CN203814032U - X-ray source - Google Patents
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- CN203814032U CN203814032U CN201420238667.0U CN201420238667U CN203814032U CN 203814032 U CN203814032 U CN 203814032U CN 201420238667 U CN201420238667 U CN 201420238667U CN 203814032 U CN203814032 U CN 203814032U
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- 238000001816 cooling Methods 0.000 claims abstract description 28
- 239000000498 cooling water Substances 0.000 claims abstract description 28
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910052802 copper Inorganic materials 0.000 claims abstract description 18
- 239000010949 copper Substances 0.000 claims abstract description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000000919 ceramic Substances 0.000 claims abstract description 8
- 238000001704 evaporation Methods 0.000 claims abstract description 6
- 230000008020 evaporation Effects 0.000 claims abstract description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 38
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 34
- 238000009413 insulation Methods 0.000 claims description 20
- 239000002784 hot electron Substances 0.000 claims description 16
- 230000000694 effects Effects 0.000 claims description 10
- 238000010276 construction Methods 0.000 claims description 9
- 229910052571 earthenware Inorganic materials 0.000 claims description 7
- 238000012546 transfer Methods 0.000 claims description 7
- 239000007937 lozenge Substances 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 3
- 230000008676 import Effects 0.000 claims description 2
- 239000013077 target material Substances 0.000 abstract description 2
- 230000005540 biological transmission Effects 0.000 abstract 2
- 238000009434 installation Methods 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 239000000463 material Substances 0.000 description 9
- 239000005030 aluminium foil Substances 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 230000005260 alpha ray Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 238000004846 x-ray emission Methods 0.000 description 1
Abstract
The utility model discloses an X-ray source, which comprises an X-ray generation and transmission module, a water-cooling temperature control module and an operating circuit. The X-ray generation and transmission module comprises a copper rod, a ceramic tube, a main tube, a target head, an anode target A and an anode target B. The anode target A and the anode target B are respectively located on the two wedge-shaped surfaces of the target head. The anode target A and the anode target B are respectively provided with a Mg layer and an Al layer through the evaporation process. The water-cooling temperature control module comprises a water-cooling outer cylinder, a water-cooling inner cylinder and an installation flange. The cooling water is circulated inside the installation flange so as to cool the main tube. The cooling water is configured to flow into the water-cooling inner cylinder and then flow out of the water-cooling outer cylinder. Through the double-layer water cooling mode, the target head is cooled. According to the technical scheme of the utility model, the target material is evaporated onto the target head to form the anode targets, so that the anode targets are ensured to be in direct contact with the cooling water. The temperature of the anode targets and the flow of the cooling water can be monitored in real time. In this way, during the usage process, the equipment is ensured to be kept at a relatively low temperature by means of the water-cooling structure. Therefore, the equipment is ensured to run stably in a vacuum state.
Description
Technical field
The utility model relates to a kind of X-ray generator, particularly a kind of x-ray source.
Background technology
X ray, according to its wave-length coverage, is used to X-ray diffraction (XRD) or x-ray photoelectron power spectrum (XPS).
For the X ray wavelength degree of XRD, approach the atomic distance of material, according to Bragg diffraction principle, can obtain the information in atomic distance and the cycle of arrangement.XRD is the most effective means of structure of matter analysis, has brought into play irreplaceable effect for resolving material structure and mechanism.X ray wavelength relative atom interval for XPS is longer, and the electron energy of its energy and material is suitable, can inspire photoelectron based on photoelectric effect principle.Therefore XPS is the important means that material electronic state is analyzed.
The main target of physics research is to probe into structure and the electronic state of material, and X ray is indispensable for this reason, and the transmitting of grasping and realize X ray is important topic.China does not have the domestic x-ray source that is specifically designed to XPS at present, and this has not only seriously fettered the development of China's physicism, and the scientific research of Ye Shi China is limited by abroad, and difficulty has original scientific achievement.The x-ray source that is specifically designed to XPS that has China's independent intellectual property right is too impatient to wait.
