CN105957774A - Switch beam - Google Patents
Switch beam Download PDFInfo
- Publication number
- CN105957774A CN105957774A CN201610287188.1A CN201610287188A CN105957774A CN 105957774 A CN105957774 A CN 105957774A CN 201610287188 A CN201610287188 A CN 201610287188A CN 105957774 A CN105957774 A CN 105957774A
- Authority
- CN
- China
- Prior art keywords
- loop configuration
- middle plate
- connecting rod
- pair
- switch beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
Abstract
The embodiment of the invention discloses a switch beam, comprising an intermediate counter electrode and articulated beams on two sides of the intermediate counter electrode. The articulated beam comprises at least one circular structure; when the articulated beam comprises one circular structure, the circular structure and the intermediate counter electrode are in connection through a pair of connecting rods; when the articulated beam comprises at least two circular structures, two adjacent circular structures are in connection through a pair of connecting rods; the circular structures adjacent with the intermediate counter electrode and the intermediate counter electrode are in connection through a pair of connecting rods; the circular structures are elliptical ring structures or fillet straight-flanked ring structures; the connecting rods are arc connecting rods, and the arc port directions of any pair of arc connecting rods are opposite. The scheme solves the problem that in a stress deformation process of an MEMS switch of the prior art, stress is concentrated in a corner area.
Description
Technical field
The present invention relates to radio-frequency micro electromechanical system technical field, particularly to a kind of switch beam.
Background technology
Along with the development of communication technology, electromagnetic wave from low frequency and high-frequency range gradually developed into radio frequency and
Microwave range.RF MEMS (Micro-Electro-Mechanical System, MEMS) switchs
Compared to traditional switch, there is the advantages such as low insertion loss, high-isolation, low-power and low cost, institute
With, RF MEMS Switches is increasingly used in the equipment such as tunable filter, antenna, matching network.
Low driving voltage mems switch is a conventional class RF MEMS Switches, relative to high driving voltage
Mems switch, uses the power supply circuits module of low driving voltage mems switch can have less size,
It is advantageous to the miniaturization of communication equipment.
Realize low driving voltage mems switch it is crucial that the low elastic coefficient mems switch that uses in Kai Guan
Girder construction.Low elastic coefficient mems switch girder construction of the prior art uses polygon warp architecture, as
Shown in Fig. 1 (a), the mems switch beam of polygon warp architecture is used to include middle plate and be positioned at centre
The tie-beam of pole plate both sides, this tie-beam includes at least two loop configuration, two adjacent loop configuration it
Between and loop configuration with middle plate between be all connected by a pair connecting rod.
In prior art, above-mentioned loop configuration is the annular polygonal containing corner, such as Fig. 1 (a) and Fig. 1 (b)
In loop configuration be ring-type rectangular configuration, there is the mems switch beam of corner structure in stress deformation process
In, stress has focused largely on corner areas (the label A indication dashed region as in Fig. 1 (a)), causes
Easily there is warpage in mems switch breaker in middle beam, switch reliability is low.
Summary of the invention
The purpose of the embodiment of the present invention is to provide a kind of switch beam, in order to solve in prior art, MEMS
Switch beam during stress deformation, the problem that stress concentrates on corner areas.
For reaching above-mentioned purpose, the embodiment of the invention discloses a kind of switch beam, including middle plate and described
The tie-beam of middle plate both sides, described tie-beam includes at least one loop configuration,
In the case of described tie-beam includes a loop configuration, described loop configuration and described middle plate
Between connected by a pair connecting rod；
In the case of described tie-beam includes at least two loop configuration, two adjacent described loop configuration
Between connected by a pair connecting rod, and the loop configuration adjacent with described middle plate and described middle plate
Between connected by a pair connecting rod；
Described loop configuration is oval ring structure or round rectangle loop configuration, and described connecting rod is that arc connects
Extension bar, the nock of any the pair of connecting rod is in opposite direction.
