CN201183822Y - 薄膜沉积装置 - Google Patents
薄膜沉积装置 Download PDFInfo
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- CN201183822Y CN201183822Y CNU2008200082745U CN200820008274U CN201183822Y CN 201183822 Y CN201183822 Y CN 201183822Y CN U2008200082745 U CNU2008200082745 U CN U2008200082745U CN 200820008274 U CN200820008274 U CN 200820008274U CN 201183822 Y CN201183822 Y CN 201183822Y
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Priority Applications (1)
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CNU2008200082745U CN201183822Y (zh) | 2008-03-14 | 2008-03-14 | 薄膜沉积装置 |
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CNU2008200082745U CN201183822Y (zh) | 2008-03-14 | 2008-03-14 | 薄膜沉积装置 |
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CN201183822Y true CN201183822Y (zh) | 2009-01-21 |
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CNU2008200082745U Expired - Fee Related CN201183822Y (zh) | 2008-03-14 | 2008-03-14 | 薄膜沉积装置 |
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Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101265574B (zh) * | 2008-03-14 | 2010-04-21 | 福建钧石能源有限公司 | 薄膜沉积装置和薄膜沉积方法 |
CN101775591A (zh) * | 2010-03-23 | 2010-07-14 | 福建钧石能源有限公司 | 沉积薄膜的方法 |
CN102021537A (zh) * | 2010-06-11 | 2011-04-20 | 福建钧石能源有限公司 | 薄膜沉积设备 |
CN102185217A (zh) * | 2011-03-04 | 2011-09-14 | 深圳市创益科技发展有限公司 | 用于硅基薄膜电池沉积夹具中射频电源的连接构件及方法 |
CN101845620B (zh) * | 2009-03-27 | 2012-07-18 | 亚洲太阳科技有限公司 | 脉冲加热多匣式化学气相沉积p-i-n镀膜装置 |
CN103140011A (zh) * | 2011-11-30 | 2013-06-05 | 亚树科技股份有限公司 | 直立式电浆产生装置 |
CN103167716A (zh) * | 2011-12-19 | 2013-06-19 | 亚树科技股份有限公司 | 直立式电浆产生装置 |
CN108950515A (zh) * | 2018-06-19 | 2018-12-07 | 上海治臻新能源装备有限公司 | 一种基于pecvd的燃料电池金属极板碳基涂层制备装置 |
CN109957786A (zh) * | 2018-11-16 | 2019-07-02 | 黄剑鸣 | 一种制作hit硅电池的气相沉積装置 |
CN110029328A (zh) * | 2019-05-22 | 2019-07-19 | 上海稷以科技有限公司 | 一种用于提高正反平面沉积均匀性的盒式电极 |
CN110042348A (zh) * | 2019-03-12 | 2019-07-23 | 深圳奥拦科技有限责任公司 | 等离子表面处理装置及方法 |
CN115491660A (zh) * | 2022-10-20 | 2022-12-20 | 深圳市拉普拉斯能源技术有限公司 | 绝缘支撑结构、镀膜装置和沉积装置 |
-
2008
- 2008-03-14 CN CNU2008200082745U patent/CN201183822Y/zh not_active Expired - Fee Related
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101265574B (zh) * | 2008-03-14 | 2010-04-21 | 福建钧石能源有限公司 | 薄膜沉积装置和薄膜沉积方法 |
CN101845620B (zh) * | 2009-03-27 | 2012-07-18 | 亚洲太阳科技有限公司 | 脉冲加热多匣式化学气相沉积p-i-n镀膜装置 |
CN101775591A (zh) * | 2010-03-23 | 2010-07-14 | 福建钧石能源有限公司 | 沉积薄膜的方法 |
CN102021537A (zh) * | 2010-06-11 | 2011-04-20 | 福建钧石能源有限公司 | 薄膜沉积设备 |
CN102185217A (zh) * | 2011-03-04 | 2011-09-14 | 深圳市创益科技发展有限公司 | 用于硅基薄膜电池沉积夹具中射频电源的连接构件及方法 |
CN102185217B (zh) * | 2011-03-04 | 2013-02-06 | 深圳市创益科技发展有限公司 | 用于硅基薄膜电池沉积夹具中射频电源的连接构件及方法 |
CN103140011A (zh) * | 2011-11-30 | 2013-06-05 | 亚树科技股份有限公司 | 直立式电浆产生装置 |
CN103167716A (zh) * | 2011-12-19 | 2013-06-19 | 亚树科技股份有限公司 | 直立式电浆产生装置 |
CN108950515A (zh) * | 2018-06-19 | 2018-12-07 | 上海治臻新能源装备有限公司 | 一种基于pecvd的燃料电池金属极板碳基涂层制备装置 |
CN108950515B (zh) * | 2018-06-19 | 2022-04-05 | 上海治臻新能源股份有限公司 | 一种基于pecvd的燃料电池金属极板碳基涂层制备装置 |
CN109957786A (zh) * | 2018-11-16 | 2019-07-02 | 黄剑鸣 | 一种制作hit硅电池的气相沉積装置 |
CN110042348A (zh) * | 2019-03-12 | 2019-07-23 | 深圳奥拦科技有限责任公司 | 等离子表面处理装置及方法 |
CN110029328A (zh) * | 2019-05-22 | 2019-07-19 | 上海稷以科技有限公司 | 一种用于提高正反平面沉积均匀性的盒式电极 |
CN115491660A (zh) * | 2022-10-20 | 2022-12-20 | 深圳市拉普拉斯能源技术有限公司 | 绝缘支撑结构、镀膜装置和沉积装置 |
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Inventor after: Yang Yusheng Inventor before: Yang Yusheng Inventor before: Zhang Yingchun |
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Free format text: CORRECT: INVENTOR; FROM: YANG YUSHENG; ZHANG YINGCHUN TO: YANG YUSHENG |
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Correction item: Patentee Correct: GS-Solar (Beijing) Company Limited False: Beijing China Mianyang Electronic Technology Co., Ltd. Number: 23 Page: 989 Volume: 25 |
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Effective date of registration: 20111116 Address after: 101204 Beijing city Pinggu District Ma Industrial Park West No. 277 Co-patentee after: Beijing Jingcheng Boyang Optoelectronic Equipment Co.,Ltd. Patentee after: GS-Solar (Beijing) Company Limited Address before: 101204 Beijing city Pinggu District Ma Industrial Park West No. 277 Patentee before: GS-Solar (Beijing) Company Limited |
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