CN201252679Y

CN201252679Y - Device for positioning or guiding an object corresponding to a substrate or together with a substrate

Info

Publication number: CN201252679Y
Application number: CNU2007203053434U
Authority: CN
Inventors: 克里斯托弗·莫泽; 卢祖博米尔·马雷尔杰科
Original assignee: AT&S China Co Ltd
Current assignee: AT&S China Co Ltd
Priority date: 2007-10-12
Filing date: 2007-11-30
Publication date: 2009-06-03
Anticipated expiration: 2017-11-30
Also published as: KR20100085026A; WO2009046468A3; AT10237U1; JP5325225B2; JP2011501109A; WO2009046468A8; WO2009046468A2

Abstract

The utility model relates to a device for positioning or guiding an object corresponding to a substrate or together with a substrate, which is provided with at least a light source that is used for irradiating the object in at least one marked area of the object that is to be positioned, and a receiving device, wherein, the receiving device is used for determining the positioning of the object and/or for correcting the position or the direction of the object according to the received reflection ray through the light that is reflected by the object and/or the substrate, and is characterized in that the device is provided with a receiving device (7), wherein, the receiving device is used for alternatively receiving the light with the optical wavelength changed that is shone on the object (1, 18, 21), so that the light with the wavelength changed is reflected by the fluorescent materials (15, 20, 22) in the marked areas (3, 19, 22) of the objects (1, 18, 21) that are to be positioned or to be guided.

Description

Be used for the relative substrate of object or with the location of substrate or directed device

Technical field

The utility model relates to and a kind ofly is used to make object with respect to substrate or with the location or the directed device of substrate, wherein be provided with at least one and be used for light source and a receiving system at the zone irradiating object of at least one mark of object to be positioned, this receiving system receives by the described object to be positioned and/or the light of substrate reflection, determines the position of described object and/or the position or the direction of described object are proofreaied and correct based on described received indirect ray.

Background technology

Although will mainly particularly explain the utility model below in conjunction with manufacturing or processing to printed circuit board by embodiment, but need explanation, the utility model usually can be used to make object with respect to or on the location of substrate or maintenance or bracing or strutting arrangement or directed method and device, use, wherein utilize after the light of different wave length shines in case of necessity, be received in the receiving system by the substrate of object or supporting object or the light of bracing or strutting arrangement reflection, and object is proofreaied and correct with respect to the location or the orientation of processing machine with respect to substrate or with substrate.This method and apparatus can be applicable to a lot of occasions, will carry out high-precision processing to workpiece in these occasions, for example boring procedure, tailoring process, etching process etc.In addition for example in exposure process and assembling process, accurate directed and the location is also very important.

With the manufacturing of printed circuit board or processing relatively, for example for pending boring procedure, particularly the laser drill process is well known that, on the printed circuit board or have on the tabular basically parts of a plurality of printed circuit boards mark is set, then circuit board or common tabular parts are fed to processing stations, and on this station, move and be calibrated with respect to substrate or with maintenance that forms substrate or bracing or strutting arrangement by at least two marks are set usually, so that for example setting out a plurality of accurately holes of setting for the treatment of on the printed circuit board or on the tabular usually parts according to computer-controlled drilling program in subsequent process, these holes for example are used to connect each parts of printed circuit board in follow-up procedure of processing, be used to assemble optional feature or be used to contact the different layer of printed circuit board.

Up to now, usually carry out as follows relatively with such orientation or position fixing process, be light, for example correspondingly the light of bunchy points to or is mapped to object to be positioned in the zone of one or more marks, for example on the printed circuit board, and utilize receiving system will by the light of printed circuit board or object reflection usually to be positioned and under the situation that the poroid mark that for example penetrates object to be positioned fully is set by the light-receiving of substrate reflection in receiving system, carry out automatic image processing in case of necessity, so that determine object to be positioned position or direction with respect to substrate, adjusting in case of necessity or proofreading and correct is value given in advance, so that can carry out the follow-up course of processing, for example carry out boring procedure with corresponding high precision.

So determine also that at this known reception reverberation the position of object to be positioned and the correlation technique and the device of direction have following shortcoming, it is object to be positioned, particularly printed circuit board or the local at least surface that is provided with reflection of tabular parts with a plurality of printed circuit boards, thereby be difficult to maybe can't to produce object to be positioned the encirclement mark the zone with respect to mark or under the situation of the poroid mark that is provided with perforation with respect to the corresponding good contrast of substrate, this substrate for example has light tone or the white that is used to produce enough contrasts, because can't distinguish between by the light of the light of the surface reflection of reflected by objects to be positioned or scattering and the light by mark or the reflection of the substrate below mark by corresponding precision, and this differentiation should be location or the orientation of determining object basic basis is provided.

