CN201094136Y

CN201094136Y - Box door with anti-separating structure standard mechanical interface wafer box

Info

Publication number: CN201094136Y
Application number: CNU2007201835988U
Authority: CN
Inventors: 陈祈雅
Original assignee: HAORUI CO Ltd
Current assignee: HAORUI CO Ltd
Priority date: 2007-10-26
Filing date: 2007-10-26
Publication date: 2008-07-30
Anticipated expiration: 2017-10-26

Abstract

The utility model relates to a box gate of a standard mechanical interface wafer box with an anti-separation structure, and the box gate is used for clamping a wafer box. The box gate comprises a base, a clamping part and a prepressing mechanism, wherein, the clamping part is arranged on the base and can move relative to the base to extend through an opening at one side of the base or shrink in an opening at the side of the base, and the clamping part is used for clamping a clamping structure of the wafer box. The prepressing mechanism is arranged on the base and is connected with the clamping part to provide the clamping part with a pre-determined pressure, thus, the clamping part is enabled to extend out of the opening at the side of the base. The box gate can prevent the wafer box from separating the box gate to achieve the effect of wafer protection in the wafer box.

Description

The box door of the SMIF wafer case of the anti-isolating construction of tool

Technical field

The utility model is especially prevented the box door of the SMIF wafer case of isolating construction about a kind of box door of SMIF wafer case about a kind of tool.

Background technology

Wafer transports from manufacturing to, all needs to carry out under airtight dustless condition.At SMIF (Standard Mechanical Interface, SMIF) in the wafer factory, wafer case is playing the part of that wafer stores and transmitting function, and the high clean environment of putting of wafer is provided simultaneously, is not subjected to the particle contamination of external environment to guarantee wafer in the manufacturing process.

The SMIF wafer case must be used with box door (Pod Door), and the box door is equivalent to base, and must can with wafer case buckle and disengaging, to transport wafer and loaded with wafers.

The traditional box door and the buckle mode of wafer case are the grooves that the pin pushing tow of box door is come out to withhold wafer case, and the pin of box door is in the permanent retraction box door under general situation, damage this pin to avoid the wafer case collision.Yet this design that makes the permanent retraction box of pin door can't be guaranteed certain buckle state of box door and wafer case wafer case to be dropped in the process of transporting, and makes that the wafer that much is placed in is wherein damaged, and it is higher to lose cost.

The utility model content

Therefore; a purpose of the present utility model provides the box door of the SMIF wafer case of the anti-isolating construction of a kind of tool; it is a kind of box door of SMIF wafer case, can prevent that wafer case from separating with the box door and reach the effect of the wafer of protection in the wafer case.

For reaching above-mentioned purpose, the utility model provides the box door of the SMIF wafer case of the anti-isolating construction of a kind of tool, and it is in order to buckle one wafer case.The box door comprises a base, a clamping part and a precompressed mechanism.Clamping part is installed on the base, and can move with respect to base, and the opening of the side of an opening of a side of protuberate basic unit or retraction base.Clamping part is in order to a buckle structure of buckle wafer case.Precompressed mechanism is installed on the base, and is connected to clamping part, to provide a predetermined pressure to clamping part, makes the opening of the side of clamping part protuberate basic unit.

According to such scheme, the utility model is significant with respect to the effect of prior art: the utility model is a kind of box door of SMIF wafer case, can prevent that wafer case from separating with the box door and reach the effect of the wafer of protection in the wafer case.

Description of drawings

Fig. 1 is that the tool of the utility model preferred embodiment is prevented the SMIF wafer case of isolating construction and the assembling schematic diagram of box door.

Fig. 2 is that the tool of the utility model preferred embodiment is prevented the SMIF wafer case of isolating construction and the decomposing schematic representation one of box door.

Fig. 3 is that the tool of the utility model preferred embodiment is prevented the SMIF wafer case of isolating construction and the decomposing schematic representation two of box door.

Fig. 4 is the schematic top plan view one of cam of the box door of the utility model preferred embodiment.

Fig. 5 is the schematic top plan view two of cam of the box door of the utility model preferred embodiment.

