CN201017021Y - Test mechanism - Google Patents
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- CN201017021Y CN201017021Y CN 200720000725 CN200720000725U CN201017021Y CN 201017021 Y CN201017021 Y CN 201017021Y CN 200720000725 CN200720000725 CN 200720000725 CN 200720000725 U CN200720000725 U CN 200720000725U CN 201017021 Y CN201017021 Y CN 201017021Y
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Abstract
The utility model relates to a testing mechanism and comprises a fixing unit, a moving unit and a test seat, which are under the fixing unit. The fixing unit is provided with a containing room and a buffer element in the containing room. The moving unit is provided with at least an embedded part, which moves along a first direction and one end of which is arranged in the containing room via an axle. The test seat is under the moving unit, connected with the embedded part, and provided with a top surface, a bottom surface opposite to the top surface, and an embedding hole arranged at the bottom surface to absorb a testing tool. The utility model makes use of the buffer element in the containing room. In addition, a buffer room is formed between the top surface of the test seat and the embedded part to provide an axial buffer displacement stroke when the measuring mechanism moves downwards to form the IC to be tested by pressing, so the case that the IC wafer is damaged as too large a pressing force is used can be avoided. Moreover, a sliding unit works with an arc hole of a connecting unit to make the test seat produce radial swaying at the appropriate moment, so the test seat can align with the IC to be tested smoothly and correctly and a single testing unit can test a plurality of IC wafers simultaneously to promote the testing efficiency.
Description
Technical field
The utility model relates to a kind of mechanism for testing, particularly relate to a kind of in order to detect the IC wafer, can prevent that mechanism for testing is because of the breakage of the excessive IC of the causing wafer of the power of exerting pressure, and can be steadily and correctly produce the contraposition effect with IC to be measured, realize that single test cell can test the IC wafer effect of many groups simultaneously and can promote the mechanism for testing of testing efficiency.
Background technology
Make afterwards good whether corrupt in order to detect the IC wafer, and to the wafer processing of being classified after the test, the dealer can utilize an IC testing sorter to carry out testing classification at present, IC testing sorter in the past mainly is earlier IC to be measured to be moved to one to treat in the examination district, utilize a test arm (test hand) with vacuum suction ability again, one test cell (measuring head) is adsorbed and be compressed on this IC to be measured, make the pin of IC to be measured produce electrically connect with the socket of this test cell, and then whether the correlation function that detects the IC wafer is normally errorless, and the IC wafer of test after finishing can controlling via a control module under, according to good product, the classification of defective products, utilize this test arm or a conveying mechanism to move, and store the storing in the district of correspondence, in order to the carrying out of next processing procedure.
But, because this test cell is just can reach the detection effect in the mode that presses IC, and the compacting power of this test cell depends on the stroke that moves down of this test arm fully, so, do not have under the situation of buffering at this test cell and IC contact position to be measured, if the displacement stroke of this test arm has error slightly, often make easily that the compacting power of test cell is excessive and make the wafer breakage, so operating personnel are the displacement stroke of the adjustment test arm of necessary extreme care before use, and dissimilar or batch the IC wafer just again adjustment once also cause the puzzlement in the use.
In addition, existing in the past IC testing classification mechanism is quite slow on the efficient of operation, main cause is that this test cell only can detect single IC wafer, if desire increases its testing efficiency, can only by the socket quantity that increases test cell come in response to, but under the development trend along with the microminiaturization of IC wafer, the socket of this test cell must be simultaneously accurately with most IC contrapositions, otherwise detect the operation except possibly reaching correct contraposition, also can be because of offset between the two, and cause IC wafer breakage after the compacting.
This shows that above-mentioned existing mechanism for testing obviously still has inconvenience and defective, and demands urgently further being improved in structure and use.In order to solve the problem of above-mentioned existence, relevant manufacturer there's no one who doesn't or isn't seeks solution painstakingly, but do not see always that for a long time suitable design finished by development, and common product does not have appropriate structure to address the above problem, this obviously is the problem that the anxious desire of relevant dealer solves.Therefore how to found a kind of novel mechanism for testing, real one of the current important research and development problem that belongs to, also becoming the current industry utmost point needs improved target.
