CN207009612U - A kind of high-isolation novel capacitor switch - Google Patents

A kind of high-isolation novel capacitor switch Download PDF

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Publication number
CN207009612U
CN207009612U CN201720824440.8U CN201720824440U CN207009612U CN 207009612 U CN207009612 U CN 207009612U CN 201720824440 U CN201720824440 U CN 201720824440U CN 207009612 U CN207009612 U CN 207009612U
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China
Prior art keywords
switch
insulating barrier
signal wire
ground wire
wire
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CN201720824440.8U
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Chinese (zh)
Inventor
陈磊
王雅珍
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CHIZHU RUICHENG MICROELECTRONICS Co Ltd
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CHIZHU RUICHENG MICROELECTRONICS Co Ltd
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Abstract

A kind of high-isolation novel capacitor switch is the utility model is related to, belongs to RF switch technical field.Including co-plane waveguide CPW transmission lines and switch beam, the co-plane waveguide transmission line is by substrate, insulating barrier, ground wire and signal line group into, insulating barrier is located above substrate, signal wire is located at centre position above insulating barrier, ground wire is spaced apart with signal wire and is arranged symmetrically in the both ends above insulating barrier, the switch beam by clamped beam and anchor district's groups into, it is connected across by anchor area between ground wire, the signal wire is located at switch beam underlying surfaces and is provided with dielectric layer, the capacitance switch uses electrostatic drive, its ground wire connects direct current ground terminal, signal wire on-load voltage, on the clamped beam four size identical circular arc gap are surrounded by close to anchor area;The utility model increases inductance, realizes the reduction of resonant frequency and the lifting of isolation by changing fixed beam structure.

Description

A kind of high-isolation novel capacitor switch
Technical field
It the utility model is related to RF switch technical field, more particularly to a kind of high-isolation novel capacitor switch.
Background technology
Under the promotion of globalization of world economy, the information industry using wireless communication technology as core enters booming Stage.People for the demand more and more higher of communication, urgently wish can it is efficient, convenient, obtain information exactly.So And a large amount of passive splitter parts include the resistance that switch, wave filter, antenna, variable capacitance, inductance etc. but turn into system compact Hinder.
Frequency-adjustable device can effectively transmit the useful signal of special frequency channel, reduce mutually dry between each communication channel Disturb, fully using frequency spectrum resource, reduce frequency spectrum waste and ensure communication equipment normal work.The core composition of adjustable device is penetrated The research of frequency switch is an important directions of wireless communication devices development.The performance of RF switch to adjustable device, or even it is whole Individual communication system plays the role of important.The effective exploitation of high band is utilized adjustable to tunable filter, reconfigurable antenna etc. Radio-frequency devices design proposes higher requirement.Therefore, it is necessary to which more advanced and mature switching technique ensures its realization.
RF MEMSs have the advantages that inexpensive, in light weight and small size, can efficiently solve passive device quality Greatly, bulky problem.Meanwhile with the rise of working frequency, radio-frequency devices are to size, precision, firing frequency performance and Gao Ke Higher requirement is proposed by property etc..Its excellent performance is applied in many fields.RF MEMS technologies can be realized The miniaturization of each communication component and integrated, the processing speed of signal can be improved and reduce the power consumption and body of communication system Product, by more and more extensive concern.
RF mems switch small volumes, light weight is insensitive to acceleration, no DC power, can low cost silicon or Manufactured on person's glass, than GaAs technology cut-off frequency high power, there is excellent isolation and insertion loss in microwave frequency.
But existing capacitance switch structure, the switch beam portion of electrical current density between ground wire and signal wire is very high, and this is right Reduce the insertion loss of switch and improve isolation and suffer from serious influence.
Utility model content
The problem of for shortcomings and deficiencies in the prior art, the utility model proposes a kind of high-isolation novel capacitor to open Close, by changing fixed beam structure, increase inductance, realize the reduction of resonant frequency and the lifting of isolation.
Technical scheme is used by the utility model solves its technical problem:
A kind of high-isolation novel capacitor switch, including co-plane waveguide CPW transmission lines and switch beam, the copline ripple Transmission line is led by substrate, insulating barrier, ground wire and signal line group into insulating barrier is located above substrate, and signal wire is located on insulating barrier Square centre position, ground wire are spaced apart with signal wire and are arranged symmetrically in the both ends above insulating barrier, and the switch beam is by clamped beam With anchor district's groups between being connected across ground wire by anchor area, the signal wire is located at switch beam underlying surfaces and is provided with dielectric layer, described Capacitance switch uses electrostatic drive, its ground wire connection direct current ground terminal, signal wire on-load voltage, close to anchor area four on the clamped beam Week is provided with four size identical circular arc gap.
Further, the clamped beam is provided with square release aperture.
The utility model has the advantages that:By setting circular arc gap on clamped beam, change traditional switch The high structure of beam current density so that capacitance switch insertion loss reduces, isolation is higher;High isolation can be reached on high band Degree, fully using frequency spectrum resource, reduce frequency spectrum waste and ensure communication equipment normal work;Using electrostatic drive, power consumption is lower, Response is faster, smaller;The utility model also has the advantages that the linearity is good, microwave property is good, more lighting.
Brief description of the drawings
Fig. 1 is the utility model overall structure diagram;
Fig. 2 is the utility model switch beam top view;
Fig. 3 is the utility model simulation curve figure;
Fig. 4 is the utility model parameter computational chart.
Embodiment
With reference to specific embodiment, the utility model is expanded on further.It should be understood that these embodiments are merely to illustrate this Utility model rather than limitation the scope of the utility model.In addition, it is to be understood that reading the content of the utility model instruction Afterwards, those skilled in the art can make various changes or modifications to the utility model, and these equivalent form of values equally fall within this Shen Please appended claims limited range.
As illustrated, a kind of high-isolation novel capacitor switchs a kind of high-isolation novel capacitor switch, including copline Waveguide CPW transmission lines 1 and switch beam 2, the co-plane waveguide transmission line 1 is by substrate 11, insulating barrier 12, ground wire 13 and signal wire 14 compositions, insulating barrier 12 are located at the top of substrate 11, and signal wire 14 is located at the top centre position of insulating barrier 12, ground wire 13 and signal wire 14 are spaced apart and are arranged symmetrically in the both ends of the top of insulating barrier 12, and the switch beam 2 is made up of clamped beam 21 and anchor area 22, passed through Anchor area 22 is connected across between ground wire 13, and the signal wire 14 is located at the underlying surfaces of switch beam 2 and is provided with dielectric layer 31, and the electric capacity is opened Pass uses electrostatic drive, its ground wire 13 connection direct current ground terminal, the on-load voltage of signal wire 14.
On the clamped beam 21 four size identical circular arc gap are surrounded by close to anchor area 22;Set on clamped beam 21 There is square release aperture 41.
Specifically, the action of switch is provided by direct-current static electric power, wherein ground wire 13 connects direct current ground terminal, while makes switch beam 2 are similarly in ground state, are Top electrode;It is bottom electrode and signal wire 14 loads high voltage or low-voltage.When signal wire 14 adds When carrying high voltage, voltage difference is produced between signal wire 14 and switch beam 2, due to the attraction of electrostatic force, clamped beam 21 is by elastic shape Change is close on dielectric layer 31, completes the drop-down of switch beam 2.Wherein, dielectric layer 31 is provided to underground state when switch beam 2 pulls down Electric capacity.
The state on switch(Up states)When, electric capacity is smaller between signal wire 14 and the switch beam 2 for being connected across ground wire 13, radio frequency letter Number pass through the structure onwards transmission of transmission line 1.When switch is pulled down by electrostatic force to be closed(Down states), switch beam 2 is close to Dielectric layer 31, capacitance structure is formed, causes radiofrequency signal shorted to earth, so as to realize the blocking of radiofrequency signal.
From its simulation result, it is apparent that this it is novel switched can reach very high isolation on high band, Especially in 35GHz resonant frequencies, switch isolation degree emulates the isolation for reaching 82dB.
The utility model reduces the part of switch beam 2 between ground wire 13 and signal wire 14 by changing the structure of clamped beam 21 Current density, inductance is increased, it is achieved thereby that the reduction of resonant frequency and the lifting of isolation.

