CN201083763Y - Multipurpose type resistance-adjusting test probe - Google Patents

Multipurpose type resistance-adjusting test probe Download PDF

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Publication number
CN201083763Y
CN201083763Y CNU2007200388525U CN200720038852U CN201083763Y CN 201083763 Y CN201083763 Y CN 201083763Y CN U2007200388525 U CNU2007200388525 U CN U2007200388525U CN 200720038852 U CN200720038852 U CN 200720038852U CN 201083763 Y CN201083763 Y CN 201083763Y
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CN
China
Prior art keywords
probe
utility
model
matrix
resistance trimming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNU2007200388525U
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Chinese (zh)
Inventor
张学忠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUZHOU HEP LASER EQUIPMENT DEVELOPMENT Co Ltd
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SUZHOU HEP LASER EQUIPMENT DEVELOPMENT Co Ltd
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Application filed by SUZHOU HEP LASER EQUIPMENT DEVELOPMENT Co Ltd filed Critical SUZHOU HEP LASER EQUIPMENT DEVELOPMENT Co Ltd
Priority to CNU2007200388525U priority Critical patent/CN201083763Y/en
Application granted granted Critical
Publication of CN201083763Y publication Critical patent/CN201083763Y/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses a multipurpose resistance trimming test probe, comprising a probe head and a basal body; the utility model is characterized in that an insulation connecting body has one end connected with the probe head and the other end connected with a movable end of a height fine turning mechanism arranged on the basal body; the bottom part of the basal body is fixedly provided with a magnet. The utility model is adsorbed on a probe plate by the magnetic performance and can move relative to the probe plate, thereby the utility model has the advantages of having good space degree of freedom regulating performance, being flexibly and repeatedly used, saving the amount of the probes while testing different chips and saving costs of manufacturers; moreover, the height fine turning mechanism in the utility model can effectively prevent the probe head from being damaged when the probe head contacts the moving chip and prolonging the service life of the probe.

