CN201242661Y

CN201242661Y - Treatment equipment for etching sheet material

Info

Publication number: CN201242661Y
Application number: CNU2008201515452U
Authority: CN
Inventors: 徐美华
Original assignee: Individual
Current assignee: Individual
Priority date: 2008-08-01
Filing date: 2008-08-01
Publication date: 2009-05-20
Anticipated expiration: 2018-08-01

Abstract

The utility model relates to a plate etching treatment installment which is mainly characterized in that a plate conveying device, a plurality of etching liquid injection pipes, a plurality of suction pipes and an etching liquid circulating pipe are arranged on an etching groove; the plate conveying device comprises an upper roller group and a lower roller group, and each roller group comprises a plurality of rod bodies which are arranged in parallel and has a plurality of rollers; the suction pipes are respectively arranged between the rod bodies of the upper roller group and between the rod bodies of the lower roller group at intervals; both ends of the etching liquid circulating pipe are communicated with the etching groove; a necking-in part for reducing the diameter of the pipe is arranged at the section position of the etching liquid circulating pipe; and the necking-in part is communicated with the suction pipes. After the plate is processed with the etching liquid injected from the etching liquid injection pipes, the extra etching liquid on the plate is sucked by the suction pipes, thereby avoiding the occurrence of insufficient etching.

Description

Sheet material etch processes device

Technical field

The utility model is a kind of sheet material etch processes device, and it utilizes round-robin current and a venturi principle, draws and is stranded in the etching solution that has reacted on the sheet material, to avoid the sheet material etch processes device of sheet material undercut.

Background technology

Present sheet material treatment facility, with sheet material wet process etch processes equipment, can comprise sheet material Etaching device, sheet material cleaning device and plate surface liquid absorption device, all be provided with the roller delivery groups in each device, to transport sheet material, as circuit board or glass substrate etc.Generally speaking, sheet material can earlier utilize etching solution to carry out etching in this sheet material Etaching device, enters in the sheet material cleaning device with clear water again and removes etching solution on the sheet material, passes through the plate surface drying device at last again, clear water on the sheet material is removed, to obtain once etched dry sheet material.

The general device that uses at the wet process etching program, can announce No. 335249 patent " circuit board wet process conveying device " referring to Taiwan, this conveying device also is a kind of sheet material wet process Etaching device, this device comprises a driving stem, arrange roller set once, arrange roller set on one, once arrange on jetting system and one and arrange jetting system, this driving stem has plural driven wheel, this time row roller set comprises that plural number is arranged in parallel with each other and has the following body of rod of plural roller, each time body of rod one end is provided with the rolling bearing with the engagement of corresponding driven wheel, each time body of rod end in addition then is provided with a driven gear, and should the row's of going up roller set be arranged at the top that roller set is arranged in this time, and comprise that plural number is arranged in parallel with each other and has the last body of rod of plural roller, the body of rod is provided with the corresponding gear that meshes with the driven gear of the corresponding following body of rod on each, this time row jetting system is arranged at this time row roller set below, and be fixed in the sidewall of this conveying device, and has a plural nozzle, each nozzle is towards the direction setting of this time row roller set, with the ejection etching liquid, and should be arranged at the top of arranging roller set on this by the row's of going up jetting system, and be fixed in the sidewall of this conveying device, and has a plural nozzle, the direction setting of each nozzle row's roller set on this is with the ejection etching liquid.

When a sheet material is put to this device, be positioned on this, under arrange between the roller set, after this driving stem starts, these driven wheels can drive down the rolling bearing of the body of rod, and allow this time body of rod begin to roll, to transport this sheet material, driven gear by this time body of rod drives the corresponding gear that goes up the body of rod again, make the body of rod also begin to roll, at this sheet material in last, under arrange in the roller set when mobile, on this, following row's jetting system can be on sheet material, lower surface ejection etching solution is with etching sheet material, making does not have the part of coating photoresistance on the sheet material with the etching solution reaction and remove, to form recess and circuit; Yet, because sheet material has certain area, when last row's jetting system behind the upper surface of sheet material ejection etching solution, the etching solution that major part had been reacted can flow out from sheet edge, but have the etching solution delay that part has been reacted in sheet material upper face center zone, promptly general alleged " water stagnates " phenomenon, therefore when still unreacted etching solution is sprayed to this sheet material, owing to be detained again stopping of etching solution that sheet material central authorities have reacted, the circuit that can cause forming in sheet material central authorities can't react with new etching solution, and the phenomenon of generation undercut, therefore the etching precision for sheet material causes uppity shortcoming.

Summary of the invention

The design people is because existing sheet material might be because the sheet material middle section has the residual of etching solution in the sheet material Etaching device, and in time remove and cause the phenomenon of undercut, therefore through after constantly studying and testing, create this sheet material etch processes device finally.

The purpose of this utility model is to provide a kind of round-robin current and venturi principle of utilizing, and draws the etching solution that residues on the sheet material, to avoid the sheet material etch processes device of sheet material undercut.

For reaching above-mentioned purpose, sheet material etch processes device of the present utility model, it makes an etching bath be arranged with:

One sheet material conveyer, it comprises a upper roller group and roller set once, each roller set comprises that plural number is arranged in parallel and has the body of rod of plural roller;

Plural number etching solution playpipe;

Plural number is absorbed body, and it is arranged at intervals between the body of rod of this upper roller group respectively and between the body of rod of this bottom roller group; And

One etching solution circulation pipe, its two ends are communicated in this etching bath, and its middle section position has the necking section that dwindles caliber, and this necking section is communicated in these absorption bodys.