Because the defective that above-mentioned existing mechanism for testing exists, the design people is based on being engaged in this type of product design manufacturing abundant for many years practical experience and professional knowledge, and the utilization of cooperation scientific principle, actively studied innovation, in the hope of founding a kind of novel mechanism for testing, can improve general existing mechanism for testing, make it have more practicality.Through constantly research, design, and, create the utility model that has practical value finally through after studying sample and improvement repeatedly.
Summary of the invention
The purpose of this utility model is, overcome the defective that existing mechanism for testing exists, and provide a kind of novel mechanism for testing, technical matters to be solved is it can be solved in the past do not have buffering between the test cell and IC to be measured, cause wafer to be suppressed back breakage easily, and the shortcoming of both precisely contrapositions, displacement stroke adjustment inconvenience, thereby be suitable for practicality more.
The purpose of this utility model and to solve its technical matters be to adopt following technical scheme to realize.According to a kind of mechanism for testing that the utility model proposes, can accept facility a control module driving and determinand moved to a test section carry out testing classification, this mechanism for testing comprises: a fixed cell, be connected on this control module, have an accommodation space and and be arranged on the interior buffer element of this accommodation space; One active unit, have at least one can be movable along a first direction and embedding that an end axle is located in this accommodation space draw part; And a test bench, be positioned at this active unit below and draw part and link with this embedding, have an end face, a bottom surface in contrast to this end face, and at least one is arranged at the hole of setting of this bottom surface, in order to adsorb a measurement jig.
The purpose of this utility model and solve its technical matters and can also be able to be further achieved by the following technical measures.
Aforesaid mechanism for testing, wherein said buffer element are with the resilient material shape of laminating.
Aforesaid mechanism for testing, wherein said fixed cell have more the air admission hole of this accommodation space of connection, can be pumped into this accommodation space for extraneous pressure fluid, impel this buffer element can keep surface tension.
Aforesaid mechanism for testing, wherein said fixed cell are to be formed by a upper casing spare and lower shell butt joint, and the internal face after this upper and lower shell spare is involutory is the accommodation space that constitutes this closed, and makes this buffer element be folded between this upper shell, the lower shell.
Aforesaid mechanism for testing, wherein said fixed cell have more the plural number lock and establish element, and it is after placing this lower shell and this buffer element that these locks are established element, and lock is established into this upper casing spare again.
Aforesaid mechanism for testing, wherein said active unit have more one and are located in the accommodation space and draw the affixed sliding seat of part with embedding, and this sliding seat is corresponding to this buffer element.
Aforesaid mechanism for testing, wherein said fixed cell have more a guide pillar that is installed in this accommodation space, and this sliding seat is to offering a guide hole by guide pillar.
Aforesaid mechanism for testing, wherein said active unit have more and at least onely extend down and the protruding butt platform that exposes outside this accommodation space from this sliding seat bottom.
Aforesaid mechanism for testing, the embedding of wherein said active unit draw a big footpath section and the path section that part includes reverse setting.
Aforesaid mechanism for testing, it more includes a connection unit that is arranged between this test bench of this active unit, this connection unit has an end face, one and the chute of the reverse bottom surface of this end face, this top of at least one perforation, bottom surface, and the big footpath Duan Keshen that makes this embedding draw part is located in this chute and does not have the anxiety of deviating from.
Aforesaid mechanism for testing, wherein said connection unit have more and at least onely are installed in this chute and cover the sliding sleeve that part is drawn in this embedding.
Aforesaid mechanism for testing, the aperture of wherein said sliding sleeve perforate are the external diameters that draws the big footpath of part section less than this embedding.
Aforesaid mechanism for testing, wherein said connection unit has more a plurality of arcuate sockets of offering along a second direction, and a plurality of these arcuate sockets and locks of placing establish into the bolt in this test bench, make this test bench can along the length direction of this arcuate socket and relatively this connection unit produce radially swing.
Aforesaid mechanism for testing, it more includes a plurality of sliding units that are installed between this test bench one end face and this connection unit bottom surface, and makes and be formed with a gap between this test bench and this connection unit.
Aforesaid mechanism for testing, wherein said sliding unit are ball bearing.
Aforesaid mechanism for testing, wherein said test bench have more a plurality of corresponding respectively these gas ports of setting the hole and can be connected.
