JPH0845696A - X-ray generating device - Google Patents

X-ray generating device

Info

Publication number
JPH0845696A
JPH0845696A JP17713694A JP17713694A JPH0845696A JP H0845696 A JPH0845696 A JP H0845696A JP 17713694 A JP17713694 A JP 17713694A JP 17713694 A JP17713694 A JP 17713694A JP H0845696 A JPH0845696 A JP H0845696A
Authority
JP
Japan
Prior art keywords
power
anode
rotating
ray
cooling water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17713694A
Other languages
Japanese (ja)
Inventor
Katsutoyo Osanai
克豊 小山内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP17713694A priority Critical patent/JPH0845696A/en
Publication of JPH0845696A publication Critical patent/JPH0845696A/en
Pending legal-status Critical Current

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  • X-Ray Techniques (AREA)

Abstract

PURPOSE:To facilitate maintenance of a rotary anode X-ray tube by substantially extending the lifetime of the water seal part of X-ray tube. CONSTITUTION:An X-ray generating device has a rotary anode part 3 including a rotary shaft 6 and stationary part, and the gap between the shaft 6 and stationary part is sealed by a water seal part 9 of rubber against a cooling water 12 which cools the rotary anode part 3. The output of a power limit setting device 20 to set the maximum of the electric power to be supplied to rotary anode X-ray tube is compared with the supply power, and an appropriate signal is passed to an X-ray power controlling part 21 and also sent to a motor speed controlling part 26. Control is made so that the revolving speed of a motor 16 to rotate the rotary anode part 3 is retarded with smaller setting value of power limiting, and the lifetime of the water seal part 9 is prolonged substantially.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はX線回折分析装置などに
用いられるX線発生装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray generator used in an X-ray diffraction analyzer and the like.

【0002】[0002]

【従来の技術】供給する電力が4kW以上で連続使用す
るX線管は、その陽極を高速回転させて物理的に熱の発
生部(焦点)を長い帯のようにして、その内側を流水で
冷却し陽極の焦点部が熱で溶けないように工夫してい
る。例えば、最大出力が18kW用のX線管では、直径
が約10cmの陽極を用いて毎分6000回転ほどの高
速回転をさせる。そしてX線発生時には、実際に供給し
ている電力の大小には関わらず、常に回転陽極は最大電
力を想定した高速回転状態にしている。また、この回転
は一般に3相カゴ型誘導モータで駆動され、回転数の変
更は簡単にはできない構造となっている。また、50H
zと60Hzの電源周波数に対応して回転速度を合わせ
る工夫として、モーターについているプーリーの直径を
電源周波数にあわせて交換することも行われている。
2. Description of the Related Art An X-ray tube continuously supplied with an electric power of 4 kW or more rotates its anode at a high speed to physically form a heat generating portion (focal point) like a long strip, and the inside of the tube is flushed with running water. It is cooled so that the focal point of the anode is not melted by heat. For example, in an X-ray tube having a maximum output of 18 kW, an anode having a diameter of about 10 cm is used to rotate at a high speed of about 6000 rpm. When the X-ray is generated, the rotating anode is always in a high-speed rotating state assuming the maximum power, regardless of the magnitude of the power actually supplied. Further, this rotation is generally driven by a three-phase cage induction motor, and the rotation speed cannot be easily changed. Also, 50H
As a device to match the rotation speed corresponding to the power supply frequency of z and 60 Hz, the diameter of the pulley attached to the motor is also changed according to the power supply frequency.

【0003】[0003]

【発明が解決しようとする課題】上記した従来技術では
陽極の回転速度は最大の供給電力を想定した高速回転に
固定されている。ここでの大きな問題は、回転陽極を冷
却する冷却水の回転軸に対するシールの寿命が短いこと
である。普通用いられるゴム製の水シール部は軸の回転
数が高いと極端に寿命が短くなる。例えば、3000r
pmでは数千時間の寿命があるが、6000rpmでは
数百時間の寿命となる。このゴム製の水シール部の寿命
を実質的に長くして回転陽極X線管の保守を容易にする
ことが本発明の課題である。
In the above-mentioned prior art, the rotation speed of the anode is fixed at a high speed assuming the maximum supply power. A major problem here is the short life of the seal on the rotating shaft of the cooling water that cools the rotating anode. Normally used rubber water seals have extremely short life when the shaft rotation speed is high. For example, 3000r
pm has a life of several thousand hours, but 6000 rpm has a life of several hundred hours. It is an object of the present invention to substantially extend the life of this rubber water seal to facilitate maintenance of the rotating anode X-ray tube.

