CN200962029Y - 3D Deformation Measurement System Based on Split Fiber - Google Patents

3D Deformation Measurement System Based on Split Fiber Download PDF

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CN200962029Y
CN200962029Y CN 200620044106 CN200620044106U CN200962029Y CN 200962029 Y CN200962029 Y CN 200962029Y CN 200620044106 CN200620044106 CN 200620044106 CN 200620044106 U CN200620044106 U CN 200620044106U CN 200962029 Y CN200962029 Y CN 200962029Y
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optical fiber
light
splitting
ccd camera
phase
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于瀛洁
王亮亮
张之江
陈振宜
张淑萍
胡孔明
周文静
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SHANGHAI UNIVERSITY
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Abstract

The utility model relates to a three-dimensional strain measuring system based on splitting optical fibers, comprising an optical maser providing light source, a graphic receiving system with a CCD camera, and a light splitting, conducting and phase-shift system, wherein the light splitting, conducting and phase-shift system is a light splitting, conducting and phase-shift system that splits the light into five beams. Through switching the shielding switch on the output of the fibers, the strain measuring the object in the direction perpendicular to the plane of the object, the horizontal direction and the anti-central direction can be achieved. The utility model has a rational compact construction, easy operation, which is applicable to the three-dimensional strain real-time measurement of the object surface.

Description

基于分束光纤的三维变形测量系统3D Deformation Measurement System Based on Split Fiber

技术领域technical field

本实用新型涉及光学三维变形测量系统,特别是一种基于分束光纤的三维变形测量系统。The utility model relates to an optical three-dimensional deformation measurement system, in particular to a three-dimensional deformation measurement system based on a split optical fiber.

背景技术Background technique

随着工作的发展,人们对材料受力后,产生的变形、应力、应变等性能参数的研究要求也不断提高。从过去的只能应用于物体点测量的金属应力量表到可以测量物体面区域的散斑技术的应用。利用散斑技术对物体进行两维或三维的变形测量的硬件系统和变形处理等算法处理方面已经有许多方法。With the development of work, people's research requirements on performance parameters such as deformation, stress, and strain after materials are stressed are also increasing. From the metal stress gauge that can only be applied to object point measurement in the past to the application of speckle technology that can measure the object surface area. There are already many methods in terms of hardware systems and algorithm processing such as deformation processing for two-dimensional or three-dimensional deformation measurement of objects using speckle technology.

在国内目前的文献记载中,电子散斑干涉技术测量物体表面三维变形系统的技术为:采用三个激光器从三个不同的方向照射以提供照射光源,照射被测物体和它的旁侧放置的参考物。用一个PZT相移器推动粘贴在参考物上面的三个反射镜,用于提供对应三束物光相干涉的参考光并引入相移。在CCD摄像机前放置大错位棱镜,使物体表面信息和参考物上的信息都进入CCD中,结合四步相移技术,三个激光器依次分别照射被测物,对所采集的散斑图进行运算并分离可获得三个独立的变形场。但这种系统由于激光器的数量多,结构庞大,参考物上的三个平面镜方向调整困难,且由于大错位棱镜的分离效果可能影响散斑图像质量,并且此系统不能单独进行一维或二维的测量。In the current domestic literature, the technology of electronic speckle interferometry to measure the three-dimensional deformation system of the object surface is: three lasers are used to irradiate from three different directions to provide the illumination light source, and the object to be measured and the laser placed beside it are irradiated. reference. A PZT phase shifter is used to push the three mirrors pasted on the reference object to provide reference light corresponding to the interference of the three beams of object light and introduce phase shift. Place a large dislocation prism in front of the CCD camera, so that the information on the surface of the object and the information on the reference object enter the CCD. Combined with the four-step phase shift technology, the three lasers irradiate the measured object in turn, and calculate the collected speckle pattern. And separate to get three independent deformation fields. However, due to the large number of lasers and the large structure of this system, it is difficult to adjust the direction of the three plane mirrors on the reference object, and the separation effect of the large misalignment prism may affect the quality of the speckle image, and this system cannot be used alone for one-dimensional or two-dimensional Measurement.