Particularly with for example for make or high accuracy that the processing printed circuit board requires relatively, under the situation of considering local parts with very little size, these parts for example will be connected or contact in subsequent process, parts to be installed or the little size hole, to be provided with so for example to be made are set out thus, promptly under the situation of using known method and device, obtain corresponding great share not corresponding accurately processing, at this particularly enough object of accurately proofreading and correct and produce a large amount of waste products thus.Also can cause when this external grave error orientation or mis-alignment producing and interrupt, be in standstill state because control appliance can make to produce in this case usually.

The utility model content

Therefore the purpose of this utility model is, avoid the foregoing problems in the device of the described type of beginning, and the device of the described type of the beginning part carried out following improvement: promptly a kind ofly be used to make object with respect to substrate or with the location or the directed device of substrate, wherein be provided with at least one and be used for light source and a receiving system at the zone irradiating object of at least one mark of object to be positioned, this receiving system receives by the described object to be positioned and/or the light of substrate reflection, and determine the position of described object and/or the position or the direction of described object are proofreaied and correct based on described received indirect ray, be provided with a receiving system, this receiving system is used for receiving selectively the light that changes with respect to the optical wavelength that shines on the described object, to be positioned or treat in the zone of mark of directed object by using fluorescigenic material to reflect the light of described wavelength shift.

Technique effect of the present utility model is: can carry out object with respect to substrate or with the location or the orientation of substrate with the precision that improves with by receiving and analyze in case of necessity the light that is reflected simplifiedly or easily so that particularly make accurately or the situation of processing object under reduce the share of the object to be processed that does not meet quality requirement or the share of waste product.

In addition to achieve these goals, use the device of described type to be characterised in that and be provided with a receiving system, this receiving system is used for receiving selectively having and is different from the light that shines the light wavelength on the object, and this light is to be positioned or treat in the zone of mark of directed object particularly by using fluorescigenic material to be reflected.Can receive in the following way simple and reliablely and analyze the position or the direction of object to be positioned, be the light that device of the present utility model is used to selectively to receive the wavelength of reformed or conversion, wherein, wherein prevent to receive the light of the reflection of the wavelength that correspondingly changes particularly by using fluorescigenic material that wavelength is changed.

For fear of scattered light enter and the light-receiving that can be simply only will change wavelength in receiving system, preferred embodiment propose according to a kind of, before receiving system, connect filter, particularly filter that the light with the wavelength that changes mates.

Can stipulate alternatively or additionally that in addition described receiving system is made of receiving system, the particularly camera of the Color Channel with a plurality of light that are used to receive different wave length, this for example corresponding to device of the present utility model another preferred embodiment.

In order to need to proofread and correct the position or the direction of object to be positioned sometimes, propose according to another preferred implementation, be used to make object to be positioned or that treat orientation to connect with receiving system with respect to substrate or with the mobile device of substrate.

In order to provide reliably and simply have the light source of narrow in case of necessity spectral region, preferred embodiment propose according to another, described light source is made of in conjunction with colour filter etc. light-emitting diode, laser diode or incandescent lamp or gaseous discharge lamp.

Preferred embodiment propose according to another, to be positioned or treat that directed object is made of tabular basically parts, these parts have at least one mark that is made of fluorescigenic material.

In addition for correct and locate up to specificationly, preferred embodiment propose according to another, to be positioned or treat that directed object is provided with at least two marks in known mode itself, these two marks of separating of position or can detect after this receiving system corresponding mobile by a unique receiving system each other wherein perhaps receive and analyze where necessary according to the position or the direction of the receiving system that location that to be positioned or directed object is arranged and mark to be provided with is utilized quantity equal described mark to relevant described object.

In order to realize corresponding contrast, stipulate that in addition the mark of object to be positioned is made of recessed or groove.

According to another preferred implementation, the utility model proposes, the mark of object to be positioned is made of through hole, substrate have one by fluorescigenic material constitute the layer form.

