CN110783673A - Multi-channel interdigital adjustable filter based on MEMS switch - Google Patents
Multi-channel interdigital adjustable filter based on MEMS switch Download PDFInfo
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- CN110783673A CN110783673A CN201911085815.3A CN201911085815A CN110783673A CN 110783673 A CN110783673 A CN 110783673A CN 201911085815 A CN201911085815 A CN 201911085815A CN 110783673 A CN110783673 A CN 110783673A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/20—Frequency-selective devices, e.g. filters
- H01P1/201—Filters for transverse electromagnetic waves
- H01P1/203—Strip line filters
- H01P1/20327—Electromagnetic interstage coupling
- H01P1/20336—Comb or interdigital filters
Abstract
The invention belongs to the technical field of tunable filters, and particularly relates to a multichannel interdigital tunable filter based on an MEMS (micro-electromechanical systems) switch, which comprises a substrate, wherein two single-pole multi-throw switches arranged in a mirror image mode are fixed on the substrate, each single-pole multi-throw switch comprises an input end and at least two output ends, the input end of each single-pole multi-throw switch is connected with an input signal line, an interdigital filter is arranged between the output ends of the two single-pole multi-throw switches, the output ends of the single-pole multi-throw switches are connected with the interdigital filter through output signal lines, and the two sides of the input signal line and the output signal line are provided with ground wires. The invention can reduce the size of the whole system and reduce the power consumption of the switch, and has the advantages of high Q value, low insertion loss, low power consumption, high linearity, easy integration and the like. Has excellent practicability in the range of 0-20 GHz. The invention can realize DC-20GHz multi-channel gating and high integration of the MEMS switch and the filter. The invention is used for filtering different frequencies.
Description
Technical Field
The invention belongs to the technical field of tunable filters, and particularly relates to a multi-channel interdigital tunable filter based on an MEMS switch.
Background
The multi-channel adjustable filter is an important electronic component which can filter stray or useless signals and has a frequency selection function, and has important significance in the aspects of realizing channel selection, image rejection, duplex, multi-channel communication and the like. Compared with the traditional band-pass filter, the band-pass filter can reduce the size of the whole system, reduce the power consumption of a switch, and has the advantages of high Q value, low insertion loss, low power consumption, high linearity, easiness in integration and the like. It can be widely applied to communication systems, instruments and equipment, radars and weaponry.
At present, the domestic mechanisms for researching the multi-channel tunable filter mainly comprise Nanjing electronic device research institute, Middy and electronic fifty-four institute, Wuhan university, China and North university and the like. For example, the fifty-fourth institute of the chinese electronics technology group corporation has designed a C-band multi-channel band-pass filter (application number: 201320615572.1), which includes a box, a cavity, and a plurality of filters arranged in the cavity, the filters are connected to two switch circuits, and the multi-channel band-pass filter is realized by controlling the frequency through switches. The Nanjing electronics institute designs an on-chip integrated three-channel MEMS switch filter, which consists of two single-pole multi-throw switches and three filters with different frequencies. However, the two multi-channel filters have the problems of complex structure, poor insertion loss, large volume and the like.
Disclosure of Invention
Aiming at the technical problems, the invention provides the MEMS switch-based multi-channel interdigital adjustable filter which has low insertion loss, low power consumption, high linearity and easy integration.
In order to solve the technical problems, the invention adopts the technical scheme that:
the utility model provides a multichannel interdigital type tunable filter based on MEMS switch, includes the substrate, be fixed with the single-pole multi-throw switch that two mirror images set up on the substrate, single-pole multi-throw switch includes an input and two at least outputs, single-pole multi-throw switch's input is connected with the input signal line, is provided with interdigital type filter between two single-pole multi-throw switch's the output, be connected through the output signal line between single-pole multi-throw switch's the output and the interdigital type filter, the both sides of input signal line and output signal line are equipped with the ground wire.
An anchor point is fixed on the output end of the single-pole multi-throw switch, the anchor point is fixedly connected to one end of a cantilever bridge, a contact is fixed on one end, close to the output end, of the output signal line, and the other end of the cantilever bridge is suspended right above the contact.
And a driving electrode is arranged right below the cantilever bridge and connected with a lead.
The cantilever bridge is provided with a release hole array which is 1-5 rows and 3-10 rows, the diameter of each release hole is 8-15 mu m, and the distance between two adjacent release holes is 15-25 mu m.
