CN201386134Y - Simple evaporator - Google Patents
Simple evaporator Download PDFInfo
- Publication number
- CN201386134Y CN201386134Y CN200920011046U CN200920011046U CN201386134Y CN 201386134 Y CN201386134 Y CN 201386134Y CN 200920011046 U CN200920011046 U CN 200920011046U CN 200920011046 U CN200920011046 U CN 200920011046U CN 201386134 Y CN201386134 Y CN 201386134Y
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- China
- Prior art keywords
- rotation
- vacuum
- driving stem
- axis
- shaft
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to the vacuum equipment, in particular to a simple evaporator. In the technical proposal, the vacuum end of a guide rod of a rotary guide is fixedly provided with a shielding which is arranged above a crucible, the crucible is wrapped with a heating wire, and the heating wire is communicated with an electrode. The simple evaporator can evaporate a plurality of metals, the crucible is made of aluminum oxide and can resist the high temperature of 1800 degrees Celsius, the amount of the discharged gas is small, the heat sourced adopts a tungsten filament with a high fusing point, the heating is performed through electrification, the use is easy, the evaporation shielding plate is arranged, the evaporation time can be controlled, the evaporation quality can be ensured simultaneously, the evaporation shielding plate is driven by the ultra-high vacuum rotary driver and can be manually controlled from the outside, the material selected for the vacuum contact component is applicable to the use in the ultra-high vacuum environment, the simple evaporation source can resist the high-temperature baking, the overall structure is unique, and the operation is simple.
Description
Technical field
The utility model belongs to vacuum apparatus, particularly ultrahigh vacuum(HHV) film forming vaporizer.
Background technology
Coating technique in the ultra-high vacuum environment is novel material synthetic basis.Reliable for the coating quality that is implemented in the ultra-high vacuum environment, need have the evaporation equipment of high-quality simple type, the at present used most complex structures of evaporation equipment that are used for evaporation of metal are difficult to control from the external world, evaporate second-rate.
Summary of the invention
The purpose of this utility model is to overcome above-mentioned not enough problem, and a kind of simple type vaporizer is provided, and is simple in structure, and extraneous control accurately guarantees to evaporate quality.
The technical scheme that the utility model is adopted for achieving the above object is: simple type vaporizer, revolution inducting device import excellent vacuum end fixed installation shield, and shield is positioned at the crucible top, is wound with heater strip on the crucible, and heater strip is connected electrode.
The excellent rotation axle head fixed installation of described importing shield support fixedly is equipped with shield on the shield support.
Described revolution inducting device is a ultrahigh vacuum(HHV) rotation inducting device, corrugated tube is housed in the outer tube, driving stem and importing rod, driving stem and import rod by the axis of rotation of axis parallel and one formation around the shaft, corrugated tube one end is welded on the movable flange, the other end is welded on the vacuum apparatus joint flange, the vacuum apparatus joint flange fixedly is equipped with outer tube one end, and by bearing the excellent axis of rotation of importing is installed in the centre hole, the outer tube the other end is installed the driving stem axis of rotation by bearing, import the excellent axis of rotation and driving stem axis of rotation concentric, movable flange two ends all have body, in the body of two ends respectively by bearing install driving stem around the shaft with import rod around the shaft, driving stem around the shaft with import rod concentric around the shaft.
Described vacuum apparatus joint flange is made of ring flange, axle sleeve and urceolus adapter sleeve one, axle sleeve one end joint flange plate, and the other end connects the urceolus adapter sleeve, and the urceolus adapter sleeve is fixedlyed connected with outer tube by mounting flange.
Fixed installation handle in described driving stem axis of rotation termination is equipped with dog screw on the handle.