【0004】[0004]

【課題を解決するための手段】上記課題を解決するため
に、本発明では、冷却水入口から水シール部を介して陽
極の回転軸の内側から回転陽極部に冷却水を供給し、回
転軸の内側に設けた戻りパイプを経て冷却水出口に排出
する水冷方式のX線発生装置において、回転陽極X線管
に供給する電力の最大値を設定する電力制限設定手段
と、回転陽極の回転速度を制御する回転速度制御手段を
備え、電力制限の設定値に連動して回転陽極の回転速度
を必要最小値に制御することによって、前記水シールの
寿命を長くするようにした。
In order to solve the above problems, according to the present invention, cooling water is supplied from the inside of the rotating shaft of the anode to the rotating anode part through the water seal part from the cooling water inlet to form the rotating shaft. In a water-cooled X-ray generator that discharges to a cooling water outlet via a return pipe provided inside the power limiting setting means for setting the maximum value of the power supplied to the rotating anode X-ray tube, and the rotating speed of the rotating anode. The rotational speed control means for controlling the water seal is provided, and the rotational speed of the rotating anode is controlled to the required minimum value in association with the set value of the power limit, thereby extending the life of the water seal.

【0005】また、前記回転陽極の回転速度を制御する
ためには、回転陽極を駆動するモーターとしてインバー
タモーターを使い、インバータ電源により回転速度を制
御することが好ましい。
In order to control the rotating speed of the rotating anode, it is preferable to use an inverter motor as a motor for driving the rotating anode and to control the rotating speed by an inverter power supply.

【0006】[0006]

【作用】回転陽極X線管をX線回折分析装置などに用い
る場合には、その出力を常に最大として使用するとは限
らず、分析試料や分析目的によっては出力を下げて使用
する場合も多い。そのときには安全のために回転陽極X
線管に供給する電力の最大値を決める電力制限の設定値
も下げておく。そうすると、その電力制限の設定値に連
動して陽極の回転速度が下がるので、水シール部の寿命
が大幅にのび、回転陽極X線管の保守が容易になる。
When the rotary anode X-ray tube is used in an X-ray diffraction analyzer, the output is not always maximized, and the output is often lowered depending on the analysis sample and the purpose of analysis. Then, for safety, the rotating anode X
The setting value of the power limit that determines the maximum value of the power supplied to the wire tube is also lowered. Then, the rotation speed of the anode is lowered in conjunction with the set value of the power limit, so that the life of the water seal portion is greatly extended and the maintenance of the rotary anode X-ray tube is facilitated.

【0007】[0007]

【実施例】本発明の実施例を図1によって説明する。回
転陽極X線管1は、真空容器2の中で回転陽極部3が回
転できるように、図示していないベアリングによって回
転軸6が支えられた構造となっている。回転陽極部3を
冷却する冷却水12は、冷却水入口10から回転軸6の
内側を通り回転陽極部を冷却したあと、回転軸の中央に
設けられた冷却水戻りパイプ7の中を通り冷却水出口1
1から排出される。回転軸6と真空容器2は磁性流体な
どを使った真空シール部8により真空が封じられ、冷却
水はゴム製の水シール部9によってシールされる。回転
陽極部の回転はモーター16によって、プーリー13、
ベルト15およびプーリー14を通じて与えられるが、
そのモーター16の回転速度すなわち回転陽極部の回転
速度はモーター回転速度制御部26によって決められて
いる。
Embodiment An embodiment of the present invention will be described with reference to FIG. The rotating anode X-ray tube 1 has a structure in which a rotating shaft 6 is supported by a bearing (not shown) so that the rotating anode portion 3 can rotate in the vacuum container 2. The cooling water 12 for cooling the rotating anode part 3 passes through the inside of the rotating shaft 6 from the cooling water inlet 10 to cool the rotating anode part, and then passes through the cooling water return pipe 7 provided at the center of the rotating shaft for cooling. Water outlet 1
Emitted from 1. The vacuum of the rotary shaft 6 and the vacuum container 2 is sealed by a vacuum seal portion 8 using a magnetic fluid or the like, and the cooling water is sealed by a water seal portion 9 made of rubber. The rotation of the rotating anode part is controlled by the motor 16 by the pulley 13,
Given through the belt 15 and the pulley 14,
The rotation speed of the motor 16, that is, the rotation speed of the rotating anode section is determined by the motor rotation speed control section 26.