And one side of the driving electrode facing the cantilever beam is provided with a dielectric layer.
The dielectric layer is made of silicon nitride or hafnium oxide.
The interdigital filter is characterized in that two groups of coupling line resonators which are parallel to each other are arranged in the interdigital filter, one ends of the coupling line resonators are open-circuit, the other ends of the coupling line resonators are short-circuit and are arranged in a crossed mode in sequence, the interdigital filter and the single-pole multi-throw switch are the same in number, and the number and the size of the coupling line resonators of each interdigital filter are different.
The single-pole multi-throw switch is a single-pole four-throw switch, the number of the output ends of the single-pole multi-throw switch is four, and an included angle of 72 degrees is formed between every two adjacent output ends.
The output signal lines comprise a first output signal line, a second output signal line, a third output signal line and a fourth output signal line, the first output signal line and the fourth output signal line are arranged on the outer sides of the second output signal line and the third output signal line, an air bridge fulcrum is fixed on the ground line, air bridges are erected on the first output signal line and the fourth output signal line through the air bridge fulcrums respectively, and air bridges are erected on lead wires corresponding to output ends of the first output signal line and the fourth output signal line through the air bridge fulcrums respectively.
Compared with the prior art, the invention has the following beneficial effects:
compared with the traditional band-pass filters such as the traditional ferrite tunable filter, the cavity tunable filter, the semiconductor tunable filter, the ferroelectric tunable filter and the like, the invention can reduce the size of the whole system and reduce the power consumption of a switch, and has the advantages of high Q value, low insertion loss, low power consumption, high linearity, easy integration and the like. Has excellent practicability in the range of 0-20 GHz. The invention can realize DC-20GHz multi-channel gating and high integration of the MEMS switch and the filter.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is another schematic structural view of the present invention;
FIG. 3 is a schematic diagram of the switch of the present invention;
FIG. 4 is a schematic structural diagram of the cantilever bridge of the present invention;
FIG. 5 is a schematic diagram of an interdigital filter in accordance with the present invention;
FIG. 6 is a simulation of the S-parameters of the multi-channel filter of the present invention;
wherein: the device comprises a substrate 1, a single-pole multi-throw switch 2, an interdigital filter 3, an input signal line 4, an output signal line 5, a ground wire 6, an air bridge pivot 7, an air bridge 8, an input end 2-1, an output end 2-2, an anchor point 2-3, a cantilever bridge 2-4, a contact 2-5, a driving electrode 2-6, a lead 2-7, a release hole 2-8, a dielectric layer 2-9, a coupling line resonator 3-1, a first output signal line 5-1, a second output signal line 5-2, a third output signal line 5-3 and a fourth output signal line 5-4.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
A multi-channel interdigital adjustable filter based on an MEMS switch is disclosed, as shown in figures 1 and 2, the multi-channel interdigital adjustable filter comprises a substrate 1, two single-pole multi-throw switches 2 arranged in a mirror image mode are fixed on the substrate 1, each single-pole multi-throw switch 2 comprises an input end 2-1 and at least two output ends 2-2, the input ends 2-1 of the single-pole multi-throw switches 2 are connected with an input signal line 4, interdigital filters 3 are arranged between the output ends 2-2 of the two single-pole multi-throw switches 2, the output ends 2-2 of the single-pole multi-throw switches 2 are connected with the interdigital filters 3 through output signal lines 5, and ground wires 6 are arranged on two sides of the input signal lines 4 and the output signal lines 5. The selection of different center frequencies of the interdigital filter 3 is realized by controlling the gating state of the single-pole multi-throw switch 2.
Further, as shown in fig. 3, an anchor point 2-3 is fixed on an output end 2-2 of the single-pole multi-throw switch 2, the anchor point 2-3 is fixedly connected to one end of a cantilever bridge 2-4, a contact 2-5 is fixed on one end of an output signal line 5 close to the output end 2-2, and the other end of the cantilever bridge 2-4 is suspended right above the contact 2-5.
Further, a driving electrode 2-6 is arranged right below the cantilever bridge 2-4, and the driving electrode 2-6 is connected with a lead 2-7. The driving electrodes 2-6 are applied with driving voltage through leads 2-7, when the driving electrodes 2-6 are not applied with driving voltage, the driving electrodes 2-6 do not act, the cantilever beam 2-4 is separated from the contact 2-5, and the switch is in an off state. When the driving voltage acts on the driving electrodes 2-6, the driving electrodes 2-6 act to generate electrostatic force to enable the cantilever beams 2-4 to deform, so that the cantilever beams are in contact with the electrode contact points 2-5, and the switch is in an on state.