Preferably, in the case of described loop configuration is oval ring structure, described oval ring structure
The major axis of outer ring ellipse is equal to the oval major axis of inner ring and the ratio of short axle with the ratio of short axle.
Preferably, in the case of described loop configuration is round rectangle loop configuration, described loop configuration
The diameter of the fillet that outer ring is corresponding, the width of the round rectangle corresponding equal to outer ring；Described loop configuration interior
The diameter of the fillet that circle is corresponding, the width of the round rectangle corresponding equal to inner ring.
Preferably, in described loop configuration with the junction of two described arc-shaped connecting rods being formed arbitrarily a pair
It is provided with gap.
Preferably, described connecting rod seamlessly transits with the junction of described loop configuration.
Preferably, described middle plate offers multiple perforate.
Preferably, described perforate is circular or limit number is the regular polygon of even number.
Preferably, the tie-beam of described middle plate both sides is symmetrical.
In this programme, the loop configuration in switch beam is oval ring structure or round rectangle loop configuration, no
There is the corner areas in polygon loop configuration, during switch beam deformation, stress is dispersed in
In loop configuration, solving mems switch beam during stress deformation, stress concentrates on corner areas
Problem, adds the reliability of switch beam.
Accompanying drawing explanation
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to enforcement
In example or description of the prior art, the required accompanying drawing used is briefly described, it should be apparent that, describe below
In accompanying drawing be only some embodiments of the present invention, for those of ordinary skill in the art, do not paying
On the premise of going out creative work, it is also possible to obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 (a) is the structural representation of a kind of low elastic coefficient mems switch beam of the prior art；
Fig. 1 (b) is the structural representation of another kind of low elastic coefficient mems switch beam of the prior art；
The first structural representation of a kind of switch beam that Fig. 2 provides for the embodiment of the present invention；
The second structural representation of a kind of switch beam that Fig. 3 provides for the embodiment of the present invention；
The third structural representation of a kind of switch beam that Fig. 4 provides for the embodiment of the present invention；
The planar structure schematic diagram of the middle plate that Fig. 5 provides for the embodiment of the present invention.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clearly
Chu, be fully described by, it is clear that described embodiment be only a part of embodiment of the present invention rather than
Whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art are not making creation
The every other embodiment obtained under property work premise, broadly falls into the scope of protection of the invention.
Should be noted that the switch beam described in the embodiment of the present invention refers to clamped beam, i.e. the two of switch beam
End is all integrally fixed on anchor point.For the material of switch beam, metal or metal mixture can be chosen as.
As shown in figs. 2 to 4, the embodiment of the present invention provide a kind of switch beam, including middle plate 1 and described in
Between the tie-beam 2 of pole plate 1 both sides, described tie-beam 2 includes at least one loop configuration 3.
In the case of described tie-beam 2 includes a loop configuration 3, described loop configuration 3 and described dynode
Connected by a pair connecting rod 4 between plate 1；
In the case of described tie-beam 2 includes at least two loop configuration 3, two adjacent described ring junctions
Connected by a pair connecting rod 4 between structure 3, and the loop configuration 3 adjacent with described middle plate 1 with described in
Between connected by a pair connecting rod 4 between pole plate 1.
Described loop configuration 3 is oval ring structure or round rectangle loop configuration, and described connecting rod 4 is arc
Connecting rod, the nock of any the pair of connecting rod 4 is in opposite direction.
The first structure as shown in Figure 2, this loop configuration 3 is oval ring structure.
In the case of described loop configuration 3 is oval ring structure, the outer ring of described oval ring structure is oval
The ratio of major axis and the short axle major axis oval equal to inner ring and the ratio of short axle.It is understood that due to ellipse
The loop configuration 3 of shape, the stress suffered by its two ends is slightly higher, the outer ring ellipse of described oval ring structure
Major axis is equal to the oval major axis of inner ring and the ratio of short axle with the ratio of short axle, i.e. represents the width at loop configuration 3 two ends
Relatively big, the two ends of loop configuration 3 are not susceptible to deformation.