Aforesaid mechanism for testing, it more includes a pedestal that is fixed between this control module and this fixed cell.
Aforesaid mechanism for testing, wherein said pedestal have two mounting parts that lay respectively at short side, in order to hang on the below of this control module.
The utility model compared with prior art has tangible advantage and beneficial effect.Via as can be known above, in order to achieve the above object, the utility model proposes a kind of test cell that can provide in the buffer displacement stroke of compacting during IC to be measured, and both can reach the mechanism for testing of accurate contraposition.This mechanism for testing can accept facility a control module driving and determinand moved to a test section carry out testing classification, and this mechanism for testing includes a fixed cell, an active unit and a test bench.
This fixed cell is connected on this control module, has an accommodation space and and is arranged on the interior buffer element of this accommodation space.
This active unit has a pair of sliding seat that should buffer element, and at least one affixed this sliding seat and can draw part along the embedding of a first direction activity.
This test bench is positioned at this active unit below and draws part with this embedding and is connected, and has an end face, a bottom surface in contrast to this end face, and at least one hole of setting that is arranged at this bottom surface, in order to adsorb a measurement jig.
In addition, this mechanism for testing more includes the connection unit between this active unit and this test bench, this connection unit has an end face, one and the reverse bottom surface of this end face, this top of at least one perforation, bottom surface and draw part for this embedding and stretch the chute of establishing in it, the bottom that makes this embedding draw part can be stretched and is located at the anxiety that this chute is interior and nothing is deviate from, and the bottom surface of this connection unit and this embedding are drawn between the bottom of part, form to be provided with a surge chamber.
By technique scheme, the utility model mechanism for testing has following advantage at least:
1, uses the utility model mechanism for testing and utilize the interior buffer element of accommodation space, add that test bench end face and embedding draw formed surge chamber between the part, the axial buffer displacement stroke of mechanism for testing when moving down compacting IC to be measured is provided, can prevent that mechanism for testing is excessive because of the power of exerting pressure, cause the damaged situation of IC wafer.
2, the utility model can produce the axial buffer displacement except test bench, can also be by the arrange in pairs or groups arcuate socket of connection unit of sliding unit, make the generation radial beat that whole test bench can be in good time, can steadily and correctly produce the contraposition effect with IC to be measured, realize that single test cell can test the effect of many group IC wafers simultaneously, and can promote testing efficiency.
In sum, the utility model is relevant a kind of mechanism for testing, include a fixed cell, one is positioned at the active unit and a test bench of this fixed cell below, this fixed cell has an accommodation space and and is located at the interior buffer element of this accommodation space, this active unit have at least one can be movable along a first direction and embedding that an end axle is located in this accommodation space draw part, this test bench is positioned at this active unit below and draws part with this embedding and is connected, has an end face, one bottom surface in contrast to this end face, and at least one hole of setting that is arranged at this bottom surface, in order to adsorb a measurement jig.It can solve does not in the past have buffering between the test cell and IC to be measured, and it is damaged easily to cause wafer to be suppressed the back, and the shortcoming of both precisely contrapositions, displacement stroke adjustment inconvenience, is very suitable for practicality.The utlity model has above-mentioned plurality of advantages and practical value, no matter it all has bigger improvement on product structure or function, obvious improvement is arranged technically, and produced handy and practical effect, and more existing mechanism for testing has the outstanding effect of enhancement, thereby being suitable for practicality more, and having the extensive value of industry, really is a new and innovative, progressive, practical new design.
Above-mentioned explanation only is the general introduction of technical solutions of the utility model, for can clearer understanding technological means of the present utility model, and can be implemented according to the content of instructions, and for above-mentioned and other purposes, feature and advantage of the present utility model can be become apparent, below especially exemplified by preferred embodiment, and conjunction with figs., be described in detail as follows.
Description of drawings
Fig. 1 is the exploded perspective view according to a kind of mechanism for testing of the utility model one preferred embodiment.
Fig. 2 is the sectional view according to a kind of mechanism for testing of this preferred embodiment of the utility model.
Fig. 3 is the sectional view of a kind of mechanism for testing after the 3-3 profile line dissects in Fig. 2 according to this preferred embodiment of the utility model.
