CN102490494B - Reverse marking prevention device of laser marking equipment - Google Patents

Reverse marking prevention device of laser marking equipment Download PDF

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Publication number
CN102490494B
CN102490494B CN201110434082.7A CN201110434082A CN102490494B CN 102490494 B CN102490494 B CN 102490494B CN 201110434082 A CN201110434082 A CN 201110434082A CN 102490494 B CN102490494 B CN 102490494B
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China
Prior art keywords
correlation sensor
prevention device
slide block
reverse
marking
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CN201110434082.7A
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Chinese (zh)
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CN102490494A (en
Inventor
夏存华
秦爱国
朱夕伟
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Tongfu Microelectronics Co Ltd
Original Assignee
Nantong Fujitsu Microelectronics Co Ltd
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Priority to CN201110434082.7A priority Critical patent/CN102490494B/en
Publication of CN102490494A publication Critical patent/CN102490494A/en
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Abstract

The invention relates to a reverse marking prevention device of laser marking equipment. The reverse marking prevention device comprises a preventing pin mechanism and a correlation sensor direction detection mechanism. As compared with the prior art, the reverse marking prevention device of the laser marking equipment provided by the invention has the advantages that: the preventing pin mechanism and the correlation sensor direction detection mechanism are designed by utilizing the self characteristics of a T0247 product; and the reverse marking prevention device has the characteristics of simple and compact structure, no space occupied and stability in operation, is low in cost , greatly improve product quality and in particular solves the reverse marking problem of T0247 laser marking.

