CN200976450Y - High-power laser resonant cavity - Google Patents
High-power laser resonant cavity Download PDFInfo
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- CN200976450Y CN200976450Y CN 200620157567 CN200620157567U CN200976450Y CN 200976450 Y CN200976450 Y CN 200976450Y CN 200620157567 CN200620157567 CN 200620157567 CN 200620157567 U CN200620157567 U CN 200620157567U CN 200976450 Y CN200976450 Y CN 200976450Y
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Abstract
本实用新型公开了一种高功率激光谐振腔，包括全反镜、输出镜和激光工作介质，全反镜由第一直角圆台的内侧面和反向的直角圆锥的外侧面组成，第一直角圆台和直角圆锥的旋转对称轴同轴，其内侧面和外侧面均为高反射面；输出镜由圆形平面半透半反镜和边缘的同心环状的全反镜组成，它们的旋转对称轴同轴，同心环状的全反镜由第二直角圆台的内侧面和反向的第三直角圆台的外侧面组成，二个直角圆台的旋转对称轴同轴，其内侧面和外侧面均为高反射面。该激光谐振腔可以消除增益介质中心与边缘不均匀分布的影响，发散角小，光束质量好，可压缩输出激光的光斑面积，提高输出激光光斑的功率密度，可用于中、高功率气体或固体激光器。
The utility model discloses a high-power laser resonant cavity, which comprises a total reflection mirror, an output mirror and a laser working medium. The rotational symmetry axes of the circular frustum and the right-angled cone are coaxial, and their inner and outer surfaces are highly reflective surfaces; the output mirror is composed of a circular flat half-mirror and a concentric ring-shaped full-reflective mirror on the edge, and their rotational symmetry The axes are coaxial, and the concentric ring-shaped total mirror is composed of the inner surface of the second right-angled circular platform and the outer surface of the third reversed right-angled circular platform. The rotational symmetry axes of the two right-angled circular platforms are coaxial, and the inner surface and the outer surface are for highly reflective surfaces. The laser resonator can eliminate the influence of the uneven distribution of the center and edge of the gain medium, the divergence angle is small, the beam quality is good, the spot area of the output laser can be compressed, and the power density of the output laser spot can be improved, which can be used for medium and high power gas or solid laser.
Description
Technical field
The utility model relates to laserresonator.
Background technology
In many occasions that laser is used, in little Precision Machining such as for example laser drilling, welding, cutting and laser medicine, wish that all laser preferably can be operated in the basic mode state of angle of divergence minimum.In order to improve laser beam quality, traditional mode selection technique (as using aperture diaphragm) can make the beam quality of laser output improve, but uses aperture diaphragm to limit mode volume to a great extent, has increased mode loss.
The subject matter that occurs in the design of high power laser light device is, how to obtain the transverse mode distinguishing ability that big as far as possible mode volume is become reconciled, with the running of realization high power single mode, thereby can from activated material, extract energy expeditiously, can keep high beam quality again.
Laserresonator commonly used has three kinds of stable cavity, unsteady cavity and critical resonators.
The loss of stable cavity is very low, and how much deviation losses of paraxial ray are zero, and as long as the Fresnel number in chamber is not too little, and diffraction loss is also little of usually can ignoring, thus in the overwhelming majority, low-power device all adopts stable cavity.When we require the operation of laser high power basic mode, because the basic mode mode volume of stable cavity is too little, and irrelevant with resonant cavity minute surface size.This just means the lateral dimension that increases active medium or increases the raising that resonant cavity minute surface size is helpless to basic mode laser beam power output, causes many transverse mode runnings of laser on the contrary easily, reduces the quality of output beam.
With generally stablize the sphere chamber and compare, the waveform limitation capability of unsteady cavity significantly improves; In addition, more insensitive because waveform is a spherical wave to influences such as the dynamic refractive index distortion of operation material, therefore be used for the high-gain laser system, can obtain the quite little high brightness output beam of the angle of divergence.The loss of unsteady cavity mainly is the divergence loss of paraxial ray, and the loss of one way is very big, can reach tens percent.For obtaining high power output, the lateral dimension of operation material is often bigger, so diffraction loss can be ignored.Because the loss in chamber is bigger, need to adopt side effusion output coupling usually, so be output as the annular beam of center sky.This intonation is whole to require height, and can not be used for all kinds of Optical Maser Systems low gain or thin bore.