X-ray source the most frequently used in XPS is mainly made up of filament, grid and plate target.The leading indicator of its x-ray source is intensity and live width, generally adopts K α line, because it is intensity maximum in X ray emission spectra.The feature K alpha ray that most important two x-ray sources are Mg and Al in XPS.Traditional x-ray source only has Sole anode target can only produce a kind of X ray, in the time of another X ray of needs, changes plate target, and user is brought inconvenience; While work in vacuum environment, can reduce vacuum environment vacuum degree because it produces a large amount of heats, vacuum degree reduction can reduce the useful life of filament and reduce the accuracy of XPS experimental result; In the X ray producing, also can reduce the accuracy of XPS experimental result doped with hot electron.
Summary of the invention
The problems referred to above that exist for solving prior art, the utility model will design a kind of x-ray source of steady operation in a vacuum.
To achieve these goals, the technical solution of the utility model is as follows: a kind of x-ray source, comprises X ray generation and emitting module, water cooling temperature control assembly and operating circuit;
Described X ray produces and emitting module comprises copper rod, earthenware, supervisor, filament socket, insulation short tube, high pressure connection, aluminum window cover plate, aluminum window pressing plate A, aluminum window, aluminum window pressing plate B, outer cover, block, target head, filament, filament fixed lever, insulation adjustment nail, target head tube connector, commutation rod, transfer tube, ceramic ring, plate target A and plate target B; Described plate target A and plate target B lay respectively on two lozenges of target head, and on described plate target A and plate target B, evaporation has Mg layer and Al layer respectively; Described aluminum window cover plate is fixed on aluminum window on outer cover with screw connecting mode, and aluminum window is divided into two parts by described aluminum window pressing plate A and aluminum window pressing plate B, and the X ray that plate target A and plate target B are produced penetrates from both sides respectively; It is upper that described outer cover is fixed on supervisor with screw connecting mode, and outer cover is for the protection of filament, plate target A and plate target B, and absorb a part of heat that filament and target head give out and conduct to supervisor; Described supervisor is for supporting and protecting its inner body and play connection transitional function; Described block is positioned at filament and target head front end, for reducing crosstalking between plate target A and plate target B; Described target head is fixed on target head tube connector with screw connecting mode; Described insulation adjustment nail is that three support nails, three support nails are uniform along the peripheral circumferential of target head tube connector, and it has certralizing ability, can be used for adjusting the position of target head axis; Filament is connected successively with filament fixed lever, commutation rod, transfer tube and copper rod; Commutation rod overcoat has ceramic ring, and copper rod overcoat has earthenware, and its object is all to ensure filament and plate target insulation; Copper rod is connected with three filament electrodes of filament socket, and filament socket external power supply is filament power supply; Insulation short tube is positioned at the insulation of high pressure connection front end for high-tension circuit;
Described water cooling temperature control assembly comprises supervisor, water-cooled urceolus, water-cooled inner core, mounting flange, target head and target head tube connector, and it is upper that described mounting flange is fixed on supervisor with screw connecting mode, and mounting flange circulate cooling water inside carries out cooling to supervisor; Water-cooled inner core is positioned at water-cooled urceolus, and water-cooled urceolus is connected with welding manner with target head tube connector, and cooling water is flowed into by water-cooled inner core, flows out from water-cooled urceolus, carries out cooling by Double water-cooled mode to target head;
Described operating circuit comprises copper rod, filament socket, high pressure connection, filament, plate target A and plate target B; Copper rod is connected with three filament electrodes of filament socket, and filament socket external power supply is filament power supply; The external positive high voltage Ua=15kV of high pressure connection is connected to plate target A and plate target B by water-cooled urceolus, cooling water tank ground connection, and it is cold that cooling water itself not only plays temperature lowering water, and himself resistance is also a part for unitary construction, plays the effect of dividing potential drop; Filament sends hot electron impinge anode target A and plate target B, and filament parallel one tunnel ground connection makes the electric current I e that hot electron forms import the earth;
On the interface of described filament socket, be provided with safety contact and safety switch interface, safety contact and safety switch interface external inspecting protected location, for operating circuit is carried out to automatic monitoring and safeguard protection, ensure user's safety and the normal operation of device; On safety switch interface, be also provided with filament one electrode, filament two electrodes and filament common electrode, these three external power source specials of electrode are powered to filament.