The second structure as shown in Figure 3, in order to make switch beam have more preferable flexural deformation performance, relatively low
Coefficient of elasticity, in described loop configuration 3, the junction with two the described arc-shaped connecting rods being formed arbitrarily a pair sets
It is equipped with gap 5, i.e. represents that loop configuration is non-occluded configuration.
The third structure as shown in Figure 4, this loop configuration 3 is round rectangle loop configuration.
In the case of described loop configuration 3 is round rectangle loop configuration, further, described loop configuration
The diameter of the fillet that the outer ring of 3 is corresponding, the width of the round rectangle corresponding equal to outer ring；Described loop configuration 3
The diameter of fillet corresponding to inner ring, the width of the round rectangle corresponding equal to inner ring.The most now, ring junction
The two ends of structure 3 are semicircle.
Should be noted that in the third structure that such as Fig. 4 shows, in described loop configuration 3 be formed arbitrarily
The junction of two described arc-shaped connecting rods of a pair is equally provided with gap 5.
It addition, the outer ring of above-mentioned oval ring representation loop configuration 3 and inner ring are ellipse, above-mentioned circle
Angular moment shape loop configuration represents that the outer ring of loop configuration 3 and inner ring are fillet square.
In embodiments of the present invention, described connecting rod 4 seamlessly transits with the junction of described loop configuration 3.This
Skilled person is it is understood that seamlessly transit the junction being i.e. connecting rod 4 with described loop configuration 3
It is rounded down, it is possible to reduce the stress in connecting rod 4 with the junction of described loop configuration 3 is concentrated.
In order to discharge the portion of residual stress of beam, reduce the Young's modulus of switch beam structure, the embodiment of the present invention
In, such as Fig. 5, described middle plate 1 offers multiple perforate 6.It addition, in order to prevent switch beam in bending
During, there is excessive stress in tapping, and hole shape should possess higher symmetry, and described perforate 6 is
Circular or limit number is the regular polygon of even number.
Uniform in order to ensure the stress distribution of the whole beam that opens the light, the tie-beam 2 of described middle plate 1 both sides is right
Claim.Should be noted that symmetry herein, may refer to the tie-beam 2 of both sides horizontal and vertical the most right
Claim.
Should be noted that in the embodiment of the present invention, middle plate 1 and the company of described middle plate 1 both sides
Connecing beam 2 can be one-body molded.
In this programme, the loop configuration in switch beam is oval ring structure or round rectangle loop configuration, no
There is the corner areas in polygon loop configuration, during switch beam deformation, stress is dispersed in
In loop configuration, solving mems switch beam during stress deformation, stress concentrates on corner areas
Problem, adds the reliability of switch beam.
Label declaration in schematic diagram:
1, middle plate；2, tie-beam；3, loop configuration；4, connecting rod；5, gap；6, perforate.
It should be noted that in this article, the relational terms of such as first and second or the like be used merely to by
One entity or operation separate with another entity or operating space, and not necessarily require or imply these
Relation or the order of any this reality is there is between entity or operation.And, term " includes ", " comprising "
Or its any other variant is intended to comprising of nonexcludability, so that include the mistake of a series of key element
Journey, method, article or equipment not only include those key elements, but also other including being not expressly set out
Key element, or also include the key element intrinsic for this process, method, article or equipment.Do not having
In the case of more restrictions, statement " including ... " key element limited, it is not excluded that including described wanting
Process, method, article or the equipment of element there is also other identical element.
Each embodiment in this specification all uses relevant mode to describe, phase homophase between each embodiment
As part see mutually, what each embodiment stressed is the difference with other embodiments.
The foregoing is only presently preferred embodiments of the present invention, be not intended to limit protection scope of the present invention.