Fig. 4 is should be than the sectional view of a kind of mechanism for testing under one first location user mode of embodiment according to the utility model.
Fig. 5 is the sectional view of a kind of mechanism for testing under one second positioning states according to this preferred embodiment of the utility model.
100: mechanism for testing 110: pedestal
111: mounting part 120: fixed cell
121: upper casing spare 122: lower shell
123: accommodation space 124: buffer element
125: guide pillar 126: air admission hole
130: active unit 131: sliding seat
1311: butt platform 1312: joining hole
132: part 1321 is drawn in embedding: the path section
1322: big footpath section 133: guide hole
134: lock-connecting piece 140: connection unit
141: end face 142: bottom surface
143: chute 144: sliding sleeve
145: arcuate socket 146: surge chamber
150: test bench 151: end face
152: bottom surface 153: outer ring surface
154: set hole 155: gas port
160: sliding unit 161: bearing seat
162: ball 170: lock member
180: test cell 200: IC to be measured
300: control module
Embodiment
For further setting forth the utility model is to reach technological means and the effect that predetermined goal of the invention is taked, below in conjunction with accompanying drawing and preferred embodiment, to according to its embodiment of mechanism for testing, structure, feature and the effect thereof that the utility model proposes, describe in detail as after.
See also Fig. 1 and shown in Figure 2, it illustrates the exploded perspective view according to a kind of mechanism for testing of the utility model first preferred embodiment.This mechanism for testing 100 can be subjected to a facility (not shown) a control module 300 driving and IC200 to be measured is moved to a test section to carry out testing classification; And this mechanism for testing 100 comprises a pedestal 110, a fixed cell 120, an active unit 130, a connection unit 140, a test bench 150, a plurality of sliding unit 160, and a plurality of lock member 170.
This pedestal 110 sees also shown in Figure 2ly, is control module 300 belows that are crossed on these facility, has two mounting parts 111 that lay respectively at short side, in order to hang on this control module 300 times.
This fixed cell 120, be to be fixed in this pedestal 110 belows, have a upper casing spare 121, and be opened in the air admission hole 126 that this upper casing spare 121 is central and be communicated with this accommodation space 123 with the lower shell 122 of this upper casing spare 121 butt joints, a guide pillar 125 and that the accommodation space that internal face constituted 123, after involutory is folded between this upper and lower shell spare 121,122 and the buffer element 124, that are positioned at this accommodation space 123 is located at these lower shell 122 central authorities and protrudes into this accommodation space 123 by this upper and lower shell spare 121,122.In the present embodiment, this buffer element 124 is to make and be laminar with rubber-like material (as rubber), it is to utilize a plurality of locks to establish element 127 to establish into this upper casing spare 121 from this lower shell 122 belows lock, and the acquisition positioning action, in addition, extraneous pressure fluid can be pumped in this accommodation space 123 by this air admission hole 126, impels this buffer element 124 to keep surface tension.
This active unit 130, connect and be located at this fixed cell 120 belows, having one is arranged on this accommodation space 123 and can draws part 132 along the embedding that the first direction X direction of this buffer element (promptly perpendicular to) movable sliding seat 131, plural number are set on this sliding seat 131, and one be opened in this sliding seat 131 central authorities and to guide hole 133 that should guide pillar 125, so that the guiding contraposition between this sliding seat 131 and this lower shell 122 to be provided, make this sliding seat 131 prevent that it from producing center displacement when this first direction X moves.In addition, this sliding seat 131 comprises that again four are extended and protrudingly expose the outer butt platform 1311 of this accommodation space 123 down, and a joining hole 1312 that axially is opened in these butt platform 1311 central authorities.These embeddings are drawn part 132 and are provided with four in the present embodiment altogether, and for being the slide bar of inverted T shape, and be to be that the center is 90 degree and uniformly-spaced arranges with this guide hole 133, and, each embedding is drawn part 132 and is included a path section 1321 that oppositely is provided with and a big footpath section 1322 respectively, this path section 1322 is to place after this joining hole 1312, put with a lock-connecting piece 134 locks by the outside again and pass this butt platform 1311, making these embeddings draw part 132 fixes as one with this sliding seat 131, and can with this sliding seat 131 interlock mutually, this 1322 of big footpath section is stretched and is established in this connection unit 140.