Fig. 6 is the partial schematic diagram according to the application of the clamping part of the automatic retraction function of having of another embodiment of the utility model.

The main element symbol description

1: the box door

2: wafer case

2A: buckle structure

3: wafer

4: wafer carrier

10: base

11: the side

12: opening

20: clamping part

21: pin

22: guide ramp

30: precompressed mechanism

40: cam

41: the back side

42: power is connected hole slot

43: the front

44: ring-type profile hole slot

45: lock solid structure

50: locked mechanism

Embodiment

For foregoing of the present utility model can be become apparent, preferred embodiment cited below particularly, and cooperate appended graphicly, be described in detail below.

Fig. 1 to 3 shows the SMIF wafer case of the anti-isolating construction of the tool of the utility model preferred embodiment and assembling schematic diagram, decomposing schematic representation one and the decomposing schematic representation two of box door respectively.As shown in Figures 1 to 3, the box door 1 of the SMIF wafer case of the anti-isolating construction of the tool of present embodiment is in order to buckle one wafer case 2.Wafer case 2 usefulness can be cleaned wafer 3 for putting a plurality of wafers 3 in wafer case 2.On implementing, carry a plurality of wafers 3 in the wafer carrier 4, then, wafer carrier 4 is placed on the box door 1, again wafer case 2 is put box door 1.Box door 1 comprises a base 10, a clamping part 20 and a precompressed mechanism 30.

Clamping part 20 is installed on the base 10, and can move with respect to base 10, and the opening 12 of the side 11 of an opening 12 of a side 11 of protuberate basic unit 10 or retraction base 10.Clamping part 20 is in order to a buckle structure 2A of buckle wafer case 2.In this, buckle structure 2A is a buckle groove.

Precompressed mechanism 30 is installed on the base 10, and is connected to clamping part 20, to provide a predetermined pressure to clamping part 20, makes the opening 12 of the side 11 of clamping part 20 protuberate basic units 10.Precompressed mechanism 30 can be compression spring, an extension spring or a torsion spring.In present embodiment, be to be that example explains with the extension spring.

In addition, the box door 1 of present embodiment can also comprise a cam 40, and it is rotatably installed on the base 10, and contacts with clamping part 20, cam 40 can be rotated and impose a resistance and give clamping part 20, makes in the opening 12 of side 11 of clamping part 20 retraction bases 10.

Moreover the box door 1 of present embodiment can also comprise a locked mechanism 50, and it is installed on the base 10, and locked mechanism 50 produces outside the opening of doing in order to the side 11 that clamping part 20 locked into protuberate basic unit 10 12.Locked mechanism 50 can be that an electromagnetically operated valve or other have the mechanism of breech lock ability.In in the case, cam 40 is rotated a predetermined angular, makes locked mechanism 50 generation effects, breaks away to prevent box door 1 and wafer case 2.

Can be formed with two power on one back side 41 of cam 40 and be connected hole slot 42, be formed with a ring-type profile hole slot 44 on the front 43 of cam 40 and contact with clamping part 20.It is in order to be connected with a power source (being motor for example) that power is connected hole slot 42, power source can come rotating cam 40 in order to see through power linking hole slot 42, so that clamping part 20 stretches out outside the opening 12 or in the retraction opening 12, reaches the effect that makes box door 1 and wafer case 2 combine or break away from.

One pin, 21 contacts of clamping part 20 by the rotation of cam 40, can make pin 21 move horizontally, and then clamping part 20 is moved horizontally at the ring-type profile hole slot 44 of cam 40.

The schematic top plan view of the cam of the box door of Fig. 4 and 5 demonstration the utility model preferred embodiments.As shown in Figure 4, ring-type profile hole slot 44 can more be formed with a lock solid structure 45, and lock solid structure 45 produces outside the opening of doing in order to the side 11 that clamping part 20 locked into protuberate basic unit 10 12.In present embodiment, lock solid structure 45 is a depressed part.Similarly, cam 40 is rotated a predetermined angular, makes lock solid structure 45 generation effects; just selling 21 falls in the depressed part; clamping part 20 is more deeply belonged among the buckle structure 2A of buckle groove, can prevent that more box door 1 and wafer case 2 break away from, and reach the effect of protection wafer.