Description

Reverse marking prevention device of laser marking equipment
Technical field
The present invention relates to semiconductor technology, relate in particular to reverse marking prevention device of laser marking equipment.
Background technology
In semiconductor packaging process process, product must detect by travel direction before laser marking.
Current direction detection device does not have any effect to T0247 product, affects product quality.
Summary of the invention
The technical problem that the present invention solves is: realize a kind of simple in structure, cost economy, can two-wayly prevent that laser marking from beating anti-reverse marking prevention device of laser marking equipment.
For solving the problems of the technologies described above, the invention provides reverse marking prevention device of laser marking equipment, it is characterized in that, described reverse marking prevention device of laser marking equipment comprises prevention pin mechanism and correlation sensor orientation testing agency;
Described prevention pin mechanism comprises stop piece, PVC probe, slide block connector, cylinder, cylinder fixed support, slide block, Fibre Optical Sensor, cylinder is arranged on cylinder fixed support, slide block connector is fixed on cylinder by double nut, stop piece is fixed by screws on slide block connector, slide block is fixed on cylinder fixed support and slide block connector, is provided with Fibre Optical Sensor and PVC probe on stop piece;
Described correlation sensor orientation testing agency comprises one group of correlation sensor, correlation sensor stand, and correlation sensor is fixed by screws on correlation sensor stand.
Optionally, described PVC probe is inserted in stop piece and with screw and fixes.
Optionally, also comprise warning device, in the time that product puts back, product contacts with PVC probe, and product is offset 2mm distance backward, and correlation sensor detects that product is abnormal, and warning device sender is to the normal alarm of anteiso-and stop.
Optionally, correlation sensor orientation testing agency also comprises vertical and horizontal travel mechanism, realizes laterally, longitudinally detects.
The application's technique effect is:
Compared with prior art, the application's reverse marking prevention device of laser marking equipment, for the design feature of T0247 product itself, special design prevention pin mechanism and correlation sensor orientation testing agency, have simple and compact for structure, do not take up space, stable feature, and with low cost, greatly improve product quality, solve especially T0247 laser marking and beaten indirect problem.
Brief description of the drawings
Fig. 1 be in the embodiment of the present application reverse marking prevention device of laser marking equipment disassemble schematic diagram.
Fig. 2 is T0247 product schematic diagram in the embodiment of the present application.
Fig. 3 is the correct injection schematic diagram of T0247 product and partial view in the embodiment of the present application.
Fig. 4 is the anti-injection schematic diagram of the T0247 line of production and partial view in the embodiment of the present application.
Fig. 5 stops pin mechanism schematic diagram in the embodiment of the present application.
Fig. 6 is correlation sensor orientation testing agency schematic diagram in the embodiment of the present application.
Detailed description of the invention
A lot of details in following examples, are recorded so that fully understand the present invention, but the present invention can also implement with a lot of alternate manners different from this details, and those skilled in the art can do similar popularization without prejudice to intension of the present invention in the situation that, therefore the present invention is also not exclusively subject to the restriction of following record disclosed detailed description of the invention.
Secondly, the present invention utilizes schematic diagram to be described in detail, and in the time that the embodiment of the present invention is described in detail in detail, for ease of explanation, described schematic diagram is example, and it should not limit the scope of protection of the invention at this.
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in detail.
As shown in Figure 1, reverse marking prevention device of laser marking equipment provided by the invention, is characterized in that, described reverse marking prevention device of laser marking equipment comprises prevention pin mechanism and correlation sensor orientation testing agency.
Described prevention pin mechanism comprises stop piece 1, PVC probe 3, slide block connector 7, cylinder 8, cylinder fixed support 11, slide block 12, Fibre Optical Sensor 13, stop piece 1 is fixed on slide block connector 7 by the screw of two M3, slide block 12 is arranged on cylinder fixed support 11 and slide block connector 7, cylinder 8 is threaded connection part 16 and is arranged on cylinder fixed support 11, cylinder 8 is fixed by two nuts 9 with slide block connector 7, on cylinder 8, comprise gas path pipe interface 10, Fibre Optical Sensor 13 is arranged on stop piece 1, PVC probe 3 inserts stop piece 1 and is fixed by the screw 5 of M3.
Described correlation sensor orientation testing agency comprises one group of correlation sensor 15, correlation sensor stand 14, and correlation sensor 15 is fixed on correlation sensor stand on 14 by the screw of M2.
Fig. 2 is T0247 product schematic diagram in the embodiment of the present application.
Fig. 3 is the correct injection schematic diagram of T0247 product and partial view in the embodiment of the present application.
Also comprise the positioning guiding structure 4 and 6 that grips respectively product 2 both sides.
As shown in Fig. 4, Fig. 5, Fig. 6, in the time that product 2 puts back, product 2 contacts with PVC probe 3, and product 2 is offset 2mm distance backward, and correlation sensor 15 detects product 2 malpositions, and warning device sends reverse abnormal alarm and points out and stop.
Wherein, the diameter dimension of PVC probe 3 is less than breach default in product 2, and the material of PVC probe 3 can not make the problems such as the plastic-sealed body generation of product 2 is damaged, scuffing.
The above is preferred embodiment of the present invention, but the present invention is not defined in this.Any those skilled in the art, not departing from the scope of spirit of the present invention and essence, various changes and the amendment made, all should be covered by among protection scope of the present invention.

Claims (3)

1. reverse marking prevention device of laser marking equipment, is characterized in that, described reverse marking prevention device of laser marking equipment comprises prevention pin mechanism and correlation sensor orientation testing agency;
Described prevention pin mechanism comprises stop piece, PVC probe, slide block connector, cylinder, cylinder fixed support, slide block, Fibre Optical Sensor, cylinder is arranged on cylinder fixed support, slide block connector is fixed on cylinder by double nut, stop piece is fixed by screws on slide block connector, slide block is fixed on cylinder fixed support and slide block connector, is provided with Fibre Optical Sensor and PVC probe on stop piece;
Described correlation sensor orientation testing agency comprises one group of correlation sensor, correlation sensor stand, and correlation sensor is fixed by screws on correlation sensor stand;
Also comprise warning device, in the time that product puts back, product contacts with PVC probe, and product is offset 2mm distance backward, and correlation sensor detects that product is abnormal, and warning device sender is to the normal alarm of anteiso-and stop mark.
2. reverse marking prevention device of laser marking equipment as claimed in claim 1, is characterized in that: described PVC probe is inserted in stop piece and with screw to be fixed.
3. reverse marking prevention device of laser marking equipment as claimed in claim 1, is characterized in that: correlation sensor orientation testing agency also comprises vertical and horizontal travel mechanism, realizes laterally, longitudinally detects.
CN201110434082.7A 2011-12-22 2011-12-22 Reverse marking prevention device of laser marking equipment Active CN102490494B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201110434082.7A CN102490494B (en) 2011-12-22 2011-12-22 Reverse marking prevention device of laser marking equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201110434082.7A CN102490494B (en) 2011-12-22 2011-12-22 Reverse marking prevention device of laser marking equipment

