CN201075382Y - Wafer direction detecting apparatus of wafer back face marking machine - Google Patents
Wafer direction detecting apparatus of wafer back face marking machine Download PDFInfo
- Publication number
- CN201075382Y CN201075382Y CNU2007201513772U CN200720151377U CN201075382Y CN 201075382 Y CN201075382 Y CN 201075382Y CN U2007201513772 U CNU2007201513772 U CN U2007201513772U CN 200720151377 U CN200720151377 U CN 200720151377U CN 201075382 Y CN201075382 Y CN 201075382Y
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- wafer
- direction detection
- connecting plate
- detection system
- marking machine
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- Expired - Fee Related
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to a wafer direction detection device of a wafer backside marking machine, which comprises a wafer rotary table device, a direction detection sensor and a direction detection system. The wafer rotary table device is provided with a rotary table, and the direction detection sensor is also arranged on the wafer rotary table device and stays at the edge of the rotary table; the direction detection system comprises a stepping motor and a camera interconnected with the stepping motor, and the rotary table is arranged below the camera. Due to the dual direction detection of the direction detection sensor and the direction detection system, the accuracy of the wafer direction sent to a wafer marking platform by a manipulator can be ensured, and the marking quality is greatly improved.
Description
Technical field
The utility model relates to IC wafer marking device, especially a kind of wafer direction detection device that is arranged on the mark machine.
Background technology
The mark machine is widely used in the surperficial mark of the integrated circuit of IC industry.According to the difference of instructions for use, the surface-mounted integrated circuit that the IC industry is used has material bar, chip and three kinds of forms of wafer.The material bar is the plate that is combined by plurality of chips, during to each chip marking on the material bar, is directly to realize automatic mark by the material conveying bar.Chip is the less piece bulk goods of size, is to be placed in the track pallet, by the conveying of track pallet being realized the automatic mark of chip.Wafer is a very thin disk directly having made the polylith chip thereon, and diameter is about 200～300mm, need carry out mark in the back side to each chip block on it on monoblock wafer thin slice.
In the right direction in order to guarantee the wafer of delivering on the wafer mark platform, need before sending into, wafer determine a direction, direction will be memorized by manipulator and mark platform after determining, manipulator will accurately be put into orientation really on the wafer mark platform to the wafer of having determined direction.Whether wafer side is accurate to detecting, and is directly connected to the quality of wafer mark.The wafer side of the wafer rear marking machine that uses is comparatively rough to detecting at present, has only used the one-level direction to detect, and the detection orientation accuracy is not high, causes mark of low quality.
The utility model content
The purpose of this utility model is that the detection accuracy that exists at existing direction detection device is low, and the deficiency that mark is of low quality provides a kind of wafer direction detection device that can carry out the wafer rear marking machine of high Precision Detection.
The technical solution of the utility model is: a kind of wafer direction detection device of wafer rear marking machine, comprise wafer rotating-table apparatus, direction detection sensor and direction detection system, have a rotating disk on the wafer rotating-table apparatus, direction detection sensor also is installed on the wafer rotating-table apparatus, and is positioned at the edge of rotating disk; The direction detection system comprises a stepping motor and one and the joining camera of stepping motor, and rotating disk is positioned at the below of camera.
Preferably, described direction detection system comprises a base, be equipped with on the base by two cradling pieces and the support that the cradling piece connecting plate constitutes, the head of support is connected with mounting panel, stepping motor and the ball screw transmission device that is attached thereto are arranged on the mounting panel, the ball body part of ball screw transmission links to each other with the ball body connecting plate, and video camera links to each other successively with video camera mounting panel, adjustment plate, right-angle connecting plate, ball body connecting plate and ball screw transmission.
Preferably, described right-angle connecting plate is provided with a lifting plate, and the lifting plate is curved a right angle, and an end is installed on the right-angle connecting plate, and the other end links to each other with an end of the holder chain on frame top.
The beneficial effects of the utility model are: because successively the dual direction by direction detection sensor and direction detection system detects, can guarantee that therefore manipulator delivers to wafer side on the wafer mark platform to accurate, the mark quality improves greatly.
Description of drawings
Fig. 1 is the location diagram of the utility model specific embodiment and manipulator;
Fig. 2 is the structural representation of the utility model specific embodiment direction detection system;
Fig. 3 is the decomposition texture schematic diagram of the utility model specific embodiment direction detection system.