Compared with prior art, the utlity model has following beneficial effect:
1, the energy during due to hot electron bombardment anode reaches as high as 15keV, and this is enough to make any metal molten, and therefore cooling construction is of crucial importance fully reliably.Cooling construction of the present utility model is Double water-cooled, and cooling water is directly led to front end target head place by the oral siphon in center, and cooling water flows out from outer tube through cooling construction.Plate target of the present utility model be by target evaporation to target head, to guarantee that plate target directly contacts with cooling water.The temperature of plate target and the flow of cooling water can be monitored in real time.Such water-cooling structure can make equipment in use keep lower temperature, thus stable operation in a vacuum.Cooling water itself separately has dividing potential drop effect, need meet in accordance with regulations rational purity.
2, the bianode design of the utility model is just in order to meet the instructions for use of XPS.The utility model is the Twin anode X-ray source being applied in vacuum environment, compact conformation, and changeable two kinds of X ray energy, and also X ray intensity is adjustable, and it is convenient especially to make to use.The utility model is particularly suitable for XPS analysis, fills up the blank of China aspect small-sized x-ray source.
3, plate target of the present utility model is selected respectively Mg and Al, under the exciting of high-energy electron, can launch energy and be respectively the X ray of 1253.6eV (MgK α line) and 1486.7eV (CuK α line).Each plate target has a filament corresponding with it, anode with respect to filament in high potential, produce above-mentioned two kinds of energy that X ray is required thereby be accelerated in the electric field that the hot electron that filament is emitted can form between filament and plate target, can produce corresponding a kind of X ray to a wherein filament energising.Thereby can be according to different X ray demands, in use select different filaments to switch the X ray of two kinds of energy, use convenient.And target head also can be replaced with the target head that is coated with other materials, thereby produce the X ray of other energy, make the scope of application of this invention more extensive.
4, the X ray that plate target of the present utility model emits is after the aluminium foil of front end, from outlet transmitting.Aluminium foil does not absorb the high-energy X ray that two kinds of targets emit, thereby the intensity that has ensured to launch X ray can stop thermionic effusion simultaneously, in order to avoid the hot electron of overflowing produces and disturbs the result of use of this invention.
5, the utility model is applicable to ultra-high vacuum environment, and its part is selected material to be applicable to ultra high vacuum completely and used, and mounting flange is taked edge of a knife flange configuration, can bear the high-temperature baking of 250 DEG C, makes equipment can keep in use the vacuum degree of vacuum environment.
6, the utility model compact conformation, stable performance, life-span length, easy to use.
Brief description of the drawings
10, the total accompanying drawing of the utility model, wherein:
Fig. 1 is cutaway view of the present utility model.
Fig. 2 is the B place enlarged drawing of Fig. 1.
Fig. 3 is the C place enlarged drawing of Fig. 2.
Fig. 4 is the left view of Fig. 1.
Fig. 5 is mounting flange structure chart of the present utility model.
Fig. 6 is the C-C profile of Fig. 5.
Fig. 7 is the vertical view of Fig. 5.
Fig. 8 is operation principle schematic diagram of the present utility model.
Fig. 9 is the utility model filament socket figure.
Figure 10 is the utility model operating circuit schematic diagram.
In figure: 1, copper rod; 2, earthenware; 3, supervisor; 4, water-cooled urceolus; 5, water-cooled inner core; 6, mounting flange; 7, filament socket; 8, CF35 screw plate; 9, insulation short tube; 10, CF16 screw plate; 11, high pressure connection; 12, aluminum window cover plate; 13, aluminum window pressing plate A; 14, aluminum window; 15, aluminum window pressing plate B; 16, outer cover; 17, block; 18, target head; 19, filament; 20, filament fixed lever; 21, nail is adjusted in insulation; 22, target head tube connector; 23, commutation rod; 24, transfer tube; 25, ceramic ring; 26, plate target A; 27, plate target B; 28, hot electron; 29, X ray; 30, cooling water; 31, safety contact; 32, filament common electrode; 33, safety switch interface; 34, filament one electrode; 35, filament two electrodes; 36, water resistance.