Publications (2)

Publication Number Publication Date
CN102490494A CN102490494A (en) 2012-06-13
CN102490494B true CN102490494B (en) 2014-11-12

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101127301A (en) * 2007-09-20 2008-02-20 格兰达技术(深圳)有限公司 Laser marker for fully automatic IC material bar
CN201075382Y (en) * 2007-07-12 2008-06-18 格兰达技术(深圳)有限公司 Wafer direction detecting apparatus of wafer back face marking machine
CN201449997U (en) * 2009-06-30 2010-05-05 佛山市联动科技实业有限公司 Full automatic ic marking machine
CN101722738A (en) * 2009-11-20 2010-06-09 格兰达技术(深圳)有限公司 Marking method of material strips and compact type full-automatic IC (integrated circuit) material strip laser marking machine
CN201601114U (en) * 2009-12-10 2010-10-06 南通华达微电子集团有限公司 Printing anti-reversing device of semiconductor packaging product
CN102141746A (en) * 2010-02-01 2011-08-03 上海康比利仪表有限公司 Instrument dial printer
CN202378440U (en) * 2011-12-22 2012-08-15 南通富士通微电子股份有限公司 Anti-reversion device for laser marking equipment

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61230020A (en) * 1985-04-04 1986-10-14 Oki Electric Ind Co Ltd Device for positioning package
JP5000944B2 (en) * 2006-08-02 2012-08-15 株式会社ディスコ Alignment method for laser processing equipment
JP4482598B2 (en) * 2008-08-08 2010-06-16 株式会社新川 BONDING DEVICE, BONDING DEVICE CORRECTION AMOUNT CALCULATION METHOD, AND BONDING METHOD
JP5324231B2 (en) * 2009-01-08 2013-10-23 日東電工株式会社 Semiconductor wafer alignment system

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201075382Y (en) * 2007-07-12 2008-06-18 格兰达技术(深圳)有限公司 Wafer direction detecting apparatus of wafer back face marking machine
CN101127301A (en) * 2007-09-20 2008-02-20 格兰达技术(深圳)有限公司 Laser marker for fully automatic IC material bar
CN201449997U (en) * 2009-06-30 2010-05-05 佛山市联动科技实业有限公司 Full automatic ic marking machine
CN101722738A (en) * 2009-11-20 2010-06-09 格兰达技术(深圳)有限公司 Marking method of material strips and compact type full-automatic IC (integrated circuit) material strip laser marking machine
CN201601114U (en) * 2009-12-10 2010-10-06 南通华达微电子集团有限公司 Printing anti-reversing device of semiconductor packaging product
CN102141746A (en) * 2010-02-01 2011-08-03 上海康比利仪表有限公司 Instrument dial printer
CN202378440U (en) * 2011-12-22 2012-08-15 南通富士通微电子股份有限公司 Anti-reversion device for laser marking equipment

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Address after: 226006 Jiangsu Province, Nantong City Chongchuan District Chongchuan Road No. 288

Patentee after: Tongfu Microelectronics Co., Ltd.

Address before: 226006 Jiangsu Province, Nantong City Chongchuan District Chongchuan Road No. 288

Patentee before: Fujitsu Microelectronics Co., Ltd., Nantong