在专利US 6188483 B1中,测量三维物体表面变形的系统中,利用一个激光器提供光源,利用分光镜和反光镜特性,进行分光、传光。将两个双光束电子散班干涉系统和一个离面变形检测系统结合到一个系统中,分别依靠出射的四束激光束完成面内变形检测,并利用四束激光中的一束和内部另一束光束构成离面变形检测系统。将变形前后获得的电子散斑图运用直接相减算法进行处理后,得到三维变形数据。此系统可以单独进行一维、二维或三维变形的测量。缺点是采用分立的元件进行分光、传光,光学器件繁多,光学器件位置放置精度要求高,系统调试要求精度高,调整操作困难。In the patent US 6188483 B1, in the system for measuring the surface deformation of three-dimensional objects, a laser is used to provide the light source, and the characteristics of the beam splitter and the mirror are used to split and transmit light. Combining two double-beam electronic scattered interferometry systems and an out-of-plane deformation detection system into one system, relying on the outgoing four laser beams to complete the in-plane deformation detection, and using one of the four laser beams and the other internal The beams of light constitute an out-of-plane deformation detection system. The electronic speckle images obtained before and after deformation are processed by direct subtraction algorithm to obtain three-dimensional deformation data. This system can measure one-dimensional, two-dimensional or three-dimensional deformation independently. The disadvantage is that discrete components are used for light splitting and light transmission, there are many optical devices, the positioning accuracy of optical devices is high, the system debugging requires high precision, and the adjustment operation is difficult.

实用新型内容Utility model content

本实用新型的目的在于针对已有技术中存在的缺陷,提供一种改进的基于分束光纤的三维变形测量系统,结构简单,操作方便,并能保证测量精度。The purpose of the utility model is to provide an improved three-dimensional deformation measurement system based on split optical fiber, which is simple in structure, easy to operate, and can ensure measurement accuracy against the defects in the prior art.

为了达到上述目的,本实用新型的构思是:In order to achieve the above object, the design of the present utility model is:

本实用新型主要针对硬件系统进行了改进和创新,采用一根一分五型光纤进行分光、传光,取其中四束分支光纤构成两对面内变形检测,通过光纤出射端口发散角参数的预定,可以直接得到满足系统要求的发散光束,无需扩束器件。为了提高变形测量精度,仍采用四步相移算法,采用传统的引入相移方法,在上述两对相干光束中,分别选择其中一束分支光纤出射端口位置分别粘贴一个PZT相移器,通过PZT相移器的推动带动分支光纤微动,便可在此光束中引入相移。共用其中一束引入相移的光束,结合第五束分支光纤,获得满足系统要求的相干光束。因此,系统整体由于光纤的采用,结构大大简化,调试操作方便,由于遮挡开关的使用,此系统可以单独进行一维、二维或三维变形的测量,并使对图像后期处理的软件结构简单,并保证了测量精度。The utility model mainly improves and innovates the hardware system, adopts a one-point five-type optical fiber to split and transmit light, and takes four branch optical fibers to form two pairs of in-plane deformation detection, and through the predetermined divergence angle parameters of the optical fiber exit port, The divergent beam that meets the system requirements can be directly obtained without a beam expander. In order to improve the accuracy of deformation measurement, the four-step phase shift algorithm is still used, and the traditional method of introducing phase shift is adopted. In the above two pairs of coherent beams, a PZT phase shifter is respectively pasted on the exit port of one of the branched optical fibers, through the PZT The push of the phase shifter drives the branch fiber to move slightly, so that a phase shift can be introduced in this beam. One of the beams introduced with phase shift is shared and combined with the fifth branch fiber to obtain a coherent beam that meets the system requirements. Therefore, due to the use of optical fiber, the structure of the system is greatly simplified, and the debugging operation is convenient. Due to the use of the blocking switch, the system can independently measure one-dimensional, two-dimensional or three-dimensional deformation, and the software structure for image post-processing is simple. And ensure the measurement accuracy.