Be used for the relative substrate of object or mainly be with the feature of the location of substrate or directed method, the light that is used for shining particularly is transformed into the light of the wavelength of change by the use material that fluoresces in the zone of mark, and receives the light of the wavelength that changes and analyze in case of necessity in receiving system.According to the light that the utility model replaces known method not receive and analysis is in case of necessity directly reflected by object and particularly mark or substrate, but particularly be transformed into the light that changes wavelength or the ray of electromagnetism usually by fluoresce light wavelength that material will be ready to use in irradiation of use according to the utility model, and in subsequent process only or the light-receiving of the wavelength that preferably will change analyze in case of necessity in receiving system neutralization, guarantee thus, for example be not received in the receiving system by object at the light of mark regional internal reflection on every side, this light has and originally is used for the particularly light wavelength of mark of irradiating object, thus can with the precision that improves and simple in case of necessity receive and to be positioned or directed object is tried to achieve in analysis at least one with respect to substrate or with the physical location or the direction of substrate or maintenance or bracing or strutting arrangement.Therefore by promptly fluorescing or light that the material of phosphorescence will be used for particularly being used for the light conversion of irradiating object in the zone of mark or convert the wavelength of change to can improve orientation and locating accuracy according to particularly using of the utility model regulation is fluorescigenic, can in subsequent process, process object to be processed with the precision of corresponding raising thus according to more accurate localization of improving and orientation, thereby can reduce widely or prevent on the whole because the processing of coarse location of the physical location of object to be positioned or direction or directed or wrong fixing caused mistake, thereby can reduce the share of the processed object that does not meet corresponding quality requirement and the therefore share of the waste product that causes thus of minimizing.Can avoid in addition because the orientation of gross error or the production disruption that mis-alignment causes.Can realize shortening orientation or locating the needed time by method of the present utility model in addition, thereby by using method of the present utility model can improve output or productivity ratio.For method of the present utility model importantly, reverberation cannot be introduced in reception and the analytical equipment, but by at least one light source irradiation to treating orientation or treat that light on the directed object is transformed into the light or the ray of electromagnetism usually of the wavelength of change by fluorescence or phosphorescence, and receive and then analyze in case of necessity the ray of this change wavelength.

Receive and for example ensuing in case of necessity or particularly graphical analysis automatically in order to simplify, preferred embodiment propose according to a kind of of method of the present utility model, use has the rayed object of narrow spectral region, and this light is transformed into the light that wavelength is different from the light wavelength that is used to shine by fluorescigenic material.

In order in the scope of method of the present utility model, also to use the receiving system that is different from known prior art basically, propose according to another preferred implementation method, connect filter, particularly filter that the light wavelength with the wavelength that changes is complementary in the receiving system front, wherein can be simple and reliable and coupling wavelength that be transformed or that change accurately by this filter.In addition by using this filter for example to enter into receiving system with what simple mode prevented original wavelength by the light of object reflection and other scattered light that exists sometimes.

Alternatively or additionally, originally be used for particularly can stipulating for fear of receiving at the scattering of light light or the reverberation of the zone of mark irradiating object, receiving system has the light-receiving passage of a plurality of different wave lengths, and in order to receive and then to analyze the light of reflection in case of necessity and select passage corresponding to the light of the wavelength that changes, this point for example corresponding to method of the present utility model another preferred embodiment.

For the simple especially and reliable execution mode that uses corresponding easy available light source, preferred embodiment propose according to another, as being used to shine to be positioned or treating the light source of directed object, light-emitting diode, laser diode or incandescent lamp and gaseous discharge lamp use in conjunction with colour filter.This light source can send the light or the interior light or the infrared light of ultraviolet range of various visible color basically, preferably has narrow spectral region, wherein consider the employed fluorescigenic material that maybe will use, by this photophase ground excitation material and the light that sends different colours or wavelength of different colours or wavelength, this light is received in the receiving system in subsequent process and analyzes where necessary.

Execution mode according to a kind of modification of the present utility model proposes, and connects dichroscope before receiving system and/or light source.

Particularly with method of the present utility model relevant to the use in the zone of the processing of printed circuit plate member or manufacturing, this printed circuit plate member has a plurality of printed circuit boards, preferred embodiment propose according to another of method of the present utility model, to be positioned or treat that directed object is made of tabular basically parts, these parts have at least one mark that is made of fluorescigenic material.

For reliable and correct positioning, preferred embodiment propose according to another, to be positioned or treat that directed object is provided with at least two marks in known mode itself.

For the ease of receiving and analyze in case of necessity the position or the direction of object to be positioned, preferred embodiment propose according to another, mark is made of recessed or groove.

For example can come a kind of simple especially execution mode of usage flag in the following way, be that mark is made of through hole, and substrate has a layer that is made of fluorescigenic material or is made up of this layer, this for example corresponding to method of the present utility model another preferred embodiment.