By the absorption body is set in etching bath, make that sheet material is handled through the etching solution that is sprayed in the etching solution playpipe after, can via this absorptions body the etching solution that had reacted on the sheet material be absorbed again, so can avoid the situation generation of undercut.

Moreover, when etching solution circulation pipe recovery etching solution utilizes again, the necking section that etching solution can dwindle by caliber, etching solution can be accelerated flow rate and produce negative pressure this moment, make to produce toward the air-flow of necking section direction in the ventilation body, allow and absorb body and absorbed the etching solution that had reacted on the plate surface; Therefore the utility model need not utilize extra electric power, so can save cost, can effectively avoid the sheet material undercut again, has very much economic benefit.

Description of drawings

Fig. 1 looks closely configuration schematic diagram for cut-away section of the present utility model; And

Fig. 2 is a part schematic side view of the present utility model.

Embodiment

Please referring to shown in Fig. 1 and 2, sheet material treating apparatus of the present utility model, it is that an etching bath 10 is arranged with:

One sheet material conveyer 20, it comprises a upper roller group 21 and roller set 22 once, move between this upper roller group 21 and bottom roller group 22 for sheet material 60, each roller set 21,22 comprises that plural number be arranged in parallel and has the body of rod 212,222 of plural roller 211,221;

Plural number etching solution playpipe 30, it can be arranged at the top of this upper roller group 21 and the below of bottom roller group 22, preferably be set in parallel between the body of rod 212,222 of these roller set 21,22, and these etching solution playpipes 30 are for penetrating etching solution, and can drop down onto the bottom land of etching bath 10 by the etching solution of drippage on the sheet material 60, utilize again with to be recycled;

Plural number is absorbed body 40, it is arranged between the body of rod 212 of this upper roller group 21 at interval, and preferably be arranged at the position at each etching solution playpipe 30 rear, unnecessary etching solution removed, and its side in the face of sheet material 60 is equipped with plurality of through holes 41 at interval with real-time;

One etching solution circulation pipe 50, its two ends are communicated in the bottom land of this etching bath 10, and are provided with a pump 51, and its middle section position has the necking section 52 that dwindles caliber, and this necking section 52 is communicated in these absorption bodys 40;

One pipeline, it is arranged in this etching bath 10, and is communicated in bottom land and this etching solution playpipe 30 of this etching bath 10, is transported in the etching solution playpipe 30 with the etching solution with its bottom land and utilizes.

The utility model in use, one sheet material 60 is sent in this etching bath 10, cooperating this upper roller group 21 to transport sheet material 60 with this bottom roller group 22 advances towards a direction, this moment, these etching solution playpipes 30 can spray etching solution, after through first etching solution playpipe 30, can slightly form recess in sheet material 60 surfaces, immediately absorbing body 40 via one absorbs the etching solution on sheet material 60 surfaces, then again through second etching solution playpipe 30, pass through another absorption body 40 subsequently, repeatedly process so can be avoided sheet material 60 to be detained the too much etching solutions that reacted and produces the phenomenon of undercut.

Moreover, the etching solution that falls within these etching bath 10 bottom lands can be by being sent in this etching solution circulation pipe 50 through pump 51, and when etching solution during through necking section 52, can be because the caliber of necking section 52 dwindles suddenly, and its flow velocity is accelerated, produce negative pressure, allow absorption body 40 produce the air-flow of 52 directions, and make this absorption body 40 be acted on towards the necking section.

Another preferred embodiment of the utility model, be adjusted into towards absorbing body 40 middle positions the density of absorbing the perforation 41 that body 40 1 sides wear at interval gradually close, when making the etching solution of this absorption body 40 on absorbing sheet material 60, the middle position that can be detained etching solution easily at sheet material 60, strengthen absorbing etching solution, to eliminate " water stagnates " phenomenon, produce the phenomenon of undercut to avoid sheet material 60 central authorities.

Claims

1. sheet material etch processes device mainly is arranged with in an etching bath:

Plural number etching solution playpipe;

2. sheet material etch processes device as claimed in claim 1 is characterized in that, each absorb body down the direction of roller set be equipped with plurality of through holes.

3. sheet material etch processes device as claimed in claim 1 or 2 is characterized in that, each roller set comprises that plural number be arranged in parallel and has a body of rod of plural roller, and these are absorbed bodys and are arranged at intervals between the body of rod of this upper roller group.

4. sheet material etch processes device as claimed in claim 3 is characterized in that, these etching solution playpipes are arranged at the top of this upper roller group and the below of bottom roller group.

5. sheet material etch processes device as claimed in claim 3 is characterized in that these etching solution playpipes are to be set in parallel between the body of rod of these roller set.

6. sheet material etch processes device as claimed in claim 5 is characterized in that, these absorb body is the position that is arranged at each etching solution playpipe rear.

7. sheet material etch processes device as claimed in claim 1 or 2 is characterized in that it also is provided with a pipeline, and it is arranged in this etching bath, and is communicated in bottom land and this etching solution playpipe of this etching bath.

8. sheet material etch processes device as claimed in claim 6 is characterized in that it also is provided with a pipeline, and it is arranged in this etching bath, and is communicated in bottom land and this etching solution playpipe of this etching bath.