根据上述的实用新型构思,本实用新型采用下述技术方案:According to above-mentioned utility model design, the utility model adopts following technical scheme:

一种基于分束光纤的三维变形测量系统,由一个提供光源的激光器、一个带CCD摄像机的图像接收系统和一个分光传光及相移系统组成,其特征在于所述的分光传光及相移系统是一个一分五型光纤分光传光及相移系统;上述的一分五型光纤分光传光及相移系统的结构是:从所述的激光器来的主光纤经一个光纤调整架连接一个一分五的光纤耦合器输入端口,光纤耦合器的输出端口连接五束光纤分支进行分光和传光:一束分支光纤连接所述的带CCD摄像机的图像接收系统,四束分支光束的输出端口各有一个光束照射器分别对准被测物体,其中两个光束照射器分别各粘贴一个PZT相移器,通过PZT相移器的膨胀移动,带动其粘贴的光束照射器移动,将相移引入光束内;所述的带CCD摄像机的图像接收系统的结构是:从所述的激光器(1)出射光束经一个显微镜(2)和光纤调整架(3),由光纤(11)传光,光束经护束准直镜(10)、遮挡开关(9)后由分光镜(7)分光,分光镜(7)置于CCD摄像机(6)与CCD镜头(8)之间。A three-dimensional deformation measurement system based on a split optical fiber, consisting of a laser providing a light source, an image receiving system with a CCD camera, and a spectroscopic light transmission and phase shift system, characterized in that the spectroscopic light transmission and phase shift The system is a one-to-five optical fiber splitting light transmission and phase shifting system; the structure of the above-mentioned one-fifth optical fiber splitting light transmission and phase shifting system is: the main optical fiber from the laser is connected to a One-to-five fiber coupler input ports, the output port of the fiber coupler is connected to five optical fiber branches for light splitting and light transmission: one branch optical fiber is connected to the image receiving system with CCD camera described above, and the output port of four branch beams Each beam irradiator is aimed at the object to be measured, and a PZT phase shifter is pasted on each of the two beam irradiators. The expansion and movement of the PZT phase shifter drives the beam irradiator pasted to move, and the phase shift is introduced. In the light beam; the structure of the image receiving system with the CCD camera is: the outgoing light beam from the laser (1) passes through a microscope (2) and an optical fiber adjustment frame (3), and is transmitted by the optical fiber (11), and the light beam After passing through the beam guard collimator (10) and the blocking switch (9), the light is split by the beam splitter (7), and the beam splitter (7) is placed between the CCD camera (6) and the CCD lens (8).

上述的光束照射器的结构是:分支光纤固定在一个光纤调整架上后,其出射光束经一个衰减片调整光强,穿过一个可变光阑和一个遮挡开关照射在被测物体表面上。The structure of the above-mentioned beam irradiator is: after the branch optical fiber is fixed on an optical fiber adjustment frame, the outgoing beam passes through an attenuation plate to adjust the light intensity, and passes through a variable aperture and a blocking switch to irradiate on the surface of the measured object.

上述的CCD摄像机连接一个计算机。The above CCD camera is connected to a computer.

本实用新型与现有三维电子散斑变形检测系统相比较,具有如下显而易见的特点和优点:本实用新型系统中采用了一分五型光纤分光、传光;共用一束分光束;通过两个PZT相移器得到满足实验要求的两束可以引入相移的激光光束。通过光纤的分光,便可得到系统所需的三对相干光束。本实用新型所需光学器件少,结构合理紧凑,操作简便,适用于物体表面的准实时三维变形测量。Compared with the existing three-dimensional electronic speckle deformation detection system, the utility model has the following obvious features and advantages: the system of the utility model adopts a one-to-five optical fiber splitting and transmitting light; shares one beam of split beams; passes through two The PZT phase shifter obtains two laser beams that can be phase shifted to meet the experimental requirements. The three pairs of coherent light beams required by the system can be obtained through optical fiber splitting. The utility model requires few optical devices, has a reasonable and compact structure, and is easy to operate, and is suitable for quasi-real-time three-dimensional deformation measurement of object surfaces.