The utility model vaporizer has outstanding feature 1) can evaporate most metals, 2) material of crucible is an aluminum oxide, can anti-1800 degrees centigrade high temperature, and it is few to emit gas, 3) thermal source adopts dystectic tungsten filament, the energising heating, use-pattern is simple, and 4) the evaporation shutter is installed, can control the opportunity of evaporation, also can guarantee simultaneously the quality of evaporating, 5) driving of evaporation shutter realizes by the ultrahigh vacuum(HHV) rotating driver, can manually control 6 from the external world) and the vacuum contact component, select for use material to consider and emit the few requirement of gas, be fit to the use of ultra-high vacuum environment, 7) adopt edge of a knife flange, be fit to ultrahigh vacuum seal, 8) but simple and easy evaporation source high-temperature baking resistant, 9) integral construction is unique and simple to operate.
Description of drawings:
Fig. 1 is the utility model structural representation.
Fig. 2 is the utility model heating schematic diagram.
Fig. 3 is the utility model revolution inducting device structural representation.
Among Fig. 1: 1 revolution inducting device; 2 flanges; 3 molybdenum bars; 4 crucibles; 5 shield supports; 6 shields; 7 heater strips; 8 ring flanges; 9 negative poles; 10 positive poles; 11 corrugated tubes; 12 import rod; 13 vacuum apparatus joint flanges; 14 mounting flanges; 15 movable flanges; 16 outer tubes; 17 handles; 18 dog screw; 19 driving stems; 20 bearings.
Embodiment:
Simple type vaporizer as shown in Figure 1, the importing rod 12 vacuum end fixed installation shield support 5 of revolution inducting device 1, shield 6 fixedly is housed on the shield support, shield is positioned at crucible 4 tops, be wound with heater strip 7---tungsten filament on the crucible, heater strip 7 is connected the molybdenum bar 3 of electrode negative pole 9 and positive level 10 respectively, the heating principle as shown in Figure 2, the revolution inducting device as shown in Figure 3, corrugated tube 11 is housed in the outer tube 16, driving stem 19 and importing rod 12, driving stem and import rod by the axis of rotation of axis parallel and one formation around the shaft, corrugated tube 11 1 ends are welded on the movable flange 15, the other end is welded on the vacuum apparatus joint flange 13, vacuum apparatus joint flange 13 is by flanged plate, axle sleeve and urceolus adapter sleeve one constitute, axle sleeve one end joint flange plate, the other end connects the urceolus adapter sleeve, the urceolus adapter sleeve is fixed by mounting flange and outer sealing of tube, by bearing the excellent axis of rotation of importing is installed in the vacuum apparatus joint flange centre hole, the outer tube the other end is installed the driving stem axis of rotation by bearing 20, import the excellent axis of rotation and driving stem axis of rotation concentric, movable flange 15 two ends all have body, in the body of two ends respectively by bearing install driving stem around the shaft with import rod around the shaft, driving stem around the shaft with import rod concentric around the shaft, driving stem axis of rotation termination fixed installation handle 17, easy to operate, dog screw is housed on the handle, screws dog screw 18 after rotating to desired location.
The rotation of the importing rod control shield of revolution inducting device during use, the opportunity and the quality of forming film of control evaporation.Tungsten filament is wrapped on the crucible, and energising produces heat, the metal in the evaporator crucible to tungsten filament by electrode.Formula is used:
Q
W＝I
2R
Wt。R
WBe the resistance of tungsten filament, Q
WBe the heat of electric current through the tungsten filament generation.
Claims (5)
1, simple type vaporizer is characterized in that: the revolution inducting device imports excellent vacuum end fixed installation shield, and shield is positioned at the crucible top, is wound with heater strip on the crucible, and heater strip is connected electrode.
2, simple type vaporizer according to claim 1 is characterized in that: import excellent vacuum end fixed installation shield support, shield fixedly is housed on the shield support.
