CN105957774B - A kind of switch beam - Google Patents
A kind of switch beam Download PDFInfo
- Publication number
- CN105957774B CN105957774B CN201610287188.1A CN201610287188A CN105957774B CN 105957774 B CN105957774 B CN 105957774B CN 201610287188 A CN201610287188 A CN 201610287188A CN 105957774 B CN105957774 B CN 105957774B
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- Prior art keywords
- loop configuration
- middle plate
- connecting rod
- tie
- pair
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
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- Micromachines (AREA)
Abstract
The embodiment of the invention discloses a kind of switch beam, including the tie-beam of middle plate and the middle plate both sides, the tie-beam includes at least one loop configuration；In the case where the tie-beam includes a loop configuration, connected between the loop configuration and the middle plate by a pair of connecting rods；In the case where the tie-beam includes at least two loop configuration, connected by a pair of connecting rods between adjacent two loop configuration, and connected between the loop configuration adjacent with the middle plate and the middle plate by a pair of connecting rods；The loop configuration is oval ring structure or round rectangle loop configuration, and the connecting rod is arc-shaped connecting rod, and the nock of any the pair of connecting rod is in opposite direction.This programme can solve the mems switch beam of prior art during stress deformation, and stress concentration is the corner areas the problem of.
Description
Technical field
The present invention relates to radio-frequency micro electromechanical system technical field, more particularly to a kind of switch beam.
Background technology
With the continuous development of the communication technology, electromagnetic wave has gradually developed into radio frequency and microwave model from low frequency and high-frequency range
Enclose.RF MEMS (Micro-Electro-Mechanical System, MEMS) is switched compared to traditional switch,
There is low insertion loss, high-isolation, low-power and low cost, so, RF MEMS Switches more and more should
Used in equipment such as tunable filter, antenna, matching networks.Low driving voltage mems switch is that conventional a kind of RF MEMS is opened
Close, relative to high driving voltage mems switch, can be had using the power supply circuit module of low driving voltage mems switch smaller
Size, be advantageous to the miniaturization of communication equipment.
The key for realizing low driving voltage mems switch is the low elastic coefficient mems switch girder construction used in switch.It is existing
There is the low elastic coefficient mems switch girder construction in technology to use polygonal warp architecture, as shown in Fig. 1 (a), using polygonal
The mems switch beam of warp architecture includes middle plate and the tie-beam positioned at middle plate both sides, and the tie-beam includes at least two
Individual loop configuration, pass through a pair of connecting rods between adjacent two loop configuration and between loop configuration and middle plate and connect
Connect.
In the prior art, above-mentioned loop configuration is in the annular polygonal containing corner, such as Fig. 1 (a) and Fig. 1 (b)
Loop configuration is ring-type rectangular configuration, has the mems switch beam of corner structure during stress deformation, stress focuses mostly on greatly
In corner areas (the label A meanings dashed region in such as Fig. 1 (a)), cause switch beam in mems switch that warpage easily occurs, switch
Reliability is low.
The content of the invention
The purpose of the embodiment of the present invention is to provide a kind of switch beam, and to solve in the prior art, mems switch beam exists
During stress deformation, stress concentration is the corner areas the problem of.
To reach above-mentioned purpose, the embodiment of the invention discloses a kind of switch beam, including middle plate and the dynode
The tie-beam of plate both sides, the tie-beam include at least one loop configuration,
In the case where the tie-beam includes a loop configuration, lead between the loop configuration and the middle plate
Cross a pair of connecting rod connections；
In the case where the tie-beam includes at least two loop configuration, lead between adjacent two loop configuration
A pair of connecting rod connections are crossed, and pass through a pair of connections between the loop configuration adjacent with the middle plate and the middle plate
Bar connects；
The loop configuration is oval ring structure or round rectangle loop configuration, and the connecting rod is arc-shaped connecting rod,
The nock of any the pair of connecting rod is in opposite direction.
Preferably, in the case where the loop configuration is oval ring structure, the outer ring of the oval ring structure is ellipse
The ratio between round major axis and short axle are equal to the ratio between the oval major axis of inner ring and short axle.