附图说明Description of drawings

图1是本实用新型一个实施例的系统结构示意图。Fig. 1 is a schematic diagram of the system structure of an embodiment of the present invention.

图2是图1示例中的一分五型光纤分光传光及相移系统的结构示意图。FIG. 2 is a schematic structural diagram of the one-to-five optical fiber splitting and transmission and phase shifting system in the example in FIG. 1 .

图3是图1示例中的光束照射器的结构示意图。Fig. 3 is a schematic structural diagram of the beam irradiator in the example of Fig. 1 .

具体实施方式Detailed ways

本实用新型的一个优选实施例是:参见图1,本基于分束光纤的三维变形测量系统由一个提供光源的激光器1、一个带CCD摄像机6的图像接收系统和一个分光传光及相移系统组成,所述的分光、传光及相移系统是一个一分五型光纤分光传光及相移系统。A preferred embodiment of the present utility model is: referring to Fig. 1, this three-dimensional deformation measurement system based on beam-splitting optical fiber consists of a laser 1 providing a light source, an image receiving system with a CCD camera 6, and a light splitting light transmission and phase shifting system Composition, the light splitting, light transmission and phase shifting system is a one-to-five fiber optic light splitting, light transmission and phase shifting system.

上述的一分五型光纤分光传光及相移系统的结构是:从所述的激光器1来的主光纤经一个光纤调整架3连接一个一分五的光纤耦合器4输入端口,光纤耦合器4的输出端口连接五束光纤分支11、12、13、14、15进行分光和传光:一束分支光纤11连接所述的带CCD摄像机6的图像接收系统,四束分支光束12、13、14、15的输出端口各有一个光束照射器20、21、19、18分别对准被测物体22,其中两个光束照射器19、18分别各粘贴一个PZT相移器17、16,通过PZT相移器17、16的膨胀移动,带动其粘贴的光束照射器19、18移动,将相移引入光束内。The structure of the above-mentioned one-to-five optical fiber splitting light transmission and phase shift system is: the main optical fiber from the laser 1 is connected to a one-to-five fiber coupler 4 input port through a fiber adjustment frame 3, and the fiber coupler The output port of 4 is connected with five bundles of optical fiber branches 11, 12, 13, 14, 15 for light splitting and light transmission: a bundle of branched optical fibers 11 is connected to the image receiving system with the CCD camera 6, and four bundles of branched light beams 12, 13, The output ports of 14 and 15 each have a beam irradiator 20, 21, 19, 18 aimed at the measured object 22 respectively, wherein the two beam irradiators 19, 18 are respectively pasted with a PZT phase shifter 17, 16, through the PZT The expansion movement of the phase shifters 17, 16 drives the beam irradiators 19, 18 attached to them to move, and introduces the phase shift into the beam.

上述的光束照射器19、18的结构是:分支光纤14、15固定在一个光纤调整架23上后,其出射光束经一个衰减片24调整光强,穿过一个可变光阑25和一个遮挡开关26照射在被测物体22表面上。The structure of above-mentioned light beam irradiator 19,18 is: after branch optical fiber 14,15 is fixed on an optical fiber adjustment frame 23, its outgoing light beam is adjusted light intensity by an attenuation sheet 24, passes through an iris diaphragm 25 and a blocking The switch 26 shines on the surface of the measured object 22 .

上述的带CCD摄像机6的图像接收系统的结构是:从所述的激光器1出射光束经一个显微镜2和光纤调整架3,由光纤11传光,光束经扩束准直镜10、遮挡开关9后由分光镜7分光,分光镜7置于CCD摄像机6与CCD镜头8之间。The structure of the image receiving system with the above-mentioned band CCD camera 6 is: the outgoing light beam from the laser 1 passes through a microscope 2 and the optical fiber adjustment frame 3, and is transmitted by the optical fiber 11, and the light beam passes through the beam expander collimating mirror 10, the blocking switch 9 After that, the light is split by the beam splitter 7, and the beam splitter 7 is placed between the CCD camera 6 and the CCD lens 8.