This connection unit 140, be arranged in this active unit 130 belows, have an end face 141, with the reverse bottom surface 142 of this end face 141, chute 143 that part 132 is offered and run through this top, bottom surface 141,142 are drawn in a plurality of corresponding these embeddings, a plurality ofly be installed in these chutes 143 respectively and cover the sliding sleeves 144 that part 132 big footpath sections 1322 are drawn in these embeddings, and a plurality of along the arcuate socket of being offered perpendicular to the second direction (promptly radially) of this first direction X 145.These chutes 143 are the class holes that are wide at the top and narrow at the bottom, the top section can be embedded in it for sliding sleeve 144, and the big footpath section 1322 that end Duan Ze draws part 132 for embedding is stretched and is established wherein, and should the big directly external diameter of section 1322 be to be aperture less than this sliding sleeve 144, the anxiety that big footpath section 1322 nothings that make this embedding draw part 132 are deviate from this chute 143, and under normal conditions, this embedding is drawn between the bottom surface 142 of the big footpath section 1322 of part 132 and this connection unit 140 and is formed with a surge chamber 146.Additional disclosure be, the length direction of this arcuate socket 145 of identification for the benefit of, special its arc length is strengthened in the diagram and be depicted as fan-shaped, precisely because actual angle and be not more than 1 °.
This test bench 150, see also Fig. 2 and shown in Figure 3, be after placing the arcuate socket 145 of this connection unit 140 with lock member 170, and be fixed in the bottom of this connection unit 140, it has an end face 151, one and the reverse bottom surface 152 of this end face 151, one be looped around outer ring surface 153 between this top, bottom surface 151,152 outer rims, a plurality of offer inwardly from this bottom surface 152 set hole 154, and a plurality of by offering on this outer ring surface 153 and setting the gas port 155 that hole 154 is connected with these respectively.In the present embodiment, these are set hole 154 and are provided with four altogether, make a vacuum absorption device (not shown) can be from this gas port 155, set hole 154 gas pumped to the external world, impel a test cell 180 (measuring head) can firmly be adsorbed on the bottom surface 152 of this test bench 150, because this test cell 180 is not this case improvement emphasis, so do not add to give unnecessary details in instructions.
These sliding units 160, be to be folded between this connection unit 140 and this test bench 150, these sliding units 160 are ball bearing in the present embodiment, it has a bearing seat 161 that is embedded on this test bench 150, and a top supports the ball 162 in this connection unit 140 bottom surfaces 142, impel this test bench 150 can be easily along the length direction activity of this arcuate socket 145, and produce the radial beat of low-angles (this angle is not more than 1 ° approximately) with respect to this connection unit 140.
Seeing also shown in Figure 4ly, is than a kind of mechanism for testing of embodiment sectional view under one first location user mode according to the utility model.The utility model is in operation, along with moving down of this mechanism for testing 100, when making this IC200 to be measured of this test cell 180 contacts that is adsorbed on its bottom, at this moment, understand under the reverse pushing and pressing of IC200 to be measured with the test bench 150 of these test cell 180 Joints, and draw part 132 with these embeddings is axle center and little by little moving towards rising, make this embedding draw part 132 big footpath section 1322 complete slippages and go into this surge chamber 146, simultaneously, this test bench 150 utilizes the radially characteristic of turn, add this sliding unit 160 ball 162 auxiliary down, can be easily and in good time produce low-angle beat with respect to this connection unit 140, allow the socket on the test cell 180 can be simultaneously and aim at most IC200 to be measured respectively, so, can obtain first section buffering contraposition effect; Then, along with moving down again of whole mechanism for testing 100, please consult shown in Figure 5 again, be the sectional view of a kind of mechanism for testing under one second positioning states according to the utility model preferred embodiment, the butt platform 1311 of end face 141 these sliding seat 131 of meeting ejection of this connection unit 140, make whole sliding seat 131 moving towards rising, and then compress this buffer element 124, elastic buffer effect by this buffer element 124, the buffer action second time between test cell 180 and the IC to be measured is provided, make the test cell 180 can be smoothly and exert pressure IC200 to be measured and do not have the anxiety of breakage, and then reach the test effect of correct contraposition with suitable power.