Preferably, in the case where the loop configuration is round rectangle loop configuration, the outer ring pair of the loop configuration
The diameter for the fillet answered, equal to the width of round rectangle corresponding to outer ring；Fillet is straight corresponding to the inner ring of the loop configuration
Footpath, equal to the width of round rectangle corresponding to inner ring.
Preferably, the junction of two arc-shaped connecting rods in the loop configuration with being formed arbitrarily a pair is provided with
Gap.
Preferably, the junction of the connecting rod and the loop configuration seamlessly transits.
Preferably, multiple perforates are offered in the middle plate.
Preferably, the perforate is regular polygon circular or that side number is even number.
Preferably, the tie-beam of the middle plate both sides is symmetrical.
In this programme, the loop configuration in switch beam is oval ring structure or round rectangle loop configuration, in the absence of more
Corner areas in angular loop configuration, during switch beam deforms, stress is dispersed in loop configuration, is solved
For mems switch beam during stress deformation, stress concentration adds the reliability of switch beam the corner areas the problem of.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the required accompanying drawing used in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 (a) is a kind of structural representation of low elastic coefficient mems switch beam of the prior art；
Fig. 1 (b) is the structural representation of another low elastic coefficient mems switch beam of the prior art；
Fig. 2 is a kind of the first structural representation of switch beam provided in an embodiment of the present invention；
Fig. 3 is a kind of second of structural representation of switch beam provided in an embodiment of the present invention；
Fig. 4 is a kind of the third structural representation of switch beam provided in an embodiment of the present invention；
Fig. 5 is the planar structure schematic diagram of middle plate provided in an embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other under the premise of creative work is not made
Embodiment, belong to the scope of protection of the invention.
It should be noted that the switch beam described in the embodiment of the present invention refers to clamped beam, i.e. the both ends of switch beam are
It is fixed on anchor point.For the material of switch beam, can select as metal or metal mixture.
As shown in figs. 2 to 4, a kind of switch beam provided in an embodiment of the present invention, including middle plate 1 and the middle plate
The tie-beam 2 of 1 both sides, the tie-beam 2 include at least one loop configuration 3.
In the case where the tie-beam 2 includes loop configuration 3, the loop configuration 3 and the middle plate 1 it
Between connected by a pair of connecting rods 4；
In the case where the tie-beam 2 includes at least two loop configuration 3, adjacent two loop configuration 3 it
Between connected by a pair of connecting rods 4, and pass through between the loop configuration 3 and the middle plate 1 adjacent with the middle plate 1
A pair of connecting rods 4 connect.
The loop configuration 3 is oval ring structure or round rectangle loop configuration, and the connecting rod 4 connects for arc
Bar, the nock of any the pair of connecting rod 4 are in opposite direction.
The first structure as shown in Figure 2, the loop configuration 3 is oval ring structure.
In the case where the loop configuration 3 is oval ring structure, the length of the outer ring ellipse of the oval ring structure
The ratio between axle and short axle are equal to the ratio between the oval major axis of inner ring and short axle.It is understood that the loop configuration due to elliptical shape
3, the stress suffered by its both ends is slightly higher, and it is ellipse that the ratio between the major axis of the outer ring ellipse of the oval ring structure and short axle are equal to inner ring
The ratio between round major axis and short axle, that is, represent that the width at the both ends of loop configuration 3 is larger, the both ends of loop configuration 3 are not susceptible to deform.
Second of structure as shown in Figure 3, in order that switch beam has more preferable flexural deformation performance, relatively low elasticity system
Count, the junction of two arc-shaped connecting rods in the loop configuration 3 with being formed arbitrarily a pair is provided with gap 5, i.e. table
It is non-occluded configuration to show loop configuration.
The third structure as shown in Figure 4, the loop configuration 3 is round rectangle loop configuration.
In the case where the loop configuration 3 is round rectangle loop configuration, further, outside the loop configuration 3
The diameter of fillet corresponding to circle, equal to the width of round rectangle corresponding to outer ring；Fillet corresponding to the inner ring of the loop configuration 3
Diameter, equal to the width of round rectangle corresponding to inner ring.I.e. now, the both ends of loop configuration 3 are semicircle.