Fig. 6 shows the partial schematic diagram according to the application of the clamping part of the automatic retraction function of having of another embodiment of the utility model.Damage in order further to avoid clamping part 20 to be clashed into, clamping part 20 can be designed to have a guide ramp 22, in order to the opening 12 of retraction side 11 when being depressed by wafer case 2.When clamping part 20 corresponded to the buckle structure 2A that belongs to the buckle groove by the time, clamping part 20 was understood the opening 12 of the precompressed mechanism 30 release sides 11 that be belonged to spring again and is withheld with buckle structure 2A.Therefore, the situation that present embodiment can avoid wafer case to break away from the box door in handling process, the misoperation when avoiding wafer case to combine with the box door simultaneously hurts the clamping part of box door.

The specific embodiment that is proposed in the detailed description of preferred embodiment is only in order to convenient explanation technology contents of the present utility model, but not with the utility model narrow sense be limited to the foregoing description, under the situation that does not exceed spirit of the present utility model and claim scope, the many variations of being done is implemented, and all belongs to scope of the present utility model.

Claims

1. a tool is prevented the box door of the SMIF wafer case of isolating construction,, it is characterized in that this box door comprises in order to buckle one wafer case:

One base;

One clamping part, it is installed on this base, and can move with respect to this base and stretch out this opening of this side of the opening of a side of this base or this base of retraction, and this clamping part is in order to a buckle structure of this wafer case of buckle; And

One precompressed mechanism, it is installed on this base, and is connected to this clamping part, to provide a predetermined pressure to this clamping part, makes this clamping part stretch out this opening of this side of this base.

2. the box door of the SMIF wafer case of the anti-isolating construction of tool as claimed in claim 1 is characterized in that, this precompressed mechanism is compression spring, an extension spring or a torsion spring.

3. the box door of the SMIF wafer case of the anti-isolating construction of tool as claimed in claim 1 is characterized in that, more comprises:

One cam, it is rotatably installed on this base, and contacts with this clamping part, and this cam can be rotated and impose a resistance and give this clamping part, makes in this opening of this side of this this base of clamping part retraction.

4. the box door of the SMIF wafer case of the anti-isolating construction of tool as claimed in claim 3 is characterized in that, more comprises:

One locked mechanism, it is installed on this base, outside this opening of this side that this locked mechanism generation locking action becomes to stretch out this base so that this clamping part is locked.

5. the box door of the SMIF wafer case of the anti-isolating construction of tool as claimed in claim 4 is characterized in that this cam is rotated a predetermined angular, makes this locked mechanism produce locking action.

6. the box door of the SMIF wafer case of the anti-isolating construction of tool as claimed in claim 3, it is characterized in that, be formed with two power on one back side of this cam and be connected hole slot, be formed with a ring-type profile hole slot on the front of this cam and contact with this clamping part.

7. the box door of the SMIF wafer case of the anti-isolating construction of tool as claimed in claim 6, it is characterized in that, this ring-type profile hole slot more is formed with a lock solid structure, outside this opening of this side that this lock solid structure generation locking action becomes to stretch out this base so that this clamping part is locked.

8. the box door of the SMIF wafer case of the anti-isolating construction of tool as claimed in claim 7 is characterized in that this cam is rotated a predetermined angular, makes this lock solid structure produce locking action.

9. the box door of the SMIF wafer case of the anti-isolating construction of tool as claimed in claim 1 is characterized in that this clamping part has a guide ramp, in order to this opening of this side of retraction when being depressed by this wafer case.

10. the box door of the SMIF wafer case of the anti-isolating construction of tool as claimed in claim 8, it is characterized in that, described lock solid structure is a depressed part, clamping part is provided with a pin, clamping part is in contact with it by the ring-type profile hole slot that this pin is resisted against cam, and is fallen into by this pin and to reach locking condition in the depressed part.