CN110388884A - Structured Illumination three-dimensional measuring apparatus - Google Patents
Structured Illumination three-dimensional measuring apparatus Download PDFInfo
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- CN110388884A CN110388884A CN201910675986.5A CN201910675986A CN110388884A CN 110388884 A CN110388884 A CN 110388884A CN 201910675986 A CN201910675986 A CN 201910675986A CN 110388884 A CN110388884 A CN 110388884A
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- Prior art keywords
- light
- optical chip
- light source
- photodetector
- beam splitting
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré
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- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of Structured Illumination three-dimensional measuring apparatus, comprising: a light source, for emitting light beam；One beam splitting optical chip is connect with the light source by an optical fiber, forms multi beam emergent light for the light beam to be carried out light splitting；One shifter is set to beam splitting optical chip side, is mechanically connected with the beam splitting optical chip, mobile for controlling beam splitting optical chip, indirectly controls the Exit positions of multi-beam；One photodetector, the reflected beams reflected for detecting multi beam emergent light through object under test；One control module is electrically connected in the light source, shifter and photodetector, for the movement of command displacement device, and control photodetector.The present invention realizes light splitting using beam splitting optical chip, generates area-structure light projection by interference, and operating wavelength range is wide, can be used for different application scene, and do not have diffraction loss, utilization ratio of optical energy is high；Meanwhile present apparatus structure is simple, and it is at low cost and small in size, it is suitable for several work scene.
Description
Technical field
The present invention relates to a kind of three-dimensional measuring apparatus more particularly to a kind of Structured Illumination three-dimensional measuring apparatus.
Background technique
Optical three-dimensional measurement is as a kind of important measuring technique, due to non-contact, quick and high-resolution
Advantage is measured, the industries such as medical treatment, industry are widely used in.At the development of modern technologies, especially laser technology, image
The high speed development of reason technology and optical image technology, three-dimensional measurement have developed the different form for different application scene.
Optical three-dimensional measuring method can be divided into passive type and active, and passive type includes that monocular, binocular and more mesh are vertical
Body vision method；Active includes time flight method, projecting structural optical method, trigonometry and Moire fringe technique；Wherein projection structure
Light method has the advantages that speed is fast, direct and with high accuracy, has been widely applied to including heavy construction to the various of small items
The measurement of target size.
In Structured Illumination three-dimensional measurement technology, a kind of prior art is to generally use liquid crystal display or digital projection
Instrument realizes the projection of the type structures light such as point, line, grating, by be placed on axis of projection it is angled on photodetection
Then the image of device (usually camera) Lai Jilu body surface realizes object by the analysis deformed to its structured light patterns again
The measurement of body three-dimensional surface shape.In addition, in such technology, it can also be by using the structured light projection of different coding mode
Realize high-precision measurement, but since projection device volume is larger, it is difficult to realize miniaturization.
Another prior art is that the projection of line-structured light is realized using laser line generator, is swept by hand-held or fixed angle
It retouches, realizes the measurement of object dimensional.Although this technology can be realized the miniaturization of measuring device, but need mobile object (or
Measuring device) Lai Shixian object entirety three-dimensional appearance measurement.It there are also a kind of prior art is swashed using vertical-cavity surface-emitting
Light device is arranged in pairs or groups DOE (Diffractive optical elements, diffraction optical device), is realized using the principle of optical diffraction
The projection of structured light patterns is widely used in the preposition recognition of face of current mobile phone, although this to realize three-dimensional measurement
Technology has small in size, the high advantage of diffraction efficiency, but it is dependent on complicated DOE design and processing, and operation wavelength is necessary
It is related to DOE design.
Therefore, based on the above problem of the existing technology, it would be highly desirable to it is simple to research and develop a kind of small size, low cost and structure
Structured Illumination three-dimensional measuring apparatus.
Summary of the invention
(1) technical problems to be solved
The present invention provides a kind of Structured Illumination three-dimensional measuring apparatus, at least partly to solve present in existing method
It is bulky or be unable to fixation measuring, and it is related to and processes complicated disadvantage.
(2) technical solution
According to an aspect of the present invention, a kind of Structured Illumination three-dimensional measuring apparatus, including a light source are provided, for sending out
Irradiating light beam；One beam splitting optical chip is connect with the light source by an optical fiber, is formed multi beam for the light beam to be carried out light splitting and is gone out
Penetrate light；One shifter is set to beam splitting optical chip side, is mechanically connected with the beam splitting optical chip, for controlling beam splitting
Optical chip is mobile, indirectly controls the Exit positions of multi-beam；One photodetector, for detecting multi beam emergent light through object under test
The reflected beams of reflection；One control module is electrically connected in the light source, shifter and photodetector, is used for control bit
Move the movement of device, and control photodetector.
In further embodiment, the light source is the laser light source with single wavelength, wave-length coverage 400-
1600nm。
In further embodiment, the beam splitting optical chip includes a quartz base plate and a light splitting waveguide, output end
Face is plane, and emergent light is to set angle of divergence vertical output.
In further embodiment, the shifter is motor machine shifter or displacement bimorph device.