Claims (2)

  1. A kind of 1. high-isolation novel capacitor switch, it is characterised in that:Including co-plane waveguide CPW transmission lines and switch beam, institute Co-plane waveguide transmission line is stated by substrate, insulating barrier, ground wire and signal line group into insulating barrier is located above substrate, signal wire position The centre position above insulating barrier, ground wire are spaced apart with signal wire and are arranged symmetrically in the both ends above insulating barrier, the switch Beam is by clamped beam with anchor district's groups between being connected across ground wire by anchor area, the signal wire is located at switch beam underlying surfaces and is provided with Dielectric layer, the capacitance switch use electrostatic drive, its ground wire connection direct current ground terminal, signal wire on-load voltage, the clamped beam It is upper to be surrounded by four size identical circular arc gap close to anchor area.
  2. A kind of 2. high-isolation novel capacitor switch according to claim 1, it is characterised in that:The clamped beam is provided with Square release aperture.
CN201720824440.8U 2017-07-10 2017-07-10 A kind of high-isolation novel capacitor switch Active CN207009612U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720824440.8U CN207009612U (en) 2017-07-10 2017-07-10 A kind of high-isolation novel capacitor switch

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720824440.8U CN207009612U (en) 2017-07-10 2017-07-10 A kind of high-isolation novel capacitor switch

Publications (1)

Publication Number Publication Date
CN207009612U true CN207009612U (en) 2018-02-13

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201720824440.8U Active CN207009612U (en) 2017-07-10 2017-07-10 A kind of high-isolation novel capacitor switch

Country Status (1)

Country Link
CN (1) CN207009612U (en)

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GR01 Patent grant
GR01 Patent grant
PE01 Entry into force of the registration of the contract for pledge of patent right

Denomination of utility model: A New Type of High Isolation Capacitor Switch

Effective date of registration: 20231228

Granted publication date: 20180213

Pledgee: Agricultural Bank of China Limited by Share Ltd. Chizhou branch

Pledgor: CHIZHOU RICHSEMI ELECTRONICS CO.,LTD.

Registration number: Y2023980074541

PE01 Entry into force of the registration of the contract for pledge of patent right