CN106653557A - Focused anode layer ion source device - Google Patents
Focused anode layer ion source device Download PDFInfo
- Publication number
- CN106653557A CN106653557A CN201611177539.XA CN201611177539A CN106653557A CN 106653557 A CN106653557 A CN 106653557A CN 201611177539 A CN201611177539 A CN 201611177539A CN 106653557 A CN106653557 A CN 106653557A
- Authority
- CN
- China
- Prior art keywords
- water
- ring
- anode
- ion source
- source device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/06—Electron- or ion-optical arrangements
- H01J49/062—Ion guides
Abstract
The invention discloses a focused anode layer ion source device, which comprises a shell, wherein an anode ring and a cathode ring are oppositely arranged in the shell at an interval; an intake pipe is also fixedly arranged on the shell; the surfaces of the anode ring and the cathode ring are circular conical surfaces; the cathode ring comprises an outer cathode ring and an inner cathode ring; the outer cathode ring and the inner cathode ring are arranged in the same circular conical surface; and the conical surface of the anode ring is parallel to that of the cathode ring. The focused anode layer ion source device is scientific and reasonable in structure design; the anode ring and the cathode ring are set to be parallel circular conical surfaces, generated ion beams are focused towards the axis direction and the ion beams of which the sections are solid circles are formed within a distance range far away from the focusing point; the ion beam density is concentrated and the section uniformity is good; through a design of multiple groups of water-cooling systems, the cooling effect on a magnetic path and the inner cathode ring is ensured; the service life of the inner cathode ring can be prolonged; and the continuous high-intensity working time of the ion source is prolonged and the reliability of the ion source is strengthened.
Description
Technical field
The present invention relates to technology of ion source field, and in particular to a kind of focusing anode layer ion source device.
Background technology
Linear ion source is earliest that Russian researchers succeed in developing, and the nineties in last century, AE PLC of the U.S. obtained
The design principle of the technology, has made intensive studies and product development to it, not only makes linear ion source in service behaviour
It is greatly improved, but also is proposed the innovative product of multiple series, such as basic model, multiple unit type and linear ion
Source etc..Such ion gun is cleaned in the ion beam etching of substrate, in terms of assisted film deposition and direct thin film deposition, achieve huge
Ten-strike.But the ion beam that such ion gun is produced is parallel, and when focused ion beam is needed, such ion gun incapability is
Power, meanwhile, in prior art, ion source device is generally lowered the temperature only with the mode of single water-cooled to device, and cooling-down effect has
Limit, extreme influence ion source life and validity.
The content of the invention
To solve problems of the prior art, the invention provides a kind of can realize the focusing of focused ion beam
Anode layer ion source device.
The purpose of the present invention is by the following technical programs implementing：
A kind of focusing anode layer ion source device, including housing, interval is relatively set with anode ring with the moon in the housing
Polar ring, is further fixedly arranged on the housing air inlet pipe, and the anode ring is taper seat with the negative electrode ring surface, described
Cathode loop includes vulva polar ring and inner cathode ring, and the vulva polar ring is arranged in same taper seat with the inner cathode ring, institute
State the anode ring surface conical surface to be parallel to each other with the negative electrode ring surface conical surface.
Further, annulus, the anode ring and institute are provided between the vulva polar ring and the inner cathode ring
State annulus position relative.
Further, the cathode loop side is provided with magnet steel, also including water-cooling system, the water-cooling system is to shell
Body, anode ring and magnet steel are cooled down.
Further, the water-cooling system includes the first water-cooling system, the second water-cooling system and the 3rd water-cooling system, described
First water-cooling system is arranged on the hull outside, and second water-cooling system is connected with the anode ring, the 3rd water-cooled
System is arranged on around the magnet steel.
Further, second water-cooling system includes anode water-cooled water inlet pipe and anode water-cooled outlet pipe, described
Anode water-cooled water inlet pipe and the anode water-cooled outlet pipe are fixed on the housing by insulating sleeve, and with the anode ring
It is fixedly connected.
Further, the 3rd water-cooling system includes that the magnet steel water-cooled water inlet pipe being fixed on housing goes out with magnet steel water-cooled
Water pipe, around the magnet steel, is additionally provided with water-cooled space, the magnet steel water-cooled water inlet pipe, water-cooled space and magnet steel water-cooled
Outlet pipe connects setting.
Further, also including yoke, the yoke is arranged between the inner cathode ring and the magnet steel.
Further, also including teabowl with a cover part, the teabowl with a cover part fixes the inner cathode ring on the housing, and with institute
State inner cathode ring and form gas buffer space, the air inlet pipe connects setting with the gas buffer space.