In further embodiment, the photodetector includes the CMOS camera with fixed-focus or zoom lens.
In further embodiment, the control module can be configured to SCM system or FPGA (Field-
Programmable Gate Array, field programmable gate array), in addition, the control module further includes a communication port, and
By the communication port by data transfer to back-end computing system, back-end computing system utilizes corresponding three-dimensional reconstruction algorithm weight
Build the three-dimensional surface shape of object under test.
In further embodiment, described device further includes a shell, and the shell includes a horizontal base, is used for institute
Light source is stated, beam splitting optical chip, shifter, photodetector and control module are fixed on same level.
(3) beneficial effect
It can be seen from the above technical proposal that a kind of Structured Illumination three-dimensional measuring apparatus provided by the invention, using point
Beam optical chip realizes light splitting, generates area-structure light projection by interference, operating wavelength range is wide, can be used for different application field
Scape, while the diffraction loss without being similar to spatial light modulator, utilization ratio of optical energy are high；Meanwhile present apparatus structure is simple,
It is at low cost and small in size, it is suitable for several work scene.
Detailed description of the invention
Fig. 1 is a kind of top view of Structured Illumination three-dimensional measuring apparatus of the embodiment of the present invention.
Fig. 2 is the front view of Fig. 1 shown device.
Fig. 3 is the schematic diagram of Fig. 1 shown device three-dimensional measurement
Fig. 4 is the interference fringe image of Fig. 1 shown device photodetector acquisition.
[description of symbols]
1- light source；2- optical fiber；3- beam splitting optical chip；4- shifter；5- photodetector；
6- control module；7- shell；8- object under test；301- quartz base plate；302- is divided waveguide.
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with specific embodiment, and reference
Attached drawing, the present invention is described in further detail.
In the present invention, " on being set to ... " or " on being pasted to ... " is for including straight with single or multiple inter-module
Connect contact relation.Moreover, ordinal number such as " first ", " second ", " No.1 " or " two used in specification and claims
Number " etc. words, to modify claimed component, itself and do not include and represent the component have it is any before ordinal number,
The sequence or the sequence in manufacturing method for not representing a certain component and another component, the use of these ordinal numbers are only used to make to have
One component of certain name is able to that clear differentiation can be made with another component with identical name.
The present invention provides a kind of Structured Illumination three-dimensional measuring apparatus, are realized using beam splitting optical chip by light source output
Single beam incident light is divided into two bundles or multi beam, by the side that two beam or multi-beam are directly output to object under test from flat end face
Formula interferes forming face structured light projection, and the phase-modulation of interference fringe, same time are then realized by the displacement function of shifter
Electric explorer acquires the reflected light of object under test, and the surface three dimension shape of object under test is finally rebuild using corresponding three-dimensional reconstruction algorithm
Looks.
Fig. 1 is a kind of top view of Structured Illumination three-dimensional measuring apparatus of the embodiment of the present invention, as shown in Figure 1, comprising:
Light source 1, in the present embodiment, light source 1 are the laser light source with single wavelength, wave-length coverage 400-
1600nm；
Beam splitting optical chip 3, for single beam incident light of the light source 1 to be divided into two beams or multi beam, the beam splitting optical chip 3 with
Light source 1 is connected by optical fiber 2, and list beam incident light caused by light source 1 is coupled into beam splitting optical chip by optical fiber 2；
Shifter 4 is set to described 3 one end of beam splitting optical chip, is mechanically connected with the beam splitting optical chip 3, the displacement
Device 4 can be motor machine shifter and displacement bimorph device, for being emitted the mobile beam splitting optical chip 3 of light direction, so as to
Realize the phase-modulation of interference fringe；
Photodetector 5 can be configured to the CMOS camera with fixed-focus or zoom lens, for acquiring and the light source one
The optical information of the wavelength of cause records the image of body surface, and the analysis by deforming to its structured light patterns, to realize object
The measurement of body three-dimensional surface shape, in other embodiments of the invention, if you need to further increase the specificity of detection, Ke Yi
The camera lens surface plated film of the photodetector 5 makes the light of its only probe source output wavelength.
Control module 6 is electrically connected in the light source 1, shifter 4 and photodetector 5, for 1 wave of light source to be arranged
It is long, data collected by the operating mode and acquisition photodetector 5 of shifter 4, in the present embodiment, the control module
6 can be configured to SCM system or FPGA, it is preferred that control module 6 further includes a communication port, and passing through the communication port will
Data transfer to back-end computing system, back-end computing system rebuilds the surface of object under test using corresponding three-dimensional reconstruction algorithm
Three-dimensional appearance.
In addition, the beam splitting optical chip 3 includes quartz base plate 301 and light splitting waveguide 302, the output end face of emergent light is flat
Face, perpendicular to light splitting waveguide 302.
The present apparatus further includes shell 7, and the shell 7 includes a horizontal base, is used for the light source 1, beam splitting optical chip
3, shifter 4, photodetector 5 and control module 6 are fixed on same level.