It should be noted that in the third structure that such as Fig. 4 shows, with being formed arbitrarily a pair in the loop configuration 3
The junction of two arc-shaped connecting rods can equally be provided with gap 5.
In addition, the outer ring of above-mentioned oval ring representation loop configuration 3 and inner ring are ellipse, above-mentioned round rectangle
Loop configuration represents that the outer ring of loop configuration 3 and inner ring are fillet square.
In embodiments of the present invention, the junction of the connecting rod 4 and the loop configuration 3 seamlessly transits.This area skill
Art personnel can subtract it is understood that it is that the junction of connecting rod 4 and the loop configuration 3 is rounded down to seamlessly transit
Few stress concentration in connecting rod 4 Yu the junction of the loop configuration 3.
In order to discharge the portion of residual stress of beam, the Young's modulus of switch girder construction is reduced, in the embodiment of the present invention, such as scheme
5, multiple perforates 6 are offered in the middle plate 1.In addition, in order to prevent that tapping switch beam occurred in BENDING PROCESS
Big stress, hole shape should possess higher symmetry, and the perforate 6 is regular polygon circular or that side number is even number.
In order to which the stress distribution for the beam that ensures entirely to open the light is uniform, the tie-beam 2 of the both sides of middle plate 1 is symmetrical.Should
Illustrate that herein symmetrical can refer to the tie-beam 2 of both sides horizontal and vertical symmetrical.
It should be noted that in the embodiment of the present invention, the tie-beams 2 of middle plate 1 and the both sides of the middle plate 1 can one
It is body formed.
In this programme, the loop configuration in switch beam is oval ring structure or round rectangle loop configuration, in the absence of more
Corner areas in angular loop configuration, during switch beam deforms, stress is dispersed in loop configuration, is solved
For mems switch beam during stress deformation, stress concentration adds the reliability of switch beam the corner areas the problem of.
Label declaration in schematic diagram：
1st, middle plate；2nd, tie-beam；3rd, loop configuration；4th, connecting rod；5th, gap；6th, perforate.
It should be noted that herein, such as first and second or the like relational terms are used merely to a reality
Body or operation make a distinction with another entity or operation, and not necessarily require or imply and deposited between these entities or operation
In any this actual relation or order.Moreover, term " comprising ", "comprising" or its any other variant are intended to
Nonexcludability includes, so that process, method, article or equipment including a series of elements not only will including those
Element, but also the other element including being not expressly set out, or it is this process, method, article or equipment also to include
Intrinsic key element.In the absence of more restrictions, the key element limited by sentence "including a ...", it is not excluded that
Other identical element also be present in process, method, article or equipment including the key element.
Each embodiment in this specification is described by the way of related, identical similar portion between each embodiment
Divide mutually referring to what each embodiment stressed is the difference with other embodiment.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the scope of the present invention.It is all
Any modification, equivalent substitution and improvements made within the spirit and principles in the present invention etc., are all contained in protection scope of the present invention
It is interior.
Claims (6)
1. a kind of switch beam, including the tie-beam of middle plate and the middle plate both sides, the tie-beam includes at least one
Individual loop configuration, it is characterised in that
In the case where the tie-beam includes a loop configuration, pass through one between the loop configuration and the middle plate
Connecting rod is connected；
In the case where the tie-beam includes at least two loop configuration, pass through one between adjacent two loop configuration
Connecting rod is connected, and connected between the loop configuration adjacent with the middle plate and the middle plate by a pair of connecting rods
Connect；
The loop configuration is oval ring structure or round rectangle loop configuration, and the connecting rod is arc-shaped connecting rod, arbitrarily
The nock of the pair of connecting rod is in opposite direction；
In the case where the loop configuration is oval ring structure, the oval major axis in the outer ring of the oval ring structure with it is short
The ratio between axle is equal to the ratio between the oval major axis of inner ring and short axle；
In the case where the loop configuration is round rectangle loop configuration, fillet is straight corresponding to the outer ring of the loop configuration
Footpath, equal to the width of round rectangle corresponding to outer ring；The diameter of fillet corresponding to the inner ring of the loop configuration, equal to inner ring pair
The width for the round rectangle answered.