Further, as shown in FIG. 4, an array of release holes 2-8 is disposed on the cantilever bridge 2-4, the array of release holes 2-8 is arranged in 1-5 rows and 3-10 rows, the diameter of the release hole 2-8 is 8-15 μm, and the distance between two adjacent release holes 2-8 is 15-25 μm.
Further, preferably, one side of the driving electrode 2-5 facing the cantilever beam 2-4 is provided with a dielectric layer 2-9.
Further, preferably, the dielectric layers 2-9 are made of silicon nitride or hafnium oxide, which have high relative dielectric constants, so as to ensure the isolation between the cantilever beam 2-4 and the driving electrode 2-6.
Further, preferably, as shown in fig. 5, two sets of coupling line resonators 3-1 parallel to each other are disposed inside the interdigital filter 3, one end of each coupling line resonator 3-1 is open-circuited, and the other end of each coupling line resonator 3-1 is short-circuited and arranged in a crossing manner, the interdigital filter 3 and the output end 2-2 of the single-pole multi-throw switch 2 are the same in number, and the number and the size of the coupling line resonators 3-1 of each interdigital filter 3 are different from each other.
Further, preferably, the single-pole multi-throw switch 2 is a single-pole four-throw switch, four output ends 2-2 of the single-pole multi-throw switch 2 are provided, and an included angle of 72 degrees is formed between two adjacent output ends 2-2.
Further, the output signal line 5 comprises a first output signal line 5-1, a second output signal line 5-2, a third output signal line 5-3 and a fourth output signal line 5-4, the first output signal line 5-1 and the fourth output signal line 5-4 are arranged on the outer sides of the second output signal line 5-2 and the third output signal line 5-3, an air bridge supporting point 7 is fixed on the ground wire 6, an air bridge 8 is respectively arranged on the first output signal line 5-1 and the fourth output signal line 5-4 through the air bridge supporting point 7, and an air bridge 8 is respectively arranged on the lead wires 2-7 corresponding to the output ends 2-2 of the first output signal line 5-1 and the fourth output signal line 5-4 through the air bridge supporting point 7.
The working process of the invention is as follows: the driving electrode applies driving voltage through the lead, when the driving voltage is not applied to the driving electrode, the driving electrode does not act, the cantilever beam is separated from the contact, and the switch is in an off state. When the driving voltage acts on the driving electrode, the driving electrode acts to generate electrostatic force to enable the cantilever beam to deform, so that the cantilever beam is in contact with the electrode contact point, the switch is in an on state, and selection of different center frequencies of the interdigital filter is achieved by controlling the gating state of the single-pole multi-throw switch.
Examples
Filters corresponding to a first output signal line, a second output signal line, a third output signal line and a fourth output signal line are respectively a first pass filter, a second pass filter, a third pass filter and a fourth pass filter, and fig. 6 is an S parameter simulation diagram of the multi-channel filter of the invention, wherein as shown in fig. 6 (a), the straight-through insertion loss of the first channel filter is 0.99dB @9.3 GHz; as shown in fig. 6 (b), the through-insertion loss of the second channel filter is 1.39dB @14.2 GHz; as shown in fig. 6 (c), the through insertion loss of the third channel filter is 1.07dB @13.7 GHz; as shown in fig. 6 (d), the through-insertion loss of the fourth channel filter is 0.93dB @10.2 GHz.
Although only the preferred embodiments of the present invention have been described in detail, the present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present invention within the knowledge of those skilled in the art, and all changes are encompassed in the scope of the present invention.
Claims (9)
1. A multichannel interdigital adjustable filter based on MEMS switch which characterized in that: the single-pole multi-throw switch comprises a substrate (1), wherein two single-pole multi-throw switches (2) arranged in a mirror image mode are fixed on the substrate (1), each single-pole multi-throw switch (2) comprises an input end (2-1) and at least two output ends (2-2), the input ends (2-1) of the single-pole multi-throw switches (2) are connected with an input signal line (4), an interdigital filter (3) is arranged between the output ends (2-2) of the two single-pole multi-throw switches (2), the output ends (2-2) of the single-pole multi-throw switches (2) are connected with the interdigital filter (3) through output signal lines (5), and ground wires (6) are arranged on two sides of the input signal lines (4) and the output signal lines (5).