Fig. 2 is the front view of Fig. 1 shown device, as shown in Fig. 2, shifter 4 is set to the side of beam splitting optical chip 3, is led to
Excessively emergent light direction is displaced beam splitting optical chip 3, realizes stripe displacement, meets the reconstruct of fringe structure light 3-D image to obtain
Required data.
Fig. 3 is the schematic diagram of Fig. 1 shown device three-dimensional measurement, below with reference to Fig. 3 to a specific embodiment of the invention
It is further elaborated, please refers to Fig. 3.
In the present embodiment, the wavelength of 1 output light of light source is 635nm, and beam splitting optical chip 3 is PLC (planar
Lightwave circuit, planar optical waveguide) optical chip, light can be divided evenly into two beams, between two light splitting waveguides 302
Away from being 250 μm, shifter 4 is piezoelectric ceramics shifter, can drive beam splitting under the control for the electric signal that control module 6 exports
The movement of optical chip 3, moving direction is parallel with two light splitting lines of 302 output point of waveguide, and photodetector 5 is to include
The CMOS camera of camera lens.
As shown in figure 3, two are divided the light direct irradiation of the output of waveguides 302 on object under test 8, while photodetector
The light that 5 acquisitions are reflected from object under test.Fig. 4 is the interference fringe image of Fig. 1 shown device photodetector acquisition, such as Fig. 4
It is shown, according to principle of interference, the light of the output of waveguide 302 is divided in 8 Surface Interference of object under test, forms interference fringe image.
5 acquired image of photodetector is the image I with interference fringe, mathematical expression are as follows:
I (x, y)=I ' (x, y)+I " (x, y) cos (φ (x, y))
The wherein coordinate of the pixel of x and y representative image, phase (x, y) represent the letter of object surface three-dimensional morphology
Breath.
The displacement of beam splitting optical chip 3 is driven by shifter 4, realizes that interference fringe phase step is the displacement of pi/2, at this
In embodiment, it is displaced 3 times, acquires 4 width images in total, mathematical expression is respectively as follows:
I1(x, y)=I ' (x, y)+I " (x, y) cos (φ (x, y))
I2(x, y)=I ' (x, y)+I " (x, y) cos (φ (x, y)+pi/2)
I3(x, y)=I ' (x, y)+I " (x, y) cos (φ (x, y)+π)
I4(x, y)=I ' (x, y)+I " (x, y) cos (+3 pi/2 of φ (x, y))
Phase (x, y) can be calculated according to this four width image:
The 3 d surface topography of object under test 8 can be recovered finally by respective phase deployment algorithm.
By above statement, aiming at the problems existing in the prior art and disadvantage, the embodiment of the invention provides a kind of knots
Structure optical illumination three-dimensional measuring apparatus is realized using beam splitting optical chip and is divided, and generates area-structure light projection, operating wave by interference
Long range is wide, can be used for different application scene, while the diffraction loss without being similar to spatial light modulator, and light energy utilizes
Rate is high；Meanwhile present apparatus structure is simple, and it is at low cost and small in size, it is suitable for several work scene.
Particular embodiments described above has carried out further in detail the purpose of the present invention, technical scheme and beneficial effects
Describe in detail bright, it should be understood that the above is only a specific embodiment of the present invention, is not intended to restrict the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in protection of the invention
Within the scope of.
Claims (7)
1. a kind of Structured Illumination three-dimensional measuring apparatus, comprising:
One light source, for emitting light beam；
One beam splitting optical chip is connect with the light source by an optical fiber, forms multi beam outgoing for the light beam to be carried out light splitting
Light；
One shifter is set to beam splitting optical chip side, is mechanically connected with the beam splitting optical chip, for controlling beam splitting light
Chip is mobile, indirectly controls the Exit positions of multi-beam；
One photodetector, the reflected beams reflected for detecting multi beam emergent light through object under test；
One control module, is electrically connected in the light source, shifter and photodetector, for the movement of command displacement device,
And control photodetector.
2. the apparatus according to claim 1, wherein the light source is the laser light source with single wavelength, wavelength model
It encloses for 400-1600nm.
3. the apparatus according to claim 1, wherein the beam splitting optical chip includes a quartz base plate and a light splitting waveguide.
4. device according to claim 3, wherein the output end face of the beam splitting optical chip is plane, the multi beam goes out
Light is penetrated to set angle of divergence vertical output.
5. the apparatus according to claim 1, wherein the shifter is motor machine shifter or displacement bimorph device.
6. the apparatus according to claim 1, wherein the photodetector includes with fixed-focus or zoom lens
CMOS camera.
7. the apparatus according to claim 1 is used for transmission measurement wherein the control module further includes a communication port
Data.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201910675986.5A CN110388884A (en) | 2019-07-24 | 2019-07-24 | Structured Illumination three-dimensional measuring apparatus |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910675986.5A CN110388884A (en) | 2019-07-24 | 2019-07-24 | Structured Illumination three-dimensional measuring apparatus |
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| CN110388884A true CN110388884A (en) | 2019-10-29 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113648094A (en) * | 2021-08-11 | 2021-11-16 | 苏州喆安医疗科技有限公司 | Split type oral cavity digital impression instrument |
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Application publication date: 20191029 |