上述的CCD摄像机6连接一个计算机5。The above-mentioned CCD camera 6 is connected with a computer 5 .

上述的激光器1、带CCD摄像机的图像接收系统和一分五型光纤分光传光及相移系统的所有组成元器件安装在一块底板27上。All components of the above-mentioned laser 1 , image receiving system with CCD camera and one-to-five optical fiber splitting light transmission and phase shifting system are installed on a base plate 27 .

上述的光纤耦合器4又称分歧器,是将光讯号从一条光纤中分至多条光纤中的元件,我们主要应用它在系统中进行分光、传光。本系统中,采用星状/树状光纤耦合器,通过烧结方式的制作法,将五条光纤并在一起烧融拉伸,使核芯聚合一起,以达光耦合作用。通过调整拉锥的长度,以及对烧结温度的控制,实现光纤分光的能量比例,以达到本系统对五束分支光束能量的比例接近均等的要求。The above-mentioned fiber coupler 4 is also called a splitter, which is a component for splitting an optical signal from one optical fiber to multiple optical fibers. We mainly use it to split and transmit light in the system. In this system, a star-shaped/tree-shaped fiber coupler is used, and five optical fibers are burnt and stretched together through the sintering method, so that the cores are aggregated together to achieve optical coupling. By adjusting the length of the taper and controlling the sintering temperature, the energy ratio of the optical fiber splitting is realized, so as to meet the requirements of the system that the energy ratio of the five branch beams is close to equal.

本实用新型的工作原理Working principle of the utility model

如图1所示,激光器1提供激光光源,激光光束经过显微镜2聚焦后,通过光纤调整架3的调整使光束进入一分五光纤耦合器4的主光纤,获得11、12、13、14、15五束光束。光束11由扩束准直器10扩束准直后通过遮挡开关9进入分光镜7;光束12和14被放置在水平面内并关于物体表面法线对称照射被测物体22,其中光束14的输出端口粘贴有PZT相移器17以便将相移引入光束14内,构成面内水平方向变形检测系统;光束13和15被放置在竖直面内并关于物体表面法线对称照射被测物体22,其中光束15的输出端口粘贴有PZT相移器16以便将相移引入光束15内,构成面内垂直方向变形检测系统。在光束12、13、14、15的输出端位置分别有光束照射器20、21、19、18的遮挡开关26,控制变形检测的顺序执行。As shown in Figure 1, the laser 1 provides a laser light source. After the laser beam is focused by the microscope 2, the beam enters the main optical fiber of the 1/5 fiber coupler 4 through the adjustment of the optical fiber adjustment frame 3 to obtain 11, 12, 13, 14, 15 five beams. The beam 11 is expanded and collimated by the beam expander and collimator 10 and enters the beam splitter 7 through the blocking switch 9; the beams 12 and 14 are placed in the horizontal plane and irradiate the measured object 22 symmetrically with respect to the normal line of the object surface, wherein the output of the beam 14 The port is pasted with a PZT phase shifter 17 so that the phase shift is introduced into the light beam 14 to form an in-plane horizontal direction deformation detection system; the light beams 13 and 15 are placed in the vertical plane and irradiate the measured object 22 symmetrically with respect to the normal line of the object surface, Wherein the output port of the beam 15 is pasted with a PZT phase shifter 16 to introduce the phase shift into the beam 15 to form an in-plane vertical deformation detection system. At the output ends of the light beams 12, 13, 14, 15, there are respectively blocking switches 26 of the light beam irradiators 20, 21, 19, 18 to control the sequence of deformation detection.

上述系统中,在分支光束12、13、14、15出射光束后分别经过结构相同的光束照射器20、21、19、18后照射到被测物体上。如图3所示,分支光束12、13、14、15固定在光纤调整架23上,出射的发散光束经过衰减片24调整光强后,穿过光阑25和遮挡开关26后照射在物体表面上。In the above system, after the branch beams 12 , 13 , 14 , 15 exit the beams, they respectively pass through the beam irradiators 20 , 21 , 19 , 18 with the same structure, and then irradiate the measured object. As shown in Figure 3, the branched light beams 12, 13, 14, 15 are fixed on the optical fiber adjustment frame 23, and the emitted divergent light beams pass through the attenuation plate 24 to adjust the light intensity, pass through the diaphragm 25 and the blocking switch 26, and then irradiate on the surface of the object superior.