All any modification, equivalent substitution and improvement etc. made within the spirit and principles in the present invention, are all contained in
In protection scope of the present invention.
Claims (8)
1. a switch beam, including middle plate and the tie-beam of described middle plate both sides, described tie-beam
Including at least one loop configuration, it is characterised in that
In the case of described tie-beam includes a loop configuration, described loop configuration and described middle plate
Between connected by a pair connecting rod；
In the case of described tie-beam includes at least two loop configuration, two adjacent described loop configuration
Between connected by a pair connecting rod, and the loop configuration adjacent with described middle plate and described middle plate
Between connected by a pair connecting rod；
Described loop configuration is oval ring structure or round rectangle loop configuration, and described connecting rod is that arc connects
Extension bar, the nock of any the pair of connecting rod is in opposite direction.
Switch beam the most according to claim 1, it is characterised in that be elliptical ring in described loop configuration
In the case of shape structure, the major axis of the outer ring ellipse of described oval ring structure is ellipse equal to inner ring with the ratio of short axle
The major axis of circle and the ratio of short axle.
Switch beam the most according to claim 1, it is characterised in that be fillet square in described loop configuration
In the case of shape loop configuration, the diameter of the fillet that the outer ring of described loop configuration is corresponding is corresponding equal to outer ring
The width of round rectangle；The diameter of the fillet that the inner ring of described loop configuration is corresponding is corresponding equal to inner ring
The width of round rectangle.
4. according to the switch beam described in any one of claims 1 to 3, it is characterised in that in described loop configuration
The junction of two the described arc-shaped connecting rods being formed arbitrarily a pair is provided with gap.
Switch beam the most according to claim 4, it is characterised in that described connecting rod and described ring junction
The junction of structure seamlessly transits.
Switch beam the most according to claim 4, it is characterised in that offer many in described middle plate
Individual perforate.
Switch beam the most according to claim 6, it is characterised in that described perforate for circular or limit number is
The regular polygon of even number.
Switch beam the most according to claim 4, it is characterised in that the connection of described middle plate both sides
Beam is symmetrical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610287188.1A CN105957774B (en) | 2016-05-03 | 2016-05-03 | A kind of switch beam |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610287188.1A CN105957774B (en) | 2016-05-03 | 2016-05-03 | A kind of switch beam |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105957774A true CN105957774A (en) | 2016-09-21 |
| CN105957774B CN105957774B (en) | 2018-03-20 |
Family
ID=56913371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610287188.1A Active CN105957774B (en) | 2016-05-03 | 2016-05-03 | A kind of switch beam |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105957774B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6506989B2 (en) * | 2001-03-20 | 2003-01-14 | Board Of Supervisors Of Louisana State University And Agricultural And Mechanical College | Micro power switch |
| US20030155221A1 (en) * | 2002-01-23 | 2003-08-21 | Murata Manufacturing Co., Ltd. | Electrostatic actuator |
| CN1519875A (en) * | 2002-12-12 | 2004-08-11 | ������������ʽ���� | RF micro-electromechanical system switch |
| CN201417715Y (en) * | 2009-07-23 | 2010-03-03 | 哈尔滨理工大学 | Capacitive radio-frequency micro mechanical switch of torsion beam |
| CN102386021A (en) * | 2011-10-17 | 2012-03-21 | 上海交通大学 | Micro-mechanical capacitance two-way switch |