According to the utility model proposes, the method for the present utility model and the device of the present utility model that are used for the location of plate-shaped member, particularly printed circuit board use when making or process printed circuit board in addition.

According to a kind of particularly preferred execution mode, propose, method of the present utility model and device of the present utility model are used to implement to utilize bore process, enforcement milling process, photographic printing technology, mask process, silk-screen printing technique, exposure process or the assembling process etc. of boring machine, particularly laser drill machine when location and directed printed circuit board additionally.

Description of drawings

Illustrate in greater detail the utility model by the embodiment that schematically illustrates in the accompanying drawing below.Shown in the figure:

Fig. 1 is the schematic isometric of first execution mode that is used to implement the device of the present utility model of method of the present utility model;

Fig. 2 for according to the execution mode of Fig. 1 to be positioned or treat the partial sectional view of the amplification in the marked region of directed object;

Fig. 3 is the partial sectional view that is similar to Fig. 2 of execution mode of modification that is used to implement the device of the present utility model of method of the present utility model; With

Fig. 4 is the view that is similar to Fig. 2 equally of execution mode of another variation that is used to implement the device of the present utility model of method of the present utility model.

Embodiment

Schematically indicate to be positioned among Fig. 1 or treat directed object with 1, this object is for example by constituting for tabular parts substantially, these parts have a plurality of schematically with the printed circuit plate member of 2 expressions, and these printed circuit plate member are subdivided into single printed circuit plate member in processing or after making.In the execution mode according to Fig. 1, to be positioned or treat that directed object 1 has two for example marks 3 of through hole 3 forms, this for example particularly will contrast Fig. 2 and illustrate in further detail.

Light is shone according to the light path 5 that schematically illustrates by light source 4 on the zone or mark of mark 3 of plate-shaped member 1, then by the material that fluoresces is set in the zone of mark 3, this for example also will contrast the following drawings and illustrate in further detail, the light of the wavelength of a change different with the light that sends according to light path 5 by light source 4 or usually the ray of electromagnetism according to light path 6 towards schematically with the receiving system shown in 7, the emission of for example camera.The front of this camera 7 for example is connected with filter 8, this filter can make the wavelength that has only described change, be injected in receiving system or the camera 7 according to the light of light path 6, for example the light that has the wavelength identical with the wavelength that is sent by light source 4 by the reflection of the peripheral region of mark 3 then can not pass filter 8, and this for example will particularly contrast other accompanying drawing detailed description below.

Receiving system 7 connects by the connection lead 9 that schematically illustrates and analysis and display unit or unit 10, in this analysis and display unit or unit, the position and/or the direction of object to be positioned 1 are analyzed, for example particularly carried out automatic graphical analysis according to the signal that in receiving system 7, is received.

If in analytic unit 10, determine of improper correction or the location of mistake of tabular object 1 with respect to value given in advance, for example to control or regulate in order to locate so installing 12 by pilot 11, this device 12 be used to make tabular object 1 with respect to substrate or maintenance or bracing or strutting arrangement 13 according to arrow x and y for example according to the cartesian coordinate system location or move, so that make mark 3 consistent with orientation in view of the correct location of object 1 with value given in advance.

Alternatively or additionally, at object 1 during by improper correction, also can control or regulate by 10 pairs one devices 14 of control unit, device 14 is used to make substrate 13 or maintenance or bracing or strutting arrangement to move according to arrow x and y, so that for the correct location of follow-up procedure of processing realization to tabular object 1.This subsequent process steps for example can be to utilize the drilling equipment that is not shown specifically to carry out laser drill.

In execution mode, can be provided with second receiving system 7 of corresponding secondary light source 4 for second for example just relative mark 3, so that realize correct space orientation or orientation to object to be positioned 1 according to Fig. 1.Scheme as an alternative, receiving system 7 is correspondingly moved in the zone of mark 3, wherein receive only equally and have with respect to originally being used for particularly at the light of wavelength wavelength shift or conversion of the zone of mark 3 irradiating object or the ray of electromagnetism usually.