上述系统中,数据采集操作步骤为:首先,进行面内竖直方向变形检测,开启光束照射器18、21上的遮挡开关26,关闭遮挡开关9和光束照射器19、20上的遮挡开关26,使光束13和15构成面内竖直方向变形检测系统;然后,进行面内水平方向变形检测,关闭光束照射器18、21上的遮挡开关26,开启光束照射器19、20上的遮挡开关26,遮挡开关9仍处于关闭状态,这样使光束12和14构成面内水平方向变形检测系统;最后,进行离面变形检测,关闭光束照射器18、20、21上的遮挡开关26,开启遮挡开关9,使光束11和14构成离面变形检测系统。从被测物体反射的光束经过CCD镜头8成像于CCD摄像机6的靶面上,进而将图像传输到计算机5进行数据处理。In the above system, the data acquisition operation steps are as follows: first, carry out in-plane vertical deformation detection, open the shielding switch 26 on the beam irradiators 18, 21, close the shielding switch 9 and the shielding switches 26 on the beam irradiators 19, 20 , so that the light beams 13 and 15 constitute an in-plane vertical deformation detection system; then, carry out in-plane horizontal deformation detection, close the shielding switch 26 on the beam irradiators 18, 21, and open the shielding switches on the beam irradiators 19, 20 26. The shielding switch 9 is still in the closed state, so that the beams 12 and 14 constitute an in-plane horizontal deformation detection system; finally, the out-of-plane deformation detection is performed, and the shielding switch 26 on the beam irradiators 18, 20, 21 is turned off, and the shielding is turned on The switch 9 makes the light beams 11 and 14 constitute an out-of-plane deformation detection system. The light beam reflected from the measured object is imaged on the target surface of the CCD camera 6 through the CCD lens 8, and then the image is transmitted to the computer 5 for data processing.

Claims (3)