Embodiment
Specific embodiment of the utility model as shown in Figure 1 to Figure 3, a kind of wafer direction detection device of wafer rear marking machine, comprise wafer rotating-table apparatus 15, direction detection sensor 16 and direction detection system 14, have a rotating disk on the wafer rotating-table apparatus 15, direction detection sensor 16 also is installed on the wafer rotating-table apparatus 15, and is positioned at the edge of rotating disk; Direction detection system 14 comprises a stepping motor 3 and one and stepping motor 3 joining cameras 9, and rotating disk is positioned at the below of camera 9.Described direction detection system 14 comprises a base 4, be equipped with on the base 4 by two cradling pieces 1 and the support that cradling piece connecting plate 2 constitutes, the head of support is connected with mounting panel 11, stepping motor 3 and the ball screw transmission 10 that is attached thereto are arranged on the mounting panel 11, the ball body part of ball screw transmission 10, it is the nut on the ball screw, link to each other with ball body connecting plate 17, video camera 9 links to each other successively with video camera mounting panel 8, adjustment plate 7, right-angle connecting plate 6, ball body connecting plate 17 and ball screw transmission 10.Described right-angle connecting plate 6 is provided with a lifting plate 5, lifting plate 5 is curved a right angle, one end is installed on the right-angle connecting plate 6, the other end links to each other with an end of the holder chain 12 on frame top, when video camera moves around, the associated lead on it will realize following the tracks of with the holder chain and move by the lifting plate.
During work, when manipulator 13 obtain can the order of grasping silicon wafer after, manipulator 13 removes to take out in the wafer grid hopper of feeding box device a wafer immediately, the part that manipulator contacts with wafer is provided with partial vacuum and inhales the hole, wafer steadily can be held, deliver on the rotating disk of the wafer rotating-table apparatus 15 relevant with the wafer direction detection device, rotating disk drives wafer and rotates, after the direction of wafer detects detecting sensor 16 that breach (or certification mark) is set at wafer rotating-table apparatus one side and detects, can allow the rotating disk of rotating-table apparatus 15 slow down immediately to rotate and notify party is started working to detection system 14.
The stepping motor 3 of direction detection system 14 drives video cameras 9 scanning that moves around by ball screw transmission 10, with the accurate direction of definite wafer.After direction was determined, rotating disk stopped operating; The video camera 9 of direction detection system 14 is got back to original position, prepares once more the wafer travel direction of sending here to be detected.Afterwards, the direction that manipulator 13 is determined according to direction detection system 14 grasping silicon wafer from the rotating disk is delivered to wafer on the wafer mark platform by the gate mouth, returns the original place afterwards and awaits orders.
Claims (3)
1. the wafer direction detection device of a wafer rear marking machine, it is characterized in that: comprise wafer rotating-table apparatus (15), direction detection sensor (16) and direction detection system (14), have a rotating disk on the wafer rotating-table apparatus (15), direction detection sensor (16) also is installed on the wafer rotating-table apparatus (15), and is positioned at the edge of rotating disk; Direction detection system (14) comprises a stepping motor (3) and one and the joining camera of stepping motor (3) (9), and rotating disk is positioned at the below of camera (9).
2. the wafer direction detection device of wafer rear marking machine as claimed in claim 1, it is characterized in that: described direction detection system (14) comprises a base (4), the support that is made of two cradling pieces (1) and a cradling piece connecting plate (2) is installed on the base (4), the head of support is connected with mounting panel (11), stepping motor (3) and the ball screw transmission (10) that is attached thereto are arranged on the mounting panel (11), the ball body part of ball screw transmission (10), it is the nut on the ball screw, link to each other video camera (9) and video camera mounting panel (8) with ball body connecting plate (17), adjust plate (7), right-angle connecting plate (6), ball body connecting plate (17) and ball screw transmission (10) link to each other successively.
3. the wafer direction detection device of wafer rear marking machine as claimed in claim 2, it is characterized in that: described right-angle connecting plate (6) is provided with a lifting plate (5), lifting plate (5) is curved a right angle, one end is installed on the right-angle connecting plate (6), and the other end links to each other with an end of the holder chain (12) on frame top.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007201513772U CN201075382Y (en) | 2007-07-12 | 2007-07-12 | Wafer direction detecting apparatus of wafer back face marking machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007201513772U CN201075382Y (en) | 2007-07-12 | 2007-07-12 | Wafer direction detecting apparatus of wafer back face marking machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201075382Y true CN201075382Y (en) | 2008-06-18 |
Family
ID=39520640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007201513772U Expired - Fee Related CN201075382Y (en) | 2007-07-12 | 2007-07-12 | Wafer direction detecting apparatus of wafer back face marking machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201075382Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102490494A (en) * | 2011-12-22 | 2012-06-13 | 南通富士通微电子股份有限公司 | Reverse marking prevention device of laser marking equipment |
-
2007
- 2007-07-12 CN CNU2007201513772U patent/CN201075382Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102490494A (en) * | 2011-12-22 | 2012-06-13 | 南通富士通微电子股份有限公司 | Reverse marking prevention device of laser marking equipment |
| CN102490494B (en) * | 2011-12-22 | 2014-11-12 | 南通富士通微电子股份有限公司 | Reverse marking prevention device of laser marking equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080618 Termination date: 20110712 |