CN201084718Y - Detection system of IC strip laser marking machine - Google Patents

Detection system of IC strip laser marking machine Download PDF

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Publication number
CN201084718Y
CN201084718Y CNU2007201760426U CN200720176042U CN201084718Y CN 201084718 Y CN201084718 Y CN 201084718Y CN U2007201760426 U CNU2007201760426 U CN U2007201760426U CN 200720176042 U CN200720176042 U CN 200720176042U CN 201084718 Y CN201084718 Y CN 201084718Y
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CN
China
Prior art keywords
detection
probe
mark
support
bar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNU2007201760426U
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Chinese (zh)
Inventor
林宜龙
陈有章
唐召来
张松岭
斐小听
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Grand Technology Shenzhen Co Ltd
Original Assignee
Grand Technology Shenzhen Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Grand Technology Shenzhen Co Ltd filed Critical Grand Technology Shenzhen Co Ltd
Priority to CNU2007201760426U priority Critical patent/CN201084718Y/en
Application granted granted Critical
Publication of CN201084718Y publication Critical patent/CN201084718Y/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model relates to a detection system of an IC strip laser marking machine detection system arranged on a conveying line of strip conveying guide rails, which comprises a direction detection device, a batch number detection device, a marking position detection device and a marking quality detection device. The utility model is characterized in that the direction detection device is arranged on one side of a rear guide rail of the strip conveying guide rails; the batch number detection device is arranged on one side of a front guide rail of the strip conveying guide rails; the marking position detection device is arranged on one side and below the rear of the strip conveying guide rails; the marking quality detection device is arranged one side of a rear guide rail of the strip conveying guide rails; the detection system comprising the four detection devices can detect the whole processes before, during and after the marking in an all-round way, so manual detection for certain procedures is not needed. Therefore, the utility model has the advantages of greatly improving work efficiency, reducing work intensity of workers, and ensuring detection precision.