2. The MEMS switch based multi-channel interdigital tunable filter of claim 1, wherein: an anchor point (2-3) is fixed on an output end (2-2) of the single-pole multi-throw switch (2), the anchor point (2-3) is fixedly connected to one end of a cantilever bridge (2-4), a contact (2-5) is fixed on one end, close to the output end (2-2), of an output signal line (5), and the other end of the cantilever bridge (2-4) is suspended right above the contact (2-5).
3. The MEMS switch based multi-channel interdigital tunable filter of claim 2, wherein: and a driving electrode (2-6) is arranged right below the cantilever bridge (2-4), and the driving electrode (2-6) is connected with a lead (2-7).
4. The MEMS switch based multi-channel interdigital tunable filter of claim 2, wherein: the cantilever bridge (2-4) is provided with an array of release holes (2-8), the array of release holes (2-8) is arranged in 1-5 rows and 3-10 rows, the diameter of each release hole (2-8) is 8-15 mu m, and the distance between two adjacent release holes (2-8) is 15-25 mu m.
5. The MEMS switch based multi-channel interdigital tunable filter of claim 3, wherein: one side of the driving electrode (2-6) facing the cantilever beam (2-4) is provided with a dielectric layer (2-9).
6. The MEMS switch based multi-channel interdigital tunable filter of claim 5, wherein: the dielectric layers (2-9) are made of silicon nitride or hafnium oxide.
7. The MEMS switch based multi-channel interdigital tunable filter of claim 1, wherein: two groups of coupling line resonators (3-1) which are parallel to each other are arranged in the interdigital filter (3), one end of each coupling line resonator (3-1) is open-circuit, the other end of each coupling line resonator is short-circuited and is arranged in a crossed mode in sequence, the interdigital filter (3) is the same as the output end (2-2) of the single-pole multi-throw switch (2), and the number and the size of the coupling line resonators (3-1) of each interdigital filter (3) are different from each other.
8. The MEMS switch based multi-channel interdigital tunable filter of claim 1, wherein: the single-pole multi-throw switch (2) is a single-pole four-throw switch, four output ends (2-2) of the single-pole multi-throw switch (2) are provided, and an included angle of 72 degrees is formed between every two adjacent output ends (2-2).
9. A MEMS switch based multi-channel interdigital tunable filter in accordance with claim 1 or 8, wherein: the output signal line (5) comprises a first output signal line (5-1), a second output signal line (5-2), a third output signal line (5-3) and a fourth output signal line (5-4), the first output signal line (5-1) and the fourth output signal line (5-4) are arranged on the outer sides of the second output signal line (5-2) and the third output signal line (5-3), an air bridge pivot (7) is fixed on the ground wire (6), an air bridge (8) is erected on the first output signal line (5-1) and the fourth output signal line (5-4) through the air bridge pivot (7), and an air bridge (8) is erected on lead wires (2-7) corresponding to output ends (2-2) of the first output signal line (5-1) and the fourth output signal line (5-4) through the air bridge pivot (7).
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| CN201911085815.3A CN110783673A (en) | 2019-11-08 | 2019-11-08 | Multi-channel interdigital adjustable filter based on MEMS switch |
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| CN201911085815.3A CN110783673A (en) | 2019-11-08 | 2019-11-08 | Multi-channel interdigital adjustable filter based on MEMS switch |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111430857A (en) * | 2020-05-09 | 2020-07-17 | 中北大学 | T-shaped adjustable filter based on radio frequency MEMS switch |
| CN113394059A (en) * | 2021-05-08 | 2021-09-14 | 中北大学南通智能光机电研究院 | Multi-pole multi-throw switch based on RF MEMS switch |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111430857A (en) * | 2020-05-09 | 2020-07-17 | 中北大学 | T-shaped adjustable filter based on radio frequency MEMS switch |
| CN111430857B (en) * | 2020-05-09 | 2021-05-28 | 中北大学 | T-shaped adjustable filter based on radio frequency MEMS switch |
| CN113394059A (en) * | 2021-05-08 | 2021-09-14 | 中北大学南通智能光机电研究院 | Multi-pole multi-throw switch based on RF MEMS switch |
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Application publication date: 20200211 |