Embodiment
For making object, technical scheme and the advantage of embodiment of the present utility model clearer, below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is known to complete description:
As shown in Fig. 1-7: a kind of x-ray source, after being switched on by filament 19, discharge hot electron, hot electron bombards plate target after being accelerated to the high-energy of maximum 15keV, and based on the principle of photoelectric effect and extranuclear electron energy level transition, plate target is launched the X ray of certain wavelength.
Because the utility model is Twin anode X-ray source, therefore tungsten filament is also designed to two.For different X ray demands, select corresponding tungsten filament heat of emission electronics.
Plate target of the present utility model is selected respectively Mg and Al, under the exciting of high-energy electron, can launch energy and be respectively the X ray of 1253.6eV (MgK α line) and 1486.7eV (AlK α line).Each plate target has an above-mentioned tungsten filament corresponding with it, anode with respect to tungsten filament in high potential.
The X ray that plate target emits is after the aluminium foil of front end, from outlet transmitting.Aluminium foil does not absorb the high-energy X ray that two kinds of targets emit, and can stop thermionic effusion simultaneously.
For angle and the intensity of the X ray that ensures to radiate, target head two anode surfaces and front end window are angled, and its front end has a block, can play certain induction to producing X ray.
For realize both sides anode target surface relatively with the symmetry of aluminum window axis, should ensure that target head axis is vertical and be positioned at aluminum window and hit exactly with respect to aluminum window, so target head part has three insulation adjustment with certralizing ability.
Energy during due to hot electron bombardment anode reaches as high as 15keV, and this is enough to make any metal molten, and therefore cooling construction is of crucial importance fully reliably.Cooling construction of the present utility model is Double water-cooled, and cooling water is directly led to front end target head place by the oral siphon in center, and cooling water flows out from outer tube through cooling construction.Plate target of the present utility model be by target evaporation to target head, to guarantee that plate target directly contacts with cooling water.The temperature of plate target and the flow of cooling water can be monitored in real time.Cooling water itself separately has dividing potential drop effect, need meet in accordance with regulations rational purity.
The utility model is applicable to ultra-high vacuum environment, and mounting flange 6 is taked edge of a knife flange configuration, selects material to be applicable to ultra high vacuum completely and uses, and can bear the high-temperature baking of 250 DEG C.
Above-mentioned technology of the present utility model, makes x-ray source compact conformation, stable performance, life-span length and easy to use.
Below be divided into X ray generation and transmitting, water cooling temperature control, control circuit three parts are described the utility model:
Described X ray produces and emitting module comprises copper rod 1, earthenware 2, supervisor 3, filament socket 7, insulation short tube 9, high pressure connection 11, aluminum window cover plate 12, aluminum window pressing plate A13, aluminum window 14, aluminum window pressing plate B15, outer cover 16, block 17, target head 18, filament 19, filament fixed lever 20, insulation adjustment nail 21, target head tube connector 22, commutation rod 23, transfer tube 24, ceramic ring 25, plate target A26 and plate target B27; Described plate target A26 and plate target B27 lay respectively on two lozenges of target head 18, and on described plate target A26 and plate target B27, evaporation has Mg layer and Al layer respectively; Described aluminum window cover plate 12 is fixed on aluminum window 14 on outer cover 16 with screw connecting mode, and aluminum window 14 is divided into two parts by described aluminum window pressing plate A13 and aluminum window pressing plate B15, and the X ray that plate target A26 and plate target B27 are produced penetrates from both sides respectively; Described outer cover 16 is fixed on supervisor 3 with screw connecting mode, and outer cover 16 is for the protection of filament 19, plate target A26 and plate target B27, and absorbs a part of heat that filament 19 and target head 18 give out and