2. switch beam according to claim 1, it is characterised in that with being formed arbitrarily two of a pair in the loop configuration
The junction of the arc-shaped connecting rod is provided with gap, and the gap represents that the loop configuration is non-occluded configuration.
3. switch beam according to claim 1, it is characterised in that put down the junction of the connecting rod and the loop configuration
Slip over and cross.
4. switch beam according to claim 1, it is characterised in that multiple perforates are offered in the middle plate.
5. switch beam according to claim 4, it is characterised in that the perforate is that circular or side number is the just polygon of even number
Shape.
6. switch beam according to claim 1, it is characterised in that the tie-beam of the middle plate both sides is symmetrical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610287188.1A CN105957774B (en) | 2016-05-03 | 2016-05-03 | A kind of switch beam |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610287188.1A CN105957774B (en) | 2016-05-03 | 2016-05-03 | A kind of switch beam |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105957774A CN105957774A (en) | 2016-09-21 |
| CN105957774B true CN105957774B (en) | 2018-03-20 |
Family
ID=56913371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610287188.1A Active CN105957774B (en) | 2016-05-03 | 2016-05-03 | A kind of switch beam |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105957774B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6506989B2 (en) * | 2001-03-20 | 2003-01-14 | Board Of Supervisors Of Louisana State University And Agricultural And Mechanical College | Micro power switch |
| CN1519875A (en) * | 2002-12-12 | 2004-08-11 | ������������ʽ���� | RF micro-electromechanical system switch |
| CN201417715Y (en) * | 2009-07-23 | 2010-03-03 | 哈尔滨理工大学 | Capacitive radio-frequency micro mechanical switch of torsion beam |
| CN102386021A (en) * | 2011-10-17 | 2012-03-21 | 上海交通大学 | Micro-mechanical capacitance two-way switch |
| CN103887602A (en) * | 2007-06-13 | 2014-06-25 | 索凡特科技有限公司 | Improvements in and relating to reconfigurable antenna |
| CN103943421A (en) * | 2014-04-18 | 2014-07-23 | 苏州锟恩电子科技有限公司 | Driving electrode plate and capacitor upper electrode plate separating type RF MEMS switch |
| CN104183426A (en) * | 2014-09-04 | 2014-12-03 | 上海工程技术大学 | Highly-integrated electromagnetic bistable-state MEMS relay and manufacturing method of highly-integrated electromagnetic bistable-state MEMS relay |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3709847B2 (en) * | 2002-01-23 | 2005-10-26 | 株式会社村田製作所 | Electrostatic actuator |
-
2016
- 2016-05-03 CN CN201610287188.1A patent/CN105957774B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6506989B2 (en) * | 2001-03-20 | 2003-01-14 | Board Of Supervisors Of Louisana State University And Agricultural And Mechanical College | Micro power switch |
| CN1519875A (en) * | 2002-12-12 | 2004-08-11 | ������������ʽ���� | RF micro-electromechanical system switch |
| CN103887602A (en) * | 2007-06-13 | 2014-06-25 | 索凡特科技有限公司 | Improvements in and relating to reconfigurable antenna |
| CN201417715Y (en) * | 2009-07-23 | 2010-03-03 | 哈尔滨理工大学 | Capacitive radio-frequency micro mechanical switch of torsion beam |
| CN102386021A (en) * | 2011-10-17 | 2012-03-21 | 上海交通大学 | Micro-mechanical capacitance two-way switch |
| CN103943421A (en) * | 2014-04-18 | 2014-07-23 | 苏州锟恩电子科技有限公司 | Driving electrode plate and capacitor upper electrode plate separating type RF MEMS switch |
| CN104183426A (en) * | 2014-09-04 | 2014-12-03 | 上海工程技术大学 | Highly-integrated electromagnetic bistable-state MEMS relay and manufacturing method of highly-integrated electromagnetic bistable-state MEMS relay |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105957774A (en) | 2016-09-21 |
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