A kind of focusing anode layer ion source device according to claim 1, it is characterised in that：Also include clip,
The clip is fixed on the vulva polar ring on the shell.
A kind of focusing anode layer ion source device according to claim 1, it is characterised in that：The anode ring with
The taper seat taper of the cathode loop is 150 °.
The invention has the beneficial effects as follows：
Focusing anode layer ion source device disclosed in this invention, scientific structure design is rationally, equal by anode ring and cathode loop
The taper seat being provided parallel to, the ion beam for making generation is focused on to axis direction, is formed with remote distance range in focus point and is cut
Face is the ion beam of filled circles, and beam current density is concentrated and sectional uniform is good.Can be effectively improved ion beam processing, heating, cleaning,
The beam current density accuracy of the technical process such as etching, sputtering and ion implanting.Meanwhile, the design of multigroup water-cooling system, Neng Gouyou
Effect avoids inner cathode ring from causing Jing often to be sputtered by serious etching because water-cooled is insufficient, palpus periodic replacement, the metal for sputtering out
Powder contaminated ion source built-in electrical insulation, cause ion gun be short-circuited failure the problems such as generation, this device water-cooling system is to magnetic
The cooling effect of road and inner cathode ring substantially, can extend the service life of inner cathode ring, increase the continuous intensive work of ion gun
Time and reliability.
Description of the drawings
Fig. 1 is a kind of focusing anode layer ion source device main view profile disclosed in this invention；
Fig. 2 is a kind of focusing anode layer ion source device right view disclosed in this invention.
Specific embodiment
With reference to specific embodiment, specific embodiments of the present invention is described in detail.
As shown in figure 1, the invention discloses a kind of focusing anode layer ion source device, including housing 18, housing 18 is
Hollow cylindrical, is made up of steel Q235-B materials, with magnetic conduction effect.On the inwall of housing 18, insulation sleeve 5 is provided with, is insulated
Set 5 is made up of polytetrafluoroethylmaterial material, it is ensured that plasma keeps insulation with housing 18.On the outer wall of housing 18, along housing 18
Outer wall is circumferentially provided with the first water-cooling system 7.First water-cooling system includes inlet pipeline 27, outlet pipeline 28, and is arranged on
Fixed water cooling tube 7 is surround with the spot welding of shell 18 between inlet pipeline 27 and outlet pipeline 28, the first water-cooling system can have
Effect ensures the cooling of housing 18.
Interval is relatively set with anode ring 6 and cathode loop in the housing 18, and the anode ring 6 is equal with the cathode loop
For the circulus that surface is taper seat, specifically, anode ring 6 is made up of stainless steel material, the water-cooled with the second water-cooling system
Pipe 17 is integrally welded, and the second water-cooling system also includes anode water-cooled water inlet pipe 1 and anode water-cooled outlet pipe 21, and anode water-cooled is entered
Water pipe 1 is connected with anode water-cooled outlet pipe 21 with water cooling tube 17, and is fixedly installed by housing 18.Specifically, anode water-cooled goes out
Between water pipe 21 and anode water-cooled water inlet pipe 1 and housing 18, isolated pipe is additionally provided with, the insulative pipe sleeve is included in insulation tube
Set 4 and insulation tube overcoat 20, are provided with sealing ring 19 between insulation tube inner sleeve 4 and insulation tube overcoat 20.Insulation tube can have
Effect ensures that anode water-cooled water inlet pipe 1 keeps insulation with anode water-cooled outlet pipe 21 with housing 18.
The cathode loop includes vulva polar ring 10 and inner cathode ring 11, and the vulva polar ring 10 sets with the inner cathode ring 11
Put in same taper seat, the surface conical surface of the anode ring 6 is parallel to each other with the negative electrode ring surface conical surface, the anode ring 6
150 ° are with the taper seat taper of the cathode loop.Ring-type is provided between the vulva polar ring 10 and the inner cathode ring 11
Space 16, the anode ring 6 is relative with the position of the annulus 16.Vulva polar ring 10 is fixed on housing 18 by clip 9.
In housing 18, magnet steel 15 is additionally provided with, by SmCo or NdFeB material, magnetic potential and the magnetic line of force can be produced.Magnetic
Steel 15 is arranged on cathode loop side, and is in the same side with anode ring 6, between magnet steel and inner cathode ring 11, is additionally provided with magnetic
Yoke 13, is made up of steel Q235-B materials, plays magnetic conduction effect.
Wireway 23 is arranged on the axial location of housing 18, and through housing 18, magnet steel 15, yoke 13 and inner cathode ring
11, and the opposite side in inner cathode ring 11 is fixedly connected setting with teabowl with a cover part 12 by nuts and washers 14.Teabowl with a cover part 12 will be interior
Cathode loop 11 is fixed on housing 18, meanwhile, a buffering for being passed through gas is formed between teabowl with a cover part 12 and inner cathode ring 11
Space, wireway 23 is connected with the cushion space of teabowl with a cover part 12, and cushion space more uniformly spreads the gas in ion gun.