conduct to supervisor 3; Described supervisor 3 is for supporting and protecting its inner body and play connection transitional function; Described block 17 is positioned at filament 19 and target head 18 front ends, for reducing crosstalking between plate target A26 and plate target B27; Described target head 18 is fixed on target head tube connector 22 with screw connecting mode; Described insulation adjustment nail 21 is that three support nails, three support nails are uniform along the peripheral circumferential of target head tube connector 22, and it has certralizing ability, can be used for adjusting the position of target head axis; Filament 19 is connected successively with filament fixed lever 20, commutation rod 23, transfer tube 24 and copper rod 1; Commutation rod 23 overcoats have ceramic ring 25, and copper rod 1 overcoat has earthenware 2, and its object is all to ensure that filament 19 insulate with plate target A26 and plate target B27 respectively; Copper rod 1 is connected with three filament electrodes of filament socket 7, and filament socket 7 external power supplys are that filament 19 is powered; Insulation short tube 9 is positioned at the insulation of high pressure connection 11 front ends for high-tension circuit;
The hot electron that filament 19 is launched bombards plate target A26 and plate target B27 after being accelerated to the high-energy of maximum 15keV, and based on the principle of photoelectric effect and extranuclear electron energy level transition, plate target A26 and plate target B27 launch the X ray of certain wavelength.Frequency or the wavelength of launching X ray are only relevant with the atomic number of target, with independent from voltage; According to mosleys law:
In formula:
Z is target atom ordinal number;
K is the constant relevant with target material;
σ is screening constant, relevant in shell position with electron institute;
Example Anodic target A26 and plate target B27 are bi-material Mg and Al, produce the X ray of two kinds of different wave lengths: MgK α, AlK α, can be obtained by photon energy equation E=h ν, two kinds of X ray energy are respectively 1253.6eV (MgK α line), 1486.7eV (AlK α line).
Described water cooling temperature control assembly comprises supervisor 3, water-cooled urceolus 4, water-cooled inner core 5, mounting flange 6, target head 18, target head tube connector 22, described mounting flange 6 with screw connecting mode be fixed on supervisor 3 on, mounting flange 6 circulate cooling water insides to be responsible for 3 carry out cooling; Water-cooled inner core 5 is positioned at water-cooled urceolus 4, and water-cooled urceolus 4 is connected with welding manner with target head tube connector 22, and cooling water is flowed into by water-cooled inner core 5, flows out from water-cooled urceolus 4, carries out cooling by Double water-cooled mode to target head 18.
Described X ray control circuit as shown in figure 10, powered to it by the external power source special of filament socket 7 by filament 19.Filament socket 7 interfaces as shown in Figure 9, filament one electrode 34, filament two electrodes 35 and filament common electrode 32 on it, these three external power source specials of electrode are powered to filament 19; On it, safety contact 31 all carries out automatic monitoring and safeguard protection for external inspecting protected location to operating circuit with safety switch interface 33, ensures user's safety and the normal operation of device.The external positive high voltage Ua=15kV of high pressure connection 11 is connected to plate target by water-cooled urceolus 4, cooling water tank ground connection, and it is cold that cooling water itself not only plays temperature lowering water, and himself resistance water resistance 36 is also a part for unitary construction, plays the effect of dividing potential drop.Filament 19 sends hot electron impinge anode target A26 and plate target B27, and plate target A26 and plate target B27 launch X ray.
The utility model operation principle as shown in Figure 8.After being switched on by filament 19, discharge hot electron 28, hot electron 28 bombards plate target A26 and plate target B27 after being accelerated to the high-energy of maximum 15keV, based on the principle of photoelectric effect and extranuclear electron energy level transition, plate target is launched the X ray 29 of certain wavelength.Cooling water 30 is flowed into by water-cooled inner core 5, and water-cooled urceolus 4 flows out, and the target head 18 antianode targets of flowing through carry out cooling.
