CN201099698Y - Ternary airflow metallorganic chemical vapour deposition equipment reaction cavity - Google Patents
Ternary airflow metallorganic chemical vapour deposition equipment reaction cavity Download PDFInfo
- Publication number
- CN201099698Y CN201099698Y CNU2007200737475U CN200720073747U CN201099698Y CN 201099698 Y CN201099698 Y CN 201099698Y CN U2007200737475 U CNU2007200737475 U CN U2007200737475U CN 200720073747 U CN200720073747 U CN 200720073747U CN 201099698 Y CN201099698 Y CN 201099698Y
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- chamber
- slide glass
- reaction
- reactant gases
- glass dish
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- 238000006243 chemical reaction Methods 0.000 title claims abstract description 48
- 238000005229 chemical vapour deposition Methods 0.000 title description 2
- 239000007789 gas Substances 0.000 claims abstract description 47
- 239000007921 spray Substances 0.000 claims abstract description 27
- 239000000126 substance Substances 0.000 claims abstract description 18
- 238000001816 cooling Methods 0.000 claims abstract description 13
- 229910052751 metal Inorganic materials 0.000 claims abstract description 10
- 239000002184 metal Substances 0.000 claims abstract description 10
- 238000009826 distribution Methods 0.000 claims abstract description 9
- 239000000376 reactant Substances 0.000 claims description 35
- 239000011521 glass Substances 0.000 claims description 23
- 239000000110 cooling liquid Substances 0.000 claims description 12
- 230000008021 deposition Effects 0.000 claims description 9
- 239000007792 gaseous phase Substances 0.000 claims description 8
- 230000001914 calming effect Effects 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 6
- 238000013022 venting Methods 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 4
- 230000006698 induction Effects 0.000 claims description 2
- 239000012495 reaction gas Substances 0.000 abstract description 8
- 238000010992 reflux Methods 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000002245 particle Substances 0.000 abstract description 3
- 230000006835 compression Effects 0.000 abstract 3
- 238000007906 compression Methods 0.000 abstract 3
- 238000004062 sedimentation Methods 0.000 abstract 2
- 238000005406 washing Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010504 bond cleavage reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- Chemical Vapour Deposition (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNU2007200737475U CN201099698Y (en) | 2007-08-17 | 2007-08-17 | Ternary airflow metallorganic chemical vapour deposition equipment reaction cavity |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNU2007200737475U CN201099698Y (en) | 2007-08-17 | 2007-08-17 | Ternary airflow metallorganic chemical vapour deposition equipment reaction cavity |
Publications (1)
Publication Number | Publication Date |
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CN201099698Y true CN201099698Y (en) | 2008-08-13 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CNU2007200737475U Expired - Lifetime CN201099698Y (en) | 2007-08-17 | 2007-08-17 | Ternary airflow metallorganic chemical vapour deposition equipment reaction cavity |
Country Status (1)
Country | Link |
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CN (1) | CN201099698Y (en) |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102001650A (en) * | 2010-12-28 | 2011-04-06 | 上海师范大学 | Method for preparing graphene through chemical vapor deposition under cold cavity wall condition |
CN102021530A (en) * | 2009-09-11 | 2011-04-20 | 甘志银 | Reaction chamber of multiple-gas coupling metal metallorganic chemical vapor deposition equipment |
CN101736307B (en) * | 2008-11-24 | 2012-01-18 | 中芯国际集成电路制造(北京)有限公司 | Plasma vapor deposition method |
CN102766852A (en) * | 2011-05-04 | 2012-11-07 | 广东量晶光电科技有限公司 | MOCVD reactor |
WO2013075390A1 (en) * | 2011-11-23 | 2013-05-30 | Gan Zhiyin | Hydride vapor phase epitaxy device |
CN103320852A (en) * | 2013-06-14 | 2013-09-25 | 光垒光电科技(上海)有限公司 | Reaction cavity used for epitaxial deposition |
CN103320865A (en) * | 2013-06-21 | 2013-09-25 | 光垒光电科技(上海)有限公司 | Shower head and vapor deposition equipment |
CN103603038A (en) * | 2013-12-10 | 2014-02-26 | 吉林大学 | Photo-assisted MOCVD (metal-organic chemical vapor deposition) reactor with horizontal porous spray device |
CN105256369A (en) * | 2015-10-20 | 2016-01-20 | 中国电子科技集团公司第四十八研究所 | High-temperature-resistant horizontal multi-layer gas inlet device for SiC epitaxy |