【0008】真空容器内のフィラメント5にはX線パワ
ー制御部21によって−20〜−60kVの負高電圧が
かけられ、アース電位のX線発生部4に向かって電子ビ
ームが当たることによってX線が発生する。管電流値も
X線パワー制御部21で設定した値に制御される。X線
管の動作状態を監視するために、管電流と管電圧をモニ
タする電流モニタ22と電圧モニタ23、および、管電
流と管電圧の積を計算する電力モニタ24が設けられて
いる。一方、回転陽極X線管に供給する電力の最大値を
設定する電力制限設定器20が設けられており、その設
定値と電力モニタ24の出力値が比較器25に入力され
ている。この2つの値が比較されることによって、実際
の電力(電力モニタの出力)が設定された電力制限値を
越えれば、ただちに比較器25の出力がX線パワー制御
部21に送られ電源が切れるように構成されている。
A negative high voltage of -20 to -60 kV is applied to the filament 5 in the vacuum container by the X-ray power control unit 21, and the electron beam hits the X-ray generation unit 4 at the ground potential, whereby X-rays are emitted. Occurs. The tube current value is also controlled to the value set by the X-ray power control unit 21. To monitor the operating state of the X-ray tube, a current monitor 22 and a voltage monitor 23 for monitoring the tube current and the tube voltage, and a power monitor 24 for calculating the product of the tube current and the tube voltage are provided. On the other hand, a power limit setter 20 for setting the maximum value of the power supplied to the rotating anode X-ray tube is provided, and the set value and the output value of the power monitor 24 are input to the comparator 25. By comparing these two values, if the actual power (output of the power monitor) exceeds the set power limit value, the output of the comparator 25 is immediately sent to the X-ray power control unit 21 and the power is turned off. Is configured.

【0009】また、電力制限設定器20で設定した値は
モーター回転速度制御部26に与えられ、その値に応じ
てモーターの回転速度が決められる。すなわち、電力の
制限値が小さいときはモーターの回転速度は遅くなり、
電力の制限値が大きいときはモーターの回転速度は早く
なるように制御される。回転陽極部を回転させるモータ
ー16はインバータモーターであり、インバータ電源を
含んだモーター回転速度制御部26によって回転速度を
任意の値にすることができる。プーリー13とプーリー
14のそれぞれの直径はモーター13の制御しやすい回
転速度と回転陽極部の望ましい回転速度との関係から適
宜決められる。
The value set by the power limit setting unit 20 is given to the motor rotation speed control unit 26, and the rotation speed of the motor is determined according to the value. That is, when the electric power limit value is small, the rotation speed of the motor becomes slower,
When the electric power limit value is large, the rotation speed of the motor is controlled to be high. The motor 16 that rotates the rotating anode unit is an inverter motor, and the motor rotation speed control unit 26 including an inverter power supply can set the rotation speed to an arbitrary value. The respective diameters of the pulley 13 and the pulley 14 are appropriately determined based on the relationship between the rotation speed of the motor 13 which is easy to control and the desired rotation speed of the rotary anode portion.

【0010】例えば、最大供給電力が18kWで、回転
陽極の直径が10cmの回転陽極X線管では最大定格で
は毎分6000回転ほどの回転速度で陽極を回転させ
る。分析目的などに応じて、その装置を定格の半分の9
kWで運転する場合には電力制限設定器を9kWと設定
する。これは誤って電力を大きくし過ぎて思わぬ事故を
防ぐためである。そうすると、電力制限設定器の設定値
に連動して、陽極の回転速度はモーター速度制御部によ
って自動的に約4000rpmに変更される。ゴム製の
水シール部は回転速度が6000rpmの使用条件では
数百時間の寿命しかないが、4000rpmではその数
倍の寿命となりメンテナンスフリーに近い状態となる。
真空シール部は磁性流体を使用しているので、その寿命
は水シール部に比べて大幅に長い。
For example, in the case of a rotating anode X-ray tube having a maximum supply power of 18 kW and a rotating anode having a diameter of 10 cm, the anode is rotated at a maximum speed of about 6000 rpm. Depending on the purpose of analysis, etc.
When operating at kW, the power limit setter is set to 9 kW. This is to prevent accidents caused by accidentally increasing the power too much. Then, the rotation speed of the anode is automatically changed to about 4000 rpm by the motor speed control unit in association with the set value of the power limit setter. The water seal made of rubber has a life of several hundred hours under the use condition of a rotation speed of 6000 rpm, but at 4000 rpm, it has a life several times as long as that of the maintenance-free state.
Since the vacuum seal uses magnetic fluid, its life is significantly longer than that of the water seal.