The above; it is only preferably embodiment of the utility model; but protection range of the present utility model is not limited to this; any be familiar with those skilled in the art the utility model disclose technical scope in; be equal to replacement or changed according to the technical solution of the utility model and inventive concept thereof, within all should being encompassed in protection range of the present utility model.
Claims (1)
1. an x-ray source, is characterized in that: comprise X ray generation and emitting module, water cooling temperature control assembly and operating circuit;
Described X ray produces and emitting module comprises copper rod (1), earthenware (2), supervisor (3), filament socket (7), insulation short tube (9), high pressure connection (11), aluminum window cover plate (12), aluminum window pressing plate A (13), aluminum window (14), aluminum window pressing plate B (15), outer cover (16), block (17), target head (18), filament (19), filament fixed lever (20), nail (21) is adjusted in insulation, target head tube connector (2), commutation rod (23), transfer tube (4), ceramic ring (25), plate target A (26) and plate target B (27), described plate target A (26) and plate target B (27) lay respectively on two lozenges of target head (18), and on described plate target A (26) and plate target B (27), evaporation has Mg layer and Al layer respectively, described aluminum window cover plate (12) is fixed on aluminum window (14) on outer cover (16) with screw connecting mode, aluminum window (14) is divided into two parts by described aluminum window pressing plate A (13) and aluminum window pressing plate B (15), and the X ray that plate target A (26) and plate target B (27) are produced penetrates from both sides respectively, described outer cover (16) is fixed on supervisor (3) with screw connecting mode, outer cover (16) is for the protection of filament (19), plate target A (26) and plate target B (27), and absorbs a part of heat that filament (19) and target head (18) give out and conduct to supervisor (3), described supervisor (3) is for supporting and protecting its inner body and play connection transitional function, described block (17) is positioned at filament (19) and target head (18) front end, for reducing crosstalking between plate target A (26) and plate target B (27), described target head (18) is fixed on target head tube connector (2) with screw connecting mode, described insulation adjustment nail (21) is that three support nails, three support nails are uniform along the peripheral circumferential of target head tube connector (2), and it has certralizing ability, can be used for adjusting the position of target head axis, filament (19) is connected successively with filament fixed lever (20), commutation rod (23), transfer tube (4) and copper rod (1), commutation rod (23) overcoat has ceramic ring (25), and copper rod (1) overcoat has earthenware (2), and its object is all to ensure filament (19) and plate target insulation, copper rod (1) is connected with three filament electrodes of filament socket (7), and filament socket (7) external power supply is filament (19) power supply, insulation short tube (9) is positioned at the insulation of high pressure connection (11) front end for high-tension circuit,
Described water cooling temperature control assembly comprises supervisor (3), water-cooled urceolus (4), water-cooled inner core (5), mounting flange (6), target head (18) and target head tube connector (2), it is upper that described mounting flange (6) is fixed on supervisor (3) with screw connecting mode, and mounting flange (6) circulate cooling water inside carries out cooling to supervisor (3); Water-cooled inner core (5) is positioned at water-cooled urceolus (4), water-cooled urceolus (4) is connected with welding manner with target head tube connector (2), cooling water is flowed into by water-cooled inner core (5), flow out from water-cooled urceolus (4), carry out cooling by Double water-cooled mode to target head (18);