CN105970188A (en) * | 2016-07-11 | 2016-09-28 | 中山德华芯片技术有限公司 | Gas feeding structure of rotating disc type MOCVD (Metalorganic Chemical Vapor Deposition) reaction chamber |
CN107366014A (en) * | 2016-04-19 | 2017-11-21 | 纽富来科技股份有限公司 | Shower nozzle, epitaxially growing equipment and method of vapor-phase growing |
CN110662858A (en) * | 2017-02-02 | 2020-01-07 | 弗谢沃洛德·弗拉基米罗维奇·龙丁 | Method for feeding gases into a reactor for growing epitaxial structures based on group III metal nitrides, and device for implementing the method |
CN111304594A (en) * | 2020-04-23 | 2020-06-19 | 苏州迈正科技有限公司 | Vacuum device and vacuum coating equipment |
CN115537765A (en) * | 2022-09-27 | 2022-12-30 | 盛吉盛(宁波)半导体科技有限公司 | Plasma chemical vapor deposition device and small-size groove filling method |
CN115537769A (en) * | 2022-12-01 | 2022-12-30 | 浙江晶越半导体有限公司 | Chemical vapor deposition method and reactor for silicon carbide |
-
2007
- 2007-08-17 CN CNU2007200737475U patent/CN201099698Y/en not_active Expired - Lifetime
Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101736307B (en) * | 2008-11-24 | 2012-01-18 | 中芯国际集成电路制造(北京)有限公司 | Plasma vapor deposition method |
CN102021530A (en) * | 2009-09-11 | 2011-04-20 | 甘志银 | Reaction chamber of multiple-gas coupling metal metallorganic chemical vapor deposition equipment |
CN102001650A (en) * | 2010-12-28 | 2011-04-06 | 上海师范大学 | Method for preparing graphene through chemical vapor deposition under cold cavity wall condition |
CN102001650B (en) * | 2010-12-28 | 2013-05-29 | 上海师范大学 | Method for preparing graphene through chemical vapor deposition under cold cavity wall condition |
CN102766852A (en) * | 2011-05-04 | 2012-11-07 | 广东量晶光电科技有限公司 | MOCVD reactor |
WO2013075390A1 (en) * | 2011-11-23 | 2013-05-30 | Gan Zhiyin | Hydride vapor phase epitaxy device |
CN103320852A (en) * | 2013-06-14 | 2013-09-25 | 光垒光电科技(上海)有限公司 | Reaction cavity used for epitaxial deposition |
CN103320865A (en) * | 2013-06-21 | 2013-09-25 | 光垒光电科技(上海)有限公司 | Shower head and vapor deposition equipment |
CN103603038B (en) * | 2013-12-10 | 2016-06-22 | 吉林大学 | There is the light auxiliary MOCVD reactor of horizontal porous spray equipment |
CN103603038A (en) * | 2013-12-10 | 2014-02-26 | 吉林大学 | Photo-assisted MOCVD (metal-organic chemical vapor deposition) reactor with horizontal porous spray device |
CN105256369A (en) * | 2015-10-20 | 2016-01-20 | 中国电子科技集团公司第四十八研究所 | High-temperature-resistant horizontal multi-layer gas inlet device for SiC epitaxy |
CN107366014A (en) * | 2016-04-19 | 2017-11-21 | 纽富来科技股份有限公司 | Shower nozzle, epitaxially growing equipment and method of vapor-phase growing |
US10920317B2 (en) | 2016-04-19 | 2021-02-16 | Nuflare Technology, Inc. | Shower head, vapor phase growth apparatus and vapor phase growth method |
CN107366014B (en) * | 2016-04-19 | 2022-05-27 | 纽富来科技股份有限公司 | Shower head, vapor phase growth apparatus, and vapor phase growth method |
CN105970188A (en) * | 2016-07-11 | 2016-09-28 | 中山德华芯片技术有限公司 | Gas feeding structure of rotating disc type MOCVD (Metalorganic Chemical Vapor Deposition) reaction chamber |
CN110662858A (en) * | 2017-02-02 | 2020-01-07 | 弗谢沃洛德·弗拉基米罗维奇·龙丁 | Method for feeding gases into a reactor for growing epitaxial structures based on group III metal nitrides, and device for implementing the method |
CN110662858B (en) * | 2017-02-02 | 2021-10-08 | 弗谢沃洛德·弗拉基米罗维奇·龙丁 | Method for supplying gases to grow epitaxial structures based on group III metal nitrides |
CN111304594A (en) * | 2020-04-23 | 2020-06-19 | 苏州迈正科技有限公司 | Vacuum device and vacuum coating equipment |
CN115537765A (en) * | 2022-09-27 | 2022-12-30 | 盛吉盛(宁波)半导体科技有限公司 | Plasma chemical vapor deposition device and small-size groove filling method |
CN115537769A (en) * | 2022-12-01 | 2022-12-30 | 浙江晶越半导体有限公司 | Chemical vapor deposition method and reactor for silicon carbide |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: GUANGDONG ZHAOXIN SEMICONDUCTOR EQUIPMENT MANUFACT Free format text: FORMER OWNER: GAN ZHIYIN Effective date: 20091023 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20091023 Address after: Guangdong province Foshan City Nanhai Pingzhou Shawei Industrial Avenue South West of the first floor of building C building, zip code: 528251 Patentee after: Guangdong RealFaith Semiconductor Equipment Co., Ltd. Address before: Hubei city of Wuhan province Luo Yu Road, No. 1037 Wuhan National Laboratory for optoelectronics Huazhong University of Science and Technology F101, zip code: 430074 Patentee before: Gan Zhiyin |
|
CX01 | Expiry of patent term |
Granted publication date: 20080813 |
|
CX01 | Expiry of patent term |