【0011】電力制限値の設定方法は数値による入力や
スイッチによる設定など各種の方法が考えられる。ま
た、電力制限設定器20からモーター速度制御部26へ
の情報の伝達も設定値に比例した直流電圧を与える方法
に限らず、シリアルやパラレルのデジタル的な通信手段
によっても良い。
Various methods such as a numerical input and a switch setting can be considered as the method of setting the power limit value. Further, the transmission of information from the power limit setting unit 20 to the motor speed control unit 26 is not limited to the method of giving a DC voltage proportional to the set value, but may be serial or parallel digital communication means.

【0012】[0012]

【発明の効果】本発明によれば、実際の使用状況に合わ
せて回転陽極の回転速度を小さくできるので、水シール
部の寿命が大幅にのび、回転陽極X線管の保守が容易に
なる。また、回転陽極の回転速度は電源周波数に影響さ
れないので設置地域によってプーリーを交換するなどの
手間がいらなくなる。
According to the present invention, since the rotating speed of the rotating anode can be reduced according to the actual use condition, the life of the water seal portion is greatly extended and the rotating anode X-ray tube can be easily maintained. Further, since the rotating speed of the rotating anode is not affected by the power supply frequency, it is not necessary to replace the pulley depending on the installation area.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例を示す。FIG. 1 shows an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1…回転陽極X線管 2…真空容器 3
…回転陽極部 4…X線発生部 5…フィラメント 6
…回転軸 7…冷却水戻りパイプ 8…真空シール部 9
…水シール部 10…冷却水入口 11…冷却水出口 1
2…冷却水 13…プーリー 14…プーリー 1
5…ベルト 16…モーター 20…電力制限設定器 21…X線パワー制御部 2
2…電流モニタ 23…電圧モニタ 24…電力モニタ 2
5…比較器 26…モーター速度制御部
1 ... Rotating anode X-ray tube 2 ... Vacuum container 3
... Rotating anode part 4 ... X-ray generating part 5 ... Filament 6
… Rotating shaft 7… Cooling water return pipe 8… Vacuum seal part 9
... Water seal part 10 ... Cooling water inlet 11 ... Cooling water outlet 1
2 ... Cooling water 13 ... Pulley 14 ... Pulley 1
5 ... Belt 16 ... Motor 20 ... Electric power limit setting device 21 ... X-ray power control unit 2
2 ... current monitor 23 ... voltage monitor 24 ... power monitor 2
5 ... Comparator 26 ... Motor speed controller

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】冷却水入口から水シール部を介して陽極の
回転軸の内側から回転陽極部に冷却水を供給し、回転軸
の内側に設けた戻りパイプを経て冷却水出口に排出する
水冷方式のX線発生装置において、回転陽極X線管に供
給する電力の最大値を設定する電力制限設定手段と、回
転陽極の回転速度を制御する回転速度制御手段を備え、
電力制限の設定値に連動して回転陽極の回転速度を必要
最小値に制御し、前記水シールの寿命を長くしたことを
特徴とするX線発生装置。
1. A water cooling system which supplies cooling water from a cooling water inlet to a rotating anode part from the inside of a rotating shaft of an anode through a water seal part and discharges the cooling water to a cooling water outlet via a return pipe provided inside the rotating shaft. In the X-ray generator of the method, a power limit setting means for setting the maximum value of the electric power supplied to the rotating anode X-ray tube and a rotating speed control means for controlling the rotating speed of the rotating anode are provided.
An X-ray generator characterized in that the rotational speed of the rotating anode is controlled to a required minimum value in association with the set value of the electric power limit to extend the life of the water seal.
JP17713694A 1994-07-28 1994-07-28 X-ray generating device Pending JPH0845696A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17713694A JPH0845696A (en) 1994-07-28 1994-07-28 X-ray generating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17713694A JPH0845696A (en) 1994-07-28 1994-07-28 X-ray generating device

Publications (1)

Publication Number Publication Date
JPH0845696A true JPH0845696A (en) 1996-02-16

Family

ID=16025817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17713694A Pending JPH0845696A (en) 1994-07-28 1994-07-28 X-ray generating device

Country Status (1)

Country Link
JP (1) JPH0845696A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103929870A (en) * 2014-03-25 2014-07-16 大连交通大学 X-ray source

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103929870A (en) * 2014-03-25 2014-07-16 大连交通大学 X-ray source

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