Described operating circuit comprises copper rod (1), filament socket (7), high pressure connection (11), filament (19), plate target A (26) and plate target B (27); Copper rod (1) is connected with three filament electrodes of filament socket (7), and filament socket (7) external power supply is filament (19) power supply; The external positive high voltage Ua=15kV of high pressure connection (11) is connected to plate target A (26) and plate target B (27) by water-cooled urceolus (4), cooling water tank ground connection, it is cold that cooling water itself not only plays temperature lowering water, himself resistance is also a part for unitary construction, plays the effect of dividing potential drop; Filament (19) sends hot electron impinge anode target A (26) and plate target B (27), and filament (19) road ground connection in parallel makes the electric current I e that hot electron forms import the earth;
On the interface of described filament socket (7), be provided with safety contact (31) and safety switch interface (33), safety contact (31) and safety switch interface (33) external inspecting protected location, for operating circuit is carried out to automatic monitoring and safeguard protection, ensure user's safety and the normal operation of device; On safety switch interface (33), be also provided with filament one electrode (34), filament two electrodes (35) and filament common electrode (32), these three external power source specials of electrode are powered to filament (19).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420238667.0U CN203814032U (en) | 2014-03-25 | 2014-05-09 | X-ray source |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410114717 | 2014-03-25 | ||
| CN201410114717.9 | 2014-03-25 | ||
| CN201420238667.0U CN203814032U (en) | 2014-03-25 | 2014-05-09 | X-ray source |
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| CN203814032U true CN203814032U (en) | 2014-09-03 |
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| CN201420238667.0U Expired - Lifetime CN203814032U (en) | 2014-03-25 | 2014-05-09 | X-ray source |
| CN201410195467.6A Expired - Fee Related CN103929870B (en) | 2014-03-25 | 2014-05-09 | A kind of x-ray source |
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| Application Number | Title | Priority Date | Filing Date |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103929870A (en) * | 2014-03-25 | 2014-07-16 | 大连交通大学 | X-ray source |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107926105A (en) * | 2015-08-27 | 2018-04-17 | 皇家飞利浦有限公司 | X-ray source |
| JP6677420B2 (en) | 2016-04-01 | 2020-04-08 | キヤノン電子管デバイス株式会社 | X-ray tube device |
| CN107546089A (en) * | 2016-08-04 | 2018-01-05 | 上海丞铭电子技术有限公司 | A kind of high power x-ray bulb |
| CN111787676A (en) * | 2020-07-27 | 2020-10-16 | 辽宁道特凯力科技有限公司 | Frequency conversion KV control system of medical diagnosis X-ray high-voltage generator |
| CN113225886B (en) * | 2021-07-07 | 2021-11-23 | 中国工程物理研究院应用电子学研究所 | Water-cooling rotary radiation conversion target for high-energy microfocus X-ray |
| CN114594121B (en) * | 2022-03-04 | 2022-11-29 | 南开大学 | High-flux XPS device, detection method and application |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0845696A (en) * | 1994-07-28 | 1996-02-16 | Shimadzu Corp | X-ray generating device |
| US6519317B2 (en) * | 2001-04-09 | 2003-02-11 | Varian Medical Systems, Inc. | Dual fluid cooling system for high power x-ray tubes |
| CN200990362Y (en) * | 2006-11-02 | 2007-12-12 | 北京普析科学仪器有限责任公司 | Side window X-ray tube |
| JP5618473B2 (en) * | 2008-10-17 | 2014-11-05 | 株式会社東芝 | X-ray tube device |
| CN201323698Y (en) * | 2008-11-14 | 2009-10-07 | 上海安平静电科技有限公司 | Device using light ions for eliminating static electricity |
| CN203399388U (en) * | 2013-09-11 | 2014-01-15 | 中国科学院西安光机所威海光电子基地 | Uninterrupted working device of X-ray high-voltage generator |
| CN103474318A (en) * | 2013-10-10 | 2013-12-25 | 大连交通大学 | Sputtering ion gun |
| CN203573942U (en) * | 2013-11-25 | 2014-04-30 | 丹东华日理学电气股份有限公司 | Double-filament X-ray tube |
| CN203814032U (en) * | 2014-03-25 | 2014-09-03 | 大连交通大学 | X-ray source |
-
2014
- 2014-05-09 CN CN201420238667.0U patent/CN203814032U/en not_active Expired - Lifetime
- 2014-05-09 CN CN201410195467.6A patent/CN103929870B/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103929870A (en) * | 2014-03-25 | 2014-07-16 | 大连交通大学 | X-ray source |
| CN103929870B (en) * | 2014-03-25 | 2016-12-07 | 大连交通大学 | A kind of x-ray source |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103929870B (en) | 2016-12-07 |
| CN103929870A (en) | 2014-07-16 |
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