1.一种基于分束光纤的三维变形测量系统,由一个提供光源的激光器(1)、一个带CCD摄像机(6)的图像接收系统和一个分光传光及相移系统组成,其特征在于所述的分光传光及相移系统是一个一分五型光纤分光传光及相移系统;所述的一分五型光纤分光传光及相移系统的结构是:从所述的激光器(1)来的主光纤经一个光纤调整架(3)连接一个一分五的光纤耦合器(4)输入端口,光纤耦合器(4)的输出端口连接五束光纤分支(11、12、13、14、15)进行分光和传光:一束分支光纤(11)连接所述的带CCD摄像机(6)的图像接收系统,四束分支光束(12、13、14、15)的输出端口各有一个光束照射器(20、21、19、18)分别对准被测物体(22),其中两个光束照射器(19、18)分别各粘贴一个PZT相移器(17、16),通过PZT相移器(17、16)的膨胀移动,带动其粘贴的光束照射器(19、18)移动,将相移引入光束内;所述的带CCD摄像机的图像接收系统的结构是:从所述的激光器(1)出射光束经一个显微镜(2)和光纤调整架(3),由光纤(11)传光,光束经护束准直镜(10)、遮挡开关(9)后由分光镜(7)分光,分光镜(7)置于CCD摄像机(6)与CCD镜头(8)之间。1. A three-dimensional deformation measurement system based on beam splitting optical fiber is composed of a laser (1) providing a light source, an image receiving system with a CCD camera (6) and a split light transmission and phase shifting system, characterized in that the The light splitting and light transmission and phase shifting system described above is a one-to-five-type optical fiber splitting and light transmission and phase shifting system; the structure of the one-to-five-type optical fiber light splitting and light transmission and phase shifting system is: from the laser (1 ) is connected to the input port of a one-to-five fiber coupler (4) through a fiber adjustment frame (3), and the output port of the fiber coupler (4) is connected to five optical fiber branches (11, 12, 13, 14 , 15) Carry out light splitting and light transmission: a branch optical fiber (11) connects the described image receiving system with CCD camera (6), and the output ports of four branch light beams (12, 13, 14, 15) each have one The beam irradiators (20, 21, 19, 18) are respectively aimed at the object to be measured (22), and two of the beam irradiators (19, 18) are respectively pasted with a PZT phase shifter (17, 16). The expansion movement of shifter (17,16) drives the beam irradiator (19,18) that it sticks to move, and phase shift is introduced in the beam; The structure of the image receiving system of described band CCD camera is: from described The output beam of the laser (1) passes through a microscope (2) and optical fiber adjustment frame (3), and is transmitted by the optical fiber (11). ) beam splitter, the beam splitter (7) is placed between the CCD camera (6) and the CCD lens (8). 2.根据权利要求1所述的基于分束光纤的三维变形测量系统,其特征在于所述的光束照射器(19、18)的结构是:分支光纤(14、15)固定在一个光纤调整架(23)上后,其出射光束经一个衰减片(24)调整光强,穿过一个可变光阑(25)和一个遮挡开关(26)照射在被测物体(22)表面上。2. The three-dimensional deformation measurement system based on split optical fiber according to claim 1, characterized in that the structure of the beam irradiator (19, 18) is: the branch optical fiber (14, 15) is fixed on an optical fiber adjustment frame After (23) is on, its outgoing light beam is adjusted light intensity by an attenuation sheet (24), passes through an iris diaphragm (25) and a blocking switch (26) and irradiates on the surface of the measured object (22). 3.根据权利要求1所述的基于分束光纤的三维变形测量系统,其特征在于所述的CCD摄像机(6)连接一个计算机(5)。3. The three-dimensional deformation measurement system based on split optical fiber according to claim 1, characterized in that said CCD camera (6) is connected to a computer (5).
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CN101832760A (en) * 2010-04-23 2010-09-15 清华大学 Remote three-dimensional micro-deformation visual on-line monitoring method and system
CN102294543A (en) * 2011-06-22 2011-12-28 北京工业大学 Method for observing transparent melt layer in material laser-cutting process
CN102506735A (en) * 2011-10-28 2012-06-20 上海大学 Transient three-dimensional deformation measurement system based on three-color laser
CN103575236A (en) * 2013-11-08 2014-02-12 湖北汽车工业学院 Miniature three-dimensional measurement system based on double-core optical fiber interference fringes
CN103727891A (en) * 2014-01-10 2014-04-16 合肥工业大学 Synchronous three-dimensional speckle interferometric measurement system and method
CN110388884A (en) * 2019-07-24 2019-10-29 中国科学院半导体研究所 Structured Light Illumination 3D Measuring Device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101832760A (en) * 2010-04-23 2010-09-15 清华大学 Remote three-dimensional micro-deformation visual on-line monitoring method and system
CN101832760B (en) * 2010-04-23 2011-12-07 清华大学 Remote three-dimensional micro-deformation visual on-line monitoring method and system
CN102294543A (en) * 2011-06-22 2011-12-28 北京工业大学 Method for observing transparent melt layer in material laser-cutting process
CN102294543B (en) * 2011-06-22 2014-04-09 北京工业大学 Method for observing transparent melt layer in material laser-cutting process
CN102506735A (en) * 2011-10-28 2012-06-20 上海大学 Transient three-dimensional deformation measurement system based on three-color laser
CN103575236A (en) * 2013-11-08 2014-02-12 湖北汽车工业学院 Miniature three-dimensional measurement system based on double-core optical fiber interference fringes
CN103727891A (en) * 2014-01-10 2014-04-16 合肥工业大学 Synchronous three-dimensional speckle interferometric measurement system and method
CN103727891B (en) * 2014-01-10 2016-08-31 合肥工业大学 Synchronize three-dimensional speckle interferometer measuration system and measuring method
CN110388884A (en) * 2019-07-24 2019-10-29 中国科学院半导体研究所 Structured Light Illumination 3D Measuring Device

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