By as seen according to the detail drawing of Fig. 2, to be positioned, the mark on the tabular object 13 is made of through hole basically.Schematically illustrate among Fig. 2 in addition, equally at least one is provided with the layer 15 that is made of the material that fluoresces in the zone of the mark 3 of object to be positioned 1 with 13 substrates that indicate or maintenance or bracing or strutting arrangement, thereby the light that is sent according to light path 5 by light source 4 is transformed into light according to wavelength light path 6, that change by the layer 15 that fluoresced.After correspondingly selecting filter 8, the light of the wavelength of this change passes this filter and is injected in the receiving system 7.On the contrary, being stoped by filter 8 of unaltered wavelength by the light of the surface of object 1 according to

light path

16 and 17 reflections, therefore can not arrive in the receiving system 7, thereby guarantee to be injected into the light of the wavelength that only changes in the receiving system 7 in simple and reliable mode, this light is transformed by being mapped on the material 15 that fluoresces that is positioned at below the mark 3 according to light path 5 by light source 4, and scattered light effect or reflecting effect would not influence correct location or the directed analysis to object to be positioned 1 unfriendly thus.

Therefore can by be provided with simply fluoresce layer 15 and attainable thus with original wavelength according to the light of light path 5 simply conversion or convert to wavelength with change, according to the light of light path 6, realization has the reliable and accurate localization of object to be positioned 1, thereby reduces or avoid fault orientation.

Under present case importantly, treated that according to light path 5 fluorescigenic layer 15 receives by the light that at least one light source 4 is mapped on the object to be positioned, and send the light or the common ray 6 of electromagnetism of the wavelength of change by this layer, wherein this ray in subsequent process and particularly be received in the receiving system 7, carries out subsequent analysis according to the light path 6 that schematically illustrates in case of necessity after passing filter 8.

Replace fluorescing or fluorescigenic layer shown in Fig. 1 and 2, for example also can use fluorescigenic or have film, polymer or the glass of fluorescent color.

The execution mode of a kind of modification shown in Fig. 3, wherein equally by in the zone of mark 19 being mapped to equally basically tabular object 18 on according to light path 5 light of original or initial wavelength with 4 light sources that indicate, wherein in execution mode shown in Figure 3, object 18 to be positioned for example is made of multilayer printed circuit board.For example as seen from Figure 3, mark 19 is made of the lip-deep recessed or blind hole of object to be positioned 18, wherein the object to be positioned 18 of this multilayer has the layer that is made of the material 20 that fluoresces equally in the bottom section of recessed or mark 19, thereby be transformed into equally according to the light of light path 5 emission change wavelength according to the light of light path 6 or the ray of electromagnetism usually, it is injected in the receiving system 7 after passing equally with 8 filters that indicate.

Be similar to execution mode, according to equally can not or passing filter 8, therefore can not be arrived in the receiving system 7 with the intensity that reduces greatly with the light of the 16 and 17 light paths reflections that indicate by the surface of object 18 according to Fig. 2.

Therefore different with structure according to Fig. 2, in execution mode shown in Figure 3, need not to be substrate 13 or maintenance or the bracing or strutting arrangement setting layer that fluoresces.

In the execution mode of modification shown in Figure 4, be marked with 21 object to be positioned and have the mark 22 that constitutes by the material that fluoresces in its surface, thereby be similar to aforementioned embodiments, the light that is sent by the light source that is marked with 4 equally is transformed into the light according to light path 6 of the wavelength of change after being mapped to fluorescigenic mark 22 according to light path 5, it is received in after passing filter 8 in the receiving system 7 equally, is then analyzed in case of necessity.

Be similar to the execution mode according to Fig. 3, in the execution mode according to Fig. 4, substrate 13 is not provided with the layer that fluoresces yet.

Be similar to execution mode according to Fig. 1 and 2, in execution mode according to Fig. 3 and 4, also can for to tabular object 18 or 21 with respect to substrate 13 or with the location of this substrate, be provided with the device 14 that is used to make the device 12 of tabular movement of objects and/or is used to make substrate 13 to move with tabular object, perhaps described device connects with latter linked analytical equipment 10 at receiving system 7.

In addition shown in Fig. 2 to 4, except light source 4, illustrate or be provided with

light path

5 or 6 for this light source respectively for expression clearly, can also be provided with at least one other the additional light source that is marked with 4 ＇, this additional light source for example can be used for improving the resolution in the zone of receiving system 10.

Replace shown additional source of light 4 ＇ to stipulate, for example be provided with a plurality of light source 4 ＇ around receiving system or camera 7 annularly basically.Compare with the acentric setting shown in Fig. 1 and 2, an advantage of this set for example is, can reduce the shade influence under the situation that a plurality of light source 4 ＇ particularly are set annularly.