Description

The detection system of IC material strip laser mark printing machine
Technical field
The utility model relates to a kind of laser marker for fully automatic IC material bar, more precisely, relate to the material bar on conveying in the course of conveying to its travel direction detect, lot number detects, the detection system of a kind of laser marker for fully automatic IC material bar of mark position probing and mark quality testing.
Background technology
The mark machine is widely used in the surperficial mark of the integrated circuit of IC industry.According to the difference of instructions for use, the surface-mounted integrated circuit that the IC industry is used has material bar (combined chip) or chip (piece die clip) and three kinds of forms of wafer.The material bar is the plate that is combined by plurality of chips, during to each chip marking on the material bar, is directly to realize automatic mark by the material conveying bar.Chip is the less piece bulk goods of size, is to be placed in the track pallet, by the conveying of track pallet being realized the automatic mark of chip.Wafer is a very thin disk directly having made polylith (grain) chip thereon, need carry out mark to the back side of each piece (grain) chip on it on monoblock wafer thin slice.
Enter the material bar of conveying from feeding box, will expect that before mark direction that whether bar puts back detects and the batch number detection of this material bar; When mark, to detect the position of chip on the material bar on one side, according to the position detected offer PC and control the laser marking head of laser marking machine chip carried out mark on one side; The target quality of also will fighting each other after mark is finished detects, and has only the up-to-standard material bar of mark just to allow to push lower feed box and deposits.The present most of laser marking machines that use, the part of above-mentioned test item is only arranged or test item also is not set, some projects need manual detection to finish, this detection method not only inefficiency, labour intensity is big, and detection accuracy is difficult to guarantee, production efficient and quality all are a greater impact.
The utility model content
The purpose of this utility model is to make inefficiency, the deficiency that labour intensity is big at what existing mark machine existed owing to carrying out manual detection, and a kind of detection system of the novel I C material strip laser mark printing machine that is combined by multiple checkout gear is provided.
The technical solution of the utility model is: a kind of detection system of IC material strip laser mark printing machine, be arranged on the conveying circuit of material bar conveying, comprise direction detection device, the batch number checkout gear, the mark position detecting device, the mark quality detection device, direction detection device is arranged at rear rail one side of material bar conveying, the batch number checkout gear is arranged at fromer rail one side of material bar conveying, the mark position detecting device is arranged at rear rail one side of material bar conveying and thereunder, and the mark quality detection device is arranged at rear rail one side of material bar conveying.
Preferably, described direction detection device comprises support, is arranged on the probe of support and the photophore under the probe.Described support is provided with one and adjusts groove, and the end of probe slidably is arranged in the sliding tray.
Preferably, described batch number checkout gear comprises support and the probe and the photophore that are arranged on the support, photophore be positioned at probe under, support is provided with one and adjusts groove, the end of probe and photophore slidably is arranged on to be adjusted in the groove.
Preferably, described mark position detecting device comprises a support, is arranged on the ball screw transmission on the support, and is installed in the servomotor in the ball screw transmission; Probe and photophore are installed in the ball screw transmission, and photophore be positioned at probe directly over.
Preferably, described mark quality detection device comprises support, is arranged on the ball screw transmission on the support, and is installed in the servomotor in the ball screw transmission; Probe and photophore are installed in the ball screw transmission, and photophore be positioned at probe under.
The beneficial effects of the utility model are: by four detection systems that checkout gear constituted can to before the mark, up to standard in, whole process after the mark comprehensively detects, need not again some step to be carried out manual detection, thereby improved operating efficiency greatly, reduced workman's working strength, the precision of Jian Ceing also can be guaranteed simultaneously.
Description of drawings
Fig. 1 is the structural representation of the utility model specific embodiment;
Fig. 2 is the direction detection device structural representation of the utility model specific embodiment;
Fig. 3 is the batch number checkout gear structural representation of the utility model specific embodiment;
Fig. 4 is the mark position detecting device structural representation of the utility model specific embodiment;
Fig. 5 is the mark quality detection device structural representation of the utility model specific embodiment.
Embodiment
As Fig. 1 to specific embodiment of the utility model shown in Figure 5, a kind of detection system of IC material strip laser mark printing machine, be arranged on the conveying circuit of material bar conveying, comprise direction detection device 1, batch number checkout gear 2, mark position detecting device 3, mark quality detection device 4, direction detection device 1 is arranged at rear rail one side of material bar conveying, batch number checkout gear 2 is arranged at fromer rail one side of material bar conveying, mark position detecting device 3 is arranged at rear rail one side of material bar conveying and thereunder, and mark quality detection device 4 is arranged at rear rail one side of material bar conveying.Described direction detection device 1 comprises support 13, is arranged on the probe 11 of support 13 and the photophore 12 under the probe 11.Described support 13 is provided with one and adjusts groove 14, and the end of probe 11 slidably is arranged in the sliding tray 14.Described batch number checkout gear 2 comprises support 22 and the probe 23 and the photophore 24 that are arranged on the support 22, photophore 24 be positioned at probe 23 under, support 22 is provided with one and adjusts groove 21, and the end of probe 23 and photophore 24 slidably is arranged on to be adjusted in the groove 21.Described mark position detecting device 3 comprises a support 34, is arranged on the ball screw transmission 35 on the support, and is installed in the servomotor 31 in the ball screw transmission 35; Probe 33 and photophore 32 are installed in the ball screw transmission 35, and photophore 32 be positioned at probe 33 directly over.Described mark quality detection device 4 comprises support 44, is arranged on the ball screw transmission 45 on the support 44, and is installed in the servomotor 41 in the ball screw transmission 45; Probe 42 and photophore 43 are installed in the ball screw transmission 45, and photophore 43 be positioned at probe 42 under.
During work, when the material bar is transported to first position block location on conveying, direction detection device 1 starts according to the instruction of PC, photophore 12 gives on upwards irradiation of probe 11 from the material bar, when the material bar place in the right direction the time, probe 11 can receive the light beam that photophore 12 sees through from material bar side breach, then this material bar information in the right direction under the system log (SYSLOG), can not receive the light beam that photophore sees through as if probe 11, then the true information of this material bar poor direction under the system log (SYSLOG); First position block descends afterwards, and conveying device will expect that bar is transported to location, the second position block place; If it is qualified that material bar direction detects, then batch number checkout gear 2 starts, the photophore 24 of lot number checkout gear 2 illuminates material bar batch number, it is on record that probe 23 is passed to system log (SYSLOG) with batch number, if it is defective that aforesaid material bar direction detects, then batch number checkout gear 2 does not start, but directly start material bar device for eliminating the underproof material bar of direction is rejected away.
After lot number detects and finishes, second position block descends, after conveying device will expect that bar is transported to the 3rd position block location, mark position detecting device 3 starts, probe 33 on it is from bottom to top facing to material bar below, under the ball screw transmission 35 of mark position detecting device 3 drives, by the light of photophore 32 the material bar is carried out the scanning of mark position, scanning result is offered PC one by one remove to control the labelling head of laser marking machine each chip marking of material bar.
After mark is finished, the 3rd position block descends, after conveying device will expect that bar is transported to the 4th position block location, mark quality detection device 4 starts, probe 42 on it, carries out the mark mass scanning by the illumination of photophore 43 to the material bar and detects under the ball screw transmission 45 of mark quality detection device 4 drives from top to bottom facing to the material bar, scanning result is offered PC one by one compare analysis, judge whether the mark quality of material bar is qualified.If mark is up-to-standard, then the 4th position block descends, and the material bar is pushed to send in the lower feed box to be deposited; If mark is off quality, then the 4th position block does not descend, and material bar device for eliminating should be rejected away by defective material bar under PC control.
Carry out so repeatedly, carry out various detections one by one, to guarantee that the material bar that transfers out from the conveying terminal all is the accept bar with regard to the material bar that can will be conveyed into conveying device.