By the above-mentioned preferred embodiment of the above the utility model as can be known, application the utlity model has following advantage:
1, prevent the breakage of IC wafer: the utility model is the buffer element 124 that utilizes in the accommodation space 123, add that test bench 150 and embedding draw formed surge chamber 146 between the part 132, and the twice axial buffer displacement stroke of mechanism for testing 100 when moving down compacting IC200 to be measured be provided, can prevent that mechanism for testing 100 is excessive because of the power of exerting pressure, cause the damaged situation of IC wafer.
2, testing efficiency is good: except test bench 150 can produce the axial buffer displacement, can also be by the arcuate socket 145 of sliding unit 160 collocation connection unit 140, make the generation radial beat that whole test bench 150 can be in good time, allow mechanism for testing when exerting pressure, can steadily and correctly produce the contraposition effect with IC to be measured, realize that single test cell can test the effect of many group IC wafers simultaneously, and can promote testing efficiency, and allow the high speed detectionization of board be achieved.
The above, it only is preferred embodiment of the present utility model, be not that the utility model is done any pro forma restriction, though the utility model discloses as above with preferred embodiment, yet be not in order to limit the utility model, any those skilled in the art are not in breaking away from the technical solutions of the utility model scope, when the technology contents that can utilize above-mentioned announcement is made a little change or is modified to the equivalent embodiment of equivalent variations, in every case be the content that does not break away from technical solutions of the utility model, according to technical spirit of the present utility model to any simple modification that above embodiment did, equivalent variations and modification all still belong in the scope of technical solutions of the utility model.
Claims (18)
1. mechanism for testing, can accept facility a control module driving and determinand moved to a test section carry out testing classification, it is characterized in that this mechanism for testing comprises:
One fixed cell is connected on this control module, has an accommodation space and and is arranged on the interior buffer element of this accommodation space;
One active unit, have at least one can be movable along a first direction and embedding that an end axle is located in this accommodation space draw part; And
One test bench is positioned at this active unit below and draws part with this embedding and links, and has an end face, a bottom surface in contrast to this end face, and at least one is arranged at the hole of setting of this bottom surface, in order to adsorb a measurement jig.
2. mechanism for testing according to claim 1 is characterized in that wherein said buffer element is with the resilient material shape of laminating.
3. mechanism for testing according to claim 2 is characterized in that wherein said fixed cell has more the air admission hole of this accommodation space of connection, can be pumped into this accommodation space for extraneous pressure fluid, impels this buffer element can keep surface tension.
4. mechanism for testing according to claim 2, it is characterized in that wherein said fixed cell is to be formed by a upper casing spare and lower shell butt joint, internal face after this upper and lower shell spare is involutory is the accommodation space that constitutes this closed, and makes this buffer element be folded between this upper shell, the lower shell.
5. mechanism for testing according to claim 4 is characterized in that wherein said fixed cell has more the plural number lock and establishes element, and it is after placing this lower shell and this buffer element that these locks are established element, and lock is established into this upper casing spare again.
6. mechanism for testing according to claim 1 it is characterized in that wherein said active unit has more one and is located in the accommodation space and draws the affixed sliding seat of part with embedding, and this sliding seat is corresponding to this buffer element.
7. mechanism for testing according to claim 6 is characterized in that wherein said fixed cell has more a guide pillar that is installed in this accommodation space, and this sliding seat is to offering a guide hole by guide pillar.
8. mechanism for testing according to claim 6, it is characterized in that wherein said active unit has more at least onely extends and the protruding butt platform that exposes outside this accommodation space down from this sliding seat bottom.
9. mechanism for testing according to claim 1 is characterized in that a big footpath section and the path section that part includes reverse setting drawn in the embedding of wherein said active unit.
10. mechanism for testing according to claim 9, it is characterized in that it more includes a connection unit that is arranged between this test bench of this active unit, this connection unit has an end face, one and the chute of the reverse bottom surface of this end face, this top of at least one perforation, bottom surface, and the big footpath Duan Keshen that makes this embedding draw part is located in this chute and does not have the anxiety of deviating from.
11. mechanism for testing according to claim 10 is characterized in that wherein said connection unit has more at least onely to be installed in this chute and to cover the sliding sleeve that part is drawn in this embedding.