Light source 4 for example can for example be combined with colour filter etc. by the diode that fluoresces, laser diode, dissimilar lamps and constitute, thus preferably having narrow spectral region and having the color of good regulation thus or the light of wavelength in emission visible range or UV scope or the infra-red range.Selecting the light source 4 of respective wavelength or color when

material

15,20 or 22 couplings with fluorescing of using for the light wavelength conversion that will be used to shine object to be positioned 1 or conversion.

Selecting corresponding electromagnetic radiation, for example UV light time, also can use the intrinsic fluorescence of polymeric material of material, particularly this object of printed circuit board material or object 1 usually to be positioned, wherein this particularly can be used for the execution mode shown in Fig. 3 and 4.As so-called reverse contrast, they can use in the execution mode according to Fig. 1 and 2 in a similar fashion.

With by the material 15 that fluoresces, 20 or 22 change Wavelength matched the time, use with at mark 3,19, the filter 8 of the corresponding coupling of wavelength of the color of the light that sends by the material that fluoresces in 22 the zone or change, the wherein particularly light conductively-closed of light source 4 or 4 ＇.

Replace filter 8 and the receiving system 7 that is connected on the back, for example also can use the receiving system 7 that has a plurality of Color Channels, RGB camera for example, wherein corresponding passage by selective reception device 7 or combination of channels can realize color differentiating or to differentiation or adjusting by

fluoresce material

15,20 or 22 wavelength that change in this case.

Replace having the receiving system or the camera of a plurality of Color Channels, as receiving system 7, can use dissimilar cameras, for example black/white CCDs, CMOS and other camera.

Can in the zone of receiving system 7 and/or at least one light source 4, use dichroscope in addition.

As shown in Figure 1, when using the object 1 tabular to be positioned for example have a plurality of printed circuit boards or printed circuit plate member 2, for example object 1 is positioned with orientation after, the zone that for example is used for each printed circuit board is provided with the drilling equipment of a plurality of borings or through hole or micro through hole, particularly laser hole drilling system printed circuit board 2 is processed.Alternatively or additionally, also can adopt the milling process that utilizes at least one milling machine.

Additionally, also can particularly implement other manufacturing step relatively with processing or manufacturing to printed circuit board, for example photographic printing technology, mask process, silk-screen printing technique, exposure process or assembling process etc. require respectively to there being object to be processed 1 correspondingly to carry out accurate and high-precision orientation and location for this reason.

Claims

1. one kind is used to make object with respect to substrate or with the location of substrate or the device of orientation, wherein be provided with at least one and be used for light source and a receiving system at the zone irradiating object of at least one mark of object to be positioned, this receiving system receives by the described object to be positioned and/or the light of substrate reflection, and determine the position of described object and/or the position or the direction of described object are proofreaied and correct based on described received indirect ray, it is characterized in that, be provided with a receiving system (7), this receiving system is used for receiving selectively with respect to shining described object (1,18,21) light that the optical wavelength on changes, to be positioned or treat the mark (3 of directed object (1,18,21), 19,22) reflect the light of described wavelength shift in the zone by the fluorescigenic material of use (15,20,22).

2. device as claimed in claim 1 is characterized in that, connects a filter (8) that mate, that filter of the light with described wavelength shift in the front of described receiving system (7).

3. device as claimed in claim 1 is characterized in that, described receiving system (7) is made of the receiving system of the Color Channel with a plurality of light that are used to receive different wave length.

4. as each described device in the claim 1 to 3, it is characterized in that, be used to make described to be positioned or treat that directed object (1,18,21) connects with described receiving system (7) with respect to substrate or the device (12,14) that moves with described substrate (13).

5. as each described device in the claim 1 to 3, it is characterized in that described light source (4) is made of in conjunction with colour filter etc. light-emitting diode, laser diode or incandescent lamp and gaseous discharge lamp.

6. as each described device in the claim 1 to 3, it is characterized in that described to be positioned or treat that directed object (18,21) is made of tabular parts, these parts have at least one mark that is made of fluorescigenic material (20,22).

7. as each described device in the claim 1 to 3, it is characterized in that, described to be positioned or treat that directed object (1,18,21) is provided with at least two marks (3,19,22) in known manner.

8. as each described device in the claim 1 to 3, it is characterized in that the mark (19) of described object (18) to be positioned is made of recessed or groove.

9. as each described device in the claim 1 to 3, it is characterized in that the mark (3) of described object (1) to be positioned is made of a through hole, and described substrate (13) has the layer (15) that is made of fluorescigenic material and forms.

10. device as claimed in claim 3 is characterized in that, described receiving system (7) is made of the camera of the Color Channel with a plurality of light that are used to receive different wave length.