Claims (7)

1. the detection system of an IC material strip laser mark printing machine, be arranged on the conveying circuit of material bar conveying, it is characterized in that: comprise direction detection device (1), batch number checkout gear (2), mark position detecting device (3), mark quality detection device (4), direction detection device (1) is arranged at rear rail one side of material bar conveying, batch number checkout gear (2) is arranged at fromer rail one side of material bar conveying, mark position detecting device (3) is arranged at rear rail one side of material bar conveying and thereunder, and mark quality detection device (4) is arranged at rear rail one side of material bar conveying.
2. the detection system of IC material strip laser mark printing machine as claimed in claim 1 is characterized in that: described direction detection device (1) comprises support (13), is arranged on the probe (11) of support (13) and the photophore (12) under the probe (11).
3. the detection system of IC material strip laser mark printing machine as claimed in claim 2 is characterized in that: described support (13) is provided with one and adjusts groove (14), and the end of probe (11) slidably is arranged in the sliding tray (14).
4. the detection system of IC material strip laser mark printing machine as claimed in claim 1, it is characterized in that: described batch number checkout gear (2) comprises support (22) and is arranged on probe (23) and photophore (24) on the support (22), photophore (24) be positioned at probe (23) under.
5. the detection system of IC material strip laser mark printing machine as claimed in claim 4 is characterized in that: support (22) is provided with one and adjusts groove (21), and the end of probe (23) and photophore (24) slidably is arranged on to be adjusted in the groove (21).
6. the detection system of IC material strip laser mark printing machine as claimed in claim 1, it is characterized in that: described mark position detecting device (3) comprises a support (34), is arranged on the ball screw transmission (35) on the support, and is installed in the servomotor (31) in the ball screw transmission (35); Probe (33) and photophore (32) are installed in the ball screw transmission (35), and photophore (32) be positioned at probe (33) directly over.
7. the detection system of IC material strip laser mark printing machine as claimed in claim 1, it is characterized in that: described mark quality detection device (4) comprises support (44), is arranged on the ball screw transmission (45) on the support (44), and is installed in the servomotor (41) in the ball screw transmission (45); Probe (42) and photophore (43) are installed in the ball screw transmission (45), and photophore (43) be positioned at probe (42) under.
CNU2007201760426U 2007-09-20 2007-09-20 Detection system of IC strip laser marking machine Expired - Fee Related CN201084718Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNU2007201760426U CN201084718Y (en) 2007-09-20 2007-09-20 Detection system of IC strip laser marking machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNU2007201760426U CN201084718Y (en) 2007-09-20 2007-09-20 Detection system of IC strip laser marking machine

Publications (1)

Publication Number Publication Date
CN201084718Y true CN201084718Y (en) 2008-07-09

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ID=39627190

Family Applications (1)

Application Number Title Priority Date Filing Date
CNU2007201760426U Expired - Fee Related CN201084718Y (en) 2007-09-20 2007-09-20 Detection system of IC strip laser marking machine

Country Status (1)

Country Link
CN (1) CN201084718Y (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102229287A (en) * 2011-05-02 2011-11-02 苏州工业园区高登威科技有限公司 Self-checking marking apparatus with observation windows
CN102310658A (en) * 2010-06-29 2012-01-11 吴华 Marker for integrated circuit packaged chip
CN107052586A (en) * 2017-04-14 2017-08-18 东莞市启天自动化设备股份有限公司 A kind of silicon chip laser marking machine and method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102310658A (en) * 2010-06-29 2012-01-11 吴华 Marker for integrated circuit packaged chip
CN102229287A (en) * 2011-05-02 2011-11-02 苏州工业园区高登威科技有限公司 Self-checking marking apparatus with observation windows
CN107052586A (en) * 2017-04-14 2017-08-18 东莞市启天自动化设备股份有限公司 A kind of silicon chip laser marking machine and method
CN107052586B (en) * 2017-04-14 2019-07-12 东莞市启天自动化设备股份有限公司 A kind of silicon wafer laser marking machine

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GR01 Patent grant
C14 Grant of patent or utility model
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20080709

Termination date: 20120920

C17 Cessation of patent right