3rd water-cooling system includes the magnet steel water-cooled water inlet pipe 22 being fixed on housing 18 and magnet steel water-cooled outlet pipe 25,
Around the magnet steel 15, water-cooled space 24, the magnet steel water-cooled water inlet pipe 22, water-cooled space 24 and magnet steel water-cooled are additionally provided with
Outlet pipe 25 connects setting.As illustrated, heat transfer distance of the water-cooled path of the 3rd water-cooling system apart from inner cathode ring 11
It is close, it is obvious to the cooling effect of magnetic circuit and inner cathode ring 11, the service life of inner cathode ring 11 can be extended, increase ion gun and connect
Continuous intensive work time and reliability.
The process of focusing anode layer ion source device production focused ion beam disclosed in this invention is situated between below
Continue：
(1) Chemical cleaning：Focused ion source device is disassembled first, acetone/ethanol is dipped in ion gun all parts using cotton
Surface carries out multipass scouring, till silk color no longer occurs significant change, is then placed on ultrasonic cleaning equipment
In, it is cleaned by ultrasonic with organic solvents such as acetone, ethanol, focusedion source is assembled after natural air drying.
(2) working environment prepares：Because the working environment of focusedion source must work under vacuum conditions, thus by its
After being assemblied in vacuum chamber, prepare forevacuum.
(3) it is passed through working gas：According to the focused ion beam species of need of work, it is passed through accordingly by air inlet pipe 23
Gas, keeps gas pressure in vacuum to be advisable in 5.0 × 10-3Pa ~ 1.0 × 10-1Pa, adjusts with specific reference to actually used demand.
(4) it is passed through water-cooled：Before ion gun works, by the first water-cooling system, the second water-cooling system and the 3rd water
Cooling system water flowing, it is ensured that ion gun low-temperature working.
(5) focused ion beam is produced：To anode ring 6 and vulva polar ring 10, inner cathode ring 11 pressurizes, then ion beam is from vulva
Draw between polar ring 10 and inner cathode ring 11, form focused ion beam.
The anode ring 6 of this device, inner cathode ring 11 and vulva polar ring 10 are both designed as part pyramid like configuration, the end of these annulus
Face is the taper seat for concaving, and about 150 degree of cone angle, the ion beam of generation is focused on to axis direction, in focus point with remote distance
Scope Formation cross-section is the ion beam of filled circles, and beam current density is concentrated and sectional uniform is good.Ion beam processing can be improved, added
The beam current density accuracy of the technical process such as heat, cleaning, etching, sputtering and ion implanting.
This device increased the water-cooled path design around the magnet steel of ion gun inside, it is to avoid common anode layer is ionogenic
Inner cathode ring is insufficient due to cooling down, and Jing is often sputtered by serious etching, must periodic replacement, the metal-powder for sputtering out pollute from
Component built-in electrical insulation, causes the ion gun many defects such as failure that are short-circuited to can effectively ensure that to the cold of magnetic circuit and inner cathode ring
But effect, extends the service life of inner cathode ring 11, increases ion gun continuous intensive work time and reliability.
Finally it should be noted that：The preferred embodiments of the present invention are the foregoing is only, the present invention is not limited to,
Although being described in detail to the present invention with reference to the foregoing embodiments, for a person skilled in the art, it still may be used
To modify to the technical scheme described in foregoing embodiments, or equivalent is carried out to which part technical characteristic.
All any modification, equivalent substitution and improvements within the spirit and principles in the present invention, made etc., should be included in the present invention's
Within protection domain.
Claims (10)
1. a kind of focusing anode layer ion source device, including housing, in the housing interval be relatively set with anode ring with
Cathode loop, is further fixedly arranged on the housing air inlet pipe, it is characterised in that：The anode ring is equal with the negative electrode ring surface
For taper seat, the cathode loop includes vulva polar ring and inner cathode ring, and the vulva polar ring is arranged on together with the inner cathode ring
In one taper seat, the anode ring surface conical surface is parallel to each other with the negative electrode ring surface conical surface.
2. a kind of focusing anode layer ion source device according to claim 1, it is characterised in that：The vulva polar ring with
Annulus is provided between the inner cathode ring, the anode ring is relative with the annulus position.
3. a kind of focusing anode layer ion source device according to claim 1, it is characterised in that：In the cathode loop one
Side is provided with magnet steel, and also including water-cooling system, the water-cooling system is cooled down to housing, anode ring and magnet steel.