Description

Many with formula resistance trimming test probe
Technical field
The utility model relates to a kind of laser resistor trimming test probe, specifically be a kind of can effectively regulate spatial degrees of freedom so that use repeatedly flexibly many with formula resistance trimming test probes.
Background technology
In the process of laser resistor trimming, the measurement of waiting to carve resistance is one of key element of the last resistance trimming precision of decision, and wherein, the setting of test probe is particularly important, and its often constraint of tested person probe self structure.With the present blade type probe that generally adopts is example, and its structure mainly comprises rigidly connected probe and blade body (matrix); Using method is that basis waits to carve resistance at on-chip location positioning probe card earlier, makes perforate correspondence resistance region to be carved on it; Then a pair of tool setting chip probe is welded on the probe card, guarantees that probe is communicated with the indicator lead-in wire of testing tool; Testing needle termination on the last probe touches two measuring junction electrodes waiting to carve resistance, thus the measurement that realization waits to carve resistance.
There is following shortcoming in this probe structure mode:
1. because probe and blade body are rigidly connected fixingly, lack fine motion and buffering, if like this in the process of mobile substrate the probe rising height usually cause the testing needle termination of fragility to be broken inadequately; Make that the life-span of this class probe is shorter.
Since test probe weldering extremely on probe card, can't be movable relatively; To regulate its spatial degrees of freedom, also can only act on probe card by testing apparatus; Yet this indirect regulation effect is limited after all, also lacks precision; Moreover the system that such probe card and test probe on it constitute often can only be accurate corresponding with a kind of substrate; If changed resistance substrate to be carved, because it goes up resistance quantity and lines changes, still can only adopt the probe card that welds test probe again, extremely inconvenience.
3. owing to the use inconvenience of 2 described existing test probes, this just causes in the process of changing the substrate resistance measurement, and the new probe card of frequent employing need consume a large amount of test probes, has improved producer's cost undoubtedly.
Summary of the invention
The utility model purpose is: provide a kind of magnetic to be adsorbed on the probe card, can effectively regulate spatial degrees of freedom so that the formula resistance trimming test probes of using that use repeatedly flexibly more with respect to the probe card activity.
The technical solution of the utility model is: a kind of many with formula resistance trimming test probe, comprise probe and matrix; It is characterized in that insulation connector one end is connected with probe, the other end is connected with the movable end of height micro-adjusting mechanism on being arranged on matrix; The matrix bottom is magnetic patch fixedly.
The same with prior art, described probe connects the indicator lead-in wire of testing tool, signal can be passed to testing tool during the electrode contacts of the termination that guarantees testing needle on the contact substrate resistance.Concrete form as for probe can be present existing structure, also can adopt following preferred form: be made up of testing needle, pin fixed block, electric waveguide plate and at least two contact screws; Have the hole with number such as contact screw on the described pin fixed block, the hole is embedded in swivel nut, and the tail end of testing needle crosses swivel nut and fixes; Contact screw runs through folded mutually successively electric waveguide plate, insulation connector and pin fixed block and swivel nut and connects.During practical operation, the indicator wire bonds of testing tool is on electric conductor, and the transmission of crossing the testing needle connection realization signal of swivel nut through contact screw together.This needle head structure is simple and firmly durable.
Described height micro-adjusting mechanism can be to adopt more spring pressure bar in the existing height fine setting technology, also can adopt following preferred form: comprise spring leaf, briquetting and height adjusting screw; On matrix, the other end is that movable end connects the insulation connector to spring leaf one end by briquetting and screw retention; The height adjusting screw connects briquetting and props up spring leaf.Simple in structure and the stable performance of this class height micro-adjusting mechanism.
The material of general probe plate is irony or similar magnetic conductive metal at present, and the utility model can be adsorbed on the probe card by the fixing magnetic patch in matrix bottom like this.During actual the use, carve on-chip resistance quantity and position according to waiting, absorption is many on probe card just can realize measuring to this probe.When changing substrate, only need on probe card, to arrange again or simply increase and decrease this probe to get final product.
The utility model advantage is:
1. how to be adsorbed on the probe card by magnetic patch owing to the utility model, so can be according to waiting that carving resistance freely changes on any direction of all around of probe card at on-chip diverse location, arranges flexibly with formula resistance trimming test probe; If mistake also only needs to take off test probe from probe card, reappose; So it is have very high spatial degrees of freedom adjusting function, and easy to use.
2. because the utility model uses the formula resistance trimming test probe can flexible repeatedly use more, so the test job that some these test probes and a probe card just can be competent at multiple different resistance substrate only need be prepared by resistance manufacturer, has saved cost greatly.
3. because how the utility model is provided with height adjustment mechanism with formula resistance trimming test probe, can carry out the height of testing needle termination freely finely tuning, provide certain vertically to buffer distance, the situation that effectively prevents the termination from contacting the substrate in moving and broken takes place, and has improved the mission life of test probe.
Description of drawings
Below in conjunction with drawings and Examples the utility model is further described:
Fig. 1 is the utility model structural representation.
Fig. 2 is a part assembling synoptic diagram of the present utility model.
Fig. 3 is a user mode synoptic diagram of the present utility model.
Wherein: 1, matrix 2, insulation connector; 3, magnetic patch; 4; Testing needle; 5, pin fixed block; 6, electric waveguide plate; 7, contact screw 8, swivel nut 9, spring leaf; 10, briquetting 11, height adjusting screw 12, probe card 13, indicator lead-in wire.
Embodiment
Embodiment: Fig. 1, the structural representation that Figure 2 shows that the utility model one specific embodiment and part assembling synoptic diagram thereof.Contrast is schemed as can be known, and how this mainly is made of probe, matrix 1, insulation connector 2, height adjustment mechanism and magnetic patch 3 with formula resistance trimming test probe; Wherein probe is made up of testing needle 4, pin fixed block 5, electric waveguide plate 6 and two contact screws 7; Have the hole with contact screw 7 numbers such as grade on the described pin fixed block 5, the hole is embedded in swivel nut 8, and it is fixing that the tail end of testing needle 4 crosses swivel nut 8; Contact screw 7 runs through folded mutually successively electric waveguide plate 6, insulation connector 2 one ends and pin fixed block 5 and connects with swivel nut 8.Described height micro-adjusting mechanism comprises spring leaf 9, briquetting 10 and height adjusting screw 11; On matrix 1, the other end is the other end that movable end connects insulation connector 2 to spring leaf 9 one ends by briquetting 10 and screw retention, and connected mode also is a screw retention; Height adjusting screw 11 connects briquetting 10 and props up spring leaf 9.Matrix 1 bottom is magnetic patch 3 fixedly.Present embodiment screws off height adjusting screw 11 its pressure sizes to spring leaf 9 of control by screwing on, and then the rising height of fine setting testing needle 4 terminations.The probe in the present embodiment and the structure of height adjustment mechanism are all simple firm.
When present embodiment uses, as shown in Figure 3, carve resistance at on-chip location positioning probe card 12 according to waiting, make perforate correspondence resistance region to be carved on it, then paired present embodiment is adsorbed on the probe card 12 by the fixing magnetic patch 3 in its matrix 1 bottom, make the termination of the testing needle 4 on the probe touch two measuring junction electrodes waiting to carve resistance, thereby realize the measurement of waiting to carve resistance.The indicator lead-in wire 13 of welding testing tool on the electric waveguide plate 6 on the probe; Because contact screw 7 contact with testing needle 4 in electric waveguide plate 6 and the swivel nut 8 simultaneously, so signal can be passed to testing tool during the electrode contacts of the termination that has guaranteed testing needle 4 on contacting substrate resistance.
Present embodiment can be pulled flexible collocation with at present general magnetic conductivity probe and use, and is easy to use.For common substrate resistance, only need about 20 present embodiment test probe just can finish resistance test work, saved the production cost of producer greatly.