Plane-parallel resonator is a kind of chamber type of extensive use in the critical resonator, and it is made up of a plane total reflective mirror and a plane semi-transparent semi-reflecting lens.The major advantage of plane-parallel resonator is: beam directionality's fabulous (angle of divergence is little), mode volume is bigger, than being easier to obtain single-mode oscillation.The major defect of plane-parallel resonator is: adjust the high and easy imbalance of required precision, compare with stable cavity, loss is also bigger, and is not quite suitable to little gain device.
Application number 99816848.3 discloses a kind of " resonant cavity contains the laser of top in shape circular cone prism "; Application number 200420017131.2 discloses a kind of " right angle internal conical surface reflector laser resonance cavity ".The resonant cavity that these two patents propose is to use right angle circular cone prism and right angle internal conical surface total reflective mirror to replace the total reflective mirror of plane-parallel resonator, utilize the right angle circular cone prism resonant cavity and the right angle internal conical surface total reflective mirror resonant cavity of the retrodirective reflection characteristic composition of right angle circular cone prism and right angle internal conical surface total reflective mirror, can reduce the adjustment requirement in chamber greatly.Simultaneously, these resonant cavitys outside the characteristics of small divergence angle, also have high stability except having the big mode volume of plane-parallel resonator.But the shortcoming of this two classes resonant cavity is: can not eliminate the influence of gain media center and edge uneven distribution; Can not compress the area of output laser facula, thereby improve the power density of output facula, can not realize the laser output of belt hollow hot spot; Circular cone prism chamber, right angle thermal stability is low, and the prism of some laser wavelength needs special optical crystal manufacturing, costs an arm and a leg.
Summary of the invention
The purpose of this utility model is to overcome above-mentioned the deficiencies in the prior art part, has proposed a kind of high-power laser resonance cavity.This laserresonator can be eliminated the influence of gain media center and edge uneven distribution, and the angle of divergence is little, good beam quality; Can compress the facula area of output laser, improve the power density of output laser facula.
For achieving the above object, the technical solution adopted in the utility model is, a kind of high-power laser resonance cavity comprises total reflective mirror, outgoing mirror and laser working medium, total reflective mirror is made up of the lateral surface of the medial surface of the first right angle round platform and reverse right angle circular cone, the rotation axes of symmetry of the first right angle round platform and right angle circular cone is coaxial, the lateral surface of the medial surface of the first right angle round platform and right angle circular cone is high reflecting surface, size relationship each other is Φ b=3 Φ a, f=2e, wherein Φ a is the medial surface of the lateral surface of right angle circular cone and the first right angle round platform diameter of a circle that joins, Φ b is the bottom surface diameter of total reflective mirror, e is the height of right angle circular cone, and f is the height of the first right angle round platform; Outgoing mirror is the split outgoing mirror, total reflective mirror by the concentric annular at circular flat semi-transparent semi-reflecting lens and edge is formed, the total reflective mirror of concentric annular is made up of the lateral surface of the medial surface of the second right angle round platform and reverse the 3rd right angle round platform, the rotation axes of symmetry of two right angle round platforms is coaxial, the lateral surface of the medial surface of the second right angle round platform and the 3rd right angle round platform is high reflecting surface, the rotation axes of symmetry of the total reflective mirror of circular flat semi-transparent semi-reflecting lens and concentric annular is coaxial, size relationship each other is Φ c=Φ a, Φ d=Φ b, Φ d-Φ g=Φ g-Φ c, Φ c is the diameter of circular flat semi-transparent semi-reflecting lens, Φ d is the bottom surface diameter of outgoing mirror, and Φ g is the medial surface of the lateral surface of the 3rd right angle round platform and the second right angle round platform diameter of a circle that joins.
The utility model compared with prior art has the following advantages:
(1) the utility model is making full use of gain media, realize under the situation of big mode volume laser output, equivalence the chamber is grown up to growth doubly, compressed the area of output facula simultaneously, it is very little to obtain the angle of divergence, and power density is very high, the extraordinary high power laser light output of beam quality.
(2) the utility model utilizes its retrodirective reflection characteristic, can eliminate influence except that gain media center and edge uneven distribution, the gain inequality that gas inhomogeneities, discharge inhomogeneities etc. in the inhomogeneities, gas laser of solid laser rod under excitation are caused plays the optical compensation effect, reduces the heat distortion of laserresonator mirror.
(3) the utility model does not have refraction effect, has improved the uniformity of optical field distribution.
(4) the utility model utilizes its retrodirective reflection characteristic, can reduce the adjustment requirement in chamber greatly, and installation, use, easy to maintenance, and dependable performance, easily existing laser is reequiped.
(5) the utility model is easy to process, low cost of manufacture.
(6) the slight disturbance of total reflective mirror or outgoing mirror is to the energy and the not obviously influence of beam quality of output laser.
Description of drawings
Fig. 1 is the structural representation of a kind of embodiment of the utility model.
Fig. 2 is the right view of total reflective mirror among Fig. 1.
Fig. 3 is the left view of split outgoing mirror among Fig. 1.
Fig. 4 has tank, structure of cover plate sketch for total reflective mirror among Fig. 1.
Fig. 5 is the left view of tank among Fig. 4.
Fig. 6 is the left view of Fig. 4 cover plate.
Fig. 7 has tank, structure of cover plate sketch for split outgoing mirror among Fig. 1.
Fig. 8 is the right view of tank among Fig. 7.
Fig. 9 is the right view of Fig. 7 cover plate.
Embodiment
The utility model is described in further detail below in conjunction with accompanying drawing.
By Fig. 1, Fig. 2 and shown in Figure 3, a kind of high-power laser resonance cavity comprises total reflective mirror, outgoing mirror and laser working medium, total reflective mirror 1 is made up of the lateral surface 5 of the medial surface 4 of the first right angle round platform and reverse right angle circular cone, the rotation axes of symmetry of the first right angle round platform and right angle circular cone is coaxial, the medial surface 4 of the first right angle round platform and the lateral surface 5 of right angle circular cone are high reflecting surface, size relationship each other is Φ b=3 Φ a, f=2e, wherein Φ a is the medial surface 4 of the lateral surface 5 of right angle circular cone and the first right angle round platform diameter of a circle that joins, Φ b is the bottom surface diameter of total reflective mirror 1, e is the height of right angle circular cone, and f is the height of the first right angle round platform; Outgoing mirror 2 is the split outgoing mirror, total reflective mirror 14 by the concentric annular at circular flat semi-transparent semi-reflecting lens 11 and edge is formed, the total reflective mirror 14 of concentric annular is made up of the lateral surface 13 of the medial surface 12 of the second right angle round platform and reverse the 3rd right angle round platform, the rotation axes of symmetry of two right angle round platforms is coaxial, the medial surface 12 of the second right angle round platform and the lateral surface 13 of the 3rd right angle round platform are high reflecting surface, the rotation axes of symmetry of the total reflective mirror 14 of circular flat semi-transparent semi-reflecting lens 11 and concentric annular is coaxial, size relationship each other is Φ c=Φ a, Φ d=Φ b, Φ d-Φ g=Φ g-Φ c, Φ c is the diameter of circular flat semi-transparent semi-reflecting lens 11, Φ d is the bottom surface diameter of outgoing mirror 2, and Φ g is the medial surface 12 of the lateral surface 13 of the 3rd right angle round platform and the second right angle round platform diameter of a circle that joins.
During installation, total reflective mirror 1 is coaxial with the rotation axes of symmetry of outgoing mirror 2, and the summit of total reflective mirror 1 described right angle circular cone preferably is positioned on the optical axis of laser cavity, and the baseplane of total reflective mirror 1 is vertical with optical axis.
By Fig. 4～shown in Figure 6, there is bosh 7 back of the assembly 6 that is made of total reflective mirror 1, tank cover plate 10 have water inlet 8 and a delivery port 9, cover plate 10 can adopt welding manner to be tightly connected with assembly 6.
By Fig. 7～shown in Figure 9, corresponding size relationship is Φ h＞Φ c among the figure, Φ i＞Φ d, and wherein Φ h is the installation dimension of circular flat semi-transparent semi-reflecting lens 11, Φ i is the installation dimension of outgoing mirror 2.Wherein 15 is the annular cooling water groove of outgoing mirror 2, and 16 for having the cover plate of intake-outlet.
The optical property of total reflective mirror 1 is: the incident ray of any direction is after total reflective mirror 1 reflection, and reflection ray is parallel with incident ray.In other words, as long as the incident ray direction is constant, no matter how total reflective mirror 1 rocks around its summit, and the direction of reflection ray is constant all the time, is consistent with the incident ray direction.According to this character, the direction of resonant cavity output light is identical with the normal direction of outgoing mirror 2, and is positioned near the optical axis when total reflective mirror 1 summit, and its axis is similar to optical axis and gets final product bright dipping when overlapping, the slight disturbance of total reflective mirror 1 or outgoing mirror 2 does not obviously descend to going out light energy and beam quality.
Effective laser output facula area of the utility model high-power laser resonance cavity is 1/9th of total reflective mirror 1 area, can improve laser output power density greatly, the compression laser beam divergence.
Claims (2)
1. a high-power laser resonance cavity comprises total reflective mirror, outgoing mirror and laser working medium, it is characterized in that:
Total reflective mirror (1) is made up of the lateral surface (5) of the medial surface (4) of the first right angle round platform and reverse right angle circular cone, the rotation axes of symmetry of the first right angle round platform and right angle circular cone is coaxial, the lateral surface (5) of medial surface of the first right angle round platform (4) and right angle circular cone is high reflecting surface, size relationship each other is Φ b=3 Φ a, f=2e, wherein Φ a is the medial surface (4) of lateral surface (5) and the first right angle round platform of the right angle circular cone diameter of a circle that joins, Φ b is the bottom surface diameter of total reflective mirror (1), e is the height of right angle circular cone, and f is the height of the first right angle round platform;
Outgoing mirror (2) is the split outgoing mirror, total reflective mirror (14) by the concentric annular at circular flat semi-transparent semi-reflecting lens (11) and edge is formed, the total reflective mirror of concentric annular (14) is made up of the lateral surface (13) of the medial surface (12) of the second right angle round platform and reverse the 3rd right angle round platform, the rotation axes of symmetry of two right angle round platforms is coaxial, the lateral surface (13) of medial surface of the second right angle round platform (12) and the 3rd right angle round platform is high reflecting surface, the rotation axes of symmetry of the total reflective mirror (14) of circular flat semi-transparent semi-reflecting lens (11) and concentric annular is coaxial, size relationship each other is Φ c=Φ a, Φ d=Φ b, Φ d-Φ g=Φ g-Φ c, Φ c is the diameter of circular flat semi-transparent semi-reflecting lens (11), Φ d is the bottom surface diameter of outgoing mirror (2), and Φ g is the medial surface (12) of lateral surface (13) and the second right angle round platform of the 3rd right angle round platform diameter of a circle that joins.
2. according to the described high-power laser resonance cavity of claim 1, it is characterized in that: the summit of the described right angle of total reflective mirror (1) circular cone is positioned on the optical axis of laser cavity, and the baseplane of total reflective mirror (1) is vertical with optical axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620157567 CN200976450Y (en) | 2006-11-24 | 2006-11-24 | High-power laser resonant cavity |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620157567 CN200976450Y (en) | 2006-11-24 | 2006-11-24 | High-power laser resonant cavity |
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| CN200976450Y true CN200976450Y (en) | 2007-11-14 |
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| CN 200620157567 Expired - Fee Related CN200976450Y (en) | 2006-11-24 | 2006-11-24 | High-power laser resonant cavity |
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- 2006-11-24 CN CN 200620157567 patent/CN200976450Y/en not_active Expired - Fee Related
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| C14 | Grant of patent or utility model | ||
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| CF01 | Termination of patent right due to non-payment of annual fee |