4. a kind of focusing anode layer ion source device according to claim 3, it is characterised in that：The water-cooling system bag
The first water-cooling system, the second water-cooling system and the 3rd water-cooling system are included, first water-cooling system is arranged on the hull outside,
Second water-cooling system is connected with the anode ring, and the 3rd water-cooling system is arranged on around the magnet steel.
5. a kind of focusing anode layer ion source device according to claim 4, it is characterised in that：Second water
Cooling system includes anode water-cooled water inlet pipe and anode water-cooled outlet pipe, the anode water-cooled water inlet pipe and the anode water-cooled water outlet
Pipe is fixed on the housing by insulating sleeve, and is fixedly connected with the anode ring.
6. a kind of focusing anode layer ion source device according to claim 4, it is characterised in that：The 3rd water-cooled system
System includes the magnet steel water-cooled water inlet pipe being fixed on housing and magnet steel water-cooled outlet pipe, around the magnet steel, is additionally provided with water
Cold space, the magnet steel water-cooled water inlet pipe, water-cooled space and magnet steel water-cooled outlet pipe connect setting.
7. a kind of focusing anode layer ion source device according to claim 1, it is characterised in that：Also include yoke, institute
State yoke to be arranged between the inner cathode ring and the magnet steel.
8. a kind of focusing anode layer ion source device according to claim 1, it is characterised in that：Also include teabowl with a cover part,
The teabowl with a cover part fixes the inner cathode ring on the housing, and forms gas buffer space, institute with the inner cathode ring
State air inlet pipe and connect setting with the gas buffer space.
9. a kind of focusing anode layer ion source device according to claim 1, it is characterised in that：Also include clip, institute
State clip the vulva polar ring is fixed on the shell.
10. a kind of focusing anode layer ion source device according to claim 1, it is characterised in that：The anode ring with
The taper seat taper of the cathode loop is 150 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611177539.XA CN106653557A (en) | 2016-12-19 | 2016-12-19 | Focused anode layer ion source device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611177539.XA CN106653557A (en) | 2016-12-19 | 2016-12-19 | Focused anode layer ion source device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106653557A true CN106653557A (en) | 2017-05-10 |
Family
ID=58833768
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611177539.XA Pending CN106653557A (en) | 2016-12-19 | 2016-12-19 | Focused anode layer ion source device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106653557A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108914091A (en) * | 2018-08-10 | 2018-11-30 | 成都极星等离子科技有限公司 | A kind of improved anode leafing component |
| CN109041402A (en) * | 2018-07-31 | 2018-12-18 | 宜昌后皇真空科技有限公司 | A kind of method and device for the method generating multiple-charged state ion beam |
| CN109536906A (en) * | 2018-12-20 | 2019-03-29 | 兰州空间技术物理研究所 | A kind of anode layer ion source for assembling cathodic sputtering ring |
| CN109599310A (en) * | 2018-06-21 | 2019-04-09 | 新奥科技发展有限公司 | A kind of ion source mounting bracket |
| CN110767522A (en) * | 2019-11-04 | 2020-02-07 | 陈伟 | Focusing type linear anode layer ion source |
| CN111586954A (en) * | 2020-06-08 | 2020-08-25 | 江苏帕斯玛环境科技有限公司 | Method for generating water vapor plasma |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109599310A (en) * | 2018-06-21 | 2019-04-09 | 新奥科技发展有限公司 | A kind of ion source mounting bracket |
| CN109599310B (en) * | 2018-06-21 | 2021-01-05 | 新奥科技发展有限公司 | Ion source mounting bracket |
| CN109041402A (en) * | 2018-07-31 | 2018-12-18 | 宜昌后皇真空科技有限公司 | A kind of method and device for the method generating multiple-charged state ion beam |
| CN108914091A (en) * | 2018-08-10 | 2018-11-30 | 成都极星等离子科技有限公司 | A kind of improved anode leafing component |
| CN109536906A (en) * | 2018-12-20 | 2019-03-29 | 兰州空间技术物理研究所 | A kind of anode layer ion source for assembling cathodic sputtering ring |
| CN110767522A (en) * | 2019-11-04 | 2020-02-07 | 陈伟 | Focusing type linear anode layer ion source |
| CN110767522B (en) * | 2019-11-04 | 2022-03-18 | 无锡诚承电子科技有限公司 | Focusing type linear anode layer ion source |
| CN111586954A (en) * | 2020-06-08 | 2020-08-25 | 江苏帕斯玛环境科技有限公司 | Method for generating water vapor plasma |
| CN111586954B (en) * | 2020-06-08 | 2022-09-09 | 江苏帕斯玛环境科技有限公司 | Method for generating water vapor plasma |
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