Claims (5)

1. use formula resistance trimming test probe one kind more, comprise probe and matrix (1), it is characterized in that: also comprise an insulation connector (2), one end of insulation connector (2) is connected with probe, the other end is connected with the movable end of height micro-adjusting mechanism on being arranged on matrix (1), and the bottom of matrix (1) is magnetic patch (3) fixedly.
2. according to claim 1 many with formula resistance trimming test probe, it is characterized in that: described probe comprises testing needle (4), pin fixed block (5), electric waveguide plate (6) and at least two contact screws (7), have hole on the described pin fixed block (5) with contact screw numbers such as (7), the hole is embedded in swivel nut (8), and it is fixing that the tail end of testing needle (4) crosses swivel nut (8); Contact screw (7) runs through folded mutually successively electric waveguide plate (6), insulation connector (2) and pin fixed block (5) and connects with swivel nut (8).
3. according to claim 2 many with formula resistance trimming test probe, it is characterized in that: the quantity of described contact screw (7) is two.
4. according to claim 1, the 2 or 3 described formula resistance trimming test probes of using, it is characterized in that: described height micro-adjusting mechanism comprises spring leaf (9), briquetting (10) and height adjusting screw (11) more; On matrix (1), the other end is that movable end connects insulation connector (2) by screw retention for spring leaf (9) one ends and briquetting (10); Height adjusting screw (11) connects briquetting (10) and props up spring leaf (9).
5. according to claim 1, the 2 or 3 described formula resistance trimming test probes of using, it is characterized in that: described height micro-adjusting mechanism is a spring pressure bar more.
CNU2007200388525U 2007-06-21 2007-06-21 Multipurpose type resistance-adjusting test probe Expired - Fee Related CN201083763Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNU2007200388525U CN201083763Y (en) 2007-06-21 2007-06-21 Multipurpose type resistance-adjusting test probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNU2007200388525U CN201083763Y (en) 2007-06-21 2007-06-21 Multipurpose type resistance-adjusting test probe

Publications (1)

Publication Number Publication Date
CN201083763Y true CN201083763Y (en) 2008-07-09

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103048566A (en) * 2012-12-20 2013-04-17 北京国网富达科技发展有限责任公司 Intelligent high-voltage magnetic measuring pen and intelligent insulator detection equipment
CN105044406A (en) * 2015-08-28 2015-11-11 东莞市天元通金属科技有限公司 Current probe
CN105403826A (en) * 2016-01-04 2016-03-16 京东方科技集团股份有限公司 Test tool
CN105738670A (en) * 2014-12-16 2016-07-06 特克特朗尼克公司 Magnetic probe cable anchor with metal marker bands
CN105988069A (en) * 2015-01-29 2016-10-05 山东华光光电子股份有限公司 Testing and aging device of semiconductor laser and usage method
CN108562766A (en) * 2018-03-15 2018-09-21 昆山精讯电子技术有限公司 Chip testing crimp head and its probe mechanism
CN111913014A (en) * 2020-08-26 2020-11-10 重庆渝微电子技术研究院有限公司 Universal electric cold and hot table

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103048566A (en) * 2012-12-20 2013-04-17 北京国网富达科技发展有限责任公司 Intelligent high-voltage magnetic measuring pen and intelligent insulator detection equipment
CN103048566B (en) * 2012-12-20 2015-08-19 北京国网富达科技发展有限责任公司 High-voltage intelligent magnetic meter pen and insulator intelligent detection equipment
CN105738670A (en) * 2014-12-16 2016-07-06 特克特朗尼克公司 Magnetic probe cable anchor with metal marker bands
CN105988069A (en) * 2015-01-29 2016-10-05 山东华光光电子股份有限公司 Testing and aging device of semiconductor laser and usage method
CN105044406A (en) * 2015-08-28 2015-11-11 东莞市天元通金属科技有限公司 Current probe
CN105403826A (en) * 2016-01-04 2016-03-16 京东方科技集团股份有限公司 Test tool
US10209272B2 (en) 2016-01-04 2019-02-19 Boe Technology Group Co., Ltd. Testing device
CN105403826B (en) * 2016-01-04 2019-02-22 京东方科技集团股份有限公司 A kind of test fixture
CN108562766A (en) * 2018-03-15 2018-09-21 昆山精讯电子技术有限公司 Chip testing crimp head and its probe mechanism
CN111913014A (en) * 2020-08-26 2020-11-10 重庆渝微电子技术研究院有限公司 Universal electric cold and hot table

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C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20080709

Termination date: 20100621