12. mechanism for testing according to claim 11, the aperture that it is characterized in that wherein said sliding sleeve perforate are the external diameters that draws the big footpath of part section less than this embedding.
13. mechanism for testing according to claim 10, it is characterized in that wherein said connection unit has more a plurality of arcuate sockets of offering along a second direction, and a plurality of these arcuate sockets and locks of placing establish into the bolt in this test bench, make this test bench can along the length direction of this arcuate socket and relatively this connection unit produce radially swing.
14. mechanism for testing according to claim 10 is characterized in that it more includes a plurality of sliding units that are installed between this test bench one end face and this connection unit bottom surface, and makes and be formed with a gap between this test bench and this connection unit.
15. mechanism for testing according to claim 14 is characterized in that wherein said sliding unit is a ball bearing.
16. mechanism for testing according to claim 1 is characterized in that wherein said test bench has more a plurality of corresponding respectively these gas ports of setting the hole and can be connected.
17. mechanism for testing according to claim 1 is characterized in that it more includes a pedestal that is fixed between this control module and this fixed cell.
18. mechanism for testing according to claim 17 is characterized in that wherein said pedestal has two mounting parts that lay respectively at short side, in order to hang on the below of this control module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200720000725 CN201017021Y (en) | 2007-02-12 | 2007-02-12 | Test mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200720000725 CN201017021Y (en) | 2007-02-12 | 2007-02-12 | Test mechanism |
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| CN201017021Y true CN201017021Y (en) | 2008-02-06 |
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| CN 200720000725 Expired - Fee Related CN201017021Y (en) | 2007-02-12 | 2007-02-12 | Test mechanism |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101567327B (en) * | 2008-04-23 | 2010-09-08 | 中茂电子(深圳)有限公司 | Buffer sorting device for bare wafer testing machine platform and machine platform |
| CN101344536B (en) * | 2008-03-19 | 2010-12-01 | 崇贸科技股份有限公司 | IC picking device with uniformly-spaced movement |
| CN103028943A (en) * | 2013-01-17 | 2013-04-10 | 苏州大学 | Device and method for automatically assembling IC (Integrated Circuit) testing seat |
| CN104142411A (en) * | 2013-05-08 | 2014-11-12 | 本田技研工业株式会社 | Parallelism adjusting device and parallelism adjusting method |
| CN104237569A (en) * | 2013-06-13 | 2014-12-24 | 京元电子股份有限公司 | Floating test head and test equipment using same |
| CN106052504A (en) * | 2015-04-13 | 2016-10-26 | 台扬科技股份有限公司 | microwave element testing device |
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2007
- 2007-02-12 CN CN 200720000725 patent/CN201017021Y/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101344536B (en) * | 2008-03-19 | 2010-12-01 | 崇贸科技股份有限公司 | IC picking device with uniformly-spaced movement |
| CN101567327B (en) * | 2008-04-23 | 2010-09-08 | 中茂电子(深圳)有限公司 | Buffer sorting device for bare wafer testing machine platform and machine platform |
| CN103028943A (en) * | 2013-01-17 | 2013-04-10 | 苏州大学 | Device and method for automatically assembling IC (Integrated Circuit) testing seat |
| CN103028943B (en) * | 2013-01-17 | 2015-02-04 | 苏州大学 | Device and method for automatically assembling IC (Integrated Circuit) testing seat |
| CN104142411A (en) * | 2013-05-08 | 2014-11-12 | 本田技研工业株式会社 | Parallelism adjusting device and parallelism adjusting method |
| CN104142411B (en) * | 2013-05-08 | 2017-05-31 | 本田技研工业株式会社 | Parallelism adjusting instrument and depth of parallelism method of adjustment |
| CN104237569A (en) * | 2013-06-13 | 2014-12-24 | 京元电子股份有限公司 | Floating test head and test equipment using same |
| CN104237569B (en) * | 2013-06-13 | 2017-03-01 | 京元电子股份有限公司 | Floating gauge head and the test equipment using this floating gauge head |
| CN106052504A (en) * | 2015-04-13 | 2016-10-26 | 台扬科技股份有限公司 | microwave element testing device |
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