3, simple type vaporizer according to claim 1 and 2, it is characterized in that: the revolution inducting device is a ultrahigh vacuum(HHV) rotation inducting device, corrugated tube is housed in the outer tube, driving stem and importing rod, driving stem and import rod by the axis of rotation of axis parallel and one formation around the shaft, corrugated tube one end is welded on the movable flange, the other end is welded on the vacuum apparatus joint flange, the vacuum apparatus joint flange fixedly is equipped with outer tube one end, and by bearing the excellent axis of rotation of importing is installed in the centre hole, the outer tube the other end is installed the driving stem axis of rotation by bearing, import the excellent axis of rotation and driving stem axis of rotation concentric, movable flange two ends all have body, in the body of two ends respectively by bearing install driving stem around the shaft with import rod around the shaft, driving stem around the shaft with import rod concentric around the shaft.
4, simple type vaporizer according to claim 3, it is characterized in that: the vacuum apparatus joint flange is made of flanged plate, axle sleeve and urceolus adapter sleeve one, axle sleeve one end joint flange plate, the other end connects the urceolus adapter sleeve, and the urceolus adapter sleeve is fixedlyed connected with outer tube by mounting flange.
5, simple type vaporizer according to claim 3 is characterized in that: driving stem axis of rotation termination fixed installation handle, be equipped with dog screw on the handle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920011046U CN201386134Y (en) | 2009-02-27 | 2009-02-27 | Simple evaporator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920011046U CN201386134Y (en) | 2009-02-27 | 2009-02-27 | Simple evaporator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201386134Y true CN201386134Y (en) | 2010-01-20 |
Family
ID=41578664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200920011046U Expired - Fee Related CN201386134Y (en) | 2009-02-27 | 2009-02-27 | Simple evaporator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201386134Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105568225A (en) * | 2014-10-13 | 2016-05-11 | 中国科学院物理研究所 | Resistance heating apparatus and resistance heating type evaporation source |
| CN106191788A (en) * | 2016-10-09 | 2016-12-07 | 北京帕托真空技术有限公司 | Organic evaporating source for electric resistor heating type evaporation coating machine |
| CN106248128A (en) * | 2016-07-26 | 2016-12-21 | 苏州衡微仪器科技有限公司 | A kind of rotation introducer of vacuum equipment |
| CN107841714A (en) * | 2017-09-26 | 2018-03-27 | 中国科学院合肥物质科学研究院 | A kind of real-time lithiumation wall processing system for being used to improve plasma chamber wall condition |
-
2009
- 2009-02-27 CN CN200920011046U patent/CN201386134Y/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105568225A (en) * | 2014-10-13 | 2016-05-11 | 中国科学院物理研究所 | Resistance heating apparatus and resistance heating type evaporation source |
| CN105568225B (en) * | 2014-10-13 | 2018-12-21 | 中国科学院物理研究所 | Resistive heating device and resistance heating evaporation source |
| CN106248128A (en) * | 2016-07-26 | 2016-12-21 | 苏州衡微仪器科技有限公司 | A kind of rotation introducer of vacuum equipment |
| CN106248128B (en) * | 2016-07-26 | 2018-07-03 | 苏州衡微仪器科技有限公司 | A kind of rotation inducting device of vacuum equipment |
| CN106191788A (en) * | 2016-10-09 | 2016-12-07 | 北京帕托真空技术有限公司 | Organic evaporating source for electric resistor heating type evaporation coating machine |
| CN106191788B (en) * | 2016-10-09 | 2019-03-05 | 北京帕托真空技术有限公司 | Organic evaporating source for electric resistor heating type evaporation coating machine |
| CN107841714A (en) * | 2017-09-26 | 2018-03-27 | 中国科学院合肥物质科学研究院 | A kind of real-time lithiumation wall processing system for being used to improve plasma chamber wall condition |
| CN107841714B (en) * | 2017-09-26 | 2019-08-30 | 中国科学院合肥物质科学研究院 | It is a kind of for improving the real-time lithiumation wall processing system of plasma chamber wall condition |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100120 Termination date: 20180227 |