining beam structure, and the driving voltage of condenser type radio frequency micro-machinery switch is excessive, considerably beyond the normal voltage 5V of CMOS integrated circuit.
The utility model content
The purpose of this utility model provides a kind of torsion beam condenser type radio frequency micro-machinery switch, and to exist driving voltage excessive to solve existing condenser type radio frequency micro-machinery switch, considerably beyond the problem of the normal voltage 5V of CMOS integrated circuit.
The utility model is to solve the problems of the technologies described above the technical scheme of taking to be: described mechanical switch comprises substrate, first insulating medium layer, a plurality of output line, anchor and top electrode; Described mechanical switch also comprises cantilever beam, the upper surface of described substrate is connected with the lower surface of first insulating medium layer, the upper surface of first insulating medium layer is connected with a plurality of output lines respectively, the upper surface of each output line is connected with the lower surface of anchor, described cantilever beam is made of the amount of deflection cantilever beam of making one and torsional cantilever beam, one end of described amount of deflection cantilever beam is fixed on the anchor, and the other end of described amount of deflection cantilever beam is connected with the lower surface of top electrode.
The utlity model has following beneficial effect: cantilever beam of the present utility model adopts amount of deflection cantilever beam and torsional cantilever beam, not only utilized the amount of deflection of cantilever beam, also utilize the torsional effect of cantilever beam, thereby effectively reduce the driving voltage of condenser type radio frequency micro-machinery switch, under current fabrication process condition, the condition that takies same area has descended 30% based on the driving voltage of the RF-MEMS on-off ratio tradition RF-MEMS switch that reverses.
Description of drawings
Fig. 1 is an overall structure schematic diagram of the present utility model, and Fig. 2 is the A-A cutaway view of Fig. 1.
Embodiment
Embodiment one: in conjunction with Fig. 1 present embodiment is described, the mechanical switch of present embodiment comprises substrate 1, first insulating medium layer 2, a plurality of output line 3, anchor 5 and top electrode 6; Described mechanical switch also comprises cantilever beam 7, the upper surface of described substrate 1 is connected with the lower surface of first insulating medium layer 2, the upper surface of first insulating medium layer 2 is connected with a plurality of output lines 3 respectively, the upper surface of each output line 3 is connected with the lower surface of anchor 5, described cantilever beam 7 is made of amount of deflection cantilever beam 7-1 that makes one and torsional cantilever beam 7-2, the end of described amount of deflection cantilever beam 7-1 is fixed on the anchor 5, and the other end of described amount of deflection cantilever beam 7-1 is connected with the lower surface of top electrode 6.
Embodiment two: in conjunction with Fig. 1 present embodiment is described, described mechanical switch also comprises second insulating medium layer 4, and the upper surface of each output line 3 is provided with second insulating medium layer 4.The advantage of this kind connected mode is that insulation property are safe and reliable.Other compositions and annexation are identical with embodiment one.
Claims (2)
1. torsion beam condenser type radio frequency micro-machinery switch, described mechanical switch comprises substrate (1), first insulating medium layer (2), a plurality of output line (3), anchor (5) and top electrode (6); It is characterized in that described mechanical switch also comprises cantilever beam (7), the upper surface of described substrate (1) is connected with the lower surface of first insulating medium layer (2), the upper surface of described first insulating medium layer (2) is connected with a plurality of output lines (3) respectively, the upper surface of each output line (3) is connected with the lower surface of anchor (5), described cantilever beam (7) is made of the amount of deflection cantilever beam (7-1) of making one and torsional cantilever beam (7-2), one end of described amount of deflection cantilever beam (7-1) is fixed on the anchor (5), and the other end of described amount of deflection cantilever beam (7-1) is connected with the lower surface of top electrode (6).
2. torsion beam condenser type radio frequency micro-machinery switch according to claim 1 is characterized in that described mechanical switch also comprises second insulating medium layer (4), and the upper surface of each output line (3) is provided with second insulating medium layer (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009203066999U CN201417715Y (en) | 2009-07-23 | 2009-07-23 | Capacitive radio-frequency micro mechanical switch of torsion beam |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009203066999U CN201417715Y (en) | 2009-07-23 | 2009-07-23 | Capacitive radio-frequency micro mechanical switch of torsion beam |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201417715Y true CN201417715Y (en) | 2010-03-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009203066999U Expired - Fee Related CN201417715Y (en) | 2009-07-23 | 2009-07-23 | Capacitive radio-frequency micro mechanical switch of torsion beam |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201417715Y (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102243940A (en) * | 2011-03-28 | 2011-11-16 | 西安电子科技大学 | Buckling radio frequency micro switch by using folded beams |
| CN102623253A (en) * | 2012-04-11 | 2012-08-01 | 中国科学院半导体研究所 | Fast radio frequency micro-electromechanical system (RF MEMS) switch |
| CN105957774A (en) * | 2016-05-03 | 2016-09-21 | 北京邮电大学 | Switch beam |
| WO2020206585A1 (en) * | 2019-04-08 | 2020-10-15 | 深圳大学 | Capacitive rf-mems switch |
| CN112908736A (en) * | 2021-01-26 | 2021-06-04 | 深圳国人科技股份有限公司 | Radio frequency switch device |
-
2009
- 2009-07-23 CN CN2009203066999U patent/CN201417715Y/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102243940A (en) * | 2011-03-28 | 2011-11-16 | 西安电子科技大学 | Buckling radio frequency micro switch by using folded beams |
| CN102243940B (en) * | 2011-03-28 | 2013-09-25 | 西安电子科技大学 | Buckling radio frequency micro switch by using folded beams |
| CN102623253A (en) * | 2012-04-11 | 2012-08-01 | 中国科学院半导体研究所 | Fast radio frequency micro-electromechanical system (RF MEMS) switch |
| CN105957774A (en) * | 2016-05-03 | 2016-09-21 | 北京邮电大学 | Switch beam |
| CN105957774B (en) * | 2016-05-03 | 2018-03-20 | 北京邮电大学 | A kind of switch beam |
| WO2020206585A1 (en) * | 2019-04-08 | 2020-10-15 | 深圳大学 | Capacitive rf-mems switch |
| CN112908736A (en) * | 2021-01-26 | 2021-06-04 | 深圳国人科技股份有限公司 | Radio frequency switch device |
| CN112908736B (en) * | 2021-01-26 | 2022-04-12 | 深圳国人科技股份有限公司 | Radio frequency switch device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100303 Termination date: 20100723 |