| CN103887602A (en) * | 2007-06-13 | 2014-06-25 | 索凡特科技有限公司 | Improvements in and relating to reconfigurable antenna |
| CN103943421A (en) * | 2014-04-18 | 2014-07-23 | 苏州锟恩电子科技有限公司 | Driving electrode plate and capacitor upper electrode plate separating type RF MEMS switch |
| CN104183426A (en) * | 2014-09-04 | 2014-12-03 | 上海工程技术大学 | Highly-integrated electromagnetic bistable-state MEMS relay and manufacturing method of highly-integrated electromagnetic bistable-state MEMS relay |
-
2016
- 2016-05-03 CN CN201610287188.1A patent/CN105957774B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6506989B2 (en) * | 2001-03-20 | 2003-01-14 | Board Of Supervisors Of Louisana State University And Agricultural And Mechanical College | Micro power switch |
| US20030155221A1 (en) * | 2002-01-23 | 2003-08-21 | Murata Manufacturing Co., Ltd. | Electrostatic actuator |
| CN1519875A (en) * | 2002-12-12 | 2004-08-11 | ������������ʽ���� | RF micro-electromechanical system switch |
| CN103887602A (en) * | 2007-06-13 | 2014-06-25 | 索凡特科技有限公司 | Improvements in and relating to reconfigurable antenna |
| CN201417715Y (en) * | 2009-07-23 | 2010-03-03 | 哈尔滨理工大学 | Capacitive radio-frequency micro mechanical switch of torsion beam |
| CN102386021A (en) * | 2011-10-17 | 2012-03-21 | 上海交通大学 | Micro-mechanical capacitance two-way switch |
| CN103943421A (en) * | 2014-04-18 | 2014-07-23 | 苏州锟恩电子科技有限公司 | Driving electrode plate and capacitor upper electrode plate separating type RF MEMS switch |
| CN104183426A (en) * | 2014-09-04 | 2014-12-03 | 上海工程技术大学 | Highly-integrated electromagnetic bistable-state MEMS relay and manufacturing method of highly-integrated electromagnetic bistable-state MEMS relay |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105957774B (en) | 2018-03-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102570034A (en) | Reconfigurable antenna based on conformal active frequency selection surface | |
| CN101777882B (en) | X-band three-digital MEMS(Micro Electric Mechanical System) tunable band-pass filter | |
| JPH0865029A (en) | Simplified tracking antenna | |
| CN110474137A (en) | A kind of three road function filter-divider of multilayer based on SIW | |
| US20170186578A1 (en) | High performance switch for microwave mems | |
| Ramaccia et al. | Angular Momentum-biased metamaterials for filtering waveguide components and antennas with non-reciprocal behavior | |
| CN105720337B (en) | The two band filter of substrate integration wave-guide complementary openings resonant ring and strip lines configuration | |
| CN110444844A (en) | A kind of single channel and the restructural filter circuit of multichannel | |
| CN103036527B (en) | A kind of square block type micromechanical resonator | |
| CN105702527B (en) | A kind of micro electro-mechanical system switch | |
| CN105957774A (en) | Switch beam | |
| US5010542A (en) | Multi-stage switching network for light waveguides | |
| CN102299394B (en) | Supernormal medium ultrahigh frequency band pass filter | |
| CN204927526U (en) | Antenna | |
| CN101425815B (en) | Duplexer and transceiver | |
| CN110783673A (en) | Multi-channel interdigital adjustable filter based on MEMS switch | |
| CN110364810A (en) | A kind of compound restructural dielectric resonator antenna of three-dimensional | |
| Liu et al. | Generalised Chebyshev function bandpass filters in box‐like topologies based on the properties of dual‐mode loop microstrip resonator | |
| CN108306081B (en) | High-power MEMS switch applied to radio frequency field | |
| CN210224236U (en) | Gyromagnetic filter ring-ball multi-coupling switching resonant circuit | |
| JPS62202601A (en) | Waveguide filter | |
| Abdelfattah et al. | A 12–20 GHz passively-compensated tunable bandstop filter with 40-dB notch level | |
| Hinojosa et al. | Half mode substrate integrated waveguide (HMSIW) notch filters using open ring resonators | |
| JPS6051016A (en) | Piezoelectric resonance parts | |
| CN110492207A (en) | The global multiple coupled switching resonance circuit of gyromagnetic filter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |