CN100367582C - Tuning laser resonance cavity - Google Patents

Tuning laser resonance cavity Download PDF

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Publication number
CN100367582C
CN100367582C CNB2006100185520A CN200610018552A CN100367582C CN 100367582 C CN100367582 C CN 100367582C CN B2006100185520 A CNB2006100185520 A CN B2006100185520A CN 200610018552 A CN200610018552 A CN 200610018552A CN 100367582 C CN100367582 C CN 100367582C
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China
Prior art keywords
right angle
round platform
diameter
outgoing mirror
mirror
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Expired - Fee Related
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CNB2006100185520A
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CN1819375A (en
Inventor
唐霞辉
秦应雄
武建强
钟如涛
柳娟
彭浩
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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Abstract

The present invention discloses a tuning laser resonance cavity which comprises a holophote, an output mirror and laser working media, wherein the holophote is formed by that the inner side surface of a central right angle taper cone, the outer side surface of a ring-shaped first right angle truncated cone at the middle and the inner side surface of a ring-shaped second right angle truncated cone arranged at the edges are connected with one another in a reverse direction. Symmetry axes of the rotation of the right angle taper cone, the first right angle truncated cone and the second right angle truncated cone are coaxial; the inner side surface of the right angle truncated cone, the outer side surface of the first right angle truncated cone and the inner side surface of the second right angle truncated cone are high reflecting surfaces. The tuning laser resonance cavity has the advantages of convenient adjustment, stable work, big areas of moulds which can be used, small output light spots, high energy density, small divergence angles and favorable heat stability; the present invention can output ring-shaped light spots; the influence of the uneven distribution of gainful medium can be eliminated. The present invention can be used for middle power lasers and high power lasers.

Description

Tuning laser resonance cavity
Technical field
The present invention relates to laserresonator.
Background technology
In many occasions that laser is used, for example little Precision Machining such as laser detection, laser measurement, laser drilling, welding, cutting, laser medicine, atom cool off, catch etc. in the most advanced and sophisticated physical study, wish that all laser preferably can be operated in the basic mode state of angle of divergence minimum.In order to improve laser beam quality, traditional mode selection technique can make the beam quality of laser output improve, but uses aperture diaphragm to limit mode volume to a great extent, has increased mode loss.
Laserresonator commonly used has three kinds of stable cavity, unsteady cavity and critical resonators.
The loss of stable cavity is very low, and how much deviation losses of paraxial ray are zero, and as long as the Fresnel number in chamber is not too little, and diffraction loss is also little of usually can ignoring, thus in the overwhelming majority, low-power device all adopts stable cavity.When we require the operation of laser high power basic mode, because the basic mode mode volume of stable cavity is too little, and irrelevant with resonant cavity minute surface size.This just means the lateral dimension that increases active medium or increases the raising that resonant cavity minute surface size is helpless to basic mode laser beam power output, causes many transverse mode runnings of laser on the contrary easily, reduces the quality of output beam.
With generally stablize the sphere chamber and compare, the waveform limitation capability of unsteady cavity significantly improves; In addition, more insensitive because waveform is a spherical wave to influences such as the dynamic refractive index distortion of operation material, therefore be used for the high-gain laser system, can obtain the quite little high brightness output beam of the angle of divergence.The loss of unsteady cavity mainly is the divergence loss of paraxial ray, and the loss of one way is very big, can reach tens percent.For obtaining high power output, the lateral dimension of operation material is often bigger, so diffraction loss can be ignored.Because the loss in chamber is bigger, need to adopt side effusion output coupling usually, so be output as the annular beam of center sky.This intonation is whole to require height, and can not be used for all kinds of Optical Maser Systems low gain or thin bore.
Plane-parallel resonator is a kind of chamber type of extensive use in the critical resonator, and it is made up of a plane total reflective mirror and a plane semi-transparent semi-reflecting lens.The major advantage of plane-parallel resonator is: beam directionality's fabulous (angle of divergence is little), mode volume is bigger, than being easier to obtain single-mode oscillation.The major defect of plane-parallel resonator is: adjust the high and easy imbalance of required precision, compare with stable cavity, loss is also bigger, and is not quite suitable to little gain device.
Application number 99816848.3 discloses a kind of " resonant cavity contains the laser of top in shape circular cone prism "; Application number 200420017131.2 discloses a kind of " right angle internal conical surface reflector laser resonance cavity ".The resonant cavity that these two patents propose is to use right angle circular cone prism and right angle internal conical surface total reflective mirror to replace the total reflective mirror of plane-parallel resonator, utilize the right angle circular cone prism resonant cavity and the right angle internal conical surface total reflective mirror resonant cavity of the retrodirective reflection characteristic composition of right angle circular cone prism and right angle internal conical surface total reflective mirror, can reduce the adjustment requirement in chamber greatly.Simultaneously, these resonant cavitys outside the characteristics of small divergence angle, also have high stability except having the big mode volume of plane-parallel resonator.But the shortcoming of this two classes resonant cavity is: can not compress the area of output laser facula, thereby improve the power density of output facula; Can not the output light field center regulate with power density distribution on every side; Can not realize having the laser output of the special hollow hot spot that goes in ring of center spot, satisfy some special laser application requirements; Circular cone prism chamber, right angle thermal stability is low, and the prism of some laser wavelength needs special optical crystal manufacturing, costs an arm and a leg.
Summary of the invention
The objective of the invention is to overcome above-mentioned the deficiencies in the prior art part, propose a kind of tuning laser resonance cavity.This laserresonator can be eliminated the influence of gain media uneven distribution; The area of compression output laser facula, thereby the power density of raising output facula; Can regulate output light field center and power density distribution on every side; Also can realize having the laser output of the special hollow hot spot that goes in ring of center spot, satisfy some special laser application requirements; In addition, easy to process, Heat stability is good, cheap.
For achieving the above object, the technical solution used in the present invention is, a kind of tuning laser resonance cavity, comprise total reflective mirror, outgoing mirror and laser working medium, total reflective mirror is by the medial surface of right angle, center circular cone, the medial surface of the lateral surface of the first right angle round platform of intermediate annular and the second right angle round platform of edge annular oppositely joins and forms, the right angle circular cone, the rotation axes of symmetry of the first right angle round platform and the second right angle round platform is coaxial, the medial surface of right angle circular cone, the medial surface of the lateral surface of the first right angle round platform and the second right angle round platform is high reflecting surface, size relationship each other is Ф b-Ф d=Ф d-Ф a, wherein Ф a is the lateral surface of the medial surface of right angle, center circular cone and the first right angle round platform diameter of a circle that joins, Ф d is the medial surface of the lateral surface of the first right angle round platform and the second right angle round platform diameter of a circle that joins, and Ф b is the bottom surface diameter of total reflective mirror; The summit of right angle, the described center of total reflective mirror circular cone is positioned near the optical axis of laser cavity or on the optical axis, the baseplane of total reflective mirror is vertical with optical axis.
The present invention compared with prior art has the following advantages:
(1) the present invention is making full use of gain media, realize under the situation of big mode volume laser output, can compress the area of output laser facula, thereby improve the power density of output facula, can regulate output light field center and power density distribution on every side, realize laser light field output comparatively uniformly; It is very little to obtain the angle of divergence, the extraordinary laser output of beam quality.
(2) the present invention utilizes its retrodirective reflection characteristic, can eliminate the influence of gain media uneven distribution, the gain inequality that gas inhomogeneities, discharge inhomogeneities etc. in the inhomogeneities, gas laser of solid laser rod under excitation are caused plays the optical compensation effect, reduces the heat distortion of laserresonator mirror.
(3) the present invention does not have refraction effect, has improved the uniformity of optical field distribution.
(4) the present invention can realize having the laser output of the special hollow hot spot that goes in ring of center spot, satisfies some special laser application requirements;
(5) the present invention utilizes its retrodirective reflection characteristic, can reduce the adjustment requirement in chamber greatly, and installation, use, easy to maintenance, and dependable performance, easily existing laser is reequiped.
(6) the present invention is easy to process, low cost of manufacture.
(7) the slight disturbance of total reflective mirror or outgoing mirror, to the energy and the not obviously influence of beam quality of output laser, use is not lacked of proper care.
Description of drawings
Fig. 1 is the structural representation of total reflective mirror among the present invention.
Fig. 2 is the right view of Fig. 1.
Fig. 3 is for having the structure diagram of a kind of embodiment of tank and cover plate among Fig. 1.
Fig. 4 is the left view of tank among Fig. 3.
Fig. 5 is the left view of Fig. 3 cover plate.
Fig. 6 is the structural representation of the embodiment of the invention 1.
Fig. 7 is the structure diagram of outgoing mirror among Fig. 6.
Fig. 8 is the structural representation of the embodiment of the invention 2.
Fig. 9 is the structure diagram of outgoing mirror among Fig. 8.
Figure 10 is the structural representation of the embodiment of the invention 3.
Figure 11 is the structure diagram of outgoing mirror among Figure 10.
Embodiment
The present invention is described in further detail below in conjunction with accompanying drawing.
By Fig. 1, shown in Figure 2, in tuning laser resonance cavity of the present invention, total reflective mirror 1 is by the medial surface 4 of right angle, center circular cone, the medial surface 6 of the lateral surface 5 of the first right angle round platform of intermediate annular and the second right angle round platform of edge annular oppositely joins and forms, the right angle circular cone, the rotation axes of symmetry of the first right angle round platform and the second right angle round platform is coaxial, the medial surface 4 of right angle circular cone, the lateral surface 5 of the first right angle round platform and the medial surface 6 of the second right angle round platform are high reflecting surface, size relationship each other is Ф b-Ф d=Ф d-Ф a, wherein Ф a is the lateral surface 5 of the medial surface 4 of right angle, center circular cone and the first right angle round platform diameter of a circle that joins, Ф d is the medial surface 6 of the lateral surface 5 of the first right angle round platform and the second right angle round platform diameter of a circle that joins, and Ф b is the bottom surface diameter of total reflective mirror 1.
The optical property of total reflective mirror 1 be the incident ray of any direction after total reflective mirror 1 reflection, emergent ray is parallel with incident ray.According to this character, the direction of resonant cavity output light is identical with the normal direction of outgoing mirror 2, and when the summit of right angle, above-mentioned center circular cone is positioned near the optical axis, its axis is similar to optical axis and gets final product bright dipping when overlapping, the slight disturbance of total reflective mirror 1 or outgoing mirror 2 does not obviously descend to light energy output and beam quality.
By Fig. 3~shown in Figure 5, there is bosh 9 back of the assembly 7 that is made of total reflective mirror 1, has water inlet 10 and delivery port 11 on tank cover plate 8, and cover plate 8 can adopt welding manner to be tightly connected with assembly 7.
In tuning laser resonance cavity of the present invention, total reflective mirror 1 is oppositely joined by the medial surface 6 of the second right angle round platform of the lateral surface 5 of the first right angle round platform of the medial surface 4 of right angle, center circular cone, intermediate annular and edge annular and forms, and outgoing mirror 2 can be multiple different structure.
During installation, total reflective mirror 1 is coaxial with the rotation axes of symmetry of outgoing mirror 2, and the summit of right angle, total reflective mirror 1 described center circular cone preferably is positioned on the optical axis of laser cavity, and the baseplane of total reflective mirror 1 is vertical with optical axis.
Embodiment 1
By Fig. 6~shown in Figure 7, a kind of tuning laser resonance cavity comprises total reflective mirror 1, outgoing mirror 2 and laser working medium 3, and outgoing mirror 2 is whole outgoing mirror, the semi-transparent semi-reflecting film of plating on the outgoing mirror 2, size relationship each other is Ф c=Ф b, and wherein Ф c is the diameter of outgoing mirror 2.
Embodiment 1 is making full use of gain media, realizes under the situation of big mode volume laser output, by regulating the size of Ф a, Ф b, can regulate output light field center and power density distribution on every side, realizes laser light field output comparatively uniformly; It is very little to obtain the angle of divergence, and the extraordinary laser output of beam quality is to gain media stronger homogenization pockety.
Embodiment 2
By Fig. 8~shown in Figure 9, a kind of tuning laser resonance cavity comprises total reflective mirror 1, outgoing mirror 2 and laser working medium 3.Outgoing mirror 2 is whole outgoing mirror, form by central circular plane 14, more intermediate annular plane 12 and edge ring plain 13, the semi-transparent semi-reflecting film of plating on central circular plane 14 and edge ring plain 13, plate high-reflecting film on the more intermediate annular plane 12, size relationship each other is Ф c=Ф b, Ф f=Ф d, Ф e=Ф a, wherein Ф c is the diameter of outgoing mirror 2, and Ф e is the diameter on central circular plane 14, and Ф f is the outer ring diameter on more intermediate annular plane 12.
Embodiment 2 is making full use of gain media, realize under the situation of big mode volume laser output, realization has the laser output of the special hollow hot spot that goes in ring of center spot, by regulating the size of Ф a, Ф b, can regulate the center spot and the power density distribution of ring-shaped light spot on every side, satisfy special laser application requirements; It is very little to obtain the angle of divergence, and the extraordinary laser output of beam quality is to gain media stronger homogenization pockety.
Embodiment 3
By Figure 10~shown in Figure 11, a kind of tuning laser resonance cavity comprises total reflective mirror 1, outgoing mirror 2 and laser working medium 3, outgoing mirror 2 is whole outgoing mirror, be made up of central circular plane 15 and edge ring plain 16, the semi-transparent semi-reflecting film of plating plates high-reflecting film on the edge ring plain 16 on central circular plane 15, size relationship each other is Ф c=Ф b, Ф f=Ф d, wherein Ф c is the diameter of outgoing mirror 2, Ф f is the diameter on central circular plane 15.
Embodiment 3 is making full use of gain media, realize under the situation of big mode volume laser output, can compress the area of output laser facula, thereby put forward the power density of output facula, by regulating the size of Ф a, Ф b, can regulate the center spot and the power density distribution of hot spot on every side, satisfy special laser application requirements; It is very little to obtain the angle of divergence, and the extraordinary laser output of beam quality is to gain media stronger homogenization pockety.

Claims (4)

1. a tuning laser resonance cavity comprises total reflective mirror, outgoing mirror and laser working medium, it is characterized in that:
Total reflective mirror (1) is by the medial surface (4) of right angle, center circular cone, the medial surface (6) of the lateral surface (5) of the first right angle round platform of intermediate annular and the second right angle round platform of edge annular oppositely joins and forms, the right angle circular cone, the rotation axes of symmetry of the first right angle round platform and the second right angle round platform is coaxial, the medial surface of right angle circular cone (4), the medial surface (6) of the lateral surface of the first right angle round platform (5) and the second right angle round platform is high reflecting surface, size relationship each other is Ф b-Ф d=Ф d-Ф a, wherein Ф a is the lateral surface (5) of medial surface (4) and the first right angle round platform of right angle, the center circular cone diameter of a circle that joins, Ф d is the medial surface (6) of the lateral surface (5) of the first right angle round platform and the second right angle round platform diameter of a circle that joins, and Ф b is the bottom surface diameter of total reflective mirror (1);
The summit of right angle, the described center of total reflective mirror (1) circular cone is positioned near the optical axis of laser cavity or on the optical axis, the baseplane of total reflective mirror (1) is vertical with optical axis.
2. tuning laser resonance cavity according to claim 1 is characterized in that:
Outgoing mirror (2) is whole outgoing mirror, goes up the semi-transparent semi-reflecting film of plating at outgoing mirror (2), and size relationship each other is Ф c=Ф b, and wherein Ф c is the diameter of outgoing mirror (2).
3. tuning laser resonance cavity according to claim 1 is characterized in that:
Outgoing mirror (2) is whole outgoing mirror, form by central circular plane (14), more intermediate annular plane (12) and edge ring plain (13), in central circular plane (14) and edge ring-shaped flat and (13) go up the semi-transparent semi-reflecting film of plating, the plating high-reflecting film is gone up on more intermediate annular plane (12), size relationship each other is Ф c=Ф b, Ф f=Ф d, Ф e=Ф a, wherein Ф c is the diameter of outgoing mirror (2), Ф e is the diameter of central circular plane (14), and Ф f is the diameter of the outer shroud on more intermediate annular plane (12).
4. tuning laser resonance cavity according to claim 1 is characterized in that:
Outgoing mirror (2) is whole outgoing mirror, form by central circular plane (15) and edge ring plain (16), go up the semi-transparent semi-reflecting film of plating in central circular plane (15), edge ring plain (16) is gone up the plating high-reflecting film, size relationship each other is Ф c=Ф b, Ф f=Ф d, wherein Ф c is the diameter of outgoing mirror (2), Ф f is the diameter of central circular plane (15).
CNB2006100185520A 2006-03-15 2006-03-15 Tuning laser resonance cavity Expired - Fee Related CN100367582C (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103904536B (en) * 2012-12-26 2016-11-09 清华大学 Laser instrument
CN112059415B (en) * 2020-08-04 2021-11-19 华中科技大学 Optical system for outputting combined annular light spots

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5099492A (en) * 1989-03-28 1992-03-24 Optomic Technologies Corporation, Ltd. Laser system
JPH07106669A (en) * 1993-09-30 1995-04-21 Toshiba Corp Laser oscillator
CN1379924A (en) * 1999-08-02 2002-11-13 王俊恒 Laser with resonance cavity including circular cone prism being top in shape
CN2681412Y (en) * 2004-02-11 2005-02-23 华中科技大学 Right-angle internal cone reflector laser resonant cavity

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5099492A (en) * 1989-03-28 1992-03-24 Optomic Technologies Corporation, Ltd. Laser system
JPH07106669A (en) * 1993-09-30 1995-04-21 Toshiba Corp Laser oscillator
CN1379924A (en) * 1999-08-02 2002-11-13 王俊恒 Laser with resonance cavity including circular cone prism being top in shape
CN2681412Y (en) * 2004-02-11 2005-02-23 华中科技大学 Right-angle